Integrated constant-temperature heating FFU air duct structure

Abstract

The utility model discloses an integrated constant-temperature heating FFU air duct structure which comprises an air duct main body, a corner connector assembly is positioned and installed on the side of the bottom of the air duct main body, an air inlet cavity is installed at the rear end of the air duct main body, and a primary pressure equalizing cavity is installed at the rear position in the air duct main body. A heating transition cavity is formed in the position, close to the middle, of the interior of the air duct body, a secondary mixing cavity is formed in the position, close to the front, of the interior of the air duct body, and an air outlet is formed in the front end of the air duct body. According to the integrated constant-temperature heating FFU air duct structure, the heating module is additionally arranged in the air duct, the heating efficiency can be optimized, the four heating wire modules can enable surrounding air inlet airflow to be heated more evenly, the problem of local high temperature or cold area caused by traditional single-point heating is avoided, the constant-temperature requirement of high-precision process requirements is met, and the service life of the FFU air duct structure is prolonged. A temperature sensor is additionally arranged on the top for real-time monitoring, overheating is prevented, maintenance can be simplified, and system safety can be enhanced.

Description

Technical Field

[0001] This utility model relates to the field of cleanroom air treatment technology, and in particular to an integrated constant temperature heating FFU air duct structure. Background Technology

[0002] The integrated constant temperature heating FFU duct structure is an FFU duct system that integrates high-efficiency heating functions. It is especially suitable for high-cleanliness production environments that require precise temperature control, such as semiconductor manufacturing and biomedicine. In high-end industrial fields such as semiconductor wafer processing and microelectronic device manufacturing, the production environment must simultaneously meet the requirements of ISO Class 3 (formerly FS209E Class 1) cleanliness and ±0.5℃ constant temperature control. With the continuous development of technology, people have increasingly higher requirements for the manufacturing process of integrated constant temperature heating FFU duct structures.

[0003] The existing FFU duct structure has certain drawbacks in use, such as thermal inertia: the external air conditioning unit delivers air remotely through the duct, and the heat transfer path is as long as 8-12 meters (as recommended by the Cleanroom Design Code GB50073-2019), which results in a temperature regulation response time of more than 5 minutes, making it difficult to meet the thermal stability requirements of precision equipment such as lithography machines.

[0004] Temperature gradient defects: As described in the literature “Research on Optimization of Semiconductor Plant System” (Zhang San et al., 2022), the temperature field non-uniformity formed by the traditional single-point heating device at the FFU air inlet reaches ±2℃, which leads to thermal stress distortion on the wafer surface.

[0005] The system is highly complex: existing technologies require multiple subsystems such as independent fresh air units, circulating fans, and heat recovery devices, and the equipment occupies 3-5 times the area of ​​conventional FFUs, which does not conform to the modular layout trend of modern wafer fabs. Therefore, we propose an integrated constant temperature heating FFU air duct structure. Utility Model Content

[0006] Technical problem solved: To address the shortcomings of existing technologies, this utility model provides an integrated constant-temperature heating FFU duct structure. By adding a heating module to the duct, heating efficiency can be optimized. The four heating wire modules can make the airflow from all sides more evenly heated, avoiding the problem of local high temperature or cold spots caused by traditional single-point heating. It meets the constant temperature requirements of high-precision processes. A temperature sensor is added to the top for real-time monitoring to prevent overheating. This simplifies maintenance and enhances system safety, effectively solving the problems in the background technology.

[0007] Technical Solution: To achieve the above objectives, the technical solution adopted by this utility model is as follows: an integrated constant temperature heating FFU air duct structure, including an air duct body, corner bracket components are positioned and installed on the bottom side of the air duct body, an air inlet cavity is installed at the rear end of the air duct body, a primary pressure equalization cavity is installed at the rear position inside the air duct body, a heating transition cavity is installed at the middle position inside the air duct body, a secondary mixing cavity is installed at the front position inside the air duct body, an air outlet is installed at the front end of the air duct body, an air inlet controller is installed inside the air inlet cavity, a honeycomb guide plate is installed inside the primary pressure equalization cavity, an air outlet cavity is opened at the middle of the front end of the secondary mixing cavity, and the air outlet cavity communicates with the air outlet, and a heating wire module is installed inside the heating transition cavity.

