Numerical control grinding machine for processing furnace tube of semiconductor vertical furnace

Abstract

The utility model relates to the technical field of numerical control grinding machines, and discloses a numerical control grinding machine for machining a furnace tube of a semiconductor vertical furnace, which is characterized in that an auxiliary plate, a sliding plate, a special clamp and other structures are arranged to realize one-time clamping of the furnace tube, the furnace tube is placed above two V-shaped supporting blocks, the V-shaped supporting blocks are used for bearing the furnace tube, and then a servo motor A is started to drive the furnace tube to rotate; a screw cylinder is driven by a screw rod A to move, three-axis air cylinders on the two sides are started to adjust the position of a V-shaped supporting block, the position of an inner hole of the furnace tube corresponds to the position of a special clamp, a servo motor A is started again to drive a saddle to move, the furnace tube is completely arranged on an outer ring of the special clamp in a sleeving mode, and at the moment, air is supplied into an air hole through an external air source; the tensioning head and the air bag head are stressed to expand and abut against the inner ring of the furnace tube, the position of the furnace tube is limited, then the grinding spindle unit is used for grinding the end face, the outer surface and the spherical top face of the furnace tube, and the effect of improving the production efficiency is achieved.

Description

Technical Field

[0001] This utility model relates to the field of CNC grinding machine technology, and in particular to a CNC grinding machine for processing semiconductor vertical furnace tubes. Background Technology

[0002] The furnace tube is a core component of a semiconductor vertical furnace. Its materials include quartz and ceramics, and it features thin walls, a large diameter, and a spherical end. To ensure the required outer diameter and surface roughness, as well as the perpendicularity of the end face to the outer diameter, the outer diameter and end face of the sintered furnace tube blank need to be ground. Because the part is made of thin-walled, brittle material, clamping requires stable clamping, centering accuracy, and controlled clamping force. Therefore, a CNC grinding machine is used for clamping during the furnace tube machining process.

[0003] In the existing technology, the traditional machining method uses ordinary CNC machine tools with large-diameter spindles and manual clamps to clamp the outer circle in multiple points for segmented machining. However, this method has certain shortcomings, such as time-consuming and laborious value adjustment, requiring multiple clamping to complete the machining, low machining efficiency, and certain skill requirements for the operator during the machining process, resulting in unstable machining quality. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a CNC grinding machine for processing semiconductor vertical furnace tubes, which has the advantages of high grinding efficiency and one-time clamping, thus solving the problems mentioned in the background technology.

[0005] This utility model provides the following technical solution: a CNC grinding machine for processing semiconductor vertical furnace tubes, comprising a horizontal machine tool, a spindle box fixedly installed at the top of one end of the horizontal machine tool, a drive shaft rotatably installed inside the spindle box, a motor box fixedly installed below the spindle box inside the horizontal machine tool, the motor box including a motor and a drive head, a servo motor A fixedly installed on one side of the horizontal machine tool, the output shaft of the servo motor A being driven by a lead screw A via a coupling, a saddle slidably installed at the top of the other end of the horizontal machine tool, an auxiliary plate fixedly installed on the top of the saddle, a slide plate slidably installed on the top of the auxiliary plate, a three-axis cylinder fixedly installed on both sides of the saddle, a V-shaped support block fixedly connected to the end of the output shaft of the three-axis cylinder, a furnace tube placed on the top of the V-shaped support block, and a special fixture fixedly connected to the end of the drive shaft.

[0006] With the above structural setup, the furnace tube is supported and its position is adjusted by a three-axis cylinder, achieving automated feeding. Then, through the cooperation of servo motor A and a special fixture, the furnace tube is fixed on the outer ring of the special fixture. After the special fixture supplies air, the position of the furnace tube is fixed, making clamping convenient and improving production efficiency.

[0007] Preferably, a motor is fixedly installed inside the motor housing, and the output shaft of the motor is connected to a transmission head via a coupling. A transmission belt is uniformly connected between the transmission head and the outer ring of the transmission shaft.

[0008] With the above structural configuration, the motor output shaft drives the transmission head through the coupling, and the transmission head drives the transmission shaft to rotate through the transmission belt, which in turn drives the special fixture to rotate, thereby causing the furnace tube to rotate.

