Material resistivity detection device

Abstract

The utility model relates to the technical field of semiconductor detection equipment, in particular to a material resistivity detection device, which comprises a test probe, a mounting bracket, a driving mechanism and a guide mechanism, avoids the problem of resistivity detection caused by manual handheld operation, reduces manual operation, improves the accuracy of a resistivity detection result, and improves the working efficiency. The mounting bracket is arranged, so that the test probe can be stably clamped, and detection errors caused by shaking and the like during testing are avoided; the driving mechanism is arranged to drive the mounting bracket to move in the vertical direction, so that the surface of the product is detected by the test probe; and meanwhile, the guide mechanism is arranged, so that the test probe runs more stably, and unfavorable conditions such as shaking are avoided.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing equipment technology, and specifically to a material resistivity testing device. Background Technology

[0002] Resistance testing of semiconductor products is a crucial step in ensuring product quality and performance. It involves the precise measurement of the electrical properties of semiconductor materials. The resistivity of the semiconductor component material surface reflects information about the carrier concentration and mobility within the semiconductor material, which is essential for quality control during the manufacturing process. Therefore, resistivity testing is one of the key steps in ensuring material quality and performance.

[0003] Currently, resistivity testing of semiconductor component materials typically involves personnel hand-holding the testing instrument to inspect the product surface. This manual operation is prone to shaking and misalignment between the instrument and the product surface, leading to errors in the resistivity measurement results. Therefore, based on these issues, existing technology requires further improvement. Utility Model Content

[0004] The purpose of this invention is to provide a material resistivity detection device to solve the existing technical problems in the background art.

[0005] To solve the above-mentioned technical problems, the technical solution provided by this utility model is as follows: a material resistivity testing device is provided, including a test probe, a mounting bracket, a driving mechanism, and a guiding mechanism. The test probe is electrically connected to a resistivity tester. The test probe is fixedly mounted on the mounting bracket. One end of the mounting bracket is connected to the guiding mechanism. The driving mechanism is mounted on a fixed base and drives the mounting bracket to move in the vertical direction. The guiding mechanism is mounted on the fixed base and is used to guide the movement of the mounting bracket.

[0006] Based on the above technical solution, the driving mechanism includes a handle, a driving rod, an adjusting rod, a connecting rod, and a stop block. The handle is fixedly connected to one end of the driving rod, and the other end of the driving rod is hinged to the top of the adjusting rod. The adjusting rod passes through the stop block and its bottom end is fixedly mounted on the mounting bracket. The stop block is fixedly mounted on the top of the fixed base. One end of the connecting rod is hinged to the driving rod, and the other end is hinged to the stop block.

[0007] Based on the above technical solution, the guiding mechanism includes a slide rail and a slider. The slide rail is fixedly mounted on a fixed base, one end of the mounting bracket is fixedly mounted on the slider, and the slider is sleeved on the slide rail and slidably connected.

[0008] Based on the above technical solution, a first spring is sleeved on the adjusting rod. One end of the first spring is fixedly mounted on the adjusting rod, and the other end abuts against the top of the mounting bracket. A nut is sleeved on the first spring.

[0009] Based on the above technical solution, a second spring is also included. The second spring is sleeved on the bottom end of the adjusting rod and located below the mounting bracket. One end of the second spring is fixedly mounted on the adjusting rod, and the other end is located below the adjusting rod.

[0010] Based on the above technical solution, the bottom end of the second spring and the bottom end of the test probe are located on the same horizontal plane, or the horizontal plane of the bottom end of the second spring is lower than the horizontal plane of the bottom end of the test probe.

[0011] Based on the above technical solution, a conveying mechanism is also included, which is located below the test probe. The conveying mechanism includes a conveying platform, a drive assembly, and a conveyor belt. The conveyor belt is located on the conveying platform and is used to convey the product to be inspected. The drive assembly is used to drive the conveyor belt to rotate on the conveying platform.

[0012] Based on the above technical solution, the drive assembly includes a drive motor, a drive roller, and a driven roller. The drive motor drives the drive roller to rotate, and the driven roller is driven to rotate by the drive roller via a conveyor belt.

[0013] Based on the above technical solution, a photoelectric in-situ sensor is installed on the conveyor platform and located above the conveyor belt.

[0014] Based on the above technical solution, the resistivity tester is configured as a four-point probe tester.