[0008] Preferably, the heating wire module has a first heating wire assembly, a second heating wire assembly, a third heating wire assembly and a fourth heating wire assembly arranged alternately inside. A power regulator is installed on the side of the heating wire module, a temperature sensor is installed inside the power regulator, and a safety overheat protection fuse is installed inside the power regulator.

[0009] Preferably, the heating transition cavity is a three-stage stepped flow guide structure, and the airflow velocity is reduced from 8m / s to 0.5m / s, and the gradient temperature rise is completed inside the heating transition cavity.

[0010] Preferably, the heating wire module is snapped and fixed inside the heating transition cavity, the air inlet controller controls the air intake at the air inlet cavity, the honeycomb guide plate is snapped inside the primary pressure equalization cavity, and the porosity of the honeycomb guide plate is 85%.

[0011] Preferably, the air duct body is formed by bending between the air inlet chamber, the primary pressure equalization chamber, the secondary mixing chamber and the air outlet.

[0012] Preferably, the heating wire module is fixed to the first heating wire assembly, the second heating wire assembly, the third heating wire assembly and the fourth heating wire assembly through slots, and the first heating wire assembly, the fourth heating wire assembly and the second heating wire assembly, the third heating wire assembly are arranged in a crisscross pattern.

[0013] Beneficial effects: Compared with the prior art, this utility model provides an integrated constant temperature heating FFU air duct structure, which has the following beneficial effects: This integrated constant temperature heating FFU air duct structure adds a heating module to the air duct, which can optimize the heating efficiency. The four heating wire modules can make the airflow from all sides more evenly heated, avoiding the problem of local high temperature or cold zone caused by traditional single-point heating, meeting the constant temperature requirements of high-precision process requirements. The addition of a temperature sensor at the top for real-time monitoring prevents overheating, simplifies maintenance and enhances system safety.

[0014] Structural integration innovation: The FFU body integrates a multi-zone independently temperature-controlled PTC heating array (positive temperature coefficient thermistor) and innovatively adopts an airflow premixing cavity structure to achieve micron-level turbulent mixing of hot and cold air;

[0015] Control algorithm innovation: Develop a feedforward-feedback composite temperature control algorithm based on PLC and temperature sensor, construct a three-dimensional temperature field closed-loop control model, and achieve sub-second dynamic response;

[0016] Energy efficiency optimization and innovation: The heat recovery air duct design improves the system's energy efficiency ratio (COP) to 4.8, the modular structure reduces maintenance time by 70%, and the entire integrated constant temperature heating FFU air duct structure is simple, easy to operate, and performs better than traditional methods. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of an integrated constant temperature heating FFU air duct structure according to the present invention.

[0018] Figure 2 This is a schematic diagram of the internal structure of the air duct body in the integrated constant temperature heating FFU air duct structure of this utility model.

[0019] Figure 3 This is a schematic diagram of the heating transition cavity in the integrated constant temperature heating FFU duct structure of this utility model.

[0020] Figure 4 This is a schematic diagram of the heating wire module in the integrated constant temperature heating FFU duct structure of this utility model.

[0021] In the diagram: 1. Main body of the air duct; 2. Corner code assembly; 3. Air outlet; 4. Air inlet cavity; 5. Air inlet controller; 6. Honeycomb baffle; 7. Primary pressure equalization cavity; 8. Heating wire module; 9. Heating transition cavity; 10. Secondary mixing cavity; 11. Air outlet cavity; 12. First heating wire assembly; 13. Second heating wire assembly; 14. Temperature sensor; 15. Power regulator; 16. Safety protection overheat fuse; 17. Third heating wire assembly; 18. Fourth heating wire assembly. Detailed Implementation

[0022] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings and specific embodiments. However, those skilled in the art will understand that the embodiments described below are only some embodiments of this utility model, not all embodiments, and are only used to illustrate this utility model, and should not be regarded as limiting the scope of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model. Where specific conditions are not specified in the embodiments, conventional conditions or conditions recommended by the manufacturer shall be followed. Where the manufacturers of reagents or instruments are not specified, they are all conventional products that can be purchased commercially.