[0009] Preferably, the saddle includes a fixing block and a screw cylinder. The fixing block is installed on one side of the bottom of the saddle, and the screw cylinder is fixedly installed on one side of the fixing block. The screw cylinder is threadedly installed on the outer ring of the lead screw A, and the inner ring of the screw cylinder is threadedly matched with the outer ring of the lead screw A.

[0010] With the above structural configuration, the saddle is slidably mounted on the horizontal machine tool, enabling it to feed laterally. The feed is achieved by the servo motor A driving the lead screw A to rotate the thread between the screw and the barrel.

[0011] Preferably, the auxiliary plate includes a servo motor B, which is fixedly installed at one end of the auxiliary plate. A groove is formed on the surface of the auxiliary plate, and a lead screw B is rotatably installed inside the groove. The output shaft of the servo motor B is connected to the end of the lead screw B through a coupling. A slide block is threaded on the outer ring of the lead screw B, and the shape of the slide block is adapted to the groove.

[0012] With the above structural setup, when the servo motor B is started, the servo motor B drives the lead screw B to rotate through the coupling. Since the position of the slide block is restricted by the slide groove, the slide block slides longitudinally on the outer ring of the lead screw B.

[0013] Preferably, the slide plate and the slide base are fixedly connected. The slide plate includes a base and a CNC rotary table. The base is fixedly installed on one side of the top of the slide plate, and the CNC rotary table is fixedly installed on the top of the base. The output shaft end of the CNC rotary table is connected to a grinding spindle unit through a coupling.

[0014] With the above structural configuration, the grinding spindle unit is connected to the output shaft of the CNC rotary table via a coupling. When the CNC rotary table is started, the output shaft of the CNC rotary table drives the grinding spindle unit via the coupling.

[0015] Preferably, the special clamp includes a rotating tube, an expansion sleeve, and an auxiliary support device. The expansion sleeve is uniformly and fixedly fitted in a circular shape in the middle of the rotating tube. The auxiliary support device is provided on both sides of the expansion sleeve on the outer ring of the rotating tube. Tensioning heads are provided at both ends of the expansion sleeve. Air bladder heads are uniformly provided in a circular shape on the outer ring of the auxiliary support device. An air hole is opened at one end of the rotating tube.

[0016] With the above-mentioned structure, the furnace tube is moved and fitted onto the outer ring of the special clamp. Then, an external air source is used to supply air to the inside of the special clamp, so that the tensioning head and the air bladder head are squeezed by compressed air and pushed against the inner ring of the furnace tube.

[0017] This utility model has the following advantages:

[0018] 1. This CNC grinding machine for processing semiconductor vertical furnace tubes achieves one-time clamping of the furnace tube by setting up auxiliary plates, sliding plates, and special fixtures. The furnace tube is placed above two V-shaped support blocks, which support the furnace tube. Then, servo motor A is started, and the screw barrel is moved by lead screw A. The three-axis cylinders on both sides are started to adjust the position of the V-shaped support blocks so that the inner hole of the furnace tube corresponds to the position of the special fixture. Servo motor A is started again to move the saddle so that the furnace tube is completely fitted into the outer ring of the special fixture. At this time, air is supplied to the inside of the air hole through an external air source, so that the tensioning head and the air bladder head are stressed and expanded to press against the inner ring of the furnace tube, limiting the position of the furnace tube. Then, the grinding spindle unit is used to grind the end face, outer surface, and spherical top surface of the furnace tube, which improves production efficiency.

[0019] 2. This CNC grinding machine for processing semiconductor vertical furnace tubes achieves precise positioning and high grinding efficiency through the use of specialized fixtures, tensioning sleeves, and auxiliary support devices. By moving the furnace tube and fitting it onto the outer ring of the specialized fixture, and then using an external air source to supply air to the inside of the fixture, the tensioning head and air bladder head are compressed by the compressed air and pushed against the inner ring of the furnace tube, thus limiting the position of the furnace tube. When the motor drives the transmission head to rotate through the coupling, the transmission belt drives the transmission shaft, causing the furnace tube to rotate, achieving the effects of precise positioning and high grinding efficiency. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2 This is a schematic diagram of the workpiece support structure of this utility model;

[0022] Figure 3 This is a schematic diagram of the auxiliary plate structure of this utility model;

[0023] Figure 4 This is a schematic diagram of the special fixture structure of this utility model.

