Edge cutting mechanism for CVD diffusion plate machining

Abstract

The utility model provides an edge cutting mechanism for processing a CVD (Chemical Vapor Deposition) diffusion plate. The feeding assembly is arranged at the top of the cabinet body, the feeding assembly comprises a first driving part, a rotating frame and two vacuum suction cups, the rotating frame is fixedly installed at the output end of the first driving part, and the two vacuum suction cups are fixedly installed at the two ends of the top of the rotating frame respectively. According to the edge cutting mechanism for machining the CVD diffusion plate, due to the arrangement of the feeding assembly, the two vacuum suction cups arranged on the feeding assembly and the first driving piece, when the diffusion plate on one vacuum suction cup is cut, a worker can carry out feeding operation on the other vacuum suction cup, feeding and cutting are carried out synchronously, and the machining efficiency is improved. Time waste caused by the fact that next feeding can be carried out after cutting is completed and discharging is carried out in the prior art is avoided, and the production efficiency of edge cutting of the diffusion plate is greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of chemical vapor deposition equipment technology, and in particular to a cutting mechanism for CVD diffusion plate processing. Background Technology

[0002] With the widespread application of CVD (Chemical Vapor Deposition) technology, diffuser plates, as key components, play an indispensable role in altering the light propagation path and achieving optical diffusion effects. In CVD applications, diffuser plates often need to be cut into specific shapes, especially circular ones, making edge-cutting mechanisms crucial equipment in the processing.

[0003] For example, the prior art patent publication number CN 219632847 U describes a CVD diffusion plate processing edge trimming mechanism. This mechanism features a support base on the upper surface of a worktable, an equipment frame on one side of the upper surface of the worktable, a support plate on one side of the equipment frame, a rotating rod rotatably mounted on the support plate, a rotating mechanism at one end of the rotating rod, and mounting plates at both ends of the rotating rod. Each mounting plate has an electro-hydraulic push rod, the telescopic end of which is connected to a fixed plate. A laser cutter is mounted on one side of the fixed plate, and an adjustment mechanism is mounted on one side of the equipment frame. By synchronously controlling the two electro-hydraulic push rods to push the two laser cutters to their sides, and then closing the two electro-hydraulic push rods after they reach a predetermined position, the main unit starts the motor to drive the two laser cutters to rotate, simultaneously activating the laser cutters to trim the diffusion plate, thus completing the efficient and high-precision edge trimming operation of the diffusion plate.

[0004] However, in actual use, the device has revealed obvious limitations. On the one hand, users must wait for one diffuser plate to be cut and unloaded before they can load and trim the next diffuser plate, which greatly reduces production efficiency. On the other hand, after each cut, users need to manually unload the material, which increases the workload of operators.

[0005] Therefore, it is necessary to provide a cutting mechanism for CVD diffusion plate processing to solve the above-mentioned technical problems. Utility Model Content

[0006] This invention provides a cutting mechanism for CVD diffusion plate processing, which solves the problems of low production efficiency and heavy workload for operators in existing cutting mechanisms.

[0007] To solve the above-mentioned technical problems, this utility model provides a trimming mechanism for CVD diffusion plate processing, comprising:

[0008] Cabinet;

[0009] A feeding assembly is disposed on the top of the cabinet. The feeding assembly includes a first driving component, a rotating frame, and two vacuum suction cups. The rotating frame is fixedly installed on the output end of the first driving component, and the two vacuum suction cups are respectively fixedly installed on both ends of the top of the rotating frame.

[0010] A cutting assembly, wherein the cutting assembly is disposed on top of the feeding assembly;

[0011] An adsorption assembly is disposed on top of the feeding assembly. The adsorption assembly includes a drive telescopic component, a fixing plate, and an adsorption plate. The fixing plate is fixedly installed on the bottom of the drive telescopic component, and the adsorption plate is fixedly installed on the bottom of the fixing plate.

[0012] A feeding assembly is disposed on the top of the cabinet. The feeding assembly includes a side plate, a moving groove, a feeding frame, a support frame, a third drive component, and a lead screw. The side plate is fixedly installed on the side of the cabinet. The moving groove is opened inside the side plate. The feeding frame is slidably connected to the inner side of the moving groove. The support frame is fixedly installed at the bottom of the feeding frame. The third drive component is fixedly installed at one end of the support frame. The lead screw is fixedly installed at the output end of the third drive component. The lead screw is also threadedly connected to the inside of the side plate.