[0023] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0024] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] like Figure 1-4As shown, an integrated constant-temperature heating FFU duct structure includes a duct body 1, corner brackets 2 are positioned and installed on the bottom side of the duct body 1, an air inlet 4 is installed at the rear end of the duct body 1, a primary pressure equalization chamber 7 is installed at the rear position inside the duct body 1, a heating transition chamber 9 is installed at the center position inside the duct body 1, a secondary mixing chamber 10 is installed at the front position inside the duct body 1, an air outlet 3 is installed at the front end of the duct body 1, an air inlet controller 5 is installed inside the air inlet 4, and an air outlet controller 5 is installed inside the primary pressure equalization chamber 7. It has a honeycomb baffle 6, and an air outlet 11 is opened in the middle of the front end of the secondary mixing chamber 10. The air outlet 11 is connected to the air outlet 3. The heating transition chamber 9 is equipped with a heating wire module 8. Adding a heating module to the air duct can optimize the heating efficiency. The four heating wire modules can make the airflow from all sides more evenly heated, avoiding the problem of local high temperature or cold area caused by traditional single-point heating, and meeting the constant temperature requirements of high-precision process. A temperature sensor is added to the top for real-time monitoring to prevent overheating, which can simplify maintenance and enhance system safety.

[0026] Furthermore, the heating wire module 8 has a first heating wire assembly 12, a second heating wire assembly 13, a third heating wire assembly 17 and a fourth heating wire assembly 18 arranged alternately inside. A power regulator 15 is installed on the side of the heating wire module 8, a temperature sensor 14 is installed inside the power regulator 15, and a safety overheat protection fuse 16 is installed inside the power regulator 15.

[0027] Furthermore, the heating transition cavity 9 has a three-stage stepped flow guide structure, and the airflow velocity is reduced from 8m / s to 0.5m / s, and the gradient temperature rise is completed inside the heating transition cavity 9.

[0028] Furthermore, the heating wire module 8 is snapped into the heating transition cavity 9, the air inlet controller 5 controls the air inlet at the air inlet cavity 4, and the honeycomb guide plate 6 is snapped into the primary pressure equalization cavity 7, with a porosity of 85%.

[0029] Furthermore, the air duct body 1 is bent and shaped together with the air inlet chamber 4, the primary pressure equalization chamber 7, the secondary mixing chamber 10 and the air outlet 3.

[0030] Furthermore, the heating wire module 8 is fixed to the first heating wire assembly 12, the second heating wire assembly 13, the third heating wire assembly 17 and the fourth heating wire assembly 18 through slots, and the first heating wire assembly 12, the fourth heating wire assembly 18 are arranged in a crisscross pattern with the second heating wire assembly 13 and the third heating wire assembly 17.

[0031] Working principle: This utility model includes a main air duct body 1, corner code assembly 2, air outlet 3, air inlet cavity 4, air inlet controller 5, honeycomb guide plate 6, primary pressure equalization cavity 7, heating wire module 8, heating transition cavity 9, secondary mixing cavity 10, air outlet cavity 11, first heating wire assembly 12, second heating wire assembly 13, temperature sensor 14, power regulator 15, overheat protection fuse 16, third heating wire assembly 17, and fourth heating wire assembly 18. Adding heating modules to the air duct can optimize heating efficiency. The four heating wire modules can make the airflow from all sides more evenly heated, avoiding the problem of local high temperature or cold zone caused by traditional single-point heating, and meeting the constant temperature requirements of high-precision processes. The addition of a temperature sensor at the top for real-time monitoring can prevent overheating, simplify maintenance, and enhance system safety.

