Positioning device and photovoltaic material processing equipment

Abstract

The utility model discloses a positioning device and photovoltaic material processing equipment. The positioning device comprises a base, a conveying device, a first limiting assembly and a first positioning assembly. The base comprises a positioning space, the conveying device is arranged on the base in the conveying direction of the boat body, part of the conveying device extends into the positioning space, and the first limiting assembly and the first positioning assembly are oppositely arranged on the two sides of the positioning space. After the graphite boat is conveyed into the positioning space by the conveying device, the boat support in the positioning space is positioned by the first positioning assembly and the first limiting assembly together, so that the deviation of each part of the graphite boat, which is used for bearing the flaky material, is reduced.

Description

Technical Field

[0001] This application relates to the field of photovoltaic manufacturing equipment, and in particular to a positioning device and photovoltaic material processing equipment. Background Technology

[0002] In the production of photovoltaic materials, graphite boats are used to carry silicon wafers, and boat supports are used to support the graphite boats, allowing the boat supports to move the graphite boats and silicon wafers as a whole. Due to the large size of the graphite boats, it is difficult to ensure positioning accuracy when clamping them at the wafer insertion / removal station, resulting in differences in accuracy between the front and rear sections of the graphite boat. Existing positioning devices often use multiple clamping elements to simultaneously position the front and rear sections of the graphite boat. However, because the clamping references and the accuracy of the clamping power mechanisms differ among these elements, the accuracy of the silicon wafers carried by different parts of the graphite boat along its length is inconsistent. This leads to positional deviations of the silicon wafers carried in different sections, hindering the robotic arm's ability to load and unload silicon wafers from the graphite boat. Utility Model Content

[0003] In view of this, this application provides a positioning device for positioning a graphite boat, thereby solving the problem that deviations exist in the various parts of the graphite boat used to support sheet materials, which is not conducive to the loading and unloading of the graphite boat by a robotic arm.

[0004] This application provides a positioning device, including a base, a conveying device, a second limiting component, and a second positioning component. The base includes a positioning space for accommodating a portion of a graphite boat and a portion of a boat support. The conveying device is disposed on the base along the conveying direction of the boat body, and a portion of the conveying device extends into the positioning space, configured to drive the portion of the boat support and the portion of the boat body to move into the positioning space. The second limiting component is disposed on the base, located on one side of the conveying device. The second positioning component is disposed on the base, and the second positioning component and the second limiting component are disposed on both sides of the conveying device, wherein the second positioning component can push the graphite boat in the positioning space toward the second limiting component, such that the second positioning component and the second limiting component respectively abut against the side walls of the boat body in the positioning space.

[0005] In the above embodiments, after the conveying device transports the graphite boat into the positioning space, the graphite boat is positioned by the second positioning component and the second limiting component, thereby reducing the deviation of each part of the graphite boat used to support the sheet material.

[0006] In some embodiments, the positioning device further includes a first limiting component and a first positioning component. The first limiting component is disposed on the base and located on one side of the conveying device. The first positioning component is disposed on the base, and the first positioning component and the first limiting component are disposed opposite to each other on both sides of the conveying device. The first positioning component is configured to push the boat support in the positioning space toward the first limiting component, such that the first limiting component and the first positioning component abut against both sides of the boat support.

[0007] In some embodiments, the first limiting component and the second positioning component are located on the same side of the conveying device, and the first positioning component and the second limiting component are also located on the same side of the conveying device. Both the first limiting component and the first positioning component are close to the base relative to the second limiting component and the second positioning component.

[0008] In some embodiments, the second positioning component includes a second positioning drive unit and a push plate. The second positioning drive unit is connected to the base and the push plate, and drives the graphite boat to move relative to the base via the push plate. The push plate is configured to abut against the side wall of the graphite boat in the positioning space.

[0009] In some embodiments, the second positioning component further includes a second guide rod, the movement of which is slidably connected to the base. The other end is fixedly connected to a push plate. One or more push blocks are connected to the surface of the push plate facing the positioning space and are spaced apart along the conveying direction of the boat; the boat includes two or more support units configured to support silicon wafers, and one push block can abut against the sidewall of one of the support units located within the positioning space.

[0010] In some embodiments, the second limiting component includes one or more top blocks, all of which are spaced apart along the transport direction of the boat; the boat includes two or more carrier units, which are configured to carry silicon wafers, and one top block can abut against the sidewall of one of the carrier units located in the positioning space of the boat.

[0011] In some embodiments, the first limiting component and / or the second limiting component each include a limiting plate and a limiting drive unit, wherein the limiting drive unit is connected to the base and the limiting plate. The limiting plate of the first limiting component is configured to contact the boat support and restrict its movement, and the limiting drive unit of the first limiting component is configured to drive the corresponding limiting plate to move away from or towards the first positioning component. The limiting plate of the second limiting component is configured to contact the graphite boat and restrict its movement, and the limiting drive unit of the second limiting component is configured to drive the corresponding limiting plate to move away from or towards the second positioning component.

