Vacuum processing chamber and multi-chamber vacuum processing device
By setting a rotating first mating component and a workpiece loading mechanism in the vacuum processing chamber, the horizontal movement of the workpiece between chambers is realized, which solves the problems of complex equipment structure and film contamination, improves production efficiency and reduces costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- OPTORUN SHANGHAI CO LTD
- Filing Date
- 2025-05-23
- Publication Date
- 2026-04-21
AI Technical Summary
Existing continuous sputtering coating equipment has a complex structure and high manufacturing cost. When the workpiece is transferred between chambers, it needs to be unloaded and reloaded, which increases the risk of film contamination. Multiple transfer operations lead to extended production cycles and reduced production efficiency.
The first mating component is rotatably set at the top and/or bottom of the vacuum processing chamber. The workpiece loading mechanism moves along the first direction and the workpiece frame is driven to rotate by the transmission mechanism. This avoids setting a loading device in each chamber. The workpiece moves horizontally between chambers, reducing the unloading and loading process. The positioning and limiting mechanism ensures precise mating.
It simplifies the structure of the vacuum processing chamber, reduces manufacturing costs, minimizes the risk of membrane contamination, improves production efficiency, and avoids extended production cycles.
Smart Images
Figure CN224148153U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of workpiece vacuum treatment technology, and in particular to a vacuum treatment chamber and a multi-chamber vacuum treatment device. Background Technology
[0002] Sputtering deposition is a physical vapor deposition technique that uses ions to bombard the surface of a target material, causing the target atoms or molecules to be sputtered onto the surface of a workpiece to form a thin film. This technique has advantages such as high deposition rate, good film uniformity, and strong adhesion, and is widely used in integrated circuits, flat panel displays, solar cells, and other fields.
[0003] Existing continuous sputtering coating equipment typically employs a multi-chamber structure, with each chamber independently equipped with a loading mechanism. When multilayer film deposition is required, the workpiece must sequentially pass through multiple chambers to complete the preparation of different film layers. However, this structure has the following drawbacks: First, each chamber requires an independent loading device, resulting in complex equipment structure and high manufacturing costs; second, the workpiece must undergo unloading and reloading processes during transfer between chambers, increasing the risk of film contamination; and third, multiple transfer operations extend the production cycle and reduce production efficiency. Utility Model Content
[0004] The purpose of this invention is to provide a multi-chamber continuous coating device to solve the problems of existing equipment having complex structure and high manufacturing cost; the need for unloading and reloading of workpieces during transfer between chambers, which increases the risk of film contamination; and the extension of production cycle and reduction of production efficiency due to multiple transfer operations.
[0005] To achieve this objective, the present invention adopts the following technical solution:
[0006] On one hand, a vacuum processing chamber is provided, wherein a first mating member is rotatably disposed on the top and / or bottom of the vacuum processing chamber, the vacuum processing chamber comprising:
[0007] A workpiece loading mechanism is movably disposed in the vacuum processing chamber along a first direction, including a receiving frame and a workpiece holder, on which multiple workpieces are loaded. The workpiece holder is provided with a central shaft in a vertical direction. The workpiece holder is rotatably disposed in the receiving frame around the central shaft. A second mating component is connected to the top and / or bottom of the central shaft.
[0008] The first mating member can move in a direction close to or away from the second mating member to engage or disengage with the second mating member.
[0009] As an optional technical solution for the vacuum processing chamber, the vacuum processing chamber further includes a transmission mechanism, which includes a transmission component, a third mating component, and a fixing component. The fixing component and the third mating component are rotatably disposed in the vacuum processing chamber. The first mating component is rotatably disposed on the fixing component. The rotation of the fixing component causes the first mating component to move closer to or away from the second mating component. The third mating component and the first mating component are connected by a transmission component.
[0010] As an optional technical solution for the vacuum processing chamber, the transmission mechanism further includes a first limiting member located on the rotation path of the fixed member to limit the rotation distance of the fixed member, thereby limiting the actual center distance between the first mating member and the second mating member.
[0011] As an optional technical solution for the vacuum processing chamber, the vacuum processing chamber further includes a driving mechanism, which includes a first driving member connected to the third mating member to drive the third mating member to rotate, thereby causing the first mating member to rotate.
