Protective device for semiconductor cutting equipment

Abstract

The utility model discloses a protective device for semiconductor cutting equipment, which comprises an organ-type protective cover, a buffer mechanism, guide rails positioned on two sides of the organ-type protective cover, and a driving mechanism for driving the organ-type protective cover to compress and extend along the length direction of the guide rails, the two ends of the organ type protective cover are connected with the buffering mechanism and the driving mechanism respectively, the guide rail comprises two guide rail bodies and guide rods fixedly connected with the inner sides of the guide rail bodies, and a fixing plate is fixedly arranged at the same ends of the two guide rods; the buffering mechanism comprises a connecting plate, elastic assemblies and buffering pads, the elastic assemblies and the buffering pads are arranged at the two ends of the connecting plate, one end of each buffering pad is located between one side of the connecting plate and one end of the guide rail body, and the top of the fixing plate is located on the side, close to the organ type protective cover, of the connecting plate. According to the protective device, when the organ type protective cover is compressed, the pressing force of the organ type protective cover can be effectively relieved, and the risk that the organ type protective cover is punctured by chippings is reduced.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor cutting equipment technology, and specifically relates to a protective device for semiconductor cutting equipment. Background Technology

[0002] Bellows-style protective covers are crucial protective devices in industrial applications, especially for semiconductor cutting equipment. Existing bellows-style protective covers connect one end to the drive mechanism of the machine and the other end to the fixed part of the equipment. As the drive mechanism reciprocates, the bellows-style protective cover stretches and contracts accordingly. Bellows-style protective covers possess excellent flexibility, allowing them to adapt freely to the operation of the equipment and maintain close contact, thus achieving a good protective effect.

[0003] During operation, semiconductor debris can enter the folded surfaces of existing accordion-style protective covers and expand and contract along with them. The tighter the folds are compressed, the higher the risk of debris puncturing the cover, thus shortening its lifespan. Replacing accordion-style protective covers is costly; furthermore, damage can cause corrosion and destruction of precision transmission components inside the equipment. Utility Model Content

[0004] In view of this, in order to overcome the shortcomings of the prior art, the purpose of this utility model is to provide a protective device for semiconductor cutting equipment, which can reduce the clamping force between the folded surfaces during the extension and retraction of the bellows-type protective cover, reduce the risk of debris puncturing the bellows-type protective cover, and extend the service life of the protective device.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A protective device for semiconductor cutting equipment includes a bellows-type protective cover, guide rails located on both sides of the bellows-type protective cover, and a drive mechanism for driving the bellows-type protective cover to compress and extend along the length of the guide rails. The protective device also includes a buffer mechanism. Both ends of the bellows-type protective cover are connected to the buffer mechanism and the drive mechanism, respectively. The guide rails include two guide rail bodies and guide rods fixedly connected to the inner side of each guide rail body. A fixing plate is fixedly provided at the same end of the two guide rods. The buffer mechanism includes a connecting plate, an elastic component, and a buffer pad. Both ends of the connecting plate are provided with an elastic component and a buffer pad. One end of the buffer pad is located between one side of the connecting plate and one end of the guide rail body. The top of the fixing plate is located on the side of the connecting plate closest to the bellows-type protective cover.

[0007] By designing a buffer mechanism at the end of the bellows-style protective cover away from the drive mechanism and adding a guide rod and a fixing plate to the original structure of the guide rail, the buffer mechanism is ensured to move within the required range along with the bellows-style protective cover. When the bellows-style protective cover is compressed, the buffer mechanism can effectively reduce the clamping force of the bellows-style protective cover, reduce the risk of debris puncturing the bellows-style protective cover, effectively protect the precision transmission components inside the equipment from corrosion and damage by dust, heat, water, oil, etc., and extend the service life of the bellows-style protective cover and the entire equipment.

[0008] According to some preferred embodiments of this utility model, each elastic component includes an elastic element, a connecting rod, a bushing, and a support sleeve. The bushing and elastic element are both located on the side of the connecting plate away from the accordion-style protective cover. The bushing is fixedly connected to the connecting plate. The end of the connecting rod near the accordion-style protective cover passes through the interior of the support sleeve and the bushing and is fixedly connected to one end of the guide rail body. The bushing is used for clearance fitting with the connecting rod, and the length direction of the bushing is parallel to the length direction of the connecting rod. The linear reciprocating motion is achieved by the sliding of the connecting rod inside the bushing.