[0024] In the diagram: 1. Horizontal machine tool; 2. Spindle box; 21. Drive shaft; 3. Motor box; 31. Drive head; 32. Drive belt; 4. Servo motor A; 41. Lead screw A; 5. Saddle; 51. Fixing block; 52. Screw; 6. Auxiliary plate; 61. Servo motor B; 62. Lead screw B; 63. Slide; 7. Slide plate; 71. Base; 72. CNC rotary table; 73. Grinding spindle unit; 8. Three-axis cylinder; 81. V-shaped support block; 9. Furnace tube; 10. Special fixture; 101. Rotary tube; 102. Expansion sleeve; 103. Auxiliary support device; 104. Tensioning head; 105. Air bladder head; 106. Air hole. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Please see Figures 1-2 A CNC grinding machine for processing semiconductor vertical furnace tubes includes a horizontal machine tool 1. A spindle box 2 is fixedly mounted on the top of one end of the horizontal machine tool 1. A drive shaft 21 is rotatably mounted inside the spindle box 2, with one end of the drive shaft 21 extending outside the spindle box 2. A motor box 3 is fixedly mounted inside the horizontal machine tool 1 below the spindle box 2. The motor box 3 includes a motor and a drive head 31. The motor is fixedly mounted inside the motor box 3. The output shaft of the motor is connected to the drive head 31 via a coupling. A drive belt 32 is evenly connected between the drive head 31 and the outer ring of the drive shaft 21. The spindle box 2 drives the drive head 3 through the motor and the coupling. 1. Rotation, then the transmission head 31 transmits power to the transmission shaft 21 via the transmission belt 32 to achieve operation. A servo motor A4 is fixedly installed on one side of the horizontal machine tool 1. The output shaft of the servo motor A4 is connected to the lead screw A41 via a coupling. A saddle 5 is slidably installed on the top of the other end of the horizontal machine tool 1. An auxiliary plate 6 is fixedly installed on the top of the saddle 5. A slide plate 7 is slidably installed on the top of the auxiliary plate 6. Three-axis cylinders 8 are fixedly installed on both sides of the saddle 5. A V-shaped support block 81 is fixedly connected to the end of the output shaft of the three-axis cylinder 8. A furnace tube 9 is placed on the top of the V-shaped support block 81. A special fixture 10 is fixedly connected to the end of the transmission shaft 21.

[0027] In practical applications, this device achieves automated feeding by supporting and adjusting the position of the furnace tube 9 using a three-axis cylinder 8. Subsequently, the furnace tube 9 is fixed to the outer ring of the special clamp 10 by the cooperation of the servo motor A4 and the special clamp 10. After the special clamp 10 supplies air, the position of the furnace tube 9 is fixed. Then, the position of the slide plate 7 is moved by the cooperation of the servo motor A4 and the servo motor B61, so that the grinding spindle unit 73 can perform uniform processing on the outer surface of the furnace tube 9 when it rotates, thus achieving convenient clamping and improving production efficiency.

[0028] Please see Figures 1-3 The saddle 5 includes a fixing block 51 and a screw barrel 52. The fixing block 51 is installed on one side of the bottom of the saddle 5. The screw barrel 52 is fixedly installed on one side of the fixing block 51. The screw barrel 52 is threadedly installed on the outer ring of the lead screw A41. The inner ring of the screw barrel 52 is threadedly matched with the outer ring of the lead screw A41.

[0029] The saddle 5 is slidably mounted on the horizontal machine tool 1 and can achieve its own transverse feed. The feed is achieved by the servo motor A4 driving the lead screw A41 to rotate the thread between the screw and the barrel 52. When the lead screw A41 is selected, the screw 52 can slide laterally on the outer ring of the lead screw A41 because its position is fixed, thereby realizing the position control of the saddle 5.

[0030] Please see Figures 1-3 The auxiliary plate 6 includes a servo motor B61, which is fixedly installed at one end of the auxiliary plate 6. A groove is provided on the surface of the auxiliary plate 6, and a lead screw B62 is rotatably installed inside the groove. The output shaft of the servo motor B61 is connected to the end of the lead screw B62 through a coupling. A slide block 63 is threaded on the outer ring of the lead screw B62, and the shape of the slide block 63 is adapted to the groove.

[0031] When the servo motor B61 is started, the servo motor B61 drives the lead screw B62 to rotate through the coupling. Since the position of the slide block 63 is restricted by the slide groove, the slide block 63 slides longitudinally on the outer ring of the lead screw B62 to change the overall position of the slide plate 7.