[0012] As an optional technical solution for the vacuum processing chamber, the driving mechanism further includes a second driving member, which is connected to the fixed member to drive the fixed member to rotate, thereby causing the first mating member to move in a direction closer to or away from the second mating member.
[0013] As an optional technical solution for the vacuum processing chamber, the vacuum processing chamber further includes a positioning mechanism, which includes a positioning rod. The second mating member is provided with a positioning hole at a position away from the geometric center of the central axis. The positioning rod can move in a direction close to or away from the positioning hole to insert into or disengage from the positioning hole.
[0014] As an optional technical solution for the vacuum processing chamber, the vacuum processing chamber further includes a limiting mechanism, which is located at the top or bottom of the vacuum processing chamber. The limiting mechanism includes a second limiting member, which can move in a direction close to or away from the workpiece loading mechanism and abut or disengage from the receiving frame to restrict the workpiece loading mechanism from moving in the first direction.
[0015] As an optional technical solution for the vacuum processing chamber, the vacuum processing chamber further includes a conveying mechanism, which includes a support base and guide wheels. The support base extends along the first direction, and the guide wheels are rotatably disposed on the support base and are spaced apart along the first direction. The workpiece loading mechanism can slide or roll with the guide wheels to move along the first direction.
[0016] As an optional technical solution for the vacuum processing chamber, the vacuum processing chamber further includes an offset mechanism, which is located at the bottom of the workpiece loading mechanism. The offset mechanism can cooperate with the workpiece loading mechanism to offset along the first direction and / or the second direction, wherein the second direction is perpendicular to the first direction.
[0017] On the other hand, a multi-chamber vacuum processing apparatus is provided, including a loading chamber, a unloading chamber, and at least one of the above-mentioned vacuum processing chambers, wherein the loading chamber, the at least one of the vacuum processing chambers, and the unloading chamber are arranged sequentially along the first direction and are selectively connected.
[0018] The beneficial effects of this utility model are:
[0019] This application discloses a vacuum processing chamber and a multi-chamber vacuum processing device. The top and / or bottom of the vacuum processing chamber are rotatably provided with a first mating member. The vacuum processing chamber includes a workpiece loading mechanism, which is movably disposed in the vacuum processing chamber along a first direction. It includes a receiving frame and a workpiece rack. Multiple workpieces are loaded on the workpiece rack. The workpiece rack is provided with a central shaft in a vertical direction. The workpiece rack is rotatably disposed on the receiving frame around the central shaft. The top and / or bottom of the central shaft are connected with a second mating member. The first mating member can move in a direction close to or away from the second mating member to engage or disengage with the second mating member. By setting a rotating first mating component in each vacuum processing chamber, the first mating component moves towards or away from a second mating component. Multiple workpieces are loaded onto a workpiece holder. When the first mating component engages with the second mating component, the first mating component drives the workpiece holder to rotate, completing the vacuum processing of multiple workpieces. After the workpiece vacuum processing is completed, the first mating component disengages from the second mating component. This avoids setting a loading device in each vacuum processing chamber, reducing the complexity of the vacuum processing chamber structure and manufacturing costs. The workpiece loading mechanism moves along a first direction, carrying multiple workpieces to other chambers. This avoids the need for separate unloading and reloading processes when transferring workpieces between chambers, reducing the risk of workpiece film contamination and avoiding multiple workpiece transfers that would extend the production cycle, thus improving the efficiency of workpiece vacuum processing. Attached Figure Description
[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.
[0021] Figure 1 This is a schematic diagram of the structure of the multi-chamber vacuum processing device provided in this embodiment of the utility model;
[0022] Figure 2 This is a schematic diagram of the structure of the vacuum processing chamber provided in this embodiment of the utility model;
[0023] Figure 3 This is a schematic diagram of the workpiece loading mechanism provided in an embodiment of the present invention;
[0024] Figure 4 This is one of the partial structural schematic diagrams of the vacuum processing chamber provided in this embodiment of the utility model;
[0025] Figure 5 This is a second schematic diagram of a partial structure of the vacuum processing chamber provided in this embodiment of the present invention;
[0026] Figure 6 This is the third partial structural schematic diagram of the vacuum processing chamber provided in this embodiment of the utility model;
[0027] Figure 7 This is the fourth partial structural schematic diagram of the vacuum processing chamber provided in this embodiment of the utility model;
[0028] Figure 8 This is a schematic diagram of the structure of the first embodiment of the offset mechanism provided in this utility model;
[0029] Figure 9 This is a schematic diagram of the structure of the second embodiment of the offset mechanism provided in this utility model;
[0030] Figure 10 This is a schematic diagram of the third embodiment of the offset mechanism provided in this utility model.