[0015] The beneficial effects of the technical solution provided by this utility model are as follows:

[0016] This invention provides a material resistivity testing device that avoids the problems caused by manual hand operation in resistivity testing, reduces manual operation, improves the accuracy of resistivity testing results, and increases work efficiency. The device features a mounting bracket that securely holds the test probe, preventing testing errors caused by shaking during testing. A drive mechanism moves the mounting bracket vertically, enabling the test probe to inspect the product surface. A guide mechanism further ensures smoother probe operation, preventing shaking and other adverse effects. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural schematic diagram of Embodiment 1 of this utility model;

[0018] Figure 2 This is a three-dimensional structural schematic diagram of Embodiment 2 of this utility model; Detailed Implementation

[0019] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0020] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0021] In the description of this utility model, it should be understood that the terms "left", "right", "front", "rear", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0022] Example 1

[0023] like Figures 1 to 2 As shown, a material resistivity testing device includes a test probe 1, a mounting bracket 2, a drive mechanism 3, and a guide mechanism 4. The test probe 1 is electrically connected to a resistivity tester. The test probe 1 is fixedly mounted on the mounting bracket 2. One end of the mounting bracket 2 is connected to the guide mechanism 4. The drive mechanism 3 is mounted on a fixed base 5 and drives the mounting bracket 2 to move in the vertical direction. The guide mechanism 4 is mounted on the fixed base 5 and is used to guide the movement of the mounting bracket 2.

[0024] This utility model provides a material resistivity testing device that avoids the problems caused by manual hand operation in resistivity testing, reduces manual operation, improves the accuracy of resistivity testing results, and increases work efficiency. By setting up a mounting bracket 2, the test probe 1 can be firmly clamped, avoiding detection errors caused by shaking during testing. By setting up a drive mechanism 3, the mounting bracket 2 is driven to move in the vertical direction, enabling the test probe 1 to detect the product surface. At the same time, a guide mechanism 4 is set up to make the test probe 1 run more smoothly and avoid shaking and other adverse conditions.

[0025] Based on the above technical solution, the driving mechanism 3 includes a handle 31, a driving rod 32, an adjusting rod 33, a connecting rod 34, and a stop block 35. The handle 31 is fixedly connected to one end of the driving rod 32, and the other end of the driving rod 32 is hinged to the top of the adjusting rod 33. The bottom end of the adjusting rod 33 passes through the stop block 35 and is fixedly mounted on the mounting bracket 2. The stop block 35 is fixedly mounted on the top of the fixed base 5. One end of the connecting rod 34 is hinged to the driving rod 32, and the other end is hinged to the stop block 35.

[0026] In a preferred embodiment, by lifting the handle 31, the driving mechanism 3 drives the adjusting rod 33 downward under the drive of the driving rod 32 and the connecting rod 34, thereby driving the test probe 1 to move closer to the product to be inspected. After the test probe 1 contacts the product, the test is completed. After the test is completed, the test probe can be restored to its initial state by reversing the operation.

[0027] Based on the above technical solution, the guide mechanism 4 includes a slide rail 41 and a slider 42. The slide rail 41 is fixedly mounted on the fixed base 5, and one end of the mounting bracket 2 is fixedly mounted on the slider 42. The slider 42 is sleeved on the slide rail 41 and slidably connected.

[0028] In a preferred embodiment, a guide mechanism with a slider 42 cooperating with a slide rail 41 makes the reciprocating motion of the mounting bracket 2 and the test probe 1 mounted thereon more stable in the vertical direction, avoiding excessively fast movement that could cause impact or damage to the surface of the product under inspection.

[0029] Based on the above technical solution, a first spring 6 is sleeved on the adjusting rod 33. One end of the first spring 6 is fixedly mounted on the adjusting rod 33, and the other end abuts against the top of the mounting bracket 2. A nut 60 is sleeved on the first spring 6.

[0030] By setting a first spring 6 and a nut 60 on the first spring 6, adjusting the position of the nut 60 in the vertical direction of the adjusting rod 33 can compress one section of the spring, thereby providing resistance during the process of the driving mechanism 3 driving the adjusting rod 33 to press down, and thus providing a certain buffering effect during the descent of the probe.

[0031] Specifically, as shown in the figure, the contact portion between the adjusting rod 33 and the first spring 6 is provided with an annular protrusion, and the top end of the first spring 6 abuts against the bottom end of the annular protrusion of the first spring 6.

[0032] Based on the above technical solution, a second spring 7 is also included. The second spring 7 is sleeved on the bottom end of the adjusting rod 33 and located below the mounting bracket 2. One end of the second spring 7 is fixedly mounted on the adjusting rod 33, and the other end is located below the adjusting rod 33.

[0033] Based on the above technical solution, the bottom end of the second spring 7 is located on the same horizontal plane as the bottom end of the test probe 1, or the horizontal plane of the bottom end of the second spring 7 is lower than the horizontal plane of the bottom end of the test probe 1.

[0034] In a preferred embodiment, a second spring 7 is provided at the bottom end of the adjusting rod 33. Specifically, the bottom end of the adjusting rod 33 extends through the mounting bracket 2 and extends below the mounting bracket 2. It can play a buffering role when the test probe 1 descends until it contacts the product surface. On the one hand, it can protect the probe from damage, and on the other hand, it can effectively reduce the damage to the product surface caused by excessive pressure.

[0035] Example 2

[0036] Based on the above technical solution, this embodiment also includes a conveying mechanism disposed below the test probe 1. The conveying mechanism includes a conveying platform 81, a driving component, and a conveying belt 82. The conveying belt 82 is disposed on the conveying platform 81 and is used to convey the product to be inspected. The driving component is used to drive the conveying belt 82 to rotate on the conveying platform 81.

