Elliptic polarization platform capable of synchronously adjusting light path

Abstract

The utility model relates to the technical field of ellipsometer application, in particular to an ellipsometer platform capable of synchronously adjusting light paths. An ellipsometric platform capable of synchronously adjusting light paths comprises a base and a parallelogram connecting rod mechanism vertically arranged on the base, and the parallelogram connecting rod mechanism comprises a first connecting rod, a second connecting rod, a first laser fixing plate, a second laser fixing plate, a fixing pin and an adjusting block capable of moving in the vertical direction; one end of the first connecting rod is hinged with the adjusting block, and the other end is hinged with the upper end of the first laser fixing plate; one end of the second connecting rod is hinged with the adjusting block, and the other end is hinged with the upper end of the second laser fixing plate; the lower end of the first laser fixing plate and the lower end of the second laser fixing plate are both hinged to a fixing pin. Based on the parallelogram principle, geometric forced synchronization of an incident angle and a reflection angle is achieved, angle adjustment is simple, and cost is moderate.

Description

Technical Field

[0001] This utility model relates to the field of ellipsometer application technology, specifically to an ellipsometer platform for synchronously adjusting the optical path. Background Technology

[0002] An ellipsometer is a precision instrument used to measure the optical properties of materials and the thickness of thin films, especially in the characterization of nanoscale thin films. In ellipsometer applications, laser light, after polarization, illuminates the surface of the thin film sample at a specific incident angle, and is then reflected and received by a laser receiver. Since the incident and reflection angles are the same, the installation angles of the laser and receiver must be symmetrical. When testing different types of samples or samples with large areas, the incident angle needs to be adjusted, thus requiring simultaneous adjustment of the reflection angle.

[0003] In the field of ellipsometer technology, traditional optical path synchronous adjustment schemes have shortcomings. Currently, high-end ellipsometers on the market use dual servo motors to independently control the angles of the laser and receiver, combined with a grating measurement system to achieve synchronous adjustment. While this method offers high accuracy, it suffers from complex control and high cost. Low-end ellipsometers, on the other hand, use symmetrical holes drilled on both sides of a background plate to create different angle settings. The laser and receiver angle settings are adjusted manually using pins to maintain symmetry. This method suffers from low adjustment accuracy, cumbersome operation, and easy wear.

[0004] Therefore, there is an urgent need to develop an elliptic deflection platform for synchronously adjusting the optical path to solve the above problems. Utility Model Content

[0005] This invention addresses the technical problems existing in the prior art by providing an elliptic deflection platform for synchronously adjusting the optical path. Based on the parallelogram principle, it achieves geometrically forced synchronization of the incident angle and the reflection angle through a single motor-driven linkage mechanism. The adjustment is simple and the cost is moderate.

[0006] The technical solution of this utility model to solve the above-mentioned technical problems is as follows:

[0007] An elliptic deflection platform for synchronously adjusting an optical path includes a base and a parallelogram linkage mechanism vertically disposed on the base. The parallelogram linkage mechanism includes a first link, a second link, a first laser fixing plate, a second laser fixing plate, a fixing pin, and an adjustment block that can move in the vertical direction.

[0008] The first connecting rod has one end hinged to the adjusting block and the other end hinged to the upper end of the first laser fixing plate; the second connecting rod has one end hinged to the adjusting block and the other end hinged to the upper end of the second laser fixing plate.

[0009] The lower ends of the first laser fixing plate and the second laser fixing plate are both hinged to the fixing pins.

[0010] The fixing pin is connected to the base, and the first laser fixing plate and the second laser fixing plate rotate synchronously under the drive of the adjusting block.

[0011] Based on the above technical solution, the present invention can be further improved as follows.

[0012] Furthermore, it also includes a support frame perpendicular to the base, the support frame being provided with a moving mechanism that drives the adjusting block to move vertically.

[0013] Furthermore, the moving mechanism includes a motor, a coupling, a lead screw, and a slider; the lead screw is perpendicular to the base and coaxially connected to the output shaft of the motor via the coupling; one side of the slider has a threaded hole that matches the lead screw and is threadedly connected to it, and the other side is connected to an adjusting block.

[0014] Furthermore, the moving mechanism also includes a guide rail, the side surface of the support frame is provided with the guide rail parallel to the lead screw, and the slider is provided with a sliding groove that cooperates with the guide rail and is slidably connected to it.

[0015] Furthermore, the first connecting rod is hinged to the first laser mounting plate via a bearing; the first connecting rod is hinged to the first laser mounting plate via a bearing.

[0016] Furthermore, a sample adjustment platform is provided on the base, which is located on the symmetrical plane between the first laser fixing plate and the second laser fixing plate.