[0032] Please see Figures 1-3 The slide plate 7 and the slide base 63 are fixedly connected. The slide plate 7 includes a base 71 and a CNC rotary table 72. The base 71 is fixedly installed on one side of the top of the slide plate 7, and the CNC rotary table 72 is fixedly installed on the top of the base 71. The output shaft end of the CNC rotary table 72 is connected to a grinding spindle unit 73 through a coupling. The grinding spindle unit 73 can be a grinding wheel or a diamond roller when in use. The corresponding grinding spindle unit 73 is selected according to the user's needs and the workpiece.

[0033] The grinding spindle unit 73 is connected to the output shaft of the CNC rotary table 72 via a coupling. When the CNC rotary table 72 is started, the output shaft of the CNC rotary table 72 drives the grinding spindle unit 73 via the coupling. When grinding the workpiece, the grinding spindle unit 73 performs tangential grinding with the outer surface of the workpiece.

[0034] Please see Figures 1-4 The special clamp 10 is connected to the transmission shaft 21 to achieve transmission connection with the transmission head 31. The special clamp 10 includes a rotating tube 101, a tensioning sleeve 102, and an auxiliary support device 103. The tensioning sleeve 102 is uniformly fixed in a circular shape in the middle of the rotating tube 101. The auxiliary support device 103 is provided on both sides of the tensioning sleeve 102 on the outer ring of the rotating tube 101. Tensioning heads 104 are provided at both ends of the tensioning sleeve 102. Airbag heads 105 are uniformly provided in a circular shape on the outer ring of the auxiliary support device 103. An air hole 106 is opened at one end of the rotating tube 101. The air hole 106 provides compressed air to the tensioning head 104 and the airbag head 105 by connecting to an external air source.

[0035] The special fixture 10 adopts a fixture structure combining a tensioning sleeve 102 and an auxiliary support device 103. The special fixture 10 is connected to the transmission shaft 21 to achieve positioning, clamping and rotation of the workpiece. In use, the furnace tube 9 is moved and placed on the outer ring of the special fixture 10. Then, an external air source is used to supply air to the inside of the special fixture 10, so that the tensioning head 104 and the air bladder head 105 are squeezed by compressed air and pushed against the inner ring of the furnace tube 9, thereby limiting the position of the furnace tube 9. When the motor drives the transmission head 31 to rotate through the coupling, the transmission belt 32 drives the transmission shaft 21, causing the furnace tube 9 to rotate.

[0036] Working principle: In use, the furnace tube 9 is placed above the two V-shaped support blocks 81, which support the furnace tube 9. Then, the servo motor A4 is started. The output shaft of the servo motor A4 drives the lead screw A41 through the coupling. When the lead screw A41 rotates, since the position of the screw cylinder 52 is fixed, the cylinder 52 is moved by the lead screw A41 towards the spindle box 2. The drive stops when the furnace tube 9 is moved to the side of the special fixture 10. At this time, check whether the center position of the inner hole shaft of the furnace tube 9 is aligned with the special fixture 10. With the shaft centers aligned, any misalignment is addressed by activating the two-axis cylinders 8 to adjust the position of the V-shaped support block 81, aligning the inner hole of the furnace tube 9 with the position of the special fixture 10. Then, the servo motor A4 is activated again to move the saddle 5, ensuring the furnace tube 9 is completely fitted onto the outer ring of the special fixture 10. At this point, air is supplied to the air hole 106 via an external air source, causing the tension head 104 and the air bladder head 105 to expand and press against the inner ring of the furnace tube 9, thus defining its position. Finally, the servo motor A4 is activated, and the coupling drives the lead screw A41 to... The grinding spindle unit 73 is moved to one side of the furnace tube 9 by rotating in the reverse direction. Then, according to the grinding position, the servo motor B61 is started. The output shaft of the servo motor B61 drives the lead screw B62 to rotate through the coupling. The slide 63 is located inside the slide groove and slides with the outer ring of the lead screw B62 to adjust the position of the slide plate 7. When the grinding position is reached, the servo motor B61 is stopped. Then, the CNC rotary table 72 is started. The CNC rotary table 72 drives the grinding spindle unit 73 to rotate through the coupling. The servo motor A4 is started again. Motor A4 drives the position of the saddle 5 and slide plate 7 through lead screw A41, so that the grinding spindle unit 73 rotates and grinds the outer surface of the furnace tube 9. The position of slide plate 7 is adjusted by the cooperation of servo motor A4 and auxiliary plate 6, so that slide plate 7 uniformly processes the outer surface of furnace tube 9. After processing, the motor is stopped so that furnace tube 9 is no longer driven to rotate by special fixture 10. Then, servo motor A4 drives lead screw A41 to drive three-axis cylinder 8 to be located below furnace tube 9. Three-axis cylinder 8 lifts furnace tube 9 and unloads it.

