Imprint template and diffraction optical waveguide
By setting auxiliary structures outside the functional area of the imprinting template and changing the imprinting contact method, the problem of damage to the grating structure during demolding was solved, thus improving the integrity of the grating structure and the product yield.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI NORTH OCEAN TECH CO LTD
- Filing Date
- 2024-07-12
- Publication Date
- 2026-04-21
AI Technical Summary
During the demolding process, the grating structure of the existing embossing template is easily damaged, resulting in a decrease in product yield. In particular, improper demolding methods in the design of grating structures in different areas can lead to serious tooth breakage.
An auxiliary structure is set outside the functional area of the imprinting template. By changing the imprinting contact method, the demolding speed is reduced, damage to the grating structure is prevented, and the auxiliary structure is left or partially left in the substrate after cutting, so as to improve the demolding process.
It improves the integrity of the grating structure and the product yield, reduces defects caused by damage to the grating structure, and enhances the process stability and product quality of embossing and demolding.
Smart Images
Figure CN224152685U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of optical technology, and in particular to an imprinted template and a diffractive waveguide. Background Technology
[0002] Diffractive waveguides, as one of the important optical components in the field of augmented reality display technology, play a crucial role in optical displays. In existing technologies, considering cost and efficiency, diffractive waveguides are often fabricated using imprinting, and the micro / nano structures used in displays are fabricated using template imprinting.
[0003] During imprinting, different diffractive waveguide designs employ different imprinting and demolding methods. In particular, for the micro-nano structures in different regions of the diffractive waveguide, the demolding methods formed by different imprinting templates can affect the micro-nano structures to some extent. For example, in the coupling region, transition region, and coupling region, different grating structures, such as straight teeth and oblique teeth, can easily cause local or even large-area tooth breakage in different positions of the grating structure. Such tooth breakage is unacceptable to those skilled in the art, as it will greatly reduce the product yield of the imprinting demolding process.
[0004] Therefore, it is necessary to improve the existing embossing and demolding process to minimize the impact of demolding on the grating structure in different structural areas under different demolding methods, reduce damage to the grating structure, and improve product yield. Utility Model Content
[0005] This utility model provides an imprint template and a diffractive waveguide, which solves the problems existing in the prior art.
[0006] An imprinting template has at least one functional area, the functional area including a structural area, and at least one auxiliary structure disposed outside the structural area. The auxiliary structure is configured to surround a portion of a grating area in the structural area, such that the auxiliary structure can change the imprinting contact mode during demolding, thereby reducing the demolding speed of the working template in the structural area and preventing damage to the grating structure caused by rapid demolding of the working template.
[0007] Furthermore, the auxiliary structure is located in the remaining area of the functional area other than the structural area, or in at least one area outside the functional area.
[0008] In another embodiment, the structural region includes a coupling grating region, and the auxiliary structure is configured to surround a portion of the coupling grating region.
[0009] Furthermore, the auxiliary structure is located outside the functional area and is configured to surround a portion of the coupled grating area.
[0010] Furthermore, the auxiliary structure is located between the functional region and the structural region and is configured to surround a portion of the coupled grating region.
[0011] In another embodiment, the structural region includes a coupling grating region, and the auxiliary structure is configured to surround a portion of the coupling grating region.
[0012] Furthermore, the auxiliary structure is located outside the functional area and is configured to surround a portion of the coupled-out grating area.
[0013] Furthermore, the auxiliary structure is located between the functional region and the structural region and is configured to surround a portion of the coupled-out grating region; and the auxiliary structure is configured as a recycle grating structure or a reflective grating structure.
[0014] In another embodiment, the auxiliary structure has the same structure as the grating structure, and the orientation of the auxiliary structure is the same as or different from that of the grating structure.
[0015] Furthermore, this utility model provides a diffractive optical waveguide, which is obtained by imprinting based on the imprinting master plate described in any of the preceding claims.
