Exposure machine lifting workbench capable of adapting to materials with different thicknesses

Abstract

The utility model relates to the technical field of exposure machines, and discloses an exposure machine lifting workbench capable of adapting to materials with different thicknesses, which comprises a bottom plate, the top of the bottom plate is rotatably connected with a hollow column, the top of the hollow column is provided with a workbench, the top of the workbench is provided with a fixing component, the top of the bottom plate is provided with a rotating component, and the rotating component is provided with a lifting component. An electric push rod is fixedly connected to the bottom of the inner wall of the hollow column, a supporting assembly is arranged on the surface of the hollow column, the fixing assembly comprises a negative pressure pump, one end of the negative pressure pump communicates with a connecting pipe, the inner wall of the connecting pipe communicates with a flow dividing pipe, and the end, away from the connecting pipe, of the flow dividing pipe communicates with a suction cup. And an electromagnetic valve is fixedly mounted on the inner wall of the flow dividing pipe. According to the utility model, the negative pressure pump is started, negative pressure is generated in the connecting pipe and the shunt pipe when the negative pressure pump runs, and an exposure material is adsorbed and fixed through the sucking disc, so that the material is prevented from moving in the exposure process, and the exposure quality is ensured.

Description

Technical Field

[0001] This utility model relates to the field of exposure machine technology, and in particular to an exposure machine lifting worktable that can adapt to materials of different thicknesses. Background Technology

[0002] An exposure machine is a device used to transfer images or patterns onto the surface of a specific material. It is widely used in semiconductor manufacturing, printed circuit board (PCB) manufacturing, flat panel display manufacturing, and other fields. Its working principle involves irradiating photoresist and other photosensitive materials with ultraviolet (UV) light or other specific wavelengths, causing a chemical reaction that transfers the pattern.

[0003] The announcement number CN219872111U discloses a lifting worktable structure for an exposure machine. The cooperation between the U-shaped rod and the lifting block, as well as the inner rod and the U-shaped frame, facilitates the support and limitation of the worktable. The cooperation between the rotating disk and the double-acting screw, as well as the sliding sleeve and the roller facilitates the movement of the two sliding sleeves. The cooperation between the drive rod and the mounting plate facilitates the lifting and lowering of the worktable, thereby improving the exposure effect of the exposed material on the worktable.

[0004] The exposure machine uses a lifting worktable structure to facilitate the lifting and lowering of the worktable, which improves the exposure effect of the exposed material on the worktable. However, the exposed material is not fixed during use, and it may shift during the exposure process, affecting the exposure accuracy and thus reducing the exposure quality. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides a lifting worktable for an exposure machine that can adapt to materials of different thicknesses.

[0006] This utility model is achieved by the following technical solution: a lifting worktable for an exposure machine that can adapt to materials of different thicknesses, including a base plate, a hollow column rotatably connected to the top of the base plate, a worktable set on the top of the hollow column, a fixing component set on the top of the worktable, a rotating component on the top of the base plate, an electric push rod fixedly connected to the bottom of the inner wall of the hollow column, and a support component set on the surface of the hollow column.

[0007] The fixed assembly includes a negative pressure pump, one end of which is connected to a connecting pipe, the inner wall of which is connected to a diversion pipe, the end of which is away from the connecting pipe is connected to a suction cup, and a solenoid valve is fixedly installed on the inner wall of the diversion pipe.

[0008] The above technical solution utilizes a negative pressure pump. When the negative pressure pump is activated, it creates negative pressure inside the connecting pipe and the distribution pipe. The suction cup then adsorbs and fixes the exposure material, preventing material movement during the exposure process and ensuring exposure quality.

[0009] As a further improvement to the above solution, the top of the negative pressure pump is fixedly connected to the top of the workbench, and the bottom of the workbench is fixedly connected to the top of the electric push rod.

[0010] The above technical solution uses an electric push rod to move the worktable upward, which allows for flexible adjustment according to needs and is simple and quick to operate.

[0011] As a further improvement to the above solution, the bottom of the suction cup is fixedly connected to the top of the worktable, and two of each of the diversion pipe, suction cup, and solenoid valve are provided.

[0012] The above technical solution allows the solenoid valve to control the closure of the two diversion pipes and the negative pressure adsorption capacity of the two suction cups.

[0013] As a further improvement to the above solution, the rotating assembly includes a motor, the output end of which is fixedly connected to a drive gear, and the inner wall of the drive gear is meshed with a driven gear.

[0014] The above technical solution uses a motor to drive the drive gear to rotate, which in turn drives the driven gear to rotate, which in turn drives the hollow column to rotate, which in turn drives the worktable to rotate, causing another suction cup to rotate to the bottom of the exposure device, thereby achieving continuous exposure and improving exposure efficiency.

