Plate conveying device for workpiece hanging plate transfer cabin of large vacuum coating machine

Abstract

The utility model discloses a plate conveying device for a workpiece hanging plate transfer cabin of a large vacuum coating machine, and belongs to the technical field of plate conveying of the transfer cabin of the vacuum coating machine, and the plate conveying device is characterized by comprising a transfer cabin, and an automatic controller is arranged on the right side of the transfer cabin. The driving structure drives the conveying belt to rotate according to an instruction of the automatic controller, so that the workpiece hanging plates clamped by the soft clamps on the outer side of the conveying belt are continuously conveyed, the workpiece hanging plates are efficiently transferred, and when a single workpiece hanging plate moves between the top clamping plate and the bottom clamping plate, a distance sensor in the clamping plate senses that the workpiece hanging plate is close to the workpiece hanging plate; when the workpiece hanging plate is clamped, a signal is fed back to the automatic controller, the automatic controller immediately starts the electric push rod in the moving plate to push the clamping plate to accurately clamp the top and the bottom of the workpiece hanging plate under the assistance of the distance sensor, and then the automatic controller starts the electric telescopic rod to push the moving plate and the clamped workpiece hanging plate to a feeding port of the coating machine.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating machine technology, and in particular to a plate feeding device for workpiece hanging plate transfer chamber in a large vacuum coating machine. Background Technology

[0002] The technological development trend of vacuum coating equipment is twofold: firstly, to increase production capacity and efficiency, and secondly, to improve the quality and stability of coated products. To increase production capacity and efficiency, equipment designs are becoming larger, with increasing loading capacity, and individual workpiece fixtures are becoming larger and heavier. To improve film quality and stability, in addition to introducing new coating technologies and processes, a fundamental requirement is to control the coating atmosphere inside the furnace to remain stable. It is necessary to ensure that the residual gas inside the furnace is reduced to a minimum and remains consistent in each batch. To achieve the above requirements, the most effective means is to carry out the coating and workpiece loading and unloading processes in a vacuum without breaking the vacuum. In this way, each batch is coated under the same vacuum environment, and the atmosphere inside the furnace is not polluted by the atmosphere due to vacuum breaking, which can maintain the consistency of the residual atmosphere between furnaces. This will greatly improve the quality and consistency of the film.

[0003] During the operation of a large vacuum coating machine, the workpiece mounting plate needs to be transferred into the coating machine through a transfer chamber. However, the existing plate feeding method is often inefficient and prone to problems such as inaccurate positioning of the mounting plate and collision damage, which affects the coating quality and production efficiency.

[0004] To address this, a feeding device for the workpiece hanging plate transfer chamber of a large vacuum coating machine is proposed. Utility Model Content

[0005] The purpose of this utility model is to provide a feeding device for the workpiece hanging plate transfer chamber of a large vacuum coating machine, which can solve the problems that existing feeding methods are often inefficient and prone to inaccurate hanging plate positioning and collision damage, thus affecting coating quality and production efficiency.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a plate feeding device for a workpiece hanging plate transfer chamber of a large vacuum coating machine, comprising a transfer chamber, an automatic controller provided on the right side of the transfer chamber, a plate feeding mechanism provided inside the transfer chamber, and a workpiece hanging plate provided on the inner side of the plate feeding mechanism.

[0007] The plate feeding mechanism includes a drive structure disposed on the top and bottom sides inside the transfer chamber. A conveyor belt is sleeved on the outside of the drive structure. A soft clamp is bolted to the outside of the conveyor belt. The inside of the soft clamp is engaged with the outside of the workpiece hanging plate. Fixed rods are bolted to the top and bottom sides inside the transfer chamber. An electric telescopic rod is bolted to the front side of the fixed rod. A moving plate is bolted to the telescopic end of the electric telescopic rod. Electric push rods are embedded on both sides of the inner side of the moving plate. A clamping plate is disposed on the inner side of the moving plate. The outside of the clamping plate is bolted to the telescopic end of the electric push rod. The clamping plates are located at the top and bottom of the front workpiece hanging plate, respectively. A distance sensor is embedded inside the clamping plate. The distance sensor, electric push rod, electric telescopic rod, and drive structure are all electrically connected to the automatic controller.

[0008] Preferably, the drive structure includes servo motors embedded in the top and bottom left side of the transfer compartment, and the servo motors are electrically connected to the automatic controller.

