Semiconductor-grade stainless steel pipe purging tool

Abstract

The utility model discloses a semiconductor-grade stainless steel pipe purging tool, which relates to the technical field of semiconductor-grade stainless steel pipes and comprises a workbench, a clamping structure is arranged on one side of the top of the workbench, a hollow limiting sliding rod is arranged on the other side of the top of the workbench, and a plurality of gas nozzles are mounted on the outer side of one end of the hollow limiting sliding rod. The outer side of the hollow limiting sliding rod is slidably connected with a limiting sleeve, the outer side of the limiting sleeve is rotatably connected with a mounting box frame, the mounting box frame is fixedly connected to the top of the workbench, and the outer side of the limiting sleeve is fixedly connected with a first gear. And a first gear drives a hollow limiting sliding rod to rotate on an L-shaped rod through a limiting sleeve, so that rotation of a plurality of gas nozzles can be achieved, dirt on the wall of the stainless steel pipe can be better purged, and the practicability of the device is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor-grade stainless steel tube technology, specifically a semiconductor-grade stainless steel tube purging fixture. Background Technology

[0002] Semiconductor-grade stainless steel tubing is a type of stainless steel tubing specifically designed for the semiconductor industry, requiring high precision and high cleanliness. In semiconductor manufacturing processes, the purity requirements for the environment and materials are extremely high. Even minute impurities or surface defects can affect the performance and yield of semiconductor devices. Therefore, this type of stainless steel tubing is mainly used in critical areas such as semiconductor peripheral exhaust systems, and the transport of ultra-high purity gases and chemicals, to ensure the stability of the production process and product quality. The semiconductor manufacturing process demands extremely high purity and stability of the transmission medium, typically requiring the internal contaminants and impurities of the stainless steel tubing to be purged to ensure its cleanliness.

[0003] In the prior art, multiple gas nozzles are used to blow clean the inner wall of stainless steel pipes. However, since multiple gas nozzles cannot rotate, the cleaning effect on the inner wall of stainless steel pipes is poor, reducing the practicality of the device. Utility Model Content

[0004] The purpose of this invention is to provide a semiconductor-grade stainless steel tube purging fixture to solve the problem in the prior art where multiple gas nozzles cannot complete the rotation action, resulting in poor cleaning effect on the inner wall of the stainless steel tube.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a semiconductor-grade stainless steel tube purging fixture, comprising a worktable, a clamping structure on one side of the top of the worktable, and a hollow limiting slide rod on the other side of the top of the worktable. Multiple gas nozzles are mounted on the outer side of one end of the hollow limiting slide rod. A limiting sleeve is slidably connected to the outer side of the hollow limiting slide rod, and a mounting box is rotatably connected to the outer side of the limiting sleeve. The mounting box is fixedly connected to the top of the worktable. A gear one is fixedly connected to the outer side of the limiting sleeve, and the gear one is disposed inside the mounting box. A gear two is meshed at the bottom of the gear one, and a driving component is provided on the outer side of the gear two. An L-shaped rod is rotatably connected to the outer side of the other end of the hollow limiting slide rod, and a moving structure is provided between the L-shaped rod and the gear two. An air pipe connection structure is provided at the other end of the hollow limiting slide rod. The mounting box protects the gear one and gear two, preventing dust and impurities from falling in.

[0006] Preferably, the clamping structure includes two hydraulic rods, both of which are fixedly connected to the top of the worktable, and both of the hydraulic rods have clamps installed at their telescopic ends.

[0007] Preferably, the driving component includes a forward and reverse motor, which is disposed on one side of the mounting box frame and fixedly connected to the top of the workbench. The output end of the forward and reverse motor passes through one side of the mounting box frame and extends into the interior of the mounting box frame. The forward and reverse motor is rotatably connected to the mounting box frame, and the output end of the forward and reverse motor is fixedly connected to gear two.

[0008] Preferably, the moving structure includes a long slide groove one, which is opened on one side of the worktable. A long slide groove two is formed at the top of the long slide groove one. A connecting groove is formed on one side of the top of the long slide groove two. The L-shaped rod is disposed inside the long slide groove one and is slidably connected to the worktable. The connecting groove is opened to allow the gear three to pass through.

[0009] Preferably, the movable structure further includes a threaded rod disposed inside the second long slide groove. Both ends of the threaded rod are rotatably connected to the worktable. A gear three is fixedly connected to the outer side of one end of the threaded rod. The gear three passes through the connecting groove and meshes with the gear two. A connecting block is provided on one side of the gear three. The connecting block is threadedly connected to the outer side of the threaded rod. The bottom end of the connecting block is fixedly connected to an L-shaped rod. The connecting block is disposed inside the second long slide groove and slidably connected to the worktable.