[0013] Preferably, the cutting assembly includes a support frame, a second drive component, a dual-head drive telescopic component, a laser cutting component, and a laser rangefinder. The support frame is fixedly installed on the back of the cabinet, the second drive component is fixedly installed on the top of the support frame, the dual-head drive telescopic component is fixedly installed on the output end of the second drive component, the laser cutting component is fixedly installed on the two moving ends of the dual-head drive telescopic component, and the laser rangefinder is fixedly installed on the side of the laser cutting component.

[0014] Preferably, the top of the drive telescopic component is fixedly installed on the bottom of the dual-head drive telescopic component.

[0015] Preferably, the bottom of the feeding frame and the top of the vacuum suction cup are at the same height.

[0016] Preferably, the top of the cabinet is provided with a material discharge groove, which is located at the bottom of the vacuum suction cup.

[0017] Preferably, a movable plate is provided on the inner side of the cabinet, a pull rod is fixedly installed on the front of the movable plate, and the outer side of the movable plate is attached to the inner side of the cabinet.

[0018] Preferably, limit plates are fixedly installed at both ends of the top of the movable plate, and limit rods are slidably connected inside the limit plates. One end of the limit rods is fixedly installed on the back side of the inner side of the cabinet.

[0019] Compared with related technologies, the edge-cutting mechanism for CVD diffusion plate processing provided by this utility model has the following advantages:

[0020] This utility model provides a cutting mechanism for CVD diffusion plate processing. By setting up a feeding component, which is equipped with two vacuum suction cups and a first driving component, the operator can perform the feeding operation on the other vacuum suction cup while the diffusion plate on one vacuum suction cup is being cut. This achieves synchronous feeding and cutting, avoiding the time waste of waiting for the cutting and unloading to be completed before the next feeding can be carried out in the prior art, and greatly improving the production efficiency of diffusion plate cutting.

[0021] By having the adsorption component and the feeding component work together, after the cutting is completed, the drive extension component of the adsorption component drives the adsorption plate to adsorb the cut diffusion plate, and the third drive component of the feeding component drives the feeding frame to move to complete the scrap cleaning and diffusion plate feeding operation. The whole process does not require the operator to manually feed the material, which effectively reduces the workload of the operator. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the first embodiment of a CVD diffusion plate processing edge trimming mechanism provided by this utility model;

[0023] Figure 2 for Figure 1 The diagram shows the cabinet structure.

[0024] Figure 3 for Figure 1 The diagram shows the structure of the feeding assembly.

[0025] Figure 4 for Figure 2 The enlarged schematic diagram of part A shown below;

[0026] Figure 5 This is a schematic diagram of the second embodiment of a CVD diffusion plate processing edge trimming mechanism provided by this utility model.

[0027] Numbered in the diagram: 1. Cabinet, 11. Unloading chute, 2. Loading assembly, 21. First drive component, 22. Rotating frame, 23. Vacuum suction cup, 3. Cutting assembly, 31. Support frame, 32. Second drive component, 33. Dual-head drive telescopic component, 34. Laser cutting component, 35. Laser rangefinder, 4. Adsorption assembly, 41. Drive telescopic component, 42. Fixing plate, 43. Adsorption plate, 5. Unloading assembly, 51. Side plate, 52. Moving chute, 53. Unloading frame, 54. Support frame, 55. Third drive component, 56. Lead screw, 6. Moving plate, 61. Pull rod, 62. Limiting plate, 63. Limiting rod. Detailed Implementation

[0028] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0029] First Embodiment

[0030] Please refer to the following: Figure 1 , Figure 2 , Figure 3 , Figure 4 ,in, Figure 1 This is a schematic diagram of the first embodiment of a CVD diffusion plate processing edge trimming mechanism provided by this utility model; Figure 2 for Figure 1 The diagram shows the cabinet structure. Figure 3 for Figure 1 The diagram shows the structure of the feeding assembly. Figure 4 for Figure 2 The enlarged schematic diagram of part A is shown. A cutting mechanism for CVD diffusion plate processing includes: a cabinet 1;

[0031] The loading assembly 2 is disposed on the top of the cabinet 1. The loading assembly 2 includes a first driving component 21, a rotating frame 22 and two vacuum suction cups 23. The rotating frame 22 is fixedly installed on the output end of the first driving component 21, and the two vacuum suction cups 23 are respectively fixedly installed on the two ends of the top of the rotating frame 22.