[0012] In some embodiments, the base includes: a base plate, a bracket, two mounting brackets, and two or more fasteners. The two mounting brackets are mounted to the base plate and are disposed opposite each other on both sides of the conveying device, such that the base plate and the two mounting brackets form a positioning space; a second limiting component and a second positioning component are respectively disposed on the two mounting brackets. The bracket is mounted to the base plate; the conveying device is mounted above the bracket, and a first limiting component and a first positioning component are respectively mounted on both sides of the bracket. The fasteners are mounted to the base plate and are disposed on one or both sides of each mounting bracket along the direction in which the second positioning component and the second limiting component are disposed opposite each other; the fasteners are connected to the mounting brackets.

[0013] In some embodiments, the positioning device further includes a third positioning component disposed on the base and located below the conveying device. A portion of the third positioning component can pass through the conveying device and abut against or extend into the bottom of the boat support to restrict movement between the boat support and the boat body. The third positioning component includes a third positioning drive unit and a stop member. The third positioning drive unit is connected to the base and the stop member respectively. The third positioning drive unit can drive the stop member to rise and insert the stop member into the boat support. The stop member is used to restrict movement of the boat support.

[0014] In some embodiments, the conveying device includes: a conveyor frame, a first transmission assembly, and a second transmission assembly. The conveyor frame is mounted to a base, with a portion of the conveyor frame extending into a positioning space. The first transmission assembly is mounted to the conveyor frame and configured to convey a boat support and a boat body; the first transmission assembly includes a first belt, a portion of which is located within the positioning space. The second transmission assembly is mounted to the conveyor frame and configured to convey the boat support and the boat body; the second transmission assembly includes a second belt, located outside the positioning space and close to the end of the first belt extending out of the positioning space. The width of the first belt is greater than the width of the second belt.

[0015] This application also provides a photovoltaic material processing apparatus, including a processing device, a loading and unloading device, and a positioning device as described above. The loading and unloading device is disposed on one side of the positioning device and is configured to acquire the processed sheet material carried by a graphite boat in the positioning space, or the loading and unloading device is configured to release the sheet material to be processed into the graphite boat in the positioning space. The processing device is disposed on one side of the positioning device and is configured to process the sheet material. Attached Figure Description

[0016] Figure 1 This is a partial structural diagram of the boat support and graphite boat.

[0017] Figure 2 This is a schematic diagram of a photovoltaic material processing equipment provided in an embodiment of this application.

[0018] Figure 3 for Figure 2A schematic diagram of the working state of the positioning device.

[0019] Figure 4 for Figure 3 A schematic diagram of the positioning device after being cut along section line Ⅲ-Ⅲ.

[0020] Figure 5 for Figure 3 A partial schematic diagram from another perspective.

[0021] Figure 6 for Figure 3 An enlarged schematic diagram of point A.

[0022] Explanation of main component symbols

[0023] 100. Photovoltaic material processing equipment; 11. Conveying device; 111. Conveying frame; 112. First transmission assembly; 113. Second transmission assembly; 12. Loading and unloading device; 13. Positioning device; 131. Base; 1311. Top surface; 1312. Positioning space; 1313. Bracket; 1314. Fixing component; 132. First limiting assembly; 1321. Guide wheel; 133. First positioning assembly; 1331. First positioning drive unit; 1332. Working head; 134. Second limiting assembly; 1341. Limiting drive unit; 1342. Limiting plate ; 1343, Top block; 1344, First guide rod; 1345, Hook; 135, Second positioning assembly; 1351, Second positioning drive unit; 1352, Push plate; 1353, Push block; 1354, Second guide rod; 136, Third positioning assembly; 1361, Third positioning drive unit; 1362, Stop; 137, Mounting bracket; 1371, Mounting plate; 14, Processing device; 15, Boat docking channel; 20, Graphite boat; 21, Bearing unit; 22, Rod; 30, Boat support; X, First direction; Y, Second direction; Z, Third direction. Detailed Implementation

[0024] The technical solutions of the embodiments of this application will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0025] It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or may also have an intervening component. When a component is considered to be "placed" on another component, it can be directly placed on the other component or may also have an intervening component. The terms "top," "above," "below," "front," "back," and similar expressions used in this article are for illustrative purposes only.

[0026] The terms “first”, “second”, etc., are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implying the quantity, specific order, or primary and secondary relationship of the indicated technical features.

[0027] The terms "one or more" and "two or more" indicate quantity, with "and more" including the original number "one" and "two".

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0029] See Figure 1 A typical graphite boat 20 has a boat support 30 at its bottom for supporting the graphite boat 20. The graphite boat 20 has multiple support units 21 or receiving slots (not shown) distributed sequentially along the first direction X for accommodating sheet materials. However, due to the large size of the graphite boat 20, there is a situation where the accuracy of each support unit 21 is inconsistent, resulting in deviations between the positions of the silicon wafers supported by each support unit 21. Therefore, this application provides a positioning device 13 to position the graphite boat 20.

[0030] Some embodiments of this application will now be described with reference to the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0031] In this embodiment, refer to Figure 2 A photovoltaic material processing equipment 100 includes a processing device 14, a boat docking channel 15, a loading and unloading device 12, and a positioning device 13. The processing device 14 is disposed on one side of the positioning device 13 in a first direction X, and the boat docking channel 15 is disposed between the positioning device 13 and the processing device 14.