[0009] According to some preferred embodiments of the present invention, the connecting plate is fixedly connected to one end of the bellows-type protective cover, the connecting rod passes through the thickness direction of the connecting plate and is slidably connected to the connecting plate, and the support sleeve is sleeved on the end of the connecting rod away from the guide rail body.

[0010] According to some preferred embodiments of the present invention, the connecting rod includes a rod body and a seat body, wherein the outer diameter of the seat body is larger than the outer diameter of the rod body; the support sleeve includes a first sleeve portion and a second sleeve portion, wherein one end of the first sleeve portion is fitted with one end of the seat body.

[0011] According to some preferred embodiments of the present invention, the inner diameter of the first sleeve is greater than the outer diameter of the rod body and less than the outer diameter of the seat, and the outer diameter of the second sleeve is less than the outer diameter of the first sleeve.

[0012] According to some preferred embodiments of this utility model, the elastic element is sleeved on the outer periphery of the rod body, the second sleeve, and the bushing, with both ends of the elastic element contacting the first sleeve and the connecting plate, respectively. One end of the elastic element contacts one end of the first sleeve, and the other end of the elastic element contacts one side of the connecting plate. The connecting rod is provided to guide the elastic element's smooth reciprocating movement. The support sleeve is provided to support one end of the elastic element, restricting both ends of the elastic element between the first sleeve of the support sleeve and one side of the connecting plate, allowing the elastic element to effectively extend and compress.

[0013] According to some preferred embodiments of this utility model, when one end of the buffer pad contacts one side of the connecting plate, the distance between the side of the first sleeve away from the seat and the connecting plate is equal to the length of the elastic member in its natural state. The buffer pad prevents direct, hard collisions with one end of the guide rail body, thus avoiding vibration and noise, when the connecting plate reciprocates with the accordion-style protective cover.

[0014] According to some preferred embodiments of this utility model, the guide rod is parallel to the rod body, located at the bottom of the accordion-style protective cover, and extends through the length of the accordion-style protective cover. Both ends of the bottom of the connecting plate have openings for the guide rod to pass through. The guide rod provides guidance for the movement of the accordion-style protective cover.

[0015] According to some preferred embodiments of this utility model, the fixing plate is located at one end of the guide rail near the buffer mechanism. The fixing plate includes a first plate and a second plate fixedly connected. The length of the first plate is less than the length of the second plate. The center of the first plate, the center of the second plate, and the center of the connecting plate are all located in the same vertical direction. The first plate and the second plate are both located on the side of the connecting plate near the bellows-type protective cover. When the elastic element is in its natural state, one side of the first plate partially fits against one side of the connecting plate. The fixing plate between the two guide rods near the buffer mechanism is provided because the fixed end connected to one end of the bellows-type protective cover in the prior art has become the movable buffer mechanism in this utility model. It is necessary to control the stroke range of the bellows-type protective cover. The movement position of the connecting plate is controlled and limited by the cooperation between the first plate and the connecting plate, thereby controlling and limiting the movement position of the bellows-type protective cover, and further ensuring that the bellows-type protective cover can slide back and forth within a controllable range along the length direction of the guide rod.

[0016] According to some preferred embodiments of this utility model, the length of the first plate is equal to or less than the distance between the inner sides of the two openings, and the second plate is located below the connecting plate, with the distance between the top edge of the second plate and the top of the opening greater than the height of the guide rod. This arrangement is to ensure that the second plate does not obstruct the extension of the guide rod.