[0017] Furthermore, the first laser mounting plate is equipped with a laser, and the second laser mounting plate is equipped with a receiver; the sample adjustment platform is a lifting platform, and its center is located at the intersection of the incident and reflected laser light by height adjustment.

[0018] The beneficial effects of this utility model are as follows: This elliptical platform simplifies the traditional complex dual-motor electronic synchronous control into a single-motor driven mechanical forced synchronization by utilizing the geometric constraint characteristics of the parallelogram linkage mechanism. While ensuring absolute consistency between the incident angle and the reflection angle, it significantly reduces system complexity and manufacturing costs. Its lead screw guide rail transmission mechanism and bearing hinge design improve the angle adjustment accuracy and effectively avoid the mechanical wear and positioning errors of traditional manual pin gear adjustment, providing a highly reliable, low-cost, and maintenance-free solution for the field of thin film measurement. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the elliptical platform described in an embodiment of the present invention;

[0020] Figure 2 This is a schematic diagram of the structure of the elliptic platform with the receiver and laser installed according to an embodiment of the present invention.

[0021] The attached diagram lists the components represented by each number as follows:

[0022] 1. Motor, 2. Coupling, 3. Guide rail, 4. Lead screw, 5. Slider, 6. Adjusting block, 71. First connecting rod, 72. Second connecting rod, 81. First laser fixing plate, 82. First laser fixing plate, 9. Fixing pin, 10. Sample adjustment platform, 11. Base, 12. Receiver, 13. Laser. Detailed Implementation

[0023] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0024] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0025] In the description of this application, the term "for example" is used to mean "used as an example, illustration, or description." Any embodiment described as "for example" in this application is not necessarily to be construed as being more preferred or advantageous than other embodiments. The following description is provided to enable any person skilled in the art to implement and use the present invention. Details are set forth in the following description for purposes of explanation. It should be understood that those skilled in the art will recognize that the present invention can be implemented without using these specific details. In other instances, well-known structures and processes will not be described in detail to avoid obscuring the description of the present invention with unnecessary detail. Therefore, the present invention is not intended to be limited to the embodiments shown, but is consistent with the broadest scope of the principles and features disclosed in this application.

[0026] Example

[0027] like Figure 1-2As shown, an elliptic deflection platform for synchronously adjusting the optical path includes a base 11 and a parallelogram linkage mechanism vertically disposed on the base 11. The parallelogram linkage mechanism includes a first link 71, a second link 72, a first laser fixing plate 81, a second laser fixing plate 82, a fixing pin 9, and an adjustment block 6 that can move in the vertical direction.

[0028] The first connecting rod 71 has one end hinged to the adjusting block 6 and the other end hinged to the upper end of the first laser fixing plate 81 via a bearing; the second connecting rod 72 has one end hinged to the adjusting block 6 and the other end hinged to the upper end of the second laser fixing plate 82 via a bearing.

[0029] The lower ends of both the first laser fixing plate 81 and the second laser fixing plate 82 are hinged to the fixing pin 9; the fixing pin 9 is connected to the base 11, and the first laser fixing plate 81 and the second laser fixing plate 82 rotate synchronously when the adjusting block 6 moves up and down. Utilizing the principle that opposite angles of a parallelogram are equal, mechanical force ensures that the incident angle equals the reflection angle, resulting in high synchronization accuracy. The adjusting block 6 is driven at a single point, making it simple, easy to implement, and low in cost.

[0030] In a preferred embodiment, a sample adjustment platform 10 is provided on the base 11. The first laser fixing plate 81 mounts the laser 13, and the second laser fixing plate 82 mounts the receiver 12. In this embodiment, the sample adjustment platform 10 uses a lifting platform, specifically a Z-axis lifting platform LZ40 from Runjia brand. The height of the sample adjustment platform 10 can be adjusted so that its center is always located at the intersection of the incident and reflected light from the laser 13, suitable for various angles. The sample adjustment platform 10 facilitates sample installation, and its center coincides with the intersection of the optical path, ensuring the sample is located at the intersection of the incident and reflected light.

[0031] In a preferred embodiment, a support frame perpendicular to the base 11 is further included. The support frame is equipped with a moving mechanism that drives the adjusting block 6 to move vertically. Specifically, the moving mechanism includes a motor 1, a coupling 2, a lead screw 4, a guide rail 3, and a slider 5. The lead screw 4 is perpendicular to the base 11 and coaxially connected to the output shaft of the motor 1 via the coupling 2. One side of the slider 5 has a threaded hole matching the lead screw 4 and is threadedly connected to it, while the other side is connected to the adjusting block 6. The side surface of the support frame is provided with the guide rail 3, which is parallel to the lead screw 4. The slider 5 has a sliding groove that mates with the guide rail 3 and is slidably connected to it. The lead screw 4 converts the rotation of the motor 1 into linear motion, driving the slider 5 to move up and down under the action of the motor 1. The guide rail 3 constrains the rotational freedom of the slider 5, serving a guiding function.