[0016] Meanwhile, this utility model also provides a display device, which includes the diffractive waveguide as described above.
[0017] On one hand, the present invention uses an imprinting template to prepare a diffractive waveguide structure. An auxiliary structure is set in the remaining area of the functional region of the imprinting template (excluding the structural region) or in at least one area outside the functional region, and the position of the auxiliary structure is defined in different grating regions. When a working template is obtained by molding using the imprinting template, a corresponding complementary structure is formed in the working template area. Then, grating material is imprinted using the working template. This improves the interaction force between the working template and the imprinting material during demolding, thereby improving the existing imprinting demolding process. By changing the imprinting contact method from planar contact to uneven surface contact, the influence of different demolding methods on the grating structure in different grating regions during the demolding process is changed, improving the conformability during demolding and ensuring the integrity of the grating structure, reducing the occurrence of defects due to grating structure damage, and improving product yield.
[0018] On the other hand, based on the different positions of the auxiliary structure in the imprinting template, the auxiliary structure can be partially or completely left in the cut residue substrate structure of the diffractive waveguide formed by imprinting through a cutting process. The resulting diffractive waveguide does not include the auxiliary structure, or includes a portion of the auxiliary structure. The portion of the auxiliary structure can also serve as a recycling or reflection grating to improve the display performance of the waveguide. Therefore, this method is beneficial to improve the product quality of imprinting demolding, and the auxiliary structure is not left or is partially left in the waveguide structure, which does not affect optical imaging. As a person skilled in the art, this has unexpected technical effects. Attached Figure Description
[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0020] Figure 1 A schematic diagram of an embossing template structure provided by this utility model Figure 1 ;
[0021] Figure 2 A schematic diagram of an embossing template structure provided by this utility model Figure 2 ;
[0022] Figure 3 A schematic diagram of an embossing template structure provided by this utility model Figure 3 ;
[0023] Figure 4 A schematic diagram of an embossing template structure provided by this utility model Figure 4 and demolding method;
[0024] Figure 5 This invention provides a schematic diagram of another embossing template structure and a demolding method.
[0025] Figure 6 This invention provides a schematic diagram of another embossing template structure and a demolding method.
[0026] Figure 7 This invention provides a schematic diagram of another embossing template structure and a demolding method.
[0027] Figure 8 A schematic diagram of the auxiliary structure in an embossing template structure provided by this utility model;
[0028] Figure 9This invention provides a schematic diagram of another embossing template structure and a demolding method.
[0029] Figure 10 This is a schematic diagram of another embossing template structure provided by this utility model. Detailed Implementation
[0030] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.
[0031] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the utility model described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.
[0032] Based on the problems pointed out in the background section of this utility model, and further, due to the different area sizes of grating regions and the distance between adjacent grating regions, the existing embossing demolding process is prone to rapid demolding of grating regions with small areas or large distances during demolding, which can easily damage the grating structure; even if the moving speed of the working template is changed during demolding, this situation is still likely to occur.
[0033] Therefore, based on the problems pointed out in the background section and the above-mentioned content, this utility model provides an imprinting template. By changing the imprinting contact method through the imprinting template, the interaction force between the working template and the imprinting material during demolding is improved, thereby improving the existing imprinting demolding process. This allows for minimizing the impact of the demolding process on gratings in different structural areas based on different demolding methods, reducing the occurrence of defects caused by damage to the grating structure, and improving product yield.
[0034] It is known that a diffractive waveguide includes multiple regions such as a coupling-in region, a coupling-out region, and, more specifically, a transition region. The coupling-in region, transition region, and coupling-out region enable the coupling, pupil expansion, and coupling-out functions of light rays. Simultaneously, a working template is obtained by imprinting a template, and a complementary structure corresponding to the imprinted template is formed in the working template region. Then, grating material is imprinted onto the working template to form a grating structure.