[0017] By adopting the above technical solutions, compared with the prior art, the protective device for semiconductor cutting equipment of this utility model, by designing a buffer mechanism at the end of the bellows-type protective cover away from the drive mechanism and adding a guide rod and a fixing plate to the original structure of the guide rail, ensures that the buffer mechanism moves within the required range with the bellows-type protective cover. When the bellows-type protective cover is compressed, the buffer mechanism can effectively reduce the clamping force of the bellows-type protective cover, reduce the risk of debris puncturing the bellows-type protective cover, effectively protect the precision transmission components inside the equipment from corrosion and damage by dust, heat, water, oil, etc., and extend the service life of the bellows-type protective cover and the entire equipment. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a three-dimensional structural diagram of the protective device (elastic element in its natural state) in a preferred embodiment of the present invention;

[0020] Figure 2 for Figure 1 A partially enlarged structural diagram of section A (where the elastic element is in its natural state);

[0021] Figure 3 for Figure 1 A partially enlarged structural diagram of section A (where the elastic element is in a compressed state);

[0022] Figure 4 This is an exploded view of a portion of the protective device in a preferred embodiment of the present invention;

[0023] Figure 5 This is a three-dimensional structural diagram of the guide rail and the fixing plate in a preferred embodiment of the present invention;

[0024] Among them, the bellows-type protective cover-1, guide rail-2, guide rail body-21, guide rod-22, drive mechanism-3, buffer mechanism-4, connecting plate-41, through-hole-411, elastic element-42, buffer pad-43, rod body-441, seat-442, first sleeve-451, second sleeve-452, bushing-46, fixing plate-5, first plate-51, second plate-52, third plate-53, fourth plate-54, and bending plate-6. Detailed Implementation

[0025] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0026] Reference Figures 1 to 5 This embodiment provides a protective device for semiconductor cutting equipment, including a bellows-type protective cover 1, a buffer mechanism 4, a drive mechanism 3, and guide rails 2 located on both sides of the bellows-type protective cover 1. The two ends of the bellows-type protective cover 1 are connected to the buffer mechanism 4 and the drive mechanism 3, respectively. The drive mechanism 3 is used to drive the bellows-type protective cover 1 to compress and extend along the length direction of the guide rails 2, so that the bellows-type protective cover 1 adapts to the operation of the equipment, maintains close contact with the equipment, and protects the precision transmission components inside the equipment.

[0027] Furthermore, such as Figure 5 As shown, the guide rail 2 includes two guide rail bodies 21 and a guide rod 22 fixedly connected to the inner side of each guide rail body 21. The end of each guide rod 22 near the buffer mechanism 4 extends from the end of the corresponding guide rail body 21 near the buffer mechanism 4 towards the buffer mechanism 4. The guide rod 22 is located at the bottom of the bellows-type protective cover 1 and extends through the length of the bellows-type protective cover 1 to guide its movement. Under the action of the drive mechanism 3, the bellows-type protective cover 1 reciprocates along the length of the guide rod 22.

[0028] Furthermore, the buffer mechanism 4 includes a connecting plate 41, an elastic component, and a buffer pad 43. The connecting plate 41 is perpendicular to the guide rail 2 and is fixedly connected to the end of the accordion-style protective cover 1 away from the drive mechanism 3. Both ends of the bottom of the connecting plate 41 are provided with openings 411 for the guide rod 22 to pass through. Both ends of the connecting plate 41 are provided with an elastic component and a buffer pad 43. The buffer pad 43 is fixedly connected to the end of the guide rail body 21 near the buffer mechanism 4, and one end of the buffer pad 43 is located between one side of the connecting plate 41 and one end of the guide rail body 21. This prevents the connecting plate 41 from having a direct hard collision with one end of the guide rail body 21 when it reciprocates with the accordion-style protective cover 1, thus avoiding vibration and noise.

[0029] Specifically, such as Figure 4As shown, each elastic component includes an elastic element 42, a connecting rod, a bushing 46, and a support sleeve. The bushing 46 and the elastic element 42 are both located on the side of the connecting plate 41 away from the bellows-type protective cover 1, and the bushing 46 is fixedly connected to the connecting plate 41. The length direction of the bushing 46 is parallel to the length direction of the support sleeve and the connecting rod, and the connecting rod is parallel to the guide rod 22. The connecting rod includes a rod body 441 and a seat 442 fixedly connected. The axis of the rod body 441 coincides with the axis of the seat 442, and the seat 442 is located at the end of the rod body 441 away from the bushing 46. The outer diameter of the seat 442 is larger than the outer diameter of the rod body 441. The support sleeve includes a first sleeve portion 451 and a second sleeve portion 452 that are fixedly connected. The axis of the first sleeve portion 451 coincides with the axis of the second sleeve portion 452. The outer diameter of the second sleeve portion 452 is smaller than the outer diameter of the first sleeve portion 451, and the inner diameter of the second sleeve portion 452 is equal to the inner diameter of the first sleeve portion 451. The inner diameter of the first sleeve portion 451 is larger than the outer diameter of the rod body 441 and smaller than the outer diameter of the seat body 442.

