Vacuum processing chamber and multi-chamber vacuum processing device

By setting a rotating first mating component and a workpiece loading mechanism in the vacuum processing chamber, the horizontal movement of the workpiece between chambers is realized, which solves the problems of complex equipment structure and film contamination, improves production efficiency and reduces costs.

CN224148153UActive Publication Date: 2026-04-21OPTORUN SHANGHAI CO LTD
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Patent Information

Application Number
CN202521031759.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-05-23
Publication Date
2026-04-21
Estimated Expiration
2035-05-23

AI Technical Summary

Technical Problem

Existing continuous sputtering coating equipment has a complex structure and high manufacturing cost. When the workpiece is transferred between chambers, it needs to be unloaded and reloaded, which increases the risk of film contamination. Multiple transfer operations lead to extended production cycles and reduced production efficiency.

Method used

The first mating component is rotatably set at the top and/or bottom of the vacuum processing chamber. The workpiece loading mechanism moves along the first direction and the workpiece frame is driven to rotate by the transmission mechanism. This avoids setting a loading device in each chamber. The workpiece moves horizontally between chambers, reducing the unloading and loading process. The positioning and limiting mechanism ensures precise mating.

Benefits of technology

It simplifies the structure of the vacuum processing chamber, reduces manufacturing costs, minimizes the risk of membrane contamination, improves production efficiency, and avoids extended production cycles.

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Abstract

The utility model belongs to the technical field of workpiece vacuum treatment, and discloses a vacuum treatment chamber and a multi-chamber vacuum treatment device. The top and / or the bottom of the vacuum processing chamber are / is rotatably provided with a first matching piece, the vacuum processing chamber comprises a workpiece loading mechanism, the workpiece loading mechanism is movably arranged in the vacuum processing chamber in the first direction and comprises a containing frame and a workpiece frame, a plurality of workpieces are loaded on the workpiece frame, and the workpiece frame is provided with a center shaft in the vertical direction; the workpiece frame can rotate around the center shaft to be arranged in the containing frame, and the top and / or the bottom of the center shaft are / is connected with a second matching piece. The first matching piece can move in the direction close to or away from the second matching piece so as to be matched with or separated from the second matching piece. The structure complexity and the manufacturing cost of the vacuum treatment cavity are reduced, the situation that the workpiece is independently unloaded and reloaded when transferred between the cavities is avoided, the pollution risk of a workpiece film layer is reduced, and the vacuum treatment efficiency is improved.
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