[0009] Preferably, the output end of the servo motor is fixedly connected to a drive shaft, the outer side of the drive shaft is in contact with the inner side of the conveyor belt, and the top and bottom of both sides of the transfer chamber are rotatably connected to auxiliary shafts, the outer side of the auxiliary shafts being in contact with the inner side of the conveyor belt.

[0010] Preferably, limiting plates are fixedly connected to both sides of the surface of the drive shaft and the inner side of the auxiliary shaft, and the outer side of the limiting plates is in contact with the inner side of the conveyor belt.

[0011] Preferably, a transparent panel is embedded in the right side of the transfer compartment, and the transparent panel is made of high-strength transparent glass.

[0012] Preferably, a loading port is provided on the rear side of the right side of the transfer compartment, and an opening and closing door is provided on the outer side of the loading port, the opening and closing door being located on the right side of the workpiece hanging plate.

[0013] Preferably, the inside of the clamping plate is provided with a transparent protective plate, which is located outside the distance sensor.

[0014] Preferably, the interior of the soft clip is grooved, and the soft clip is made of vacuum-grade rubber material.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] 1. This application connects the transfer chamber to the coating machine inlet by setting up a plate feeding mechanism. The drive structure drives the conveyor belt to rotate according to the instructions of the automatic controller, so that the workpiece hanging plate clamped by the soft clamp on the outside of the conveyor belt can be continuously transported, and the transfer of workpiece hanging plates can be completed efficiently. When a single workpiece hanging plate moves between the top and bottom clamping plates, the distance sensor in the clamping plate senses that the distance to the workpiece hanging plate is close and feeds back the signal to the automatic controller. The automatic controller then activates the electric push rod in the moving plate to push the clamping plate to accurately clamp the top and bottom of the workpiece hanging plate with the assistance of the distance sensor. Then, the automatic controller activates the electric telescopic rod to push the moving plate and the clamped workpiece hanging plate to the coating machine inlet. At the same time, the drive structure drives the conveyor belt to continue to rotate, so that the next workpiece hanging plate reaches the designated position. After that, the electric telescopic rod drives the moving plate and related components to reset, and performs the same clamping and conveying operation on the next workpiece hanging plate according to the instructions of the automatic controller. The overall coordination greatly improves the positioning accuracy of the workpiece hanging plate and avoids the collision damage caused by inaccurate positioning, thereby effectively improving the coating quality and production efficiency.

[0017] 2. By setting up a drive structure, this application provides stable power to the conveyor belt, ensuring smooth operation of the conveyor belt and guaranteeing the continuity and stability of the workpiece hanging plate conveying process. This stable conveying reduces the possibility of the workpiece hanging plate shaking or shifting during the transfer process, further reducing the risk of collision damage and helping to improve the reliability and efficiency of overall production. Attached Figure Description

[0018] Figure 1 This is an overall structural diagram of the feeding device for the workpiece hanging plate transfer chamber of a large vacuum coating machine according to this utility model.

[0019] Figure 2 This is a structural diagram of the transfer compartment of this utility model;

[0020] Figure 3 This is a structural diagram of the plate feeding mechanism of this utility model;

[0021] Figure 4 This is a structural diagram of the servo motor of this utility model;

[0022] Figure 5 This is a structural diagram of the conveyor belt of this utility model;

[0023] Figure 6 This is a structural diagram of the present invention with an added plate opening.

[0024] In the diagram: 1. Transfer chamber; 2. Automatic controller; 3. Plate feeding mechanism; 31. Drive structure; 311. Servo motor; 312. Drive shaft; 313. Auxiliary shaft; 314. Limiting plate; 32. Conveyor belt; 33. Soft clamp; 34. Fixing rod; 35. Electric telescopic rod; 36. Plate shifting; 37. Electric push rod; 38. Clamping plate; 39. Distance sensor; 4. Workpiece hanging plate; 5. Transparent plate; 6. Plate adding port; 7. Opening and closing door; 8. Transparent protective plate. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Please see Figure 1-6 The present invention provides the following technical solution:

[0027] A plate feeding device for a workpiece hanging plate transfer chamber of a large vacuum coating machine includes a transfer chamber 1, an automatic controller 2 is provided on the right side of the transfer chamber 1, a plate feeding mechanism 3 is provided inside the transfer chamber 1, and a workpiece hanging plate 4 is provided on the inner side of the plate feeding mechanism 3.

