Correcting device for semiconductor gas pipeline welding part

Abstract

The utility model relates to the technical field of semiconductors, in particular to a correcting device for a semiconductor gas pipeline welding part. The utility model provides a correcting device for a semiconductor gas pipeline welding part. The correcting device comprises a rotating rod, a rotating disc, a clamping jaw, an angle scale and a pointer assembly. The clamping jaw is used for connecting a semiconductor gas pipeline welding part; the rotating disc is arranged at one end of the rotating rod, the rotating disc is fixedly connected with the clamping jaw, and the rotating disc and the clamping jaw can be driven to rotate under the action of the rotating rod; the pointer assembly is arranged on the clamping jaw or the rotating disc and can rotate relative to the angle scale under the action of the rotating rod. According to the utility model, accurate angle correction can be realized, so that the correction precision is improved, the correction frequency is reduced, the correction can be qualified at one time, the strength and the density of a corrected welding seam are ensured, and the requirements of ISO (International Standardization Organization) cleanliness and SEMI (Scanning Electron Microscope Index) granularity of a semiconductor clean room are met.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and more specifically, to a straightening device for semiconductor gas pipeline welding components. Background Technology

[0002] Semiconductor gas pipeline welding components require high angular installation tolerances, needing to reach an accuracy of 0.005. Furthermore, the pipeline welding components are made of ultra-high purity EP tubing with thin walls, and the welds are self-fusion welds. After component assembly, due to the thin effective weld cladding thickness, repeated corrections are necessary, posing a risk of reduced weld strength and weld density.

[0003] The existing solution for straightening flange assemblies requires manual visual adjustment of the angle after welding in a Class 100 cleanroom. After straightening, the angle is measured again using an angle gauge, but there are angle deviations, requiring repeated straightening and measurement, which is labor-intensive and time-consuming. In addition, the angle control relies mainly on repeated straightening, which can adversely affect weld density and leakage testing. The leakage rate requirements are also very high, which does not meet the requirements of the semiconductor industry. Utility Model Content

[0004] The purpose of this utility model is to provide a straightening device for welded components of semiconductor gas pipelines.

[0005] This utility model provides a straightening device for semiconductor gas pipeline welding components, including a rotating rod, a rotating disk, a chuck, an angle disk, and a pointer assembly;

[0006] The claw is used to connect the semiconductor gas pipeline welding component;

[0007] The rotating disk is disposed at one end of the rotating rod, and the rotating disk is fixedly connected to the chuck, which can drive the rotating disk and the chuck to rotate under the action of the rotating rod;

[0008] The pointer assembly is mounted on the chuck or the rotating disk and can rotate relative to the angle disk under the action of the rotating rod.

[0009] In an optional embodiment, the claw includes a chassis and a cover plate;

[0010] One side of the chassis has a connecting rod for connecting the semiconductor gas pipeline welding component;

[0011] The other side of the chassis has a positioning protrusion, and the rotating disk is provided with positioning holes that cooperate with the positioning protrusion.

[0012] After the positioning protrusion is inserted from one end of the positioning hole, it connects to the cover plate at the other end of the positioning hole.

[0013] In an optional implementation, the positioning hole is an arc-shaped hole.

[0014] In an optional embodiment, the number of positioning holes is multiple, and the multiple positioning holes are arranged in a circular array.

[0015] In an optional embodiment, there are multiple connecting rods arranged in a circular array.

[0016] In an optional embodiment, the positioning protrusion is provided with a first through hole, and the cover plate is provided with a second through hole. The positioning bolt passes through the first through hole and the second through hole, thereby realizing a fixed connection between the cover plate and the chassis.

[0017] In an optional implementation, the pointer assembly includes an angle pointer, a collar, and a fixing bolt;

[0018] One end of the angle pointer is fixed to the collar, and the fixing bolt passes through the collar and is fixedly connected to the pawl.