[0032] When the boat carrier 30 and the graphite boat 20 pass the positioning device 13, the positioning device 13 positions one or more of the support units 21 of the graphite boat 20, so that the loading and unloading device 12 can release the sheet material to be processed into the positioned support unit 21. After the loading and unloading device 12 finishes loading the graphite boat 20, the graphite boat 20 is transferred to the processing device 14 through the boat docking channel 15, where the processing device 14 processes the sheet material. After the sheet material is processed, the graphite boat 20 is transferred back to the positioning device 13 through the boat docking channel 15. After the positioning device 13 positions the graphite boat 20, the loading and unloading device 12 removes the sheet material from the positioned support unit 21, thereby achieving the function of accurately loading and unloading the graphite boat 20.

[0033] In some embodiments, the boat docking channel 15 is provided with transfer equipment such as a transplanting conveyor belt or a boat pushing device that can transfer the graphite boat 20 back and forth.

[0034] In some embodiments, the positioning device 13 includes a conveying device 11 and a positioning space 1312 for accommodating a portion of the graphite boat 20 and a portion of the boat support 30. The positioning space 1312 is arranged parallel to the conveying direction of the graphite boat 20. Along the conveying direction of the graphite boat 20, a portion of the conveying device 11 passes through the positioning space 1312, conveying the boat support 30 and simultaneously conveying the graphite boat 20 through the positioning space 1312, so as to sequentially position one or more of the carrying units 21 of the graphite boat 20 within the positioning space 1312.

[0035] For example, the conveying device 11 passes through the positioning space 1312 along the first direction X, and the loading / unloading device 12 is disposed on one side of the conveying device 11. The conveying device 11 synchronously conveys the boat carrier 30 and the graphite boat 20 on the boat carrier 30 along the first direction X. When the boat carrier 30 and the graphite boat 20 pass through the positioning space 1312, the positioning device 13 positions one or more of the carrying units 21 of the graphite boat 20 so that the loading / unloading device 12 can release the sheet material to be processed into the positioned carrying unit 21.

[0036] The conveying device 11 continues to convey the boat carrier 30 and the graphite boat 20. The positioning device 13 positions the different carrying units 21 of the graphite boat 20, which helps to improve the accuracy of the loading and unloading device 12 in releasing sheet materials to different carrying units 21 in sequence. This continues until all carrying units 21 of the graphite boat 20 are carrying sheet materials.

[0037] After the sheet material is processed, the boat support 30 and the graphite boat 20 are conveyed from the processing area of ​​the processing device 14 to outside the processing area, and transferred to the conveying device 11 through the boat docking channel 15. When the conveying device 11 carries the graphite boat 20 and the boat support 30 through the positioning space 1312, the positioning device 13 repositions one or more of the carrying units 21 of the boat support 30 and the graphite boat 20 to facilitate the loading and unloading device 12 in obtaining the processed sheet material in the positioned carrying units 21. The conveying device 11 continues to convey the boat support 30 and the graphite boat 20, and the positioning device 13 positions the different carrying units 21 of the graphite boat 20 respectively, which helps to improve the accuracy of the loading and unloading device 12 in obtaining the sheet material on the carrying units 21.

[0038] In some embodiments, the positioning device 13 can also position the boat support 30 located in the positioning space 1312.

[0039] In some embodiments, after the loading and unloading device 12 acquires the processed sheet material, the positioning device 13 remains stationary so that the position of the graphite boat 20 and / or the boat support 30 remains unchanged. The loading and unloading device 12 then releases the sheet material to be processed into the carrying unit 21. This helps to reduce the number of positioning operations performed by the positioning device 13 when the loading and unloading device 12 loads and unloads the graphite boat 20.

[0040] In some embodiments, the photovoltaic material processing equipment 100 has two positioning devices 13, which are spaced apart along the second direction Y. The conveying device 11 of each positioning device 13 conveys a graphite boat 20 along the first direction X. A loading / unloading device 12 is located between the conveying devices 11 of the two positioning devices 13. The loading / unloading device 12 releases the sheet material to be processed into the positioning space 1312 of one positioning device 13 and retrieves the processed sheet material from the positioning space 1312 of the other positioning device 13. Positioning different graphite boats 20 using the two positioning devices 13 helps improve the loading and unloading efficiency of the sheet material. The second direction Y intersects with the first direction X.

[0041] In other embodiments, the number of loading / unloading devices 12 is the same as the number of positioning devices 13, with one loading / unloading device 12 corresponding to one positioning device 13.

[0042] In other embodiments, the photovoltaic material processing equipment 100 has two loading / unloading devices 12 and two positioning devices 13. A conveying device 11 is positioned along the first direction X near the processing area of ​​the processing device 14. The loading / unloading devices 12 and the positioning devices 13 are located on one side of the processing device 14 along the first direction X. The conveying device 11 simultaneously conveys multiple boat supports 30 and multiple graphite boats 20, so that when one loading / unloading device 12 releases the sheet material to be processed into the graphite boat 20, the other loading / unloading device 12 can acquire the processed sheet material from another graphite boat 20, thus improving the loading and unloading efficiency of the sheet material. Alternatively, the conveying device 11 can pass through the processing area of ​​the processing device 14 along the first direction X and convey the graphite boats 20, allowing the graphite boats 20 to be transferred from outside the processing device 14 to inside the processing device 14, or from inside the processing device 14 to outside the processing device 14, without the need for a boat docking channel 15.