[0030] The rod body 441 extends through the thickness of the connecting plate 41, and the end of the rod body 441 near the accordion-style protective cover 1 passes through the interior of the support sleeve and the interior of the bushing 46, and is fixedly connected to one end of the guide rail body 21. The entire connecting rod is slidably connected to the connecting plate 41. The bushing 46 is used to fit with the rod body 441 with a clearance, and the linear reciprocating motion is achieved by the sliding of the connecting rod inside the bushing 46. The support sleeve is fitted on the end of the rod body 441 away from the guide rail body 21, and one end of the first sleeve 451 is in contact with one end of the seat 442. The elastic element 42 is fitted on the outer periphery of the rod body 441, the second sleeve 452 and the bushing 46. One end of the elastic element 42 is in contact with one end of the first sleeve 451, and the other end of the elastic element 42 is in contact with one side of the connecting plate 41. The connecting rod enables the elastic element 42 to move smoothly back and forth along the length of the connecting rod, providing guidance for its movement; the support sleeve provides support for the elastic element 42, so that both ends of the elastic element 42 are restricted between the first sleeve portion 451 of the support sleeve and one side of the connecting plate 41, so that the elastic element 42 can effectively extend and compress; in this embodiment, the elastic element 42 is preferably a spring.

[0031] Furthermore, such as Figures 2 to 5As shown, a fixing plate 5 is fixedly installed between the two guide rods 22 near the same end of the buffer mechanism 4. The fixing plate 5 includes a first plate 51, a second plate 52, a third plate 53, and a fourth plate 54. The first plate 51 is located above the second plate 52 and is fixedly connected to the second plate 52. The third plate 53 and the fourth plate 54 are both fixedly connected to the side of the second plate 52 away from the bellows-type protective cover 1. The third plate 53 and the fourth plate 54 are both perpendicular to the second plate 52, with the third plate 53 located above the fourth plate 54. The third plate 53 and the fourth plate 54 both extend outward from one side of the second plate 52. The end of the guide rod 22 near the buffer mechanism 4 is fixedly connected to the top surface of the third plate 53 through a bending plate 6. The bottom surface of the third plate 53 is fixedly connected to the top of the fourth plate 54. The fourth plate 54 can support the third plate 53 and one end of the guide rod 22 connected to it.

[0032] The centers of the first plate 51, the second plate 52, and the connecting plate 41 are all located in the same vertical direction. The first plate 51 and the second plate 52 are both located on the side of the connecting plate 41 closest to the bellows-style protective cover 1. The first plate 51 is parallel to the connecting plate 41, and the orthographic projections of the first plate 51 and the connecting plate 41 on the same vertical plane parallel to both coincide. The length of the first plate 51 is less than the length of the second plate 52, and the length of the first plate 51 is equal to or less than the distance between the inner sides of the two openings 411. The second plate 52 is located below the connecting plate 41, and the distance between the top edge of the second plate 52 and the top of the opening 411 is greater than the height of the guide rod 22, ensuring that the second plate 52 does not obstruct the extension of the guide rod 22.

[0033] In this embodiment, the elastic element 42 has a compressed state and a relaxed state. When the elastic element 42 is in the relaxed state, such as Figure 2 As shown, one end of the buffer pad 43 contacts one side of the connecting plate 41. At this time, the connecting plate 41 cannot move further, that is, the accordion-style protective cover 1 has been fully extended and cannot extend further. Furthermore, the side of the first plate 51 away from the drive mechanism 3 is partially attached to the side of the connecting plate 41 near the drive mechanism 3. The distance between the side of the first sleeve 451 away from the seat 442 and the connecting plate 41 is equal to the length of the elastic element 42 in its natural state. Under the driving action of the drive mechanism 3, the accordion-style protective cover 1 can be retracted, thereby causing the connecting plate 41 to move away from the buffer pad 43 to compress the elastic element 42, so that the elastic element 42 is in a compressed state, as... Figure 3As shown, at this time, the side of the connecting plate 41 closest to the buffer pad 43 is away from the buffer pad 43 and does not contact it, and there is also a gap between the first plate 51 and the connecting plate 41. Under the action of the elastic element 42 in the buffer mechanism 4, the clamping force between the folded surfaces of the bellows-type protective cover 1 when it retracts can be effectively reduced, thereby reducing the risk of debris puncturing the bellows-type protective cover 1, which is conducive to extending the service life of the bellows-type protective cover 1, and thus effectively protecting the precision transmission components inside the equipment from corrosion and damage by dust, heat, water, oil, etc., and ultimately extending the service life of the entire equipment.