[0019] In an optional embodiment, the rotating disk has a connecting hole, and the angle disk has a limiting groove hole;

[0020] The limiting bolt passes through the connecting hole and the limiting slot to provide radial limiting between the rotating disk and the angle disk.

[0021] In an optional embodiment, the end of the rotating rod away from the rotating disk has a portability hole.

[0022] In an optional embodiment, the rotating disk has a pointer slot, and the pointer assembly is disposed within the pointer slot.

[0023] The beneficial effects of this utility model embodiment are:

[0024] The rotating rod drives the rotating disk, chuck, and pointer assembly on the chuck to rotate. Through the cooperation of the pointer assembly and the stationary angle disk, precise angle correction can be achieved, thereby improving the correction accuracy, reducing the number of corrections, and even achieving a one-time correction to meet the ISO cleanliness and particle size requirements of semiconductor cleanrooms, and ensuring the strength and density of the corrected weld. Attached Figure Description

[0025] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 A schematic diagram of the structure of the straightening device for the semiconductor gas pipeline welding component provided in this embodiment of the utility model;

[0027] Figure 2 A side view of the correction device provided in an embodiment of this utility model;

[0028] Figure 3 Rear view of the correction device provided in an embodiment of this utility model;

[0029] Figure 4 A three-dimensional structural schematic diagram of the correction device provided in the embodiment of this utility model;

[0030] Figure 5 A three-dimensional structural schematic diagram of the correction device provided in an embodiment of this utility model from another perspective;

[0031] Figure 6 A schematic diagram of the rotating rod and rotating disk of the correction device provided in the embodiment of this utility model;

[0032] Figure 7 for Figure 6 A schematic diagram of the three-dimensional structure;

[0033] Figure 8 for Figure 6 A three-dimensional structural diagram from another perspective;

[0034] Figure 9 A three-dimensional structural diagram of the chassis of the correction device provided in an embodiment of this utility model;

[0035] Figure 10 A front view of the chassis of the correction device provided in an embodiment of this utility model;

[0036] Figure 11 A side view of the chassis of the correction device provided in an embodiment of this utility model;

[0037] Figure 12 An exploded view of the correction device provided in an embodiment of this utility model.

[0038] Icons: 1-Rotating rod; 2-Rotating disk; 3-Claw; 4-Pointer assembly; 5-Angle disk; 6-Positioning hole; 7-Connecting hole; 8-Pointer slot; 9-Portable hole; 10-Base; 11-Positioning protrusion; 12-Connecting rod; 13-First through hole; 14-Cover plate. Detailed Implementation

[0039] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0040] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0041] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0042] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0043] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0044] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0045] The following is combined Figures 1-12 The following describes some embodiments of the present invention in detail. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0046] This utility model provides a straightening device for welded components of semiconductor gas pipelines, such as... Figures 1-5 As shown, it includes a rotating rod 1, a rotating disk 2, a chuck 3, an angle disk 5, and a pointer assembly 4; the chuck 3 is used to connect the semiconductor gas pipeline welding component; the rotating disk 2 is disposed at one end of the rotating rod 1, and the rotating disk 2 is fixedly connected to the chuck 3, and can drive the rotating disk 2 and the chuck 3 to rotate under the action of the rotating rod 1; the pointer assembly 4 is disposed on the chuck 3 or the rotating disk 2, and can rotate relative to the angle disk 5 under the action of the rotating rod 1.

[0047] In this embodiment, the rotating rod 1 drives the rotating disk 2 to rotate, the rotating disk 2 drives the pawl 3 to rotate, and the pawl 3 simultaneously drives the pointer assembly 4 and the semiconductor circuit to rotate. Thus, while the semiconductor circuit is being angle-corrected, the pointer assembly 4 can display the specific angle being adjusted, making the adjustment more precise.