[0043] In some embodiments, the graphite boat 20 and the boat support 30 are part of the photovoltaic material processing equipment 100.

[0044] In some embodiments, see Figure 3 and Figure 4The positioning device 13 further includes a base 131 and a first limiting component 132, a first positioning component 133, a second limiting component 134, and a second positioning component 135, respectively disposed on the top surface 1311 of the base 131. The first limiting component 132 and the first positioning component 133 are disposed opposite each other along the second direction Y, and the second limiting component 134 and the second positioning component 135 are disposed opposite each other along the second direction Y. The positioning space 1312 is located on one side of the base 131 along the third direction Z, and the positioning space 1312 is located between the first limiting component 132 and the first positioning component 133 and between the second limiting component 134 and the second positioning component 135. A portion of the conveying device 11 is located within the positioning space 1312, and the conveying device 11 is connected to the base 131. The third direction Z is parallel to the direction of gravity, and the second direction Y, the first direction X, and the third direction Z are perpendicular to each other.

[0045] When the conveying device 11 conveys the boat support 30 and the graphite boat 20 through the positioning space 1312, and at least one bearing unit 21 of the graphite boat 20 is located in the positioning space 1312, the first positioning component 133 moves toward the first limiting component 132 and corresponds to the graphite boat 20 acted upon by the bearing unit 21 in the positioning space 1312, so as to push the boat support 30 in the positioning space 1312 relative to the graphite boat 20 toward the first limiting component 132 until the boat support 30 contacts the first limiting component 132, so that the first positioning component 133 and the first limiting component 132 jointly position the boat support 30. The second positioning component 135 moves towards the second limiting component 134, corresponding to the graphite boat 20 acted upon by the carrying unit 21 within the positioning space 1312. This pushes the graphite boat 20 within the positioning space 1312 relative to the boat support 30 towards the second limiting component 134 until the graphite boat 20 and the second limiting component 134 come into contact with the graphite boat 20, thereby achieving the effect of positioning the boat support 30 and the graphite boat 20 respectively. The conveying device 11 drives the graphite boat 20 and the boat support 30 to move, so that the second positioning component 135 and the second limiting component 134 act upon the graphite boat 20 corresponding to different carrying units 21. This helps all the carrying units 21 of the graphite boat 20 to be in the designated position relative to the boat support 30, thereby eliminating the deviation of different carrying units 21 of the graphite boat 20. This improves the accuracy of the loading and unloading device 12 in acquiring or releasing sheet materials, reducing the risk of collisions and damage to sheet materials caused by loading and unloading deviations.

[0046] In some embodiments, the first positioning component 133 and the second limiting component 134 are located on the same side of the base 131 along the second direction Y. That is, the first positioning component 133 and the second positioning component 135 are arranged opposite to each other along the second direction Y, so that when fixing the boat support 30 and the graphite boat 20, the boat support 30 and the graphite boat 20 can move in opposite directions respectively. Exemplarily, the side of the graphite boat 20 facing the second limiting component 134 is the reference plane. The first positioning component 133 first pushes the boat support 30 towards the first limiting component 132 for fixing, and simultaneously drives the graphite boat 20 closer to the second positioning component 135, so that the reference plane of the graphite boat 20 is away from the second limiting component 134, thereby increasing the gap between the second limiting component 134 and the graphite boat 20, thereby driving the graphite boat 20 to move closer to the second limiting component 134 relative to the boat support 30. This gap provides a larger adjustment space for the graphite boat 20, which helps to improve the accuracy of fixing the graphite boat 20.

[0047] In other embodiments, the first positioning component 133 and the second positioning component 135 are located on the same side of the base 131 along the second direction Y.

[0048] In some embodiments, a bracket 1313 for mounting the conveying device 11 is provided on the base 131.

[0049] In some embodiments, the base 131 is a plate-shaped member or a block-shaped member.

[0050] In other embodiments, the base 131 may also be the surface on which the processing equipment is placed, such as the ground, platform, or top of a rack.

[0051] In some embodiments, see Figure 4 The positioning device 13 also includes a third positioning component 136, which is disposed on the base 131 and located below the conveying device 11. When the conveying device 11 conveys the boat support 30 and the graphite boat 20 through the positioning space 1312, and the carrying unit 21 of the graphite boat 20 is aligned with the second positioning component 135 and the second limiting component 134, the working end of the third positioning component 136 rises through the conveying device 11 and extends into the boat support 30 to restrict the boat support 30 from moving along the first direction X, thereby simultaneously restricting the movement of the graphite boat 20. This helps to improve the accuracy of the second positioning component 135 and the second limiting component 134 in positioning the graphite boat 20, so that the loading and unloading device 12 can obtain the sheet material in the carrying unit 21 of the positioned graphite boat 20, or the loading and unloading device 12 can release the sheet material into the carrying unit 21 of the positioned graphite boat 20.

[0052] After the loading and unloading device 12 acquires or releases the sheet material, the third positioning component 136 moves away from the boat support 30, and the conveying device 11 continues to convey the boat support 30 and the graphite boat 20 along the first direction X. When the next carrying unit 21 is aligned with the second positioning component 135 and the second limiting component 134, the third positioning component 136 works again and restricts the movement of the boat support 30 and the graphite boat 20, so that the second positioning component 135 and the second limiting component 134 can position different carrying units 21 in sequence.