[0035] like Figure 1 As shown, an imprinting template has at least one functional region 101, which includes a structural region 102. At least one auxiliary structure 201 is provided outside the structural region 102. The auxiliary structure 201 is configured to surround a portion of the grating region in the structural region 102, so that the auxiliary structure 201 can change the imprinting contact mode during demolding, reduce the demolding speed of the working template in the structural region, and prevent damage to the grating structure caused by rapid demolding of the working template.
[0036] Combination Figure 1 In this invention, the structural region 102 refers to the grating region formed by the coupling-in grating region, the transition grating region, and the coupling-out grating region, as well as the optical path regions connecting the coupling-in grating region and the transition grating region, and the transition grating region and the coupling-out grating region. The dashed lines in the figure represent the boundary lines of the connected optical path regions. The overall structure formed in this way is defined as structural region 102. Alternatively, in other embodiments, structural region 102 refers to the grating region formed by the coupling-in grating region and the coupling-out grating region, as well as the optical path regions connecting the coupling-in grating region and the coupling-out grating region.
[0037] Furthermore, the auxiliary structure 201 is configured to surround a portion of the grating region in the structural region 102, that is, the auxiliary structure 201 is formed in the peripheral region of the structural region 102, including a portion of the grating region such as the coupled-in grating region, the turning grating region, and the coupled-out grating region, i.e., formed outside the structural region 102. For example, as... Figure 1 As shown, the auxiliary structure 201 is formed on the outer periphery of the coupling grating region and is located outside the functional region 101. Figure 2 As shown, the auxiliary structure 201 is formed between the functional region 101 and the structural region 102.
[0038] Furthermore, exemplarily, the present invention further specifies that the auxiliary structure 201 is provided in at least one region outside the functional region 101, excluding the structural region 102. More specifically, in some embodiments, such as... Figure 2As shown, the imprinting template includes two functional regions 101, i.e., imprinting to form a multi-purpose diffractive waveguide structure. Optionally, an auxiliary structure 201 may be formed on the outer periphery of the coupling grating region, located in the remaining area of the functional region 101 excluding the structural region 102, i.e., the remaining area of the functional region 101 excluding the structural region 102. In some other embodiments, the auxiliary structure 201 may be defined as being formed on the outer periphery of the coupling grating region, with the auxiliary structure 201 disposed between the structural region 102 and the functional region 101 and on the outside of the functional region 101.
[0039] To elaborate further, Figure 2 Only an example including two functional regions 101 is shown, but an imprint template structure with a multi-view diffraction waveguide structure can be formed according to different imprinting layout requirements, and the number of functional regions can be limited to four, five, six, eight, etc., all of which are within the quantity range defined in this application.
[0040] By setting the aforementioned auxiliary structure 201, the imprinting contact method can be changed, transforming the existing local planar contact method into a local uneven surface contact method. This prevents damage to the grating structure caused by rapid demolding of grating areas with small areas or large distances due to the high demolding speed of the working template during the imprinting demolding process. By increasing the interaction force between the two, the demolding speed of the working template is reduced, thereby decreasing the probability of grating damage. This improves the process stability and integrity of the fabricated grating structure during imprinting demolding, and ultimately increases product yield.
[0041] In more detail, combined Figure 1 It is known that the area of the coupled-in grating region is smaller than that of the transition grating region and the coupled-out grating region, even much smaller than the areas of the transition and coupled-out grating regions. During demolding, due to the different designs of the diffractive waveguide gratings, different waveguides have different demolding methods and directions. When demolding from different directions, the coupled-in grating region is more prone to defects such as broken teeth due to the difference in grating area area during the gradual demolding process of the working template. Alternatively, if the transition grating region and the coupled-out grating region are spaced at different distances, the demolding speed of the working template can affect the demolding speed, causing the grating in the grating region that is farther apart to be damaged due to the faster demolding speed. Therefore, when the working template is obtained by imprinting a template, a corresponding complementary structure is formed in the working template area, and then the grating material is imprinted on the working template to improve the interaction force between the working template and the imprinted material during demolding. That is, by using the auxiliary structure 201 to change the magnitude of the force between the working template and the imprinting material during demolding, the occurrence of grating damage defects can be minimized, thereby improving the integrity of the grating structure.