[0048] When using this correction device, first accurately place the flange sealing side of the semiconductor gas pipeline welded component on the connection part of the jaw 3, and stably connect the jaw 3 to the flange. Then, the operator holds the rotating rod 1 and slowly rotates the rotating rod 1 according to the required correction angle, causing the rotating disk 2 and the jaw 3 to rotate together. During this process, the pointer component 4 displays the rotation angle in real time on the angle disk 5. When the pointer points to the target scale, the rotation stops, and the correction is completed.

[0049] Compared to traditional manual visual correction, the correction method in this embodiment not only significantly improves the accuracy of angle control and avoids the tediousness of repeated corrections and measurements, but also significantly reduces errors and time costs caused by manual operation, thereby improving production efficiency. Furthermore, when the correction device is used in a semiconductor cleanroom environment, it does not adversely affect cleanliness or particle size, ensuring the high cleanliness standards of the semiconductor manufacturing process.

[0050] In this embodiment, the rotating disk 2 and the rotating rod 1 are integrally set as a whole structure.

[0051] This configuration allows for a stronger and more stable connection between the rotating rod 1 and the rotating disk 2.

[0052] In an optional embodiment, the claw 3 includes a chassis 10 and a cover plate 14; one side of the chassis 10 has a connecting rod 12 for connecting the semiconductor gas pipeline welding component; the other side of the chassis 10 has a positioning protrusion 11, and the rotating disk 2 is provided with a positioning hole 6 that cooperates with the positioning protrusion 11; after the positioning protrusion 11 is inserted from one end of the positioning hole 6, it is connected to the cover plate 14 at the other end of the positioning hole 6.

[0053] In this embodiment, the claw 3 is divided into two parts, which are respectively set at opposite ends of the rotating disk 2 and connected in the middle by a positioning protrusion 11 passing through the positioning hole 6 on the rotating disk 2.

[0054] This configuration ensures a reliable connection between the chuck 3 and the rotating disk 2, preventing relative displacement during rotation and thus ensuring the accuracy of the correction angle.

[0055] In an optional embodiment, the positioning hole 6 is an arc-shaped hole.

[0056] In this embodiment, the center of the arc-shaped hole is coaxial with the rotation center of the rotating rod 1, the rotating disk 2, and the chuck 3. During the installation process, slight rotation can make the installation smoother, improving the accuracy and convenience of the installation.

[0057] It is understood that in this embodiment, the positioning hole 6 is an arc-shaped hole, but it is not limited to an arc-shaped hole. It can also be other types of hole structures, such as circular holes, square holes, etc., as long as it can achieve the relative positioning between the rotating disk 2 and the claw 3.

[0058] In an optional embodiment, the number of positioning holes 6 is multiple, and the multiple positioning holes 6 are arranged in a circular array.

[0059] The positioning hole 6 and the positioning protrusion 11 work together to transmit the rotational force of the rotating disk 2 to the chuck 3. Therefore, in order to increase the stability of the positioning protrusion 11 during the force transmission process and to prevent it from being damaged by the shearing force generated during the transmission process, the number of positioning holes 6 is set to be multiple, and the number of corresponding positioning protrusions 11 is also set to be multiple. The positioning protrusions 11 and the positioning holes 6 are matched one by one to ensure the stability of the force transmission process and the service life of the positioning protrusions 11.

[0060] In this embodiment, the arc centers of all positioning holes 6 are on the same axis and have the same arc radius, and the multiple positioning holes 6 are arranged in a circular array.

[0061] This configuration ensures the balance of the positioning protrusion 11 during force transmission.

[0062] In this embodiment, there are two positioning protrusions 11, and correspondingly, there are two positioning holes 6.

[0063] It is understandable that the number of positioning protrusions 11 can be two, but it is not limited to two. There can also be three, four or even more, as long as the force transmission between the rotating disk 2 and the chuck 3 can be guaranteed.

[0064] In an optional embodiment, there are multiple connecting rods 12, which are arranged in a circular array.