[0031] In the picture:
[0032] 1. Loading chamber; 2. Unloading chamber; 3. Gate;
[0033] 10. Vacuum processing chamber; 11. First mating component;
[0034] 20. Workpiece loading mechanism; 21. Receiving frame; 22. Workpiece holder; 221. Central shaft; 23. Second mating part; 231. Positioning hole;
[0035] 30. Transmission mechanism; 31. Transmission component; 32. Third mating component; 33. Fixing component;
[0036] 40. Drive mechanism; 41. First drive component; 42. Second drive component; 43. First shaft; 44. Second shaft; 45. Magnetofluid;
[0037] 50. Positioning mechanism; 51. Positioning rod; 52. Fourth driving component;
[0038] 60. Limiting mechanism; 61. Second limiting component; 62. Connecting rod;
[0039] 70. Conveying mechanism; 71. Support base; 72. Guide wheel;
[0040] 81. Air-filled ball; 82. Sliding guide rail; 83. Magnetic component; 84. Guide component; 85. Bearing component. Detailed Implementation
[0041] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not the entire structure.
[0042] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0043] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0044] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
[0045] Existing continuous sputtering coating equipment typically employs a multi-chamber structure, with each chamber independently equipped with a loading mechanism. When multilayer film deposition is required, the workpiece must sequentially pass through multiple chambers to complete the preparation of different film layers. However, this structure has the following drawbacks: First, each chamber requires an independent loading device, resulting in complex equipment structure and high manufacturing costs; second, the workpiece must undergo unloading and reloading processes during transfer between chambers, increasing the risk of film contamination; and third, multiple transfer operations extend the production cycle and reduce production efficiency.
[0046] To address the aforementioned problems, this embodiment provides a vacuum processing chamber 10, see reference. Figure 2 A first mating member 11 is rotatably disposed on the top and / or bottom of the vacuum processing chamber 10. The vacuum processing chamber 10 includes a workpiece loading mechanism 20, which is movably disposed in the vacuum processing chamber 10 along a first direction. The mechanism includes a receiving frame 21 and a workpiece holder 22. Multiple workpieces are loaded onto the workpiece holder 22. The workpiece holder 22 is vertically disposed with a central shaft 221. The workpiece holder 22 is rotatably disposed on the receiving frame 21 around the central shaft 221. A second mating member 23 is connected to the top and / or bottom of the central shaft 221. The first mating member 11 can move towards or away from the second mating member 23 to engage or disengage with the second mating member 23. In this embodiment, the first direction is the Y-axis direction. It should be noted that the position and number of the first mating members 11 correspond one-to-one with the position and number of the second mating members 23. That is, when the first mating member 11 is provided at the top of the vacuum processing chamber 10, the second mating member 23 is provided at the top of the central shaft 221; when the first mating member 11 is provided at the bottom of the vacuum processing chamber 10, the second mating member 23 is provided at the bottom of the central shaft 221; when both the top and bottom of the vacuum processing chamber 10 are provided with the first mating member 11, the top and bottom of the central shaft 221 are respectively provided with the second mating member 23. In this embodiment, the top and / or bottom of the central shaft 221 protrude from the receiving frame 21 and the protruding end is connected to the second mating member 23. In other embodiments, the second mating member 23 can be directly rotatably disposed on the receiving frame 21.