[0032] Cutting component 3, which is disposed on top of feeding component 2;

[0033] Adsorption component 4 is disposed on top of the feeding component 2. The adsorption component 4 includes a driving telescopic component 41, a fixing plate 42, and an adsorption plate 43. The fixing plate 42 is fixedly installed on the bottom of the driving telescopic component 41, and the adsorption plate 43 is fixedly installed on the bottom of the fixing plate 42.

[0034] The material feeding assembly 5 is disposed on the top of the cabinet 1. The material feeding assembly 5 includes a side plate 51, a moving groove 52, a material feeding frame 53, a support frame 54, a third driving component 55, and a lead screw 56. The side plate 51 is fixedly installed on the side of the cabinet 1. The moving groove 52 is opened inside the side plate 51. The material feeding frame 53 is slidably connected to the inner side of the moving groove 52. The support frame 54 is fixedly installed at the bottom of the material feeding frame 53. The third driving component 55 is fixedly installed at one end of the support frame 54. The lead screw 56 is fixedly installed at the output end of the third driving component 55. The lead screw 56 is also threadedly connected to the inside of the side plate 51.

[0035] The cutting assembly 3 includes a support frame 31, a second drive component 32, a dual-head drive telescopic component 33, a laser cutting component 34, and a laser rangefinder 35. The support frame 31 is fixedly installed on the back of the cabinet 1, the second drive component 32 is fixedly installed on the top of the support frame 31, the dual-head drive telescopic component 33 is fixedly installed on the output end of the second drive component 32, the laser cutting component 34 is fixedly installed on the two moving ends of the dual-head drive telescopic component 33, and the laser rangefinder 35 is fixedly installed on the side of the laser cutting component 34.

[0036] The top of the drive telescopic component 41 is fixedly installed on the bottom of the dual-head drive telescopic component 33.

[0037] The bottom of the feeding frame 53 and the top of the vacuum suction cup 23 are at the same height.

[0038] The top of the cabinet 1 is provided with a material discharge groove 11, which is located at the bottom of the vacuum suction cup 23.

[0039] The first driving component 21 is usually an electric motor; the second driving component 32, as the rotation power source, can be a servo motor, which can precisely control the rotation angle and speed of the dual-head drive telescopic component 33. The dual-head drive telescopic component 33 is driven by hydraulic or pneumatic pressure to achieve precise telescopic action. The laser generator power of the laser cutting component 34 can be adjusted according to the material and thickness of the diffuser plate. For thinner diffuser plates, the laser power can be reduced to avoid over-cutting.

[0040] The drive telescopic component 41 is generally an electric push rod, which has the advantages of fast response speed and precise stroke control. The adsorption plate 43 is made of rubber material with good sealing and adsorption performance. Its internal vacuum channel is reasonably designed to quickly form a vacuum environment and generate sufficient adsorption force.

[0041] The third driving component 55 is usually a motor. The inclination angle of the inner side of the feeding frame 53 is generally between 30° and 45°. This angle can ensure that the diffuser plate slides smoothly under the action of gravity.

[0042] Throughout the entire trimming process, the operation of each component is coordinated by the control system. The control system can be a PLC (Programmable Logic Controller), which can precisely control the action sequence and time interval of each drive component according to the preset program. For example, after the vacuum suction cup 23 rotates into position, the control system will automatically start the cutting component to cut; after the cutting is completed, the suction component and the unloading component will be started immediately for subsequent operations.

[0043] When using the device, to confirm the diameter of the circular diffuser plate to be cut, the operator can activate the dual-head drive telescopic component 33 to extend it. At this time, the laser rangefinder 35 will measure the distance between the laser cutting component 34 and the support frame 31 to calculate the spacing between the two laser cutting components 34. The spacing between the two laser cutting components 34 is the diameter of the diffuser plate to be cut. Then, the second drive component 32 is activated to drive the dual-head drive telescopic component 33 to rotate, and then the dual-head drive telescopic component 33 drives the two laser cutting components 34 to rotate, cutting the diffuser plate.

[0044] The working principle of the edge-cutting mechanism for CVD diffusion plate processing provided by this utility model is as follows:

[0045] When performing edge trimming on the diffusion plate, the user first places the diffusion plate to be processed on one of the vacuum suction cups 23. The vacuum suction cup 23 is activated, and the diffusion plate is firmly fixed by the vacuum adsorption principle. Then, the first driving component 21 is activated, which acts as a power source to drive the rotating frame 22 to rotate. The vacuum suction cups 23 at both ends of the top of the rotating frame 22 also rotate, so that the vacuum suction cup 23 on which the diffusion plate to be processed is placed is moved to the direct under the cutting component 3.