[0053] In some embodiments, see Figure 4 The third positioning component 136 includes a third positioning drive unit 1361 and a stop member 1362. The third positioning drive unit 1361 is connected to the base 131, and the stop member 1362 is connected to the telescopic end of the third positioning drive unit 1361. When the third positioning drive unit 1361 drives the stop member 1362 to rise, the stop member 1362 is inserted into the boat support 30 and restricts the movement of the boat support 30.

[0054] In some embodiments, the number of third positioning drive units 1361 and stop members 1362 are two or more, one third positioning drive unit 1361 is connected to one stop member 1362, and all third positioning drive units 1361 are distributed along the second direction Y.

[0055] In some embodiments, the third positioning drive unit 1361 is mounted on the bracket 1313.

[0056] In some embodiments, the third positioning drive unit 1361 is a power unit with output reciprocating force, such as a cylinder, hydraulic cylinder, lead screw module, or electric actuator.

[0057] In some embodiments, see Figure 3 The first limiting component 132, the first positioning component 133, the second limiting component 134, and the second positioning component 135 are approximately located at the same position in the first direction X, so that the positioning device 13 can simultaneously act on the same position of the boat support 30 and the graphite boat 20 in the first direction X. Compared with the positioning device 13 acting on different positions of the boat support 30 and the graphite boat 20 in the first direction X, it helps to reduce the positional deviation between the boat support 30 and the graphite boat 20.

[0058] In some embodiments, see Figure 4 The first limiting component 132 and the first positioning component 133 are located below the second limiting component 134 and the second positioning component 135 to avoid interference between the first limiting component 132 and the first positioning component 133 and the graphite boat 20, and interference between the second limiting component 134 and the second positioning component 135 and the boat support 30, so as to improve the accuracy of the positioning device 13 acting on the boat support 30 and the graphite boat 20 respectively.

[0059] In some embodiments, see Figure 3 and Figure 4 The base 131 also includes two mounting brackets 137. The mounting brackets 137 are fixedly disposed on the top surface 1311 of the base 131 along the second direction Y. The bracket 1313 is located between the two mounting brackets 137, so that the base 131 and the two mounting brackets 137 form a positioning space 1312. The second positioning component 135 and / or the first limiting component 132 are disposed on one of the mounting brackets 137, and the first positioning component 133 and / or the second limiting component 134 are disposed on the other mounting bracket 137.

[0060] In some embodiments, see Figure 3 and Figure 4 The base 131 also includes a fixing member 1314, which is fixedly disposed on one or both sides of each mounting bracket 137 along the second direction Y. The fixing member 1314 is threadedly connected to the corresponding mounting bracket 137 so that the fixing member 1314 fixes the mounting bracket 137 along the second direction Y. This reduces the risk of the mounting bracket 137 moving along the second direction Y when the first positioning component 133 and the second positioning component 135 are working, and helps to improve the stability of the first positioning component 133 acting on the boat support 30 and the stability of the second positioning component 135 acting on the graphite boat 20.

[0061] In some embodiments, see Figure 4 The first positioning component 133 includes a first positioning drive unit 1331 and a working head 1332. The first positioning drive unit 1331 is connected to the side of the support 1313 away from the conveying device 11 along the second direction Y. The working head 1332 is connected to the first positioning drive unit 1331. The first positioning drive unit 1331 drives the working head 1332 to extend and retract, so that the working head 1332 contacts the boat support 30 in the positioning space 1312, and pushes the boat support 30 closer to the first limiting component 132 along the second direction Y, until the boat support 30 contacts the first limiting component 132. Using a smaller working head 1332 helps reduce the risk of interference between the first positioning component 133 and the second positioning component 135 or the graphite boat 20.

[0062] In other embodiments, the first positioning drive unit 1331 is connected to the mounting bracket 137.

[0063] In some embodiments, the first positioning drive unit 1331 is an electric actuator, a hydraulic cylinder, or a pneumatic cylinder.

[0064] In some embodiments, see Figure 3 and Figure 4The first limiting component 132 consists of multiple guide wheels 1321 disposed on one side of the bracket 1313. All guide wheels 1321 are distributed sequentially along the first direction X. The guide wheels 1321 and the working head 1332 are located on both sides of the conveying device 11 along the second direction Y. This allows the guide wheels 1321 to jointly position the boat support 30 with the working head 1332, while also enabling the guide wheels 1321 to move and guide the boat support 30, thereby reducing the resistance generated by the first limiting component 132 on the moving boat support 30.

[0065] In some embodiments, the guide wheels 1321 may also be distributed on both sides of the base 131 in the second direction Y, and the distance between the guide wheels 1321 in the second direction Y is greater than the width of the boat support 30 in the second direction Y.

[0066] In other embodiments, the first limiting component 132 and the first positioning component 133 have the same structure. The first limiting component 132 and the first positioning component 133 can move closer to or further away from each other so that, during positioning, the first limiting component 132 and the first positioning component 133 can jointly clamp the boat support 30.

