The invention provides a vertical furnace front conveying device, a
wafer box conveying method of a vertical furnace and a vertical furnace
system.The vertical furnace front conveying device comprises a front shell, a cache fixing device, a translation mechanical arm, a lifting module and a translation conveying module, a
butt joint opening is formed in the front shell and correspondingly connected with an inlet of the vertical furnace, and the translation mechanical arm is arranged in the front shell; the cache fixing device and the translation transmission module are both arranged in the front shell, the lifting module is connected with the translation
manipulator and the translation transmission module, and the translation
manipulator and the translation transmission module move in the first direction and the second direction respectively. According to the front conveying device for the vertical furnace, automatic production is achieved, then the production efficiency is effectively improved, transfer motion is divided into two independent motions in the first direction and the second direction, the overall positioning precision and
motion accuracy are effectively improved, the adaptability of the device is also effectively improved, and the production cost is reduced. And therefore, the reliability and the practicability of the device are improved, and the final quality of products is guaranteed.