[0046] At this point, the cutting component 3 starts working and cuts the diffuser plate;

[0047] At the same time, another vacuum suction cup 23 is moved to the front of the operator by the rotating frame 22, ready for the next loading. The operator can place the next diffusion plate to be processed on this empty vacuum suction cup 23, so as to realize the simultaneous loading and cutting operations, effectively improving work efficiency.

[0048] Once a diffuser plate is cut, the adsorption assembly 4 starts working, driving the telescopic component 41 to extend, which in turn moves the fixed plate 42 and the adsorption plate 43 downward until the adsorption plate 43 presses against the top of the cut diffuser plate. Then, the adsorption plate 43 activates its adsorption function, using vacuum suction to hold the diffuser plate in place. Subsequently, the telescopic component 41 is driven to retract, moving the diffuser plate upward.

[0049] At this time, the feeding component 5 starts to operate, the third drive component 55 starts, and the drive screw 56 rotates in the side plate 51. Since the screw 56 and the side plate 51 are threadedly connected, and the feeding frame 53 is connected to the screw 56 through the support frame 54, the rotation of the screw 56 will drive the feeding frame 53 to slide along the moving groove 52. When the feeding frame 53 moves to the bottom of the suction cup 43, since the bottom of the feeding frame 53 and the top of the vacuum suction cup 23 are at the same height, the feeding frame 53 will push the scraps remaining on the vacuum suction cup 23 into the feeding groove 11 opened at the top of the cabinet 1 during the movement. The scraps slide down the feeding groove 11 to the designated waste collection area.

[0050] Afterwards, the vacuum pump connected to the adsorption plate 43 stops working, the adsorption force disappears, and the diffuser plate falls into the unloading frame 53 after losing its adsorption force. At this time, the third drive component 55 reverses, driving the lead screw 56 to rotate in the opposite direction, causing the unloading frame 53 to move away from the vacuum suction cup 23. Since the inner side of the unloading frame 53 is inclined, the diffuser plate that falls into it will slide down the inclined inner side under the action of gravity into the collection frame placed on the side of the cabinet 1, completing the unloading operation.

[0051] Finally, the first drive unit 21 rotates again, moving the empty vacuum suction cup 23 to the operator, who can then place a new diffusion plate to be processed. This process is repeated to achieve continuous edge trimming of the diffusion plate.

[0052] Compared with related technologies, the edge-cutting mechanism for CVD diffusion plate processing provided by this utility model has the following advantages:

[0053] By setting up the feeding component 2, which is equipped with two vacuum suction cups 23 and a first driving component 21, the operator can perform the feeding operation on the other vacuum suction cup 23 while the diffusion plate on one vacuum suction cup 23 is being cut, thus realizing the synchronous operation of feeding and cutting. This avoids the time waste of waiting for the cutting to be completed and the material to be unloaded before the next feeding can be carried out, which is a significant improvement in the production efficiency of diffusion plate edge cutting.

[0054] With the adsorption component 4 and the feeding component 5 working together, after the cutting is completed, the drive telescopic component 41 of the adsorption component 4 drives the adsorption plate 43 to adsorb the cut diffusion plate, and the third drive component 55 of the feeding component 5 drives the feeding frame 53 to move to complete the scrap cleaning and diffusion plate feeding operation. The whole process does not require the operator to manually feed the material, which effectively reduces the workload of the operator.

[0055] Second Embodiment

[0056] Please refer to the following: Figure 5Based on the first embodiment of this application which provides a trimming mechanism for CVD diffusion plate processing, the second embodiment of this application proposes another trimming mechanism for CVD diffusion plate processing. The second embodiment is merely a preferred embodiment of the first embodiment, and the implementation of the second embodiment will not affect the separate implementation of the first embodiment.

[0057] Specifically, the difference in the edge-cutting mechanism for CVD diffusion plate processing provided in the second embodiment of this application is that, in the edge-cutting mechanism for CVD diffusion plate processing, a movable plate 6 is provided on the inner side of the cabinet 1, a pull rod 61 is fixedly installed on the front of the movable plate 6, and the outer side of the movable plate 6 is attached to the inner side of the cabinet 1.