[0034] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the protection scope of this utility model.

Claims

1. A protective device for semiconductor cutting equipment, comprising a bellows-type protective cover, guide rails located on both sides of the bellows-type protective cover, and a drive mechanism for driving the bellows-type protective cover to compress and extend along the length of the guide rails, characterized in that, The protective device also includes a buffer mechanism. The two ends of the bellows-style protective cover are respectively connected to the buffer mechanism and the drive mechanism. The guide rail includes two guide rail bodies and a guide rod fixedly connected to the inner side of each guide rail body. A fixing plate is fixedly provided at the same end of the two guide rods. The buffer mechanism includes a connecting plate, an elastic component, and a buffer pad. Both ends of the connecting plate are provided with an elastic component and a buffer pad. One end of the buffer pad is located between one side of the connecting plate and one end of the guide rail body. The top of the fixing plate is located on the side of the connecting plate near the bellows-style protective cover.

2. The guard of claim 1, wherein Each of the elastic components includes an elastic element, a connecting rod, a bushing, and a support sleeve. The bushing and the elastic element are both located on the side of the connecting plate away from the bellows-style protective cover. The bushing is fixedly connected to the connecting plate. The end of the connecting rod near the bellows-style protective cover passes through the interior of the support sleeve and the bushing and is fixedly connected to one end of the guide rail body.

3. The guard of claim 2, wherein, The connecting plate is fixedly connected to one end of the bellows-style protective cover, the connecting rod passes through the thickness direction of the connecting plate and is slidably connected to the connecting plate, and the support sleeve is fitted on the end of the connecting rod away from the guide rail body.

4. The guard of claim 3, wherein, The connecting rod includes a rod body and a base, the outer diameter of the base being larger than the outer diameter of the rod body; the support sleeve includes a first sleeve portion and a second sleeve portion, one end of the first sleeve portion fitting into one end of the base.

5. The guard of claim 4, wherein, The inner diameter of the first sleeve is greater than the outer diameter of the rod body and less than the outer diameter of the base, and the outer diameter of the second sleeve is less than the outer diameter of the first sleeve.

6. The guard of claim 5, wherein, The elastic element is sleeved on the outer periphery of the rod body, the second sleeve and the bushing, and the two ends of the elastic element are in contact with the first sleeve and the connecting plate respectively.

7. The guard of claim 6, wherein, When one end of the buffer pad contacts one side of the connecting plate, the distance between the side of the first sleeve away from the seat and the connecting plate is equal to the length of the elastic element in its natural state.

8. The guard of claim 4, wherein, The guide rod is parallel to the rod body and is located at the bottom of the bellows-style protective cover. The guide rod extends through the length of the bellows-style protective cover, and both ends of the bottom of the connecting plate are provided with openings for the guide rod to pass through.

9. The guard of claim 8, wherein, The fixing plate is located at one end of the guide rail body near the buffer mechanism. The fixing plate includes a first plate and a second plate that are fixedly connected. The length of the first plate is less than the length of the second plate. The center of the first plate, the center of the second plate, and the center of the connecting plate are all located in the same vertical direction. The first plate and the second plate are both located on the side of the connecting plate near the bellows-style protective cover. When the elastic element is in its natural state, one side of the first plate is partially attached to one side of the connecting plate.

10. The protective device according to claim 9, characterized in that, The length of the first plate is equal to or less than the distance between the inner sides of the two openings, and the second plate is located below the connecting plate and the distance between the top edge of the second plate and the top of the opening is greater than the height of the guide rod.

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