[0015] As a further improvement to the above solution, the top of the motor is fixedly connected to the top of the base plate, and the inner wall of the driven gear is fixedly connected to the surface of the hollow column.

[0016] The above technical solution uses a large driven gear and a small driving gear to achieve the effect of speed reduction of the hollow column and avoid excessive rotation speed.

[0017] As a further improvement to the above solution, the support assembly includes a support base, a support plate is hinged to the inner wall of the support base, and a hinged seat is hinged to the end of the support plate away from the support base.

[0018] With the above technical solution, during the process of the worktable rising or falling, the support plate will rotate on the inner wall of the support seat and the hinge seat. The three support plates improve the support stability of the worktable and prevent tilting during use.

[0019] As a further improvement to the above solution, the inner wall of the support base is fixedly connected to the surface of the hollow column, the support base is located at the upper end of the driven gear, the top of the hinge base is fixedly connected to the bottom of the worktable, and three support plates and three hinge bases are provided.

[0020] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0021] This invention uses a fixing component, specifically a negative pressure pump. When the negative pressure pump is running, it creates negative pressure inside the connecting pipe and the distribution pipe, which in turn uses a suction cup to adhere and fix the exposure material, preventing the material from moving during the exposure process and ensuring the exposure quality.

[0022] This invention features a rotating assembly. Specifically, after one material has been exposed, a motor drives a drive gear to rotate, which in turn drives a driven gear to rotate, causing the hollow column to rotate and the worktable to rotate. This causes another suction cup to rotate to the bottom of the exposure device, thereby achieving continuous exposure and improving exposure efficiency.

[0023] This utility model incorporates an electric push rod and a support assembly. Specifically, the electric push rod moves the worktable upward, allowing for adjustment of the worktable's height. This facilitates flexible adjustments based on requirements. Furthermore, during the upward movement of the worktable, the support plates rotate within the inner walls of the support base and the hinge base. These three support plates enhance the stability of the worktable's support. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0025] Figure 2 This is a schematic cross-sectional view of the present invention.

[0026] Figure 3 This is a schematic diagram of the fixing component structure of this utility model;

[0027] Figure 4 This is a schematic diagram of the hollow column connection structure of this utility model;

[0028] Figure 5 This is a side view of the structure of this utility model.

[0029] Explanation of key symbols:

[0030] 1. Base plate; 2. Hollow column; 3. Workbench; 4. Fixing assembly; 401. Negative pressure pump; 402. Connecting pipe; 403. Diverter pipe; 404. Suction cup; 405. Solenoid valve; 5. Rotating assembly; 501. Motor; 502. Drive gear; 503. Driven gear; 6. Electric push rod; 7. Support assembly; 701. Support base; 702. Support plate; 703. Hinge base. Detailed Implementation

[0031] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0032] Example:

[0033] Please combine Figure 1-5 This embodiment provides a lifting worktable for an exposure machine that can adapt to materials of different thicknesses. It includes a base plate 1, a hollow column 2 rotatably connected to the top of the base plate 1, a worktable 3 set on the top of the hollow column 2, a fixing component 4 set on the top of the worktable 3, a rotating component 5 on the top of the base plate 1, an electric push rod 6 fixedly connected to the bottom of the inner wall of the hollow column 2, and a support component 7 set on the surface of the hollow column 2.

[0034] The fixing component 4 includes a negative pressure pump 401. One end of the negative pressure pump 401 is connected to a connecting pipe 402. The inner wall of the connecting pipe 402 is connected to a diversion pipe 403. The end of the diversion pipe 403 away from the connecting pipe 402 is connected to a suction cup 404. A solenoid valve 405 is fixedly installed on the inner wall of the diversion pipe 403. The material to be exposed is placed on the suction cup 404, and then the negative pressure pump 401 is started. When the negative pressure pump 401 is running, it generates a negative pressure inside the connecting pipe 402 and the diversion pipe 403. The suction cup 404 adsorbs and fixes the exposed material, preventing the material from moving during the exposure process and ensuring the exposure quality. Since there are two suction cups 404, two exposed materials can be fixed at the same time.

[0035] The top of the negative pressure pump 401 is fixedly connected to the top of the workbench 3, and the bottom of the workbench 3 is fixedly connected to the top of the electric push rod 6. The height of the workbench 3 can be adjusted by pushing the workbench 3 upward through the electric push rod 6, which is convenient for flexible adjustment according to needs.

[0036] The bottom of the suction cup 404 is fixedly connected to the top of the worktable 3, and there are two of each of the diversion pipe 403, suction cup 404 and solenoid valve 405.