[0067] In some embodiments, see Figures 3 to 5 The second positioning component 135 includes a second positioning drive unit 1351 and a push plate 1352. The second positioning drive unit 1351 is connected to the base 131 (or mounting bracket 137), and the second positioning drive unit 1351 is connected to the push plate 1352. When the graphite boat 20 needs to be positioned, the second positioning drive unit 1351 drives the push plate 1352 relative to the base 131 and moves the push plate 1352 closer to the second limiting component 134, so that the push plate 1352 contacts the bearing unit 21 located in the positioning space 1312 and the graphite boat 20, and pushes the graphite boat 20 toward the second limiting component 134 until the graphite boat 20 contacts the second limiting component 134, thereby fixing the graphite boat 20.

[0068] In some embodiments, the second positioning drive unit 1351 includes a lead screw module (not shown), which includes a motor, a reducer, a coupling, and a lead screw. The motor and reducer of the lead screw module are both fixed to the mounting bracket 137, and the coupling and / or lead screw of the lead screw module are rotatably connected to the mounting bracket 137. The motor, reducer, coupling, and lead screw are connected in sequence. The lead screw of the lead screw module is threadedly connected to the push plate 1352, so that the motor drives the coupling to rotate through the reducer, and synchronously drives the lead screw to rotate, so that the lead screw drives the push plate 1352 to reciprocate along the second direction Y through the thread. The reducer increases the output torque of the motor, enabling the push plate 1352 to push the relatively heavy graphite boat 20.

[0069] It is understandable that when the push plate 1352 is connected to the lead screw, the push plate 1352 is also slidably connected to the mounting bracket 137. In addition, the lead screw and the graphite boat 20 are offset. The push plate 1352 may also be provided with threaded components such as threaded sleeves, threaded brackets or nuts that are threadedly connected to the lead screw, so that while the lead screw drives the push plate 1352 to move, the lead screw can be moved away from the graphite boat 20, thereby avoiding interference between the lead screw and the graphite boat 20.

[0070] In other embodiments, the second positioning drive unit 1351 is a hydraulic cylinder.

[0071] In some embodiments, see Figure 4 and Figure 5 The second positioning component 135 also includes a second guide rod 1354, which extends along the second direction Y. One end of the second guide rod 1354 is slidably connected to the mounting bracket 137, and the other end is fixedly connected to the push plate 1352 to improve the stability of the push plate 1352 moving along the second direction Y.

[0072] In some embodiments, the number of second guide rods 1354 is two or more.

[0073] In some embodiments, see Figures 3 to 5 The second limiting component 134 includes a limiting drive unit 1341 and a limiting plate 1342. The limiting drive unit 1341 is fixedly connected to the mounting bracket 137, and the limiting plate 1342 is connected to the limiting drive unit 1341. The push plate 1352 and the limiting plate 1342 are correspondingly arranged along the second direction Y. When it is necessary to position the graphite boat 20, the limiting drive unit 1341 drives the limiting plate 1342 to move closer to the push plate 1352 along the second direction Y, so that the push plate 1352 and the limiting plate 1342 jointly clamp the graphite boat 20. When the conveying device 11 conveys the graphite boat 20, the push plate 1352 and the limiting plate 1342 move away from each other to release the graphite boat 20.

[0074] In some embodiments, the limit drive unit 1341 is a hydraulic cylinder or a pneumatic cylinder.

[0075] In some embodiments, the hydraulic cylinder or pneumatic cylinder of the second limiting component 134 can also act directly on the graphite boat 20.

[0076] In other embodiments, one side of the graphite boat 20 along the second direction Y is a reference surface. The limiting drive unit 1341 of the second limiting component 134 first drives the limiting plate 1342 to move along the second direction Y to a designated position, and then the second positioning component 135 pushes the graphite boat 20 to move, and makes the reference surface of the graphite boat 20 abut against the limiting plate 1342, so that the second limiting component 134 and the second positioning component 135 jointly fix the graphite boat 20.

[0077] In some embodiments, the first limiting component 132 also includes a limiting drive unit 1341 and a limiting plate 1342. The limiting drive unit 1341 is fixedly connected to the mounting bracket 137, and the limiting plate 1342 is connected to the limiting drive unit 1341. The push plate 1352 and the limiting plate 1342 are correspondingly arranged along the second direction Y. When it is necessary to position the boat support 30, the limiting drive unit 1341 drives the limiting plate 1342 to move closer to the push plate 1352 along the second direction Y, so that the push plate 1352 and the limiting plate 1342 jointly clamp the boat support 30. When the conveying device 11 conveys the boat support 30, the push plate 1352 and the limiting plate 1342 move away from each other to release the boat support 30.

[0078] In some embodiments, the limiting drive unit 1341 of the first limiting component 132 has the same structure as the limiting drive unit 1341 of the second limiting component 134. And / or the limiting plate 1342 of the first limiting component 132 has the same structure as the limiting plate 1342 of the second limiting component 134, so that the components between the first limiting component 132 and the second limiting component 134 can be interchanged, thereby improving the applicability of the same part in different components.

[0079] In some embodiments, see Figure 4 and Figure 5 The second limiting component 134 also includes a first guide rod 1344, which extends along the second direction Y. One end of the first guide rod 1344 is slidably connected to the mounting bracket 137, and the other end is fixedly connected to the limiting plate 1342 to improve the stability of the limiting plate 1342 moving along the first direction X.