[0047] Specifically, see Figure 3 The receiving frame 21 is a square frame structure, with a central shaft 221 passing through the center of the workpiece holder 22. Shaft holes are provided on both the upper and lower sides of the receiving frame 21. The two ends of the central shaft 221 pass through the two shaft holes respectively and are clearance-fitted with them. To increase the smoothness of the workpiece holder 22's rotation, bearings can also be installed between the central shaft 221 and the shaft holes. Specifically, the workpiece holder 22 is a rotating workpiece loading rack, with the surface of the workpiece to be coated facing outwards and hung on the rotating workpiece loading rack. Since the rotating workpiece loading rack is existing technology, its structure and principle will not be described in detail here.
[0048] By setting a rotating first mating member 11 in each vacuum processing chamber 10, the first mating member 11 is moved in a direction close to or away from the second mating member 23, and multiple workpieces are loaded onto the workpiece holder 22. When the first mating member 11 and the second mating member 23 are mated, the first mating member 11 drives the workpiece holder 22 to rotate, completing the vacuum processing of multiple workpieces. After the workpiece vacuum processing is completed, the first mating member 11 and the second mating member 23 are disengaged, avoiding the need to set a loading device in each vacuum processing chamber 10, reducing the structural complexity and manufacturing cost of the vacuum processing chamber 10. The workpiece loading mechanism moves along the first direction, driving multiple workpieces to other chambers, avoiding the need for separate unloading and reloading processes when transferring workpieces between chambers, reducing the risk of workpiece film contamination, avoiding multiple workpiece transfer operations that lead to extended production cycles, and improving the efficiency of workpiece vacuum processing. In this embodiment, the workpiece loading mechanism 20 does not need to move up and down when transferring between multiple chambers, only horizontal movement is involved, further reducing the risk of workpiece film contamination.
[0049] Specifically, see Figure 4 and Figure 5 The vacuum processing chamber 10 also includes a transmission mechanism 30, which includes a transmission component 31, a third mating component 32, and a fixing component 33. The fixing component 33 and the third mating component 32 are rotatably disposed in the vacuum processing chamber 10. The first mating component 11 is rotatably disposed on the fixing component 33. The rotation of the fixing component 33 drives the first mating component 11 to move closer to or away from the second mating component 23. The third mating component 32 and the first mating component 11 are connected by transmission through the transmission component 31.
[0050] In this embodiment, the fixing member 33 is set as a fixing rod, and the first mating member 11 is rotatably connected to the fixing rod through a rotating shaft. The fixing rod rotates clockwise or counterclockwise, causing the first mating member 11 to swing, thereby causing the first mating member 11 to move in a direction closer to or away from the second mating member 23.
[0051] In this embodiment, the first mating component 11 is configured as a combination of a sprocket and a gear, that is, the end faces of the sprocket and the gear are coaxially fixed by adhesive bonding or mechanical connection. The second mating component 23 is configured as a gear, the third mating component 32 is configured as a sprocket, and the transmission component 31 is configured as a chain. The chain is wound around the outside of the sprockets of the first mating component 11 and the sprockets of the third mating component 32. The third mating component 32 rotates and drives the first mating component 11 to rotate through the chain. The gear part of the first mating component 11 moves in the direction close to the second mating component 23 through the fixing component 33. The tooth block of the first mating component 11 meshes with the tooth block of the second mating component 23 to drive the second mating component 23 to rotate, thereby driving the workpiece holder 22 to rotate.
[0052] In other embodiments, the first mating member 11 and the second mating member 23 can both be set as magnets, or one of them can be set as a magnet and the other as a ferromagnetic material. In this case, the first mating member 11 and the second mating member 23 are at different heights in the vertical direction. When the fixing member 33 drives the first mating member 11 to swing, the first mating member 11 is located above the second mating member 23. The third mating member 32 drives the first mating member 11 to rotate through a belt or other connecting member, thereby driving the second mating member 23 to rotate.
[0053] Furthermore, the transmission mechanism 30 also includes a first limiting member located on the rotation path of the fixed member 33 to limit the rotation distance of the fixed member 33, thereby limiting the actual center distance between the first mating member 11 and the second mating member 23. Specifically, the first limiting member can be configured as a stop block located on the rotation path of the fixed member 33. Specifically, a flexible buffer member, such as a rubber pad, spring, or rubber column, is provided on the side of the stop block near the fixed member 33 to avoid hard contact between the fixed member 33 and the stop block, which would cause wear on the fixed member 33. It should be noted that, in order to avoid long-term meshing and mutual wear between the first mating member 11 and the second mating member 23, the actual center distance between the first mating member 11 and the second mating member 23 is greater than the theoretical center distance between the first mating member 11 and the second mating member 23, based on the requirement that the teeth of the first mating member 11 can contact the teeth of the second mating member 23 and rotate the second mating member 23. Those skilled in the art can adjust the value of the actual center distance according to the actual situation on site.