[0037] The rotating assembly 5 includes a motor 501. The output end of the motor 501 is fixedly connected to a drive gear 502. The inner wall of the drive gear 502 is meshed with a driven gear 503. The motor 501 drives the drive gear 502 to rotate, which in turn drives the driven gear 503 to rotate, thereby driving the hollow column 2 to rotate and the worktable 3 to rotate. This causes another suction cup 404 to rotate to the bottom of the exposure device, thus achieving continuous exposure and improving exposure efficiency.

[0038] The top of the motor 501 is fixedly connected to the top of the base plate 1, and the inner wall of the driven gear 503 is fixedly connected to the surface of the hollow column 2.

[0039] The support assembly 7 includes a support base 701, a support plate 702 is hinged to the inner wall of the support base 701, and a hinge seat 703 is hinged to the end of the support plate 702 away from the support base 701. During the process of the worktable 3 rising, the support plate 702 will rotate on the inner wall of the support base 701 and the hinge seat 703. The support stability of the worktable 3 is improved by the three support plates 702.

[0040] The inner wall of the support base 701 is fixedly connected to the surface of the hollow column 2. The support base 701 is located at the upper end of the driven gear 503. The top of the hinge base 703 is fixedly connected to the bottom of the worktable 3. There are three support plates 702 and three hinge bases 703.

[0041] The implementation principle of the lifting worktable of the exposure machine that can adapt to materials of different thicknesses in this embodiment is as follows: During use, the material to be exposed is placed on the suction cup 404, and then the negative pressure pump 401 is started. When the negative pressure pump 401 runs, it generates negative pressure inside the connecting pipe 402 and the diverter pipe 403, which adsorbs and fixes the material to be exposed through the suction cup 404, preventing material movement during exposure and ensuring exposure quality. Since there are two suction cups 404, two materials can be fixed simultaneously. After one material has been exposed, the motor 501 drives the active... Gear 502 rotates, causing driven gear 503 to rotate, which in turn drives hollow column 2 to rotate, which in turn drives worktable 3 to rotate. This causes another suction cup 404 to rotate to the bottom of the exposure device, thereby achieving continuous exposure and improving exposure efficiency. The height of worktable 3 can be adjusted by pushing worktable 3 upward with electric push rod 6, which can be flexibly adjusted according to needs. During the upward movement of worktable 3, support plate 702 rotates on the inner wall of support base 701 and hinge base 703. The three support plates 702 improve the support stability of worktable 3.

[0042] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. An exposure machine lifting stage capable of adapting to materials of different thicknesses, characterized in that, Includes a base plate (1), a hollow column (2) is rotatably connected to the top of the base plate (1), a worktable (3) is provided on the top of the hollow column (2), a fixing component (4) is provided on the top of the worktable (3), a rotating component (5) is provided on the top of the base plate (1), an electric push rod (6) is fixedly connected to the bottom of the inner wall of the hollow column (2), and a support component (7) is provided on the surface of the hollow column (2). The fixing component (4) includes a negative pressure pump (401), one end of which is connected to a connecting pipe (402), the inner wall of which is connected to a diversion pipe (403), the end of which is away from the connecting pipe (402) is connected to a suction cup (404), and a solenoid valve (405) is fixedly installed on the inner wall of the diversion pipe (403).

2. The exposure apparatus stage capable of accommodating materials of different thicknesses according to claim 1, wherein: The top of the negative pressure pump (401) is fixedly connected to the top of the workbench (3), and the bottom of the workbench (3) is fixedly connected to the top of the electric push rod (6).

3. The exposure apparatus stage capable of accommodating materials of different thicknesses according to claim 1, wherein: The bottom of the suction cup (404) is fixedly connected to the top of the workbench (3), and there are two of each of the diversion pipe (403), suction cup (404) and solenoid valve (405).

4. The exposure apparatus stage capable of accommodating materials of different thicknesses according to claim 1, wherein: The rotating assembly (5) includes a motor (501), the output end of which is fixedly connected to a drive gear (502), and the inner wall of the drive gear (502) is meshed with a driven gear (503).

5. The exposure apparatus stage capable of accommodating materials of different thicknesses according to claim 4, wherein: The top of the motor (501) is fixedly connected to the top of the base plate (1), and the inner wall of the driven gear (503) is fixedly connected to the surface of the hollow column (2).

6. The exposure apparatus stage capable of accommodating materials of different thicknesses according to claim 1, wherein: The support assembly (7) includes a support base (701), a support plate (702) is hinged to the inner wall of the support base (701), and a hinged seat (703) is hinged to the end of the support plate (702) away from the support base (701).

7. The exposure apparatus stage capable of accommodating materials of different thicknesses according to claim 6, wherein: The inner wall of the support base (701) is fixedly connected to the surface of the hollow column (2). The support base (701) is located at the upper end of the driven gear (503). The top of the hinge base (703) is fixedly connected to the bottom of the worktable (3). There are three support plates (702) and three hinge bases (703).

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