[0080] In some embodiments, the number of first guide rods 1344 is two or more.

[0081] In some embodiments, see Figures 3 to 5 The limiting plate 1342 is provided with at least one top block 1343, which is located on the side of the limiting plate 1342 facing the positioning space 1312. The push plate 1352 is provided with at least one push block 1353, which is located on the side of the push plate 1352 facing the positioning space 1312. All the top blocks 1343 and all the push blocks 1353 are distributed sequentially along the first direction X, and one push block 1353 is correspondingly set with one top block 1343, so that each top block 1343 and each push block 1353 work together on two adjacent bearing units 21 on the graphite boat 20, thereby helping to improve the efficiency of the positioning device 13 in positioning the graphite boat 20.

[0082] In addition, all the top blocks 1343 are arranged at intervals in sequence, and all the push blocks 1353 are arranged at intervals in sequence, so as to avoid the second positioning component 135 and the second limiting component 134 interfering with the rod 22 (not shown) exposed on the outside of the graphite boat 20 in the second direction Y, thus avoiding the risk that the second positioning component 135 and the second limiting component 134 cannot fully act on the graphite boat 20.

[0083] In some embodiments, see Figure 5 The mounting bracket 137 is also provided with a mounting plate 1371, and the first guide rod 1344 and the second guide rod 1354 are slidably connected to the mounting plate 1371 respectively.

[0084] In some embodiments, see Figure 6 The second limiting component 134 also includes a hook portion 1345. The hook portion 1345 and the limiting plate 1342 are located on both sides of the mounting plate 1371 along the second direction Y. The hook portion 1345 and the limiting plate 1342 are fixedly connected on the side of the second direction Y away from the top block 1343. When the limiting plate 1342 moves close to the push plate 1352, the limiting plate 1342 simultaneously drives the hook portion 1345 and the top block 1343 to move until the hook portion 1345 contacts the surface of the mounting plate 1371, thereby restricting the movement of the limiting plate 1342 by the hook portion 1345, so as to position the limiting plate 1342 and the top block 1343, which helps to improve the stability of the position of the limiting plate 1342 each time it contacts the graphite boat 20.

[0085] In some embodiments, a limiting bolt is threaded onto the hook portion 1345. By rotating the limiting bolt, the distance between the limiting bolt and the mounting plate 1371 in the second direction Y is adjusted, thereby adjusting the moving distance of the hook portion 1345, and further adjusting the moving distance of the limiting plate 1342, so as to achieve the effect of positioning graphite boats 20 of different sizes or different precisions.

[0086] In some embodiments, the conveying device 11 includes a conveyor frame 111, a first transmission assembly 112, and a second transmission assembly 113. The conveyor frame 111 is mounted to the base 131, and a portion of the conveyor frame 111 extends into the positioning space 1312. The first transmission assembly 112 includes a first belt mounted to the conveyor frame 111, a portion of which is located within the positioning space 1312. The second transmission assembly 113 includes a second belt mounted to the conveyor frame 111, the second belt located outside the positioning space 1312 and close to the end of the first belt that extends out of the positioning space 1312. The first belt and the second belt respectively contact the boat support 30, and together the first belt and the second belt convey the boat support 30 and the graphite boat 20 synchronously, thereby realizing the function of sequentially conveying a portion of the graphite boat 20 and a portion of the boat support 30 through the positioning space 1312.

[0087] In some embodiments, the first transmission assembly 112 includes a first belt, and the second transmission assembly 113 includes a second belt, wherein the width of the first belt in the second direction Y is greater than the width of the second belt in the second direction Y. Increasing the width of the first belt helps to increase the contact area between the first belt and the boat support 30, thereby increasing the friction. This reduces the risk of relative movement between the boat support 30 and the first belt when the first belt moves the boat support 30, and helps to improve the accuracy of the conveying device 11 in transporting the graphite boat 20 and the boat support 30 through the positioning space 1312.

[0088] In some embodiments, when the photovoltaic material processing equipment 100 includes a boat docking channel 15, the number of the first belt and the second belt is one each, and the second belt and the boat docking channel 15 are located on both sides of the first belt along the first direction X.

[0089] In some embodiments, when the photovoltaic material processing equipment 100 includes a boat docking channel 15, the number of first belts is one and the number of second belts is two. The two second belts are located on both sides of the first belt along the first direction X. One of the second belts passes through the processing area of ​​the processing device 14 so as to transfer the graphite boat 20 from outside the processing device 14 to inside the processing device 14, or from inside the processing device 14 to outside the processing device 14.

[0090] In other embodiments, the first transmission assembly 112 and the second transmission assembly 113 are respectively conveying structures such as multiple spaced conveying rollers or a magnetohydrodynamic conveying mechanism installed on the conveyor frame 111.

[0091] In some embodiments, the sheet material is a photovoltaic material such as a silicon wafer or a solar cell.

[0092] In some embodiments, the processing apparatus 14 is a CVD (chemical vapor deposition) device.

[0093] In other embodiments, the processing apparatus 14 is a device capable of performing processes such as diffusion or coating.

[0094] In some embodiments, the loading and unloading device 12 is a robot, a robotic arm, or a multi-axis motion module.