[0054] Further, see Figure 6 The vacuum processing chamber 10 further includes a drive mechanism 40, which includes a first drive member 41 connected to a third mating member 32 to drive the third mating member 32 to rotate, thereby causing the first mating member 11 to rotate. The drive mechanism 40 also includes a second drive member 42 connected to a fixing member 33 to drive the fixing member 33 to rotate, thereby causing the first mating member 11 to move in a direction closer to or further away from the second mating member 23. In this embodiment, both the first drive member 41 and the second drive member 42 are motors. In other embodiments, both the first drive member 41 and the second drive member 42 are cylinders. In other embodiments, the first drive member 41 and the second drive member 42 can be linear motors or hydraulic cylinders, etc. In this embodiment, see reference... Figure 7The drive mechanism 40 also includes a first shaft 43 and a second shaft 44. The vacuum processing chamber 10 includes a shaft hole. The first shaft 43 passes through the shaft hole and is connected at one end to the first drive member 41, and at the other end to the rotation center of the third mating member 32. The second shaft 44 is sleeved outside the first shaft 43. The second shaft 44 passes through the shaft hole and is connected at one end to the second drive member 42, and at the other end to the end of the fixing member 33. The fixing member 33 is located on the side of the third mating member 32 closer to the first drive member 41. Furthermore, the drive mechanism 40 also includes a magnetic fluid 45, which is disposed between the first shaft 43, the second shaft 44 and the shaft hole to increase the sealing between the first shaft 43, the second shaft 44 and the shaft hole, preventing gas leakage in the vacuum processing chamber 10.
[0055] Further, see Figure 2 The vacuum processing chamber 10 also includes a positioning mechanism 50, which includes a positioning rod 51. The second mating member 23 has a positioning hole 231 located away from the geometric center of the central axis 221. The positioning rod 51 can move towards or away from the positioning hole 231 to insert into or disengage from it. When the workpiece loading mechanism 20 approaches the mating position, a slight deviation occurs. Inserting the positioning rod 51 into the positioning hole 231 corrects the position of the workpiece loading mechanism 20, improving the accuracy of the mating between the first mating member 11 and the second mating member 23. Specifically, the positioning mechanism 50 also includes a fourth driving member 52, which is connected to the positioning rod 51 to drive the positioning rod 51 to move towards or away from the positioning hole 231. In this embodiment, the fourth driving member 52 is a cylinder. In other embodiments, the fourth driving member 52 can be a linear motor or a hydraulic cylinder, etc.
[0056] For example, the workpiece loading mechanism 20 moves along the first direction. When the workpiece loading mechanism 20 reaches the mating position, it stops moving. The fourth driving member 52 drives the positioning rod 51 to move along the direction close to the positioning hole 231 and insert into the positioning hole 231 to correct the position of the workpiece loading mechanism 20. The second driving member 42 runs, causing the fixing member 33 to swing, thereby causing the first mating member 11 to approach the second mating member 23 and mesh with each other. After the fixing member 33 is limited by the first limiting member, the first driving member 41 runs to drive the third mating member 32 to rotate. The third mating member 32 drives the first mating member 11 to rotate through the transmission member 31, thereby driving the second mating member 23 to rotate.
[0057] Furthermore, the positioning mechanism 50 also includes a detection element disposed on the inner wall of the vacuum processing chamber 10 to detect whether the relative positions of the first mating part 11 and the second mating part 23 in the first direction meet the mating conditions. Specifically, after the workpiece loading mechanism 20 moves into the detection range of the detection element along the first direction, the moving speed of the workpiece loading mechanism 20 along the first direction slows down. When the relative positions of the first mating part 11 and the second mating part 23 in the first direction meet the mating conditions, the workpiece loading mechanism 20 stops moving along the first direction. Specifically, multiple detection elements are provided to increase the accuracy of detection. Specifically, the detection element is a distance sensor, and the error of the distance sensor is ±1mm. It should be noted that since the distance sensor is existing technology, its specific structure and principle will not be described in detail here.