[0032] 1. Composite air duct components

[0033] The stepped flow guide structure is manufactured using a 6063-T5 aluminum alloy one-piece molding process;

[0034] Include:

[0035] Primary pressure equalization chamber: honeycomb baffle plate, porosity 85%;

[0036] Heating transition chamber: Built-in 4 sets of staggered PTC heating modules;

[0037] Secondary mixing chamber: V-shaped guide ribs, with an inclination angle of 55±2°.

[0038] 2. Intelligent temperature control system

[0039] Temperature sensor: Includes one PT100 platinum resistance sensor;

[0040] Power regulation module: It adopts an IGBT-driven PWM power regulation circuit with a regulation accuracy of 0.5%;

[0041] Safety protection device: dual redundant overheat fuse, response time <50ms.

[0042] 3. Modular assembly interface

[0043] Standardized quick-install flange: conforms to ISO 13351:2020 standard;

[0044] Airtight sealing structure: fluororubber O-ring, compression set <15%.

[0045] Airflow path optimization: After being pre-treated by the primary filter, the external air undergoes three velocity field reforms along the stepped flow guide structure (the flow velocity decreases from 8 m / s to 0.5 m / s), and the gradient temperature rise (ΔT = 15℃) is completed in the heating transition cavity.

[0046] Dynamic temperature control process: The sensor array collects three-dimensional temperature distribution data in real time (sampling rate 100Hz).

[0047] Control unit execution: Achieve constant temperature accuracy of ±0.3℃ through PWM regulation.

[0048] It should be noted that, in this document, relational terms such as first and second (number one, number two), etc., are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0049] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. An integrated constant temperature heating FFU air duct structure, comprising an air duct body (1), characterized in that: Angle code assembly (2) is positioned and installed on the bottom side of the air duct body (1). An air inlet cavity (4) is installed at the rear end of the air duct body (1). A primary pressure equalization cavity (7) is installed at the rear position inside the air duct body (1). A heating transition cavity (9) is installed at the middle position inside the air duct body (1). A secondary mixing cavity (10) is installed at the front position inside the air duct body (1). An air outlet (3) is installed at the front end of the air duct body (1). An air inlet controller (5) is installed inside the air inlet cavity (4). A honeycomb guide plate (6) is installed inside the primary pressure equalization cavity (7). An air outlet cavity (11) is opened at the middle of the front end of the secondary mixing cavity (10), and the air outlet cavity (11) is connected to the air outlet (3). A heating wire module (8) is installed inside the heating transition cavity (9).

2. An integrated constant temperature heating FFU plenum structure according to claim 1, wherein: The heating wire module (8) has a first heating wire assembly (12), a second heating wire assembly (13), a third heating wire assembly (17) and a fourth heating wire assembly (18) arranged alternately inside. A power regulator (15) is installed on the side of the heating wire module (8). A temperature sensor (14) is installed inside the power regulator (15). A safety protection overheat fuse (16) is installed inside the power regulator (15).

3. An integrated constant temperature heating FFU plenum structure according to claim 1, wherein: The heating transition cavity (9) is a three-stage stepped flow guide structure, and the airflow velocity is reduced from 8m / s to 0.5m / s, and the gradient temperature rise is completed inside the heating transition cavity (9).

4. An integrated constant temperature heating FFU plenum structure according to claim 1, wherein: The heating wire module (8) is locked inside the heating transition cavity (9), the air inlet controller (5) controls the air inlet at the air inlet cavity (4), the honeycomb guide plate (6) is locked inside the primary pressure equalization cavity (7), and the porosity of the honeycomb guide plate (6) is 85%.

5. An integrated constant temperature heating FFU plenum structure according to claim 1, wherein: The air duct body (1) is formed by bending and shaping with respect to the air inlet chamber (4), the primary pressure equalization chamber (7), the secondary mixing chamber (10) and the air outlet (3).

6. An integrated constant temperature heating FFU plenum structure according to claim 2, wherein: The heating wire module (8) is fixed to the first heating wire assembly (12), the second heating wire assembly (13), the third heating wire assembly (17) and the fourth heating wire assembly (18) through slots, and the first heating wire assembly (12), the fourth heating wire assembly (18) are arranged in a crisscross pattern with the second heating wire assembly (13) and the third heating wire assembly (17).

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