[0028] The plate feeding mechanism 3 includes a drive structure 31 located on the top and bottom sides inside the transfer chamber 1. A conveyor belt 32 is sleeved on the outside of the drive structure 31. A soft clamp 33 is bolted to the outside of the conveyor belt 32. The inside of the soft clamp 33 is engaged with the outside of the workpiece hanging plate 4. Fixed rods 34 are bolted to the top and bottom sides inside the transfer chamber 1. An electric telescopic rod 35 is bolted to the front side of the fixed rod 34. A moving plate 36 is bolted to the telescopic end of the electric telescopic rod 35. Electric push rods 37 are embedded on both sides of the inner side of the moving plate 36. A clamping plate 38 is provided on the inner side of the moving plate 36. The outside of the clamping plate 38 is bolted to the telescopic end of the electric push rod 37. The clamping plate 38 is located at the top and bottom of the front workpiece hanging plate 4. A distance sensor 39 is embedded inside the clamping plate 38. The distance sensor 39, electric push rod 37, electric telescopic rod 35 and drive structure 31 are all electrically connected to the automatic controller 2.

[0029] In this embodiment: By setting up the plate feeding mechanism 3, firstly, the transfer chamber 1 is connected to the coating machine inlet, and a multi-layer sealing structure is adopted between the transfer chamber 1 and the coating machine inlet. Then, the automatic controller 2 sends a command to the drive structure 31, which drives the conveyor belt 32 to rotate. The soft clamp 33 on the outside of the conveyor belt 32 clamps the workpiece hanging plate 4. As the conveyor belt 32 rotates, the workpiece hanging plate 4 is continuously conveyed. When a workpiece hanging plate 4 moves between the top and bottom clamping plates 38, the distance sensor 39 in the clamping plate 38 senses that the distance to the workpiece hanging plate 4 is close and quickly feeds back the signal to the automatic controller 2. After receiving the signal, the automatic controller 2 immediately controls the electric push rod 37 in the moving plate 36 to move, pushing the clamping plate 38 to accurately clamp the workpiece hanging plate 4 from the top and bottom. Subsequently, the automatic controller 2 controls the extension of the electric telescopic rod 35, pushing the transfer plate 36 and the clamped workpiece hanging plate 4 forward to feed them into the coating machine inlet. During this process, the drive structure 31, equipped with the instructions of the automatic controller 2, continuously drives the conveyor belt 32 to rotate, moving the next workpiece hanging plate 4 to the designated position. When a workpiece hanging plate 4 is successfully fed into the coating machine, the automatic controller 2 controls the electric telescopic rod 35 to retract, driving the transfer plate 36 and related components back to the initial position, ready to repeat the above clamping and conveying operation for the next workpiece hanging plate 4. Under the unified coordination of the automatic controller 2, all components work closely together, which not only improves the conveying efficiency of the workpiece hanging plate 4, but also ensures the accuracy of positioning and avoids collision damage to the workpiece hanging plate 4, thereby improving the coating quality and production efficiency.

[0030] Specifically, such as Figure 4 As shown, the drive structure 31 includes a servo motor 311 embedded in the top and bottom left side of the transfer compartment 1, and the servo motor 311 is electrically connected to the automatic controller 2.

[0031] Specifically, such as Figure 4 As shown, the output end of the servo motor 311 is fixedly connected to the drive shaft 312. The outer side of the drive shaft 312 contacts the inner side of the conveyor belt 32. The top and bottom of both sides of the transfer chamber 1 are rotatably connected to the auxiliary shaft 313. The outer side of the auxiliary shaft 313 contacts the inner side of the conveyor belt 32.

[0032] Specifically, such as Figure 4 As shown, both sides of the surface of the drive shaft 312 and the inner side of the auxiliary shaft 313 are fixedly connected to the limiting piece 314, and the outer side of the limiting piece 314 is in contact with the inner side of the conveyor belt 32.

[0033] In this embodiment: by setting the drive structure 31, the automatic controller 2 sends a command to the servo motor 311. The servo motor 311 starts according to the running program set by the automatic controller 2 and drives the drive shaft 312 to rotate. Since the outer side of the drive shaft 312 is in contact with the inner side of the conveyor belt 32, the rotation of the drive shaft 312 drives the conveyor belt 32 to run. The auxiliary shaft 313 in the transfer chamber 1 plays the role of auxiliary support and guidance of the conveyor belt 32, ensuring that the conveyor belt 32 can rotate smoothly. The limiting piece 314 on the drive shaft 312 and the auxiliary shaft 313 limits the conveyor belt 32 to prevent it from deviating during operation, ensuring that the workpiece hanging plate 4 can be transported stably and accurately with the conveyor belt 32, providing a solid foundation for the efficient operation of the entire plate feeding process.