[0058] Further, see Figures 8-10 The vacuum processing chamber 10 also includes a limiting mechanism 60, which is located at the top or bottom of the vacuum processing chamber 10. The limiting mechanism 60 includes a second limiting member 61, which can move in a direction close to or away from the workpiece loading mechanism 20 and abut or disengage from the receiving frame 21 to restrict the workpiece loading mechanism 20 from moving in the first direction. Specifically, the limiting mechanism 60 also includes a connecting rod 62 and a third driving member. One end of the connecting rod 62 is connected to the second limiting member 61, and the other end is connected to the third driving member. In this embodiment, the third driving member is a cylinder. In other embodiments, the third driving member can be a linear motor or a hydraulic cylinder, etc. Specifically, the connecting rod 62 is a telescopic rod, and the third driving member can drive the connecting rod 62 to extend or retract, thereby causing the second limiting member 61 to move in a direction close to or away from the workpiece loading mechanism 20. In this embodiment, the limiting mechanism 60 is located at the bottom of the vacuum processing chamber 10 and the second limiting member 61 abuts against the center position of one side of the workpiece loading mechanism 20, so that the abutting force between the second limiting member 61 and the workpiece loading mechanism 20 is evenly distributed, and the workpiece loading mechanism 20 is prevented from shifting or tilting due to abutment.
[0059] Further, see Figure 2The vacuum processing chamber 10 also includes a conveying mechanism 70, which includes a support base 71 and guide wheels 72. The support base 71 extends along a first direction, and multiple guide wheels 72 are rotatably disposed on the support base 71 and spaced apart along the first direction. The workpiece loading mechanism 20 can slide or roll with the guide wheels 72 to move along the first direction. In other embodiments, sprockets, slide rails, and lead screws can be used instead of guide wheels 72, which is not limited here. When sprockets and slide rails are used, pulleys are adapted to be provided at the bottom of the workpiece loading mechanism 20. When lead screws are used, nuts or threaded holes are adapted to be provided at the bottom of the workpiece loading mechanism 20. Specifically, the support base 71 and guide wheels 72 are connected by a rotating shaft, and a limiting element is provided on the rotating shaft to limit the axial movement of the guide wheels 72. Since the limiting element is prior art, it will not be described in detail here. Specifically, multiple guide wheels 72 are driven by chains and sprockets. Since chains and sprockets are prior art, they will not be described in detail here. In this embodiment, two sets of conveying mechanisms 70 are arranged at intervals along a horizontal direction perpendicular to the first direction.
[0060] Furthermore, the vacuum processing chamber 10 also includes an offset mechanism located at the bottom of the workpiece loading mechanism 20. The offset mechanism can cooperate with the workpiece loading mechanism 20 to offset along a first direction and / or a second direction, wherein the second direction is perpendicular to the first direction. In this embodiment, the second direction is the X-axis direction.
[0061] See Figure 8 In one embodiment, the offset mechanism includes a guide 84, a carrier 85, and an aerosol ball 81 or a universal ball. The guide 84 is stationary relative to the receiving frame 21 in a first direction. A guide groove is provided on one side of the guide 84 along the first direction. The guide groove can slide with the guide wheel 72. The carrier 85 is connected to the guide 84. The carrier 85 has an opening on one side and a bearing cavity inside. The aerosol ball 81 floats with the bearing cavity. When the positioning rod 51 is inserted into the positioning hole 231, the aerosol ball 81 can move adaptively relative to the bearing cavity along the first direction and / or the second direction to correct the position of the workpiece loading mechanism 20.
[0062] See Figure 9 In one embodiment, the offset mechanism includes a sliding guide rail 82, one side of which is connected to the workpiece loading mechanism 20, and the other side is slidably engaged with the guide wheel 72 in a first direction. When the positioning rod 51 is inserted into the positioning hole 231, the sliding guide rail 82 can adaptively move in the first direction to correct the position of the workpiece loading mechanism 20.