[0042] For the structure of auxiliary structure 201, such as Figure 1 As shown, the auxiliary structure 201 in the coupling grating region can be configured as follows: Figure 1 The structure shown can also be set as follows: Figure 3 The auxiliary structure shown in (c) is as follows. Figure 10 The auxiliary structure shown is a ring-shaped strip structure surrounding the coupling grating region.
[0043] like Figure 1 and Figure 2 As shown, embodiments are illustrated where the auxiliary structure 201 is located outside the functional region 101, and embodiments are illustrated where the auxiliary structure 201 is located in the remaining region of the functional region 101 excluding the structural region 102, and the auxiliary structure 201 is configured to surround the coupled grating region. The position of the auxiliary structure 201 is selected to surround the grating region based on different diffraction waveguide grating structure designs. Figure 1 In this embodiment, the auxiliary structure 201 is formed outside the functional region 101. When the imprinted grating structure is formed by imprinting template, and the diffractive waveguide is formed by cutting the outer contour of the functional region 101, the auxiliary structure 201 is left in the cutting residue substrate. The formed diffractive waveguide does not include the auxiliary structure 201. Therefore, this method is beneficial to improve the product quality of imprinting demolding, and the auxiliary structure is not left in the waveguide structure, so it does not affect optical imaging.
[0044] Of course, on the other hand, based on considerations of different processes, such as Figure 2 In the structural schematic diagram on the right, auxiliary structures 201 are provided in the remaining areas of functional region 101 other than structural region 102 and outside functional region 101. When the imprinted structure is formed and then cut to form a diffractive waveguide, the auxiliary structures 201 located in the remaining areas of functional region 101 other than structural region 102 are retained in the diffractive waveguide structure, while the auxiliary structures 201 located outside functional region 101 are left in the cut residual substrate. The auxiliary structures 20 located between the remaining areas are configured not to affect the propagation of light in the diffractive waveguide.
[0045] In the two embodiments described above, different regions of the diffractive waveguide structure may be limited to include auxiliary structure 201 based on different technical requirements, thereby forming a waveguide structure with a variety of different combinations of auxiliary structures.
[0046] Furthermore, in some other embodiments, such as Figure 3 As shown, an embodiment is illustrated in which auxiliary structures 201 are respectively provided in the coupling-in grating region and the coupling-out grating region. On the one hand, as... Figure 3As shown in (a), the auxiliary structure 201 is disposed in the remaining areas of the functional region 101 excluding the structural region 102, that is, within the functional region outside the coupling grating region and surrounding that portion of the grating region; as shown in (a), the auxiliary structure 201 is disposed in the remaining areas of the functional region 101 excluding the structural region 102, that is, within the functional region outside the coupling grating region and surrounding that portion of the grating region; Figure 3 As shown in (b), auxiliary mechanisms 201 are provided in the remaining areas of functional region 101 excluding structural region 102, and on both the input grating region and output grating region sides. Each auxiliary mechanism 201 for each grating region is arranged around its respective grating region. Figure 3 As shown in (c), the auxiliary structures 201 located on the input grating region and the output grating region side are all located outside the functional region 101, and the auxiliary structures 201 of each grating region are arranged around the input grating region and the output grating region. Figure 3 The illustration shows possible layouts of the auxiliary structure 201. Of course, it is not intended as a detailed limitation on a specific location. Such limitations, as in other ways, are also within the core inventive concept of this utility model.
[0047] More in detail, such as Figure 3 As shown in (c), the auxiliary structure 201 is a ring-shaped strip structure surrounding the coupling-in grating region and the coupling-out grating region, and is located outside the functional region 101. Figure 3 Figures (a), (b), and (c) show the structural shapes of different auxiliary structures 201.