[0032] The working process of this utility model is as follows:

[0033] The optical path is synchronously adjusted through mechanical linkage. When motor 1 starts, its output shaft drives the vertically arranged lead screw 4 to rotate through coupling 2, driving slider 5 to move vertically up and down along guide rail 3. Slider 5 drives the adjustment block 6, which is rigidly connected to it, to move synchronously. At this time, the vertical displacement of adjustment block 6 is transmitted to laser fixing plate through two sets of symmetrically arranged connecting rods: the first connecting rod 71 and the second connecting rod 72 respectively convert the linear motion of adjustment block 6 into rotational torque, pushing the first laser fixing plate 81 and the second laser fixing plate 82 to rotate symmetrically around the fixing pin 9 at the bottom.

[0034] Due to the geometric constraints of the parallelogram mechanism, the rotation angles of the first laser fixing plate 81 and the second laser fixing plate 82 are always forced to be equal. When the adjusting block 6 moves upward, both expand outward synchronously, increasing the incident angle and the reflection angle; conversely, when the adjusting block 6 moves downward, both retract inward, decreasing the angle. During this process, the precise cooperation between the lead screw 4 and the guide rail 3 ensures the linear accuracy of the slider 5's movement, while the bearing hinge structure effectively reduces frictional loss, making angle adjustment smooth and stable.

[0035] The synchronously rotating first laser fixing plate 81 and second laser fixing plate 82 drive the laser emitter 13 and receiver 12 on them to change the direction of the light path. At this time, the sample adjustment platform 10 can always keep the surface of the sample under test in the intersection area of ​​the incident light and the reflected light through vertical height compensation, thereby realizing the measurement of thin film characteristics at different angles.

[0036] In summary, this utility model, based on the parallelogram principle, achieves geometrically forced synchronization of the incident angle and the reflection angle through a single motor-driven linkage mechanism, balancing the requirements of accuracy, cost, and reliability.

[0037] While embodiments or examples of this disclosure have been described with reference to the accompanying drawings, it should be understood that the methods, systems, and devices described above are merely exemplary embodiments or examples, and the scope of this utility model is not limited by these embodiments or examples, but only by the granted claims and their equivalents. Various elements in the embodiments or examples may be omitted or replaced by their equivalents. Furthermore, the steps may be performed in a different order than that described in this disclosure. Further, various elements in the embodiments or examples may be combined in various ways. Importantly, as technology evolves, many elements described herein can be replaced by equivalents that appear after this disclosure.

Claims

1. An ellipsometric stage for synchronously adjusting an optical path, characterized by, The system includes a base and a parallelogram linkage mechanism vertically mounted on the base. The parallelogram linkage mechanism includes a first link, a second link, a first laser fixing plate, a second laser fixing plate, a fixing pin, and an adjustment block that can move in the vertical direction. The first connecting rod has one end hinged to the adjusting block and the other end hinged to the upper end of the first laser fixing plate. The second connecting rod has one end hinged to the adjusting block and the other end hinged to the upper end of the second laser fixing plate. The lower ends of the first laser fixing plate and the second laser fixing plate are both hinged to the fixing pins. The fixing pin is connected to the base, and the first laser fixing plate and the second laser fixing plate rotate synchronously under the drive of the adjusting block.

2. The ellipsometer of claim 1, wherein, It also includes a support frame perpendicular to the base, the support frame being provided with a moving mechanism that drives the adjusting block to move in the vertical direction.

3. The ellipsometer of claim 2, wherein, The moving mechanism includes a motor, a coupling, a lead screw, and a slider; The lead screw is perpendicular to the base and is coaxially connected to the motor output shaft via a coupling. The slider has a threaded hole on one side that matches the lead screw and is threadedly connected to it, and an adjustment block is connected to the other side.

4. The ellipsometer of claim 3, wherein, The moving mechanism further includes a guide rail, the side surface of the support frame is provided with the guide rail parallel to the lead screw, and the slider is provided with a sliding groove that cooperates with the guide rail and is slidably connected to it.

5. The ellipsometer of claim 1, wherein, The first connecting rod is hinged to the first laser mounting plate via a bearing; the first connecting rod is hinged to the first laser mounting plate via a bearing.

6. The ellipsometer of claim 1, wherein, The base is equipped with a sample adjustment platform, which is located on the plane of symmetry between the first laser fixing plate and the second laser fixing plate.

7. The ellipsometer of claim 6, wherein, The first laser mounting plate mounts the laser, and the second laser mounting plate mounts the receiver.

8. The ellipsometer of claim 7, wherein, The sample adjustment platform is a height-adjustable lifting platform.

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