[0034] Specifically, such as Figure 6 As shown, a transparent panel 5 is embedded in the right side of the transfer compartment 1. The transparent panel 5 is made of high-strength transparent glass.

[0035] Specifically, such as Figure 6 As shown, a plate-adding opening 6 is provided on the rear right side of the transfer chamber 1, and an opening and closing door 7 is provided on the outer side of the plate-adding opening 6. The opening and closing door 7 is located on the right side of the workpiece hanging plate 4.

[0036] In this embodiment: By setting up a viewing panel 5, a plate-adding port 6, and an opening and closing door 7, the viewing panel 5, made of high-strength transparent glass, allows operators to observe in real time the conveying status of the workpiece hanging plate 4 in the transfer chamber 1 and the operating status of the equipment, so as to promptly identify problems and take corresponding measures. Also, when a batch of workpiece hanging plates 4 is used up and it is necessary to add more workpiece hanging plates 4, the opening and closing door 7 on the outside of the plate-adding port 6 can be opened, and the workpiece hanging plate 4 can be placed into the transfer chamber 1 through the plate-adding port 6 and engaged with the soft clamp 33 on the outside of the conveyor belt 32. During this process, an additional conveyor belt 32 is added to move the outer soft clamp 33 forward by one position, thereby facilitating use.

[0037] Specifically, such as Figure 3 As shown, a transparent protective plate 8 is provided inside the clamping plate 38, and the transparent protective plate 8 is located outside the distance sensor 39.

[0038] Specifically, such as Figure 5 As shown, the interior of the soft clip 33 is grooved, and the soft clip 33 is made of vacuum-grade rubber material.

[0039] In this embodiment: By setting a transparent protective plate 8, which is located outside the distance sensor 39, the transparent protective plate 8 can protect the distance sensor 39 without affecting its sensing function, preventing damage to the distance sensor 39 from collisions, dust, etc. that may occur during the plate feeding process, ensuring the stable operation of the distance sensor 39, and thus ensuring the accuracy of the workpiece hanging plate 4 positioning. In addition, the groove shape inside the soft clamp 33 is easy to engage with the outside of the workpiece hanging plate 4, which can firmly fix the workpiece hanging plate 4 and prevent it from shaking or falling off during the conveying process. At the same time, the soft clamp 33, made of vacuum-grade rubber material, can adapt to the high temperature vacuum environment inside the large vacuum coating machine and is not easily decomposed or volatilized, ensuring the stability of the atmosphere inside the furnace, not easily deformed or damaged, extending the service life of the soft clamp 33, and ensuring the stable operation of the plate feeding process.

[0040] Working Principle: During the use of the workpiece hanging plate 4 transfer chamber feeding device in a large vacuum coating machine, the transfer chamber 1 is first connected to the coating machine's feed inlet. The automatic controller 2, as the core control unit, begins to coordinate the work of each component. The automatic controller 2 sends a command to the servo motor 311 in the drive structure 31. The servo motor 311 starts and drives the drive shaft 312 to rotate. The outer side of the drive shaft 312 contacts the inner side of the conveyor belt 32, thereby driving the conveyor belt 32 to rotate. The auxiliary shafts 313 on both sides inside the transfer chamber 1 assist in supporting and guiding the conveyor belt 32, ensuring its smooth circulation. The limiting plates 314 on the drive shaft 312 and auxiliary shaft 313 prevent the conveyor belt 32 from shifting, allowing the soft clamps 33 attached to the outer side of the conveyor belt 32 to stably clamp and transport the workpiece hanging plate 4. When the workpiece hanging plate 4 moves with the conveyor belt 32 between the top and bottom clamping plates 38, the distance sensor 39 inside the clamping plate 38 senses the distance... When the workpiece mounting plate 4 approaches, it quickly sends a signal to the automatic controller 2. Upon receiving the signal, the automatic controller 2 immediately controls the electric push rod 37 inside the transfer plate 36 to move, pushing the clamping plate 38 to precisely clamp the workpiece mounting plate 4 from the top and bottom. Then, the automatic controller 2 controls the electric telescopic rod 35 to extend, pushing the transfer plate 36 and the clamped workpiece mounting plate 4 forward to send it into the coating machine's feed inlet. During this period, the drive structure 31 continuously drives the conveyor belt 32 to rotate according to the instructions of the automatic controller 2, so that the next workpiece mounting plate 4 moves to the designated position. When a workpiece mounting plate 4 is successfully sent into the coating machine, the automatic controller 2 controls the electric telescopic rod 35 to retract, driving the transfer plate 36 and related components back to the initial position, ready to repeat the above clamping and conveying operation for the next workpiece mounting plate 4. The transparent plate 5 embedded on the right side of the transfer chamber 1 allows the operator to observe the situation inside the transfer chamber 1 in real time, and to deal with any abnormalities in a timely manner.