[0048] Of course, in Figures 1-6 In any embodiment, the auxiliary structure 201 may be positioned near the transition grating region to control the demolding rate of the working template in each blank area. This design is beneficial to existing demolding processes. Therefore, Figures 1-6 The illustration only shows the setting of an auxiliary structure in the coupling grating region; other embodiments also include setting an auxiliary structure in the turning grating region.
[0049] The above embodiments only show schematic diagrams of the auxiliary structure located at different positions in structural region 102 and functional region 101. Figures 1-3 This does not constitute a specific limitation on the position of the auxiliary structure. When forming the imprint template, the positional relationship of the auxiliary structure in different regions is limited based on the design of the diffractive waveguide structure and the imprinting requirements. For example, the auxiliary structure may be included both inside and outside the functional region 101. Such adjustments can be made by those skilled in the art based on the concept of this utility model and are all within the protection scope of this utility model.
[0050] Furthermore, combined with Figure 4The figure shows three demolding directions, A, B, and C. During the imprinting demolding process, based on different grating structure designs, there may be three demolding directions as shown in A, B, and C (of course, the demolding directions in the figure are only examples and do not represent the actual demolding directions). When demolding from direction A, based on the existing imprinting template method, there are no auxiliary structures near the coupled grating area. Because the imprinting contact surfaces are all planar structures, large-area rapid demolding during demolding can easily cause damage and breakage of the grating teeth in the coupled grating area. Therefore, as... Figure 4 As shown, by incorporating the auxiliary structures 201 set in different grating regions of this invention, the imprinting contact method can be changed from planar contact to uneven surface contact, altering the magnitude of the interaction force between the two. This slows down the removal rate of the working template during demolding, allowing the grating structure in the coupling region to be less damaged by the force of the working template. The grating structure located in the coupling grating region also benefits from the auxiliary structures set in this region, preventing rapid demolding and damage to the edge of the coupling grating region. Based on the same understanding, when demolding from directions B and C, the auxiliary structures located in the coupling grating region can slow down the removal rate of the working template in that region. Simultaneously, the auxiliary structures in the coupling grating region can also alleviate the removal rate of the working template in the coupling region.
[0051] certainly, Figure 4 The location of the auxiliary structure 201 is only an example. The specific location of the auxiliary structure 201 can be adjusted appropriately based on any of the foregoing embodiments.
[0052] Furthermore, as the coupling grating region, combined with Figure 5 As mentioned earlier, since the coupled grating region is relatively small compared to other grating regions, the grating teeth are particularly susceptible to damage during imprinting and demolding. Therefore, in this embodiment, considering the fabrication process of the auxiliary structure and subsequent optical imaging issues, the auxiliary structure 201 is placed outside the functional region 101. Through the demolding directions A, B, and C shown in the figure, the grating structure in the coupled grating region can be effectively protected, providing focused protection for the grating structure within the coupled grating structure. After imprinting and demolding, the waveguide is cut out using a cutting process, while the auxiliary structure remains in the substrate. The resulting diffractive waveguide structure does not include any auxiliary structure. This design effectively protects the grating structure in the coupled region, preventing damage during demolding, and does not affect the optical performance of the cut diffractive waveguide structure.
[0053] Furthermore, as the coupling-in grating region and the coupling-out grating region, combined with Figure 6Outside the coupling-in grating region and the coupling-out grating region, the auxiliary structure 201 is set outside the functional region 101. When demolding in the directions A, B, and C as shown in the figure, the grating structure of the coupling-in grating region and the coupling-out grating region can be effectively protected. After the imprinted structure is formed, the diffractive waveguide structure formed by laser cutting does not include any auxiliary structure. However, by setting the auxiliary structure, the structure of the coupling-in grating and the coupling-out grating can be well protected, preventing the grating structure of these two parts from being damaged due to the demolding process.