[0065] In this embodiment, the connecting rod 12 is connected to the flange. The rotation of the chassis 10 causes the flange to rotate. At this time, the stress applied to the connecting rod 12 is still shear force. To improve the shear stress resistance of the connecting rod 12, the number of connecting rods 12 is set to multiple, and the multiple connecting rods 12 are arranged in a circular array, which can both improve the shear stress resistance and ensure the balance of force transmission.

[0066] In this embodiment, there are two connecting rods 12.

[0067] It is understandable that the number of connecting rods 12 can be two, but it is not limited to two. It can also be three, four or even more, as long as it can cooperate with the flange to transmit the rotation of the claw 3 to the flange, thereby realizing the angle adjustment of the semiconductor gas pipeline welding parts.

[0068] In an optional embodiment, the positioning protrusion 11 is provided with a first through hole 13, and the cover plate 14 is provided with a second through hole. The positioning bolt passes through the first through hole 13 and the second through hole, thereby realizing a fixed connection between the cover plate 14 and the chassis 10.

[0069] In this embodiment, the first through hole 13 provided on the positioning protrusion 11 is located on the symmetrical plane of the arc-shaped positioning protrusion 11, so as not to damage the strength of the positioning protrusion 11.

[0070] In this embodiment, after the second through hole is provided on the cover plate 14, the positioning protrusion 11 is installed in the positioning hole 6, and then the cover plate 14 covers the claw 3, so that the second through hole matches the first through hole 13 one by one, which facilitates the passage of the positioning bolt. After the positioning bolt passes through the first through hole 13 and the second through hole, it is fixed by a nut, thereby realizing the fixed connection between the cover plate 14 and the chassis 10, and at the same time, the claw 3 is fixedly set on the rotating disk 2.

[0071] In this embodiment, each positioning protrusion 11 is provided with a first through hole 13.

[0072] It is understandable that the number of first through holes 13 can be flexibly set according to the size of the positioning protrusion 11. For example, when the width of the positioning protrusion 11 is large, it is necessary to fix it with multiple positioning bolts to ensure the connection strength. In this case, the number of first through holes 13 is multiple.

[0073] In an optional embodiment, the pointer assembly 4 includes an angle pointer, a collar, and a fixing bolt; one end of the angle pointer is fixed to the collar, and the fixing bolt passes through the collar and is fixedly connected to the pawl 3.

[0074] In this embodiment, one end of the angle pointer is a pointed tip, which is used to match the scale on the angle disk 5. The other end of the angle pointer is fixedly connected to the collar. The collar is sleeved on the fixing bolt. Under the action of the fixing bolt, the collar is fixedly set on the base 10 of the chuck 3, thereby achieving the effect of fixing the angle pointer on the chuck 3 and rotating with the chuck 3.

[0075] In an optional embodiment, the rotating disk 2 has a connecting hole 7, and the angle disk 5 has a limiting slot; the limiting bolt passes through the connecting hole 7 and the limiting slot to radially limit the distance between the rotating disk 2 and the angle disk 5.

[0076] In this embodiment, the connecting hole 7 on the rotating disk 2 and the limiting slot hole on the angle disk 5 are connected by limiting bolts, so that the rotating disk 2 can rotate relative to the angle disk 5, but cannot move radially or axially, thereby ensuring the accuracy of angle correction.

[0077] In this embodiment, the limiting slot is an arc-shaped hole, and the center of its arc is on the rotation axis of the rotating disk 2, thereby ensuring that the rotating disk 2 can rotate relative to the angle disk 5.

[0078] In this embodiment, the radius of the limiting slot is greater than the radius of the positioning protrusion 11 on the claw 3, so that when the claw 3 is between the angle disk 5 and the rotating disk 2, it will not interfere with the connection of the limiting bolt.

[0079] To ensure the balance of the limiting position, in this embodiment, the number of limiting slots is at least two, and they are arranged symmetrically or in a circular array.

[0080] In an optional embodiment, the end of the rotating rod 1 away from the rotating disk 2 has a portable hole 9.

[0081] In this embodiment, the portable hole 9 allows the correction device to be hung on a wall or tool rack after use, thus saving space.

