Air tightness detection tool suitable for metal cavity

Abstract

The air tightness detection tool suitable for the metal cavity comprises a base, the base is used in cooperation with a leak detection opening of a helium mass spectrometer, a pressing mechanism is arranged on the base, an air tightness detection corresponding groove is formed in the base, and a pressing block is arranged in the air tightness detection corresponding groove. The bottom of the pressing block is provided with an air tightness pressing corresponding part which is used as a leak detection port pressing body of a helium mass spectrometer, and the air tightness detection corresponding groove is correspondingly provided with a helium gas inlet which is used as an air tightness medium introduction corresponding part.

Description

Technical Field

[0001] This utility model relates to the fabrication technology of optical devices and the equipment used thereon, specifically, a tooling for testing the airtightness of metal cavities. Background Technology

[0002] The airtightness testing fixture for the metal cavity of optoelectronic devices needs to be used with an airtightness tester. It is used to support the product shell and connect the airtight interface so that the part of the product to be tested is connected to the airtightness tester, thereby achieving the purpose of testing the airtightness of the product. Generally, the airtightness testing fixture requires good reliability, stability, disassembly and assembly, and ease of operation.

[0003] Currently, the main problems and shortcomings of airtightness testing equipment are:

[0004] 1) For slightly larger products, the vacuum suction of the helium mass spectrometer alone is insufficient to meet the leakage rate requirements;

[0005] 2) Inappropriate fit with the filter and leak detection port, resulting in inconvenient installation;

[0006] 3) The product is not properly compressed, resulting in a failure to meet leakage standards.

[0007] Therefore, it is necessary to provide a tooling suitable for testing the airtightness of metal cavities to solve the above problems. Utility Model Content

[0008] The purpose of this invention is to provide a tooling for testing the airtightness of metal cavities.

[0009] The technical solution is as follows:

[0010] A gas tightness testing fixture for metal cavities includes a base, which is used in conjunction with the leak detection port of a helium mass spectrometer. The base is provided with a clamping mechanism and a corresponding gas tightness testing slot. A clamping block is provided in the corresponding gas tightness testing slot. The bottom of the clamping block is provided with a gas tightness clamping component that serves as a clamping body for the leak detection port of the helium mass spectrometer. The corresponding gas tightness testing slot is also provided with a helium inlet for introducing a gas tightness medium into the corresponding part.

[0011] Furthermore, the base is fixed to the leak detection port of the helium mass spectrometer by hinge screws.

[0012] Furthermore, the clamping mechanism is formed by a combination of a rocker arm clamping mechanism and a threaded locking mechanism.

[0013] Furthermore, there are two rocker arm clamping mechanisms.

[0014] Furthermore, two rocker arm clamping mechanisms are symmetrically distributed on both sides of the corresponding slot for airtightness testing.

[0015] Furthermore, the corresponding component for airtight compression is a silicone pad.

[0016] Compared with the prior art, this utility model, through the airtightness compression setting, has a greater pressure between the product to be tested and the leak detection port, thereby meeting the leak rate requirements. It has good reliability in connection with the leak detector, good disassembly, and is easy for operators to operate. It can simultaneously meet the metal cavity testing needs of photoelectric devices of different sizes, and has good stability in airtightness testing. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of this utility model;

[0018] Figure 2 This is an exploded view of this utility model. Detailed Implementation

[0019] Example:

[0020] Please see Figure 1-2 This embodiment demonstrates a gas tightness testing fixture suitable for metal cavities, including a base 1. The base 1 is used in conjunction with the leak detection port of a helium mass spectrometer. A clamping mechanism 2 is provided on the base 1, and a gas tightness testing corresponding groove 3 is provided on the base 1. A clamping block 4 is provided in the gas tightness testing corresponding groove 3. A gas tightness clamping corresponding part 5 is provided at the bottom of the clamping block 4, which serves as a clamping body for the leak detection port of the helium mass spectrometer. The gas tightness testing corresponding groove 3 is also provided with a helium gas inlet 6, which is used to introduce a gas tightness medium into the corresponding part.

[0021] The base 1 is fixed to the leak detection port of the helium mass spectrometer by hinge screws.

[0022] The clamping mechanism 2 is formed by a combination of a rocker arm clamping mechanism and a threaded locking mechanism.

[0023] There are two rocker arm clamping mechanisms.

[0024] Two rocker arm clamping mechanisms are symmetrically distributed on both sides of the corresponding slot 3 for airtightness testing.

[0025] The airtightness clamping component 5 is a silicone pad.

[0026] Compared with the prior art, this utility model, through the airtightness compression setting, has a greater pressure between the product to be tested and the leak detection port, thereby meeting the leak rate requirements. It has good reliability in connection with the leak detector, good disassembly, and is easy for operators to operate. It can simultaneously meet the metal cavity testing needs of photoelectric devices of different sizes, and has good stability in airtightness testing.

[0027] For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. A fixture for testing the airtightness of metal cavities, characterized in that: Includes a base, which is used in conjunction with the leak detection port of a helium mass spectrometer. The base is equipped with a clamping mechanism and a corresponding slot for airtightness testing. A clamping block is installed in the corresponding slot for airtightness testing. The bottom of the clamping block is equipped with an airtightness clamping component that serves as a clamping body for the leak detection port of the helium mass spectrometer. The corresponding slot for airtightness testing is also equipped with a helium inlet for the introduction of an airtight medium into the corresponding part.

2. The hermeticity testing tool for metal cavities of claim 1, wherein: The base is fixed to the leak detection port of the helium mass spectrometer by hinge screws.

3. The leak detection tool for metal cavities of claim 1, wherein: The clamping mechanism is formed by a combination of a rocker arm clamping mechanism and a threaded locking mechanism.

4. The leak detection tool for metal cavities of claim 3, wherein: There are two rocker arm clamping mechanisms.

5. The leak detection tool for metal cavities of claim 4, wherein: Two rocker arm clamping mechanisms are symmetrically distributed on both sides of the corresponding slot for airtightness testing.

6. The hermeticity testing tool for metal cavities of claim 1, wherein: The corresponding component for airtight compression is a silicone pad.

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