[0054] As an improvement to the foregoing embodiments, in another embodiment, such as Figure 7 As shown, an auxiliary structure 201 is set in the coupling grating region to protect the structure of the coupling grating during demolding in direction A. Of course, Figure 7 The location of the auxiliary structure 201 is limited only to the remaining area of the functional area 101 excluding the structural area 102. It is understood that this solution also includes cases where the auxiliary structure 201 is located outside the functional area 101, which will not be elaborated here.
[0055] By changing the position of the auxiliary structure 201 in the functional area 101, it is beneficial to improve the magnitude of the force during demolding in different areas, thereby improving the shape preservation of the grating and the integrity of the structure.
[0056] In any of the above embodiments, by forming an auxiliary structure 201 in the working template, the shape of the auxiliary structure can be adapted to the shape change of the grating structure region, such as... Figure 8 As shown in (a), the auxiliary structures include various shapes, such as an arc-shaped auxiliary structure corresponding to the shape of the coupling area, or a rectangular structure corresponding to the transition grating area and the coupling grating area, or further, a rhomboid, elliptical structure, etc.; and also including, Figure 3 The structure shown in (c) is a ring-shaped strip structure; Figures 1-8 The shape of the auxiliary structure 201 is not a limitation on the auxiliary structure in this utility model. Figure 8 (a) is merely an example; the size of the auxiliary structure 201 is adjusted based on the knowledge in the art, and this utility model does not impose such a limitation. It is understood that in this utility model, the position of the auxiliary structure is limited so that the auxiliary structure 201 is arranged around a portion of the grating area in the structural region 102, such as an arc-shaped block structure, a rectangular structure, a rhomboid structure, etc., all without restriction, to achieve the requirement of enhancing the force during the pressing and demolding process. Furthermore, the number of auxiliary structures 201 at different positions can be selected according to the situation, including, for example, 1 to n, where n≥2, that is, their number and shape are not limited.
[0057] Furthermore, compared to the grating structures of the coupled-in grating region, the turning grating region, and the coupled-out grating region, the size of the auxiliary structure is larger than the size of the grating structure.
[0058] Furthermore, based on the grating design of the coupled-in grating region, the transition grating region, and the coupled-out grating region, including parameters such as grating tooth profile, grating orientation, grating duty cycle, and period, the structure of the auxiliary structure 201 is further defined to be the same as the structure of the grating at the location of the auxiliary structure. The orientation of the auxiliary structure is the same as or different from the orientation of the grating structure. In this utility model, "different" means that the two structures have different orientations or completely opposite orientations. For example, if the auxiliary structure is the same as the grating structure of the coupled-in grating region, or the auxiliary structure is the same as the grating structure of the coupled-out grating structure, or the auxiliary structure is the same as the grating structure of the transition grating structure, each auxiliary structure remains the same as the grating structure at its location. On the one hand, such as Figure 8 As shown in (b), if the grating is designed with straight teeth, helical teeth, blazing, or other structures, the structure of the auxiliary structure 201 is also set to be the same as the grating structure, such as straight teeth, helical teeth, blazing, or other structures. On the other hand, when the auxiliary structure is set to helical teeth or blazing, the orientation of the auxiliary structure 201 toward the grating structure is the same as or different from that of the grating structure; its size can be larger than the size of the grating structure, or even much larger than the size of the grating structure. In order to reduce the difficulty of the imprinting template manufacturing process, the specific structure of the auxiliary structure is limited, which can be achieved by using the same process as the grating structure; at the same time, by making the orientations of the two structures the same or different, the interaction force between the working template and the imprinting adhesive layer during demolding is changed, the magnitude of the interaction force between the two during demolding is increased, and the large area of the working template is prevented from being quickly removed in a short time, which is beneficial to the shape preservation of the grating structure in each area.
[0059] The size of the auxiliary structure 201 is determined based on different choices and process requirements. As long as it can ensure that rapid demolding of grating areas with small areas or long distances prevents damage to the grating structure, the force during demolding can be changed, and the size of the structure is not limited.