[0037] In a preferred embodiment, the conveying mechanism is positioned below the test probe 1 to convey the product to be tested, thereby reducing manual operation and improving work efficiency.

[0038] Based on the above technical solution, the driving component includes a drive motor, a drive roller 83 and a driven roller 84. The drive motor drives the drive roller 83 to rotate, and the driven roller 84 is driven to rotate by the drive roller 83 through the conveyor belt 82.

[0039] Based on the above technical solution, a photoelectric in-situ sensor 9 is provided on the conveyor table 81 and is located above the conveyor belt 82.

[0040] In a more preferred embodiment, the conveyor table 81 is also equipped with a photoelectric presence sensor 9. When a product to be inspected is conveyed to this position on the conveyor belt 82, the photoelectric presence sensor 9 sends a signal to remind the staff to perform the inspection, making the operation more convenient.

[0041] Based on the above technical solution, the resistivity tester is configured as a four-point probe tester.

[0042] In a preferred embodiment, the testing equipment is a four-point probe tester, which is specifically used to measure the resistance of thin layers, such as the resistivity of the surface of semiconductor components. By using four equally spaced probes, the influence of contact resistance on the measurement results can be reduced, and the measurement accuracy can be improved.

[0043] The foregoing has shown and described the basic principles and main features of this utility model. It is obvious to those skilled in the art that this utility model is not limited to the details of the above exemplary embodiments. Therefore, the embodiments should be regarded as exemplary and non-limiting. The scope of this utility model is defined by the appended claims rather than the foregoing description. Therefore, it is intended to include all changes that fall within the meaning and scope of the equivalents of the claims within this utility model.

[0044] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A material resistivity detecting device characterized by comprising: The device includes a test probe (1), a mounting bracket (2), a drive mechanism (3), and a guide mechanism (4). The test probe (1) is electrically connected to a resistivity tester. The test probe (1) is fixedly mounted on the mounting bracket (2). One end of the mounting bracket (2) is connected to the guide mechanism (4). The drive mechanism (3) is mounted on a fixed base (5) and drives the mounting bracket (2) to move in the vertical direction. The guide mechanism (4) is mounted on the fixed base (5) and is used to guide the movement of the mounting bracket (2).

2. The material resistivity detection device according to claim 1, wherein The drive mechanism (3) includes a handle (31), a drive rod (32), an adjusting rod (33), a connecting rod (34), and a stop (35). The handle (31) is fixedly connected to one end of the drive rod (32), and the other end of the drive rod (32) is hinged to the top of the adjusting rod (33). The adjusting rod (33) passes through the stop (35) and its bottom end is fixedly mounted on the mounting bracket (2). The stop (35) is fixedly mounted on the top of the fixed seat (5). One end of the connecting rod (34) is hinged to the drive rod (32), and the other end is hinged to the stop (35).

3. The material resistivity detection device according to claim 1, wherein The guide mechanism (4) includes a slide rail (41) and a slider (42). The slide rail (41) is fixedly mounted on the fixed base (5). One end of the mounting bracket (2) is fixedly mounted on the slider (42). The slider (42) is sleeved on the slide rail (41) and slidably connected.

4. The material resistivity detection device according to claim 2, wherein The adjusting rod (33) is fitted with a first spring (6), one end of which is fixedly mounted on the adjusting rod (33), and the other end abuts against the top of the mounting bracket (2). A nut (60) is fitted on the first spring (6).

5. The material resistivity detection device of claim 2, wherein It also includes a second spring (7), which is sleeved on the bottom end of the adjusting rod (33) and located below the mounting bracket (2). One end of the second spring (7) is fixed on the adjusting rod (33), and the other end is located below the adjusting rod (33).

6. The material resistivity detection device according to claim 5, wherein The bottom end of the second spring (7) is on the same horizontal plane as the bottom end of the test probe (1), or the horizontal plane of the bottom end of the second spring (7) is lower than the horizontal plane of the bottom end of the test probe (1).

7. The material resistivity detection device of claim 1, wherein It also includes a conveying mechanism located below the test probe (1). The conveying mechanism includes a conveying platform (81), a drive assembly, and a conveyor belt (82). The conveyor belt (82) is located on the conveying platform (81) and is used to convey the product to be inspected. The drive assembly is used to drive the conveyor belt (82) to rotate on the conveying platform (81).

8. The material resistivity detection device according to claim 7, wherein The drive assembly includes a drive motor, a drive roller (83) and a driven roller (84). The drive motor drives the drive roller (83) to rotate, and the driven roller (84) is driven to rotate by the drive roller (83) via a conveyor belt (82).

9. The material resistivity detection device of claim 7, wherein The conveyor platform (81) is equipped with a photoelectric in-situ sensor (9) and is located above the conveyor belt (82).

10. The material resistivity detection device of claim 1, wherein The resistivity tester is configured as a four-point probe tester.

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