[0095] In some embodiments, the loading and unloading device 12 can simultaneously hold multiple sheet materials to release multiple sheet materials to the graphite boat 20 at the same time, or to simultaneously obtain multiple sheet materials from the graphite boat 20.

[0096] Furthermore, those skilled in the art should recognize that the above embodiments are merely illustrative of this application and are not intended to limit this application. Any appropriate changes and variations made to the above embodiments within the substantive scope of this application fall within the scope of this application.

Claims

1. A positioning device for positioning a boat body, the bottom of which is provided with a boat support for carrying, characterized in that, The positioning device includes: A base, the base including positioning space for accommodating the portion of the boat body and the portion of the boat support; A conveying device is disposed on the base along the conveying direction of the boat body, and a portion of the conveying device extends into the positioning space, configured to drive a portion of the boat support and a portion of the boat body to move into the positioning space; The second limiting component is disposed on the base and is located on one side of the conveying device; A second positioning component is disposed on the base, and the second positioning component and the second limiting component are disposed opposite to each other on both sides of the conveying device; The second positioning component can push the boat body in the positioning space toward the second limiting component, so that the second positioning component and the second limiting component respectively abut against the two side walls of the boat body in the positioning space.

2. The positioning device of claim 1, wherein, The positioning device further includes: A first limiting component is disposed on the base and located on one side of the conveying device; A first positioning component is disposed on the base. The first positioning component and the first limiting component are disposed opposite to each other on both sides of the conveying device. The first positioning component is configured to push the boat support in the positioning space toward the first limiting component, so that the first limiting component and the first positioning component abut against both sides of the boat support.

3. The positioning device of claim 2, wherein, The first limiting component and the second positioning component are located on the same side of the conveying device; Both the first limiting component and the first positioning component are close to the base relative to the second limiting component and the second positioning component.

4. The positioning device of claim 1, wherein, The second positioning component includes a second positioning drive unit and a push plate. The second positioning drive unit is connected to the base and the push plate, and drives the boat body to move relative to the base through the push plate. The push plate is configured to abut against the side wall of the hull within the positioning space.

5. The positioning device of claim 4, wherein, The second positioning component also includes: The second guide rod has one end slidably connected to the base and the other end fixedly connected to the push plate; One or more push blocks are connected to the surface of the push plate facing the positioning space and are spaced apart along the conveying direction of the boat body; the boat body includes two or more support units, the support units are configured to support silicon wafers, and one of the push blocks can abut against the side wall of one of the support units located in the positioning space.

6. The positioning device of claim 1, wherein, The second limiting component includes one or more top blocks, which are spaced apart along the conveying direction of the boat body; the boat body includes two or more support units, which are configured to support silicon wafers, and one of the top blocks can abut against the side wall of one of the support units located in the positioning space of the boat body.

7. The positioning device of claim 1, wherein, The second limiting component includes a limiting plate and a limiting drive unit, wherein the limiting drive unit is connected to the base and the limiting plate. The limiting plate of the second limiting component is configured to contact the boat body and restrict the movement of the boat body, and the limiting drive unit of the second limiting component is configured to drive the corresponding limiting plate to move away from or closer to the second positioning component.

8. The positioning device of claim 2, wherein, The base includes: Base plate; Two mounting brackets are mounted to the base plate and are positioned opposite each other on both sides of the conveying device, such that the base plate and the two mounting brackets form the positioning space; the second limiting component and the second positioning component are respectively disposed on the two mounting brackets. A bracket is mounted to the base plate; a conveying device is mounted above the bracket; and the first limiting component and the first positioning component are respectively mounted on both sides of the bracket. Two or more fasteners are installed on the base plate. The fasteners are located on one or both sides of each mounting bracket in the direction in which the second positioning component and the second limiting component are disposed opposite to each other. The fasteners are connected to the mounting bracket.

9. The positioning device of claim 1, wherein, The positioning device further includes a third positioning component, which is disposed on the base and located below the conveying device. A portion of the third positioning component can pass through the conveying device and abut against or extend into the bottom of the boat support to restrict the movement of the boat support and the boat body. The third positioning component includes a third positioning drive unit and a stop member. The third positioning drive unit is connected to the base and the stop member respectively. The third positioning drive unit can drive the stop member to rise and insert the stop member into the boat support. The stop is used to restrict the movement of the boat support.

10. The positioning device of claim 1, wherein, The conveying device includes: A conveyor frame, which is mounted to the base and a portion of the conveyor frame extends into the positioning space; A first transmission assembly is mounted to the conveyor frame and configured to convey the boat support and the boat body; the first transmission assembly includes a first belt, a portion of which is located within the positioning space. A second transmission assembly is mounted to the conveyor frame and configured to convey the boat support and the boat body; the second transmission assembly includes a second belt located outside the positioning space and close to the end of the first belt that extends out of the positioning space. The width of the first belt is greater than the width of the second belt.

11. A photovoltaic material processing apparatus, characterized by, It includes a processing device, a loading and unloading device, and a positioning device as described in any one of claims 1 to 10 above; The loading and unloading device is located on one side of the positioning device and is configured to acquire the processed sheet material carried by the boat in the positioning space, or to place the sheet material to be processed into the boat in the positioning space. The processing device is disposed on one side of the positioning device, and the processing device is configured to process the sheet material.

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