[0060] In some other embodiments, such as Figure 9As shown, an auxiliary structure 201 is arranged around the coupling grating region and located between the structural region 102 and the functional region 101. When the diffractive waveguide is cut to form a waveguide, the auxiliary structure 201 in this region exists in the waveguide structure. By matching the period and direction of the grating structure in the structural region, the period and direction of the auxiliary structure are designed. The auxiliary structure 201 at this position can be configured as a recovery grating structure or a reflection grating structure to recover or reflect light that has not yet been utilized in the turning region and the coupling region, thereby improving light energy utilization, display effect, and optical performance of the waveguide. Furthermore, in conjunction with the aforementioned embodiment, the auxiliary structure 201 can be simultaneously arranged in the coupling grating region to improve the integrity of the grating structure in the coupling region. After the cutting process, the auxiliary structure 201 in this part of the region is left in the cutting residue. This design is beneficial. Of course, based on different optical requirements, different ways of leaving the auxiliary structure 201 in different regions can be selected, and the diffractive waveguide product formed may or may not include the auxiliary structure.
[0061] Meanwhile, this utility model also provides a diffractive waveguide, which is obtained by imprinting based on the imprinting master of any of the foregoing embodiments.
[0062] Meanwhile, this utility model also provides a display device, which includes the diffractive waveguide as described above.
[0063] This invention utilizes an imprinting template to fabricate diffractive waveguide structures. An auxiliary structure is placed in the remaining area of the imprinting template (excluding the structural area) or at least one area outside the functional area, defining the position of the auxiliary structure in different grating regions. When a working template is obtained by casting from the imprinting template, a corresponding complementary structure is formed in the working template area. Grating material is then imprinted using the working template, thereby improving the interaction force between the working template and the imprinting material during demolding. This improves existing imprinting demolding processes by changing the imprinting contact method from planar contact to uneven surface contact, thus altering the impact of different demolding methods on the grating structure in different grating regions during demolding. This enhances the shape retention and integrity of the grating structure, reduces defects caused by grating structure damage, and improves product yield.
[0064] The specific embodiments described above do not constitute a limitation on the scope of protection of this utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.
Claims
1. A stamping template, characterized by It has at least one functional area, which includes a structural area. At least one auxiliary structure is provided outside the structural area. The auxiliary structure is configured to surround a portion of the grating area in the structural area, so that the auxiliary structure can change the imprinting contact mode during imprinting and demolding, thereby reducing the demolding speed of the working template in the structural area and preventing damage to the grating structure caused by rapid demolding of the working template.
2. The imprint template of claim 1, wherein, The auxiliary structure is located in the remaining area of the functional region other than the structural region, or in at least one area outside the functional region.
3. The imprint template of claim 2, wherein, The structural region includes a coupling grating region, and the auxiliary structure is configured to surround a portion of the coupling grating region.
4. The imprint template of claim 3, wherein, The auxiliary structure is located outside the functional area and is configured to surround a portion of the coupling grating area.
5. The imprint template of claim 3, wherein, The auxiliary structure is located in the remaining area of the functional region excluding the structural region and is configured to surround a portion of the coupling grating region.
6. The imprint template according to claim 1 or 3, wherein The structural region includes a coupling grating region, and the auxiliary structure is configured to surround a portion of the coupling grating region.
7. The imprint template of claim 6, wherein, The auxiliary structure is located outside the functional area and is configured to surround a portion of the coupling grating area.
8. The imprint template of claim 6, wherein, The auxiliary structure is located in the remaining area of the functional region excluding the structural region and is configured to surround a portion of the coupling grating region; and the auxiliary structure is configured as a recovery grating structure or a reflection grating structure.
9. The imprint template of claim 1, wherein, The auxiliary structure has the same structure as the grating structure, and the orientation of the auxiliary structure is the same as or different from that of the grating structure.
10. A diffractive optical waveguide, characterized in that, The diffractive waveguide is obtained by imprinting based on the imprinting template according to any one of claims 1 to 9.