[0063] See Figure 10In one embodiment, the offset mechanism includes a sliding guide rail 82 and a magnetic element 83. One side of the sliding guide rail 82 is connected to the workpiece loading mechanism 20, and the other side is slidably engaged with the guide wheel 72 in a first direction. Magnetic elements 83 are provided on the bottom wall of the vacuum processing chamber 10 and the bottom of the accommodating frame 21. When the workpiece loading mechanism 20 is in place, the same level of the two magnetic elements 83 approaches each other and generates a repulsive force, causing the workpiece loading mechanism 20 to float in the vertical direction. That is, a gap is generated between the sliding guide rail 82 and the guide wheel 72. When the positioning rod 51 is inserted into the positioning hole 231, the sliding guide rail 82 can be adaptively moved in the first direction and / or the second direction to correct the position of the workpiece loading mechanism 20.
[0064] Exemplary, in the vacuum processing chamber 10 provided in this embodiment, when the workpiece loading mechanism 20 moves into the vacuum processing chamber 10 along the first direction, after the workpiece loading mechanism 20 enters the detection range of the detection element, the moving speed of the workpiece loading mechanism 20 along the first direction slows down, and the third driving member drives the second limiting member 61 to move along the direction close to the vacuum loading mechanism 20. When the workpiece loading mechanism 20 is in place, that is, the receiving frame 21 abuts against the second limiting member 61, at this time the relative positions of the first mating member 11 and the second mating member 23 in the first direction meet the mating conditions, the workpiece loading mechanism 20 stops moving along the first direction, the detection element sends a signal to the fourth driving member 52, the fourth driving member 52 drives the positioning rod 51 to insert into the positioning hole 231, after the positioning rod 51 is inserted, the second driving member 42 runs, driving the fixing member 33 to swing, thereby driving the first mating member 11 to move along the first direction. When the first mating part 11 approaches the second mating part 23 and engages with it, during the swinging of the fixed part 33, the fixed part 33 will contact the first limiting part. After the fixed part 33 is limited by the first limiting part, the first driving part 41 runs and drives the third mating part 32 to rotate. The third mating part 32 drives the first mating part 11 to rotate through the transmission part 31, thereby driving the second mating part 23 to rotate, and thus driving the workpiece holder 22 to rotate. Then the vacuum treatment mechanism performs vacuum treatment on the workpiece. When the workpiece vacuum treatment is completed, the first driving part 41 stops running, the second driving part 42 runs, and drives the fixed part 33 to swing, thereby driving the first mating part 11 away from the second mating part 23, so that the first mating part 11 and the second mating part 23 disengage. The fourth driving part 52 drives the positioning rod 51 to disengage from the positioning hole 231, and the workpiece loading mechanism 20 moves along the first direction to reach other chambers.
[0065] In one embodiment, the vacuum processing chamber 10 further includes a fixing mechanism that abuts against the receiving frame 21 to restrict the movement of the receiving frame 21. Specifically, the fixing mechanism can be configured as multiple telescopic cylinders, the cylinder rods of which can extend and retract to abut against the receiving frame 21 to fix the position of the receiving frame 21. In other embodiments, the fixing mechanism can also be configured as a fixing gripper, etc. Since the fixing mechanism is prior art, it will not be described in detail here.
[0066] See Figure 1 This embodiment also provides a multi-chamber vacuum processing device, including a loading chamber 1, a unloading chamber 2, and at least one vacuum processing chamber 10. The loading chamber 1, the at least one vacuum processing chamber 10, and the unloading chamber 2 are arranged sequentially along a first direction and can be selectively connected. Specifically, a gate 3 can be provided between the loading chamber 1, the vacuum processing chamber 10, and the unloading chamber 2 to maintain the independence of each chamber and avoid mutual interference between the vacuum processing of multiple chambers. In one embodiment, the loading chamber 1 and the unloading chamber 2 have the same structure as the vacuum processing chamber 10 to reduce design costs and facilitate the addition of other vacuum processing mechanisms in the loading chamber 1 and the unloading chamber 2, increasing the versatility of the loading chamber 1 and the unloading chamber 2. In one embodiment, the loading chamber 1 and the unloading chamber 2 have different structures from the vacuum processing chamber 10, for example, no vacuum processing source is provided. Therefore, the structure of the loading chamber 1 and the unloading chamber 2 is relatively simple to save material and maintenance costs.