[0082] In an optional embodiment, the rotating disk 2 has a pointer slot 8, and the pointer assembly 4 is disposed in the pointer slot 8.

[0083] In this embodiment, a pointer slot 8 is provided on the rotating disk 2, and the pointer assembly 4 is installed in the pointer slot 8. This design provides a stable mounting base and good protection for the pointer assembly 4. The pointer slot 8 can effectively position the pointer assembly 4, ensuring that the pointer assembly 4 and the rotating disk 2 move synchronously during rotation, avoiding angle indication errors caused by shaking or displacement. At the same time, the pointer slot 8 protects the pointer assembly 4 from external collisions or interference during use, extending the service life of the pointer assembly 4. In addition, the design of the pointer slot 8 makes the appearance of the rotating disk 2 neater and more aesthetically pleasing, improving the overall quality of the entire correction device.

[0084] The beneficial effects of this utility model embodiment are:

[0085] The rotating rod 1 drives the rotating disk 2, the chuck 3, and the pointer assembly 4 on the chuck 3 to rotate. Through the cooperation of the pointer assembly 4 and the fixed angle disk 5, precise angle correction can be achieved, thereby improving the correction accuracy, reducing the number of corrections, and even achieving a one-time correction to meet the ISO cleanliness and particle size requirements of semiconductor cleanrooms. It ensures the strength and density of the corrected weld, and prevents micro-leakage caused by changes in density due to weld distortion after correction. It also meets the requirement of a leakage rate of ≤1.0x10-11 Pa·m3 / s for special gases in the semiconductor industry, and meets the ISO cleanliness and SEMI particle size requirements of semiconductor cleanrooms.

[0086] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A straightening device for welded components of a semiconductor gas pipeline, characterized in that, Includes a rotating rod, rotating disk, chuck, angle dial, and pointer assembly; The claw is used to connect the semiconductor gas pipeline welding component; The rotating disk is disposed at one end of the rotating rod, and the rotating disk is fixedly connected to the chuck, which can drive the rotating disk and the chuck to rotate under the action of the rotating rod; The pointer assembly is mounted on the chuck or the rotating disk and can rotate relative to the angle disk under the action of the rotating rod.

2. The orthotic device of claim 1, wherein, The chuck includes a chassis and a cover plate; One side of the chassis has a connecting rod for connecting the semiconductor gas pipeline welding component; The other side of the chassis has a positioning protrusion, and the rotating disk is provided with positioning holes that cooperate with the positioning protrusion. After the positioning protrusion is inserted from one end of the positioning hole, it connects to the cover plate at the other end of the positioning hole.

3. The orthotic device of claim 2, wherein, The positioning hole is an arc-shaped hole.

4. The orthotic device of claim 2, wherein, The number of positioning holes is multiple, and the multiple positioning holes are arranged in a circular array.

5. The orthotic device of claim 2, wherein, The number of connecting rods is multiple, and the multiple connecting rods are arranged in a circular array.

6. The orthotic device of claim 2, wherein, The positioning protrusion is provided with a first through hole, and the cover plate is provided with a second through hole. The positioning bolt passes through the first through hole and the second through hole, which can realize the fixed connection between the cover plate and the chassis.

7. The orthotic device of claim 1, wherein, The pointer assembly includes an angle pointer, a collar, and a fixing bolt; One end of the angle pointer is fixed to the collar, and the fixing bolt passes through the collar and is fixedly connected to the pawl.

8. The orthotic device of claim 1, wherein, The rotating disk has a connecting hole, and the angle disk has a limiting groove hole; The limiting bolt passes through the connecting hole and the limiting slot to provide radial limiting between the rotating disk and the angle disk.

9. The orthotic device of claim 1, wherein, The rotating rod has a portability hole at the end away from the rotating disk.

10. The orthotic device of claim 1, wherein, The rotating disk has a pointer slot, and the pointer assembly is disposed in the pointer slot.

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