[0041] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A plate feeding device for transferring a workpiece hanging plate of a large vacuum coating machine, comprising a transfer chamber (1), characterized in that: An automatic controller (2) is provided on the right side of the transfer chamber (1), and a plate feeding mechanism (3) is provided inside the transfer chamber (1). A workpiece hanging plate (4) is provided on the inner side of the plate feeding mechanism (3). The plate feeding mechanism (3) includes a drive structure (31) disposed on the top and bottom sides inside the transfer chamber (1). A conveyor belt (32) is sleeved on the outside of the drive structure (31). A soft clamp (33) is bolted to the outside of the conveyor belt (32). The inside of the soft clamp (33) is engaged with the outside of the workpiece hanging plate (4). Fixed rods (34) are bolted to the top and bottom sides inside the transfer chamber (1). An electric telescopic rod (35) is bolted to the front side of the fixed rod (34). The telescopic end of the electric telescopic rod (35) is bolted with a moving plate (36). Electric push rods (37) are embedded in both sides of the inner side of the moving plate (36). A clamping plate (38) is provided on the inner side of the moving plate (36). The outer side of the clamping plate (38) is bolted to the telescopic end of the electric push rod (37). The clamping plate (38) is located at the top and bottom of the front workpiece hanging plate (4). A distance sensor (39) is embedded inside the clamping plate (38).

2. The plate feeding device for transferring a workpiece hanging plate of a large vacuum coating machine according to claim 1, characterized in that: The drive structure (31) includes a servo motor (311) embedded in the top and bottom left side of the transfer compartment (1), and the servo motor (311) is electrically connected to the automatic controller (2).

3. The plate feeding device for transferring a workpiece hanging plate of a large vacuum coating machine according to claim 2, characterized in that: The output end of the servo motor (311) is fixedly connected to the drive shaft (312), the outer side of the drive shaft (312) is in contact with the inner side of the conveyor belt (32), and the top and bottom of both sides of the transfer chamber (1) are rotatably connected to the auxiliary shaft (313), the outer side of the auxiliary shaft (313) is in contact with the inner side of the conveyor belt (32).

4. The plate feeding device for transferring a workpiece hanging plate of a large vacuum coating machine according to claim 3, characterized in that: Limiting plates (314) are fixedly connected to both sides of the surface of the drive shaft (312) and the inner side of the auxiliary shaft (313), and the outer side of the limiting plate (314) is in contact with the inner side of the conveyor belt (32).

5. The plate feeding device for transferring a workpiece hanging plate of a large vacuum coating machine according to claim 1, characterized in that: The right side of the transfer compartment (1) is fitted with a transparent panel (5), which is made of high-strength transparent glass.

6. The plate feeding device for transferring a workpiece hanging plate of a large vacuum coating machine according to claim 1, characterized in that: A loading port (6) is provided on the rear right side of the transfer compartment (1), and an opening and closing door (7) is provided on the outer side of the loading port (6). The opening and closing door (7) is located on the right side of the workpiece hanging plate (4).

7. The plate feeding device for transferring a workpiece hanging plate of a large vacuum coating machine according to claim 1, characterized in that: The clamping plate (38) is provided with a transparent protective plate (8) inside, and the transparent protective plate (8) is located outside the distance sensor (39).

8. A plate feeding device for a workpiece hanging plate transfer chamber in a large vacuum coating machine according to claim 1, characterized in that: The interior of the soft clip (33) is grooved, and the soft clip (33) is made of vacuum-grade rubber material.

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