[0058] Limiting plates 62 are fixedly installed at both ends of the top of the movable plate 6. A limiting rod 63 is slidably connected inside the limiting plate 62. One end of the limiting rod 63 is fixedly installed on the back of the inner side of the cabinet 1.

[0059] The working principle of the edge-cutting mechanism for CVD diffusion plate processing provided by this utility model is as follows:

[0060] When it is necessary to clean up the accumulated waste inside the cabinet 1 or to perform maintenance on the inside of the cabinet, the worker holds the pull rod 61 and pulls the moving plate 6 along the inner side of the cabinet 1. Since the limiting plate 62 is internally connected to the limiting rod 63, and one end of the limiting rod 63 is fixedly installed on the back of the inner side of the cabinet 1, the moving plate 6 will slide smoothly along the direction of the limiting rod 63 during the pulling process, avoiding the moving plate 6 from deviating or shaking during the movement, ensuring that the moving plate 6 can be pulled out smoothly. At the same time as the moving plate 6 is pulled out, the edge material on the front of the moving plate 6 will be pulled out simultaneously.

[0061] Compared with related technologies, the edge-cutting mechanism for CVD diffusion plate processing provided by this utility model has the following advantages:

[0062] The movable plate 6, pull rod 61, limit plate 62 and limit rod 63 work together to move the movable plate 6 after cutting, which can bring out the impurities on the inner side of the cabinet 1, making it easier for staff to handle the impurities later.

[0063] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A trimming mechanism for CVD diffusion plate processing, characterized in that, include: Cabinet; A feeding assembly is disposed on the top of the cabinet. The feeding assembly includes a first driving component, a rotating frame, and two vacuum suction cups. The rotating frame is fixedly installed on the output end of the first driving component, and the two vacuum suction cups are respectively fixedly installed on both ends of the top of the rotating frame. A cutting assembly, wherein the cutting assembly is disposed on top of the feeding assembly; An adsorption assembly is disposed on top of the feeding assembly. The adsorption assembly includes a drive telescopic component, a fixing plate, and an adsorption plate. The fixing plate is fixedly installed on the bottom of the drive telescopic component, and the adsorption plate is fixedly installed on the bottom of the fixing plate. A feeding assembly is disposed on the top of the cabinet. The feeding assembly includes a side plate, a moving groove, a feeding frame, a support frame, a third drive component, and a lead screw. The side plate is fixedly installed on the side of the cabinet. The moving groove is opened inside the side plate. The feeding frame is slidably connected to the inner side of the moving groove. The support frame is fixedly installed at the bottom of the feeding frame. The third drive component is fixedly installed at one end of the support frame. The lead screw is fixedly installed at the output end of the third drive component. The lead screw is also threadedly connected to the inside of the side plate.

2. The edge cutting mechanism for processing a CVD diffusion plate according to claim 1, wherein The cutting assembly includes a support frame, a second drive component, a dual-head drive telescopic component, a laser cutting component, and a laser rangefinder. The support frame is fixedly installed on the back of the cabinet, the second drive component is fixedly installed on the top of the support frame, the dual-head drive telescopic component is fixedly installed on the output end of the second drive component, the laser cutting component is fixedly installed on the two moving ends of the dual-head drive telescopic component, and the laser rangefinder is fixedly installed on the side of the laser cutting component.

3. The edge cutting mechanism for processing a CVD diffusion plate according to claim 2, wherein The top of the drive telescopic component is fixedly installed on the bottom of the dual-head drive telescopic component.

4. The edge cutting mechanism for processing a CVD diffusion plate according to claim 1, wherein The bottom of the feeding frame and the top of the vacuum suction cup are at the same height.

5. The edge cutting mechanism for processing a CVD diffusion plate according to claim 1, wherein The top of the cabinet is provided with a material discharge slot, which is located at the bottom of the vacuum suction cup.

6. The edge cutting mechanism for processing a CVD diffusion plate according to claim 1, wherein A movable panel is provided on the inner side of the cabinet, a pull rod is fixedly installed on the front of the movable panel, and the outer side of the movable panel is attached to the inner side of the cabinet.

7. The edge-cutting mechanism for CVD diffusion plate processing according to claim 6, characterized in that, Limiting plates are fixedly installed at both ends of the top of the movable plate, and a limiting rod is slidably connected inside the limiting plate. One end of the limiting rod is fixedly installed on the back of the inner side of the cabinet.

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