Claims

1. A numerical control grinder for processing a furnace tube of a semiconductor vertical furnace, comprising a horizontal machine tool (1), characterized in that: A spindle box (2) is fixedly installed at the top of one end of the horizontal machine tool (1). A transmission shaft (21) is rotatably installed inside the spindle box (2). A motor box (3) is fixedly installed inside the horizontal machine tool (1) below the spindle box (2). The motor box (3) includes a motor and a transmission head (31). A servo motor A (4) is fixedly installed on one side of the horizontal machine tool (1). The output shaft of the servo motor A (4) is connected to a lead screw A (41) via a coupling. A saddle (5) is slidably installed at the top of the other end of the horizontal machine tool (1). An auxiliary plate (6) is fixedly installed on the top of the saddle (5). A sliding plate (7) is slidably installed on the top of the auxiliary plate (6). A three-axis cylinder (8) is fixedly installed on both sides of the saddle (5). A V-shaped support block (81) is fixedly connected to the end of the output shaft of the three-axis cylinder (8). A furnace tube (9) is placed on the top of the V-shaped support block (81). A special fixture (10) is fixedly connected to the end of the transmission shaft (21).

2. The numerical control grinder for processing the furnace tube of the semiconductor vertical furnace according to claim 1, wherein: A motor is fixedly installed inside the motor housing (3). The output shaft of the motor is connected to a transmission head (31) via a coupling. A transmission belt (32) is uniformly connected between the transmission head (31) and the outer ring of the transmission shaft (21).

3. The numerical control grinder for processing the furnace tube of the semiconductor vertical furnace according to claim 2, wherein: The saddle (5) includes a fixing block (51) and a screw barrel (52). The fixing block (51) is installed on one side of the bottom of the saddle (5). The screw barrel (52) is fixedly installed on one side of the fixing block (51). The screw barrel (52) is threadedly installed on the outer ring of the lead screw A (41). The inner ring of the screw barrel (52) is threadedly matched with the outer ring of the lead screw A (41).

4. The CNC grinding machine for processing semiconductor vertical furnace tubes according to claim 3, characterized in that: The auxiliary plate (6) includes a servo motor B (61), which is fixedly installed at one end of the auxiliary plate (6). A groove is provided on the surface of the auxiliary plate (6), and a lead screw B (62) is rotatably installed inside the groove. The output shaft of the servo motor B (61) is connected to the end of the lead screw B (62) through a coupling. A slide block (63) is threaded on the outer ring of the lead screw B (62), and the shape of the slide block (63) is adapted to the groove.

5. The numerical control grinder for processing the furnace tube of a semiconductor vertical furnace according to claim 4, wherein: The slide plate (7) is fixedly connected to the slide base (63). The slide plate (7) includes a base (71) and a CNC rotary table (72). The base (71) is fixedly installed on one side of the top of the slide plate (7). The CNC rotary table (72) is fixedly installed on the top of the base (71). The output shaft end of the CNC rotary table (72) is connected to the grinding spindle unit (73) through a coupling.

6. The numerical control grinder for processing the furnace tube of a semiconductor vertical furnace according to claim 5, wherein: The special clamp (10) includes a rotating tube (101), a tightening sleeve (102), and an auxiliary support device (103). The middle part of the rotating tube (101) is uniformly and fixedly fitted with the tightening sleeve (102) in a circular shape. The outer ring of the rotating tube (101) is provided with auxiliary support devices (103) on both sides of the tightening sleeve (102). The two ends of the tightening sleeve (102) are provided with tension heads (104). The outer ring of the auxiliary support device (103) is uniformly provided with air bladder heads (105) in a circular shape. One end of the rotating tube (101) is provided with an air hole (106).

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