[0067] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.
Claims
1. A vacuum processing chamber, characterized in that, The top and / or bottom of the vacuum processing chamber (10) are rotatably provided with a first mating member (11), and the vacuum processing chamber (10) includes: A workpiece loading mechanism (20) is movably disposed in the vacuum processing chamber (10) along a first direction, including a receiving frame (21) and a workpiece holder (22). Multiple workpieces are loaded on the workpiece holder (22). The workpiece holder (22) is provided with a central shaft (221) in a vertical direction. The workpiece holder (22) is rotatably disposed on the receiving frame (21) around the central shaft (221). A second mating part (23) is connected to the top and / or bottom of the central shaft (221). The first mating member (11) can move in a direction close to or away from the second mating member (23) to engage or disengage with the second mating member (23).
2. The vacuum processing chamber of claim 1, wherein, The vacuum processing chamber (10) further includes a transmission mechanism (30), which includes a transmission component (31), a third mating component (32), and a fixing component (33). The fixing component (33) and the third mating component (32) are rotatably disposed in the vacuum processing chamber (10). The first mating component (11) is rotatably disposed on the fixing component (33). The fixing component (33) rotates to drive the first mating component (11) to move closer to or away from the second mating component (23). The third mating component (32) and the first mating component (11) are connected by transmission through the transmission component (31).
3. The vacuum processing chamber of claim 2, wherein, The transmission mechanism (30) further includes a first limiting member located on the rotation path of the fixing member (33) to limit the rotation distance of the fixing member (33), thereby limiting the actual center distance between the first mating member (11) and the second mating member (23).
4. The vacuum processing chamber of claim 2, wherein, The vacuum processing chamber (10) further includes a drive mechanism (40), which includes a first drive member (41) connected to the third mating member (32) to drive the third mating member (32) to rotate, thereby driving the first mating member (11) to rotate.
5. The vacuum processing chamber of claim 4, wherein, The drive mechanism (40) further includes a second drive member (42), which is connected to the fixing member (33) to drive the fixing member (33) to rotate, thereby causing the first mating member (11) to move in a direction closer to or away from the second mating member (23).
6. The vacuum processing chamber of claim 1, wherein, The vacuum processing chamber (10) further includes a positioning mechanism (50), which includes a positioning rod (51). The second mating member (23) is provided with a positioning hole (231) at a position away from the geometric center of the central axis (221). The positioning rod (51) can move in a direction close to or away from the positioning hole (231) to insert into or disengage from the positioning hole (231).
7. The vacuum processing chamber of any of claims 1-6, wherein, The vacuum processing chamber (10) further includes a limiting mechanism (60), which is located at the top or bottom of the vacuum processing chamber (10). The limiting mechanism (60) includes a second limiting member (61), which can move in a direction close to or away from the workpiece loading mechanism (20) and abut or disengage from the receiving frame (21) to restrict the workpiece loading mechanism (20) from moving in the first direction.
8. The vacuum processing chamber of any of claims 1-6, wherein, The vacuum processing chamber (10) further includes a conveying mechanism (70), which includes a support base (71) and guide wheels (72). The support base (71) extends along the first direction, and the guide wheels (72) are rotatably disposed on the support base (71) and are spaced apart along the first direction. The workpiece loading mechanism (20) can slide or roll with the guide wheels (72) to move along the first direction.
9. The vacuum processing chamber of claim 8, wherein, The vacuum processing chamber (10) further includes an offset mechanism located at the bottom of the workpiece loading mechanism (20). The offset mechanism is capable of offsetting the workpiece loading mechanism (20) along the first direction and / or the second direction, wherein the second direction is perpendicular to the first direction.
10. A multi-chamber vacuum processing apparatus, characterized by, It includes a loading chamber (1), a unloading chamber (2), and at least one vacuum processing chamber (10) as described in any one of claims 1-9, wherein the loading chamber (1), at least one of the vacuum processing chambers (10), and the unloading chamber (2) are arranged sequentially along the first direction and are selectively connected.