[0010] Preferably, the endotracheal connection structure includes a short tube, which is rotatably connected to the other end of the hollow limiting slide rod via a sealed bearing. A fixing seat is fixedly connected to the outside of the short tube, and the fixing seat is fixedly connected to the outside of the L-shaped rod. A gas delivery hose is fixedly connected to one end of the short tube. The fixing seat provides a fixed support for the short tube.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] 1. This application uses the output end of the positive and negative motor to drive the second gear to rotate. The second gear meshes with the first gear. The first gear drives the hollow limit slide rod to rotate on the L-shaped rod through the limit sleeve. Therefore, multiple gas nozzles can be rotated, which can better blow away dirt from the stainless steel pipe wall and improve the practicality of the device.

[0013] 2. This application uses gear two and gear three to mesh and connect. Gear three drives the threaded rod to rotate in the long slide groove two. The threaded rod is threadedly connected to the connecting block. The connecting block drives the hollow limiting slide rod on the L-shaped rod to move. The hollow limiting slide rod slides in the limiting sleeve, realizing the movement of multiple gas nozzles, which can blow the inner wall of the stainless steel pipe.

[0014] 3. By using a short tube, this application can prevent the gas delivery hose from rotating when the hollow limit slide bar rotates. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of a semiconductor-grade stainless steel tube purging fixture according to this utility model.

[0016] Figure 2 This is a cross-sectional view of the workbench of a semiconductor-grade stainless steel tube purging fixture according to this utility model.

[0017] Figure 3 This utility model relates to a semiconductor-grade stainless steel tube purging fixture. Figure 2 Enlarged view of the A-section structure;

[0018] Figure 4 This is a schematic diagram of the limiting sleeve structure of a semiconductor-grade stainless steel tube purging fixture according to this utility model.

[0019] The following are labeled in the diagram: 1. Workbench; 100. Long slide rail one; 101. Long slide rail two; 102. Connecting groove; 2. Hydraulic rod; 3. Fixture; 4. Hollow limiting slide rail; 400. Gas nozzle; 5. L-shaped rod; 6. Mounting box frame; 600. Limiting sleeve; 7. Gear one; 8. Short pipe; 9. Fixed seat; 10. Gas delivery hose; 11. Gear two; 12. Forward and reverse motor; 13. Threaded rod; 130. Connecting block; 14. Gear three. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Example: Figure 1 - Figure 4As shown, this utility model provides a technical solution for a semiconductor-grade stainless steel tube purging fixture, including a workbench 1. A clamping structure is provided on one side of the top of the workbench 1. The clamping structure includes two hydraulic rods 2, both of which are fixedly connected to the top of the workbench 1. A clamp 3 is installed on the telescopic end of each of the two hydraulic rods 2. A hollow limiting slide rod 4 is provided on the other side of the top of the workbench 1. Multiple gas nozzles 400 are installed on the outer side of one end of the hollow limiting slide rod 4. A limiting sleeve 600 is slidably connected to the outer side of the hollow limiting slide rod 4. A mounting box frame 6 is rotatably connected to the outer side of the limiting sleeve 600. The mounting box frame 6 is fixedly connected to the top of the workbench 1. A gear 7 is fixedly connected to the outer side of the limiting sleeve 600. The gear 7 is set inside the mounting box frame 6. A gear 11 is meshed at the bottom of the gear 7. A driving component is provided on the outer side of the gear 11. An L-shaped rod 5 is rotatably connected to the outer side of the other end of the hollow limiting slide rod 4. A moving structure is provided between the L-shaped rod 5 and the gear 11. An air pipe connection structure is provided at the other end of the hollow limiting slide rod 4.

[0022] The driving component includes a forward and reverse motor 12, which is located on one side of the mounting box frame 6 and is fixedly connected to the top of the workbench 1. The output end of the forward and reverse motor 12 passes through one side of the mounting box frame 6 and extends into the interior of the mounting box frame 6. The forward and reverse motor 12 is rotatably connected to the mounting box frame 6, and the output end of the forward and reverse motor 12 is fixedly connected to the gear 11.

[0023] Specifically, starting the forward and reverse motor 12 (the specific model of the forward and reverse motor 12 is not limited, but depends on the compatible equipment) drives the output end of the forward and reverse motor 12 to rotate the gear 2 11. The gear 2 11 meshes with the gear 1 7. The gear 1 7 drives the hollow limit slide rod 4 to rotate on the L-shaped rod 5 through the limit sleeve 600. Therefore, multiple gas nozzles 400 can be rotated, which can better blow away dirt from the stainless steel pipe wall and improve the practicality of the device.

[0024] Example: Figure 1 - Figure 3 As shown, the moving structure includes a long slide groove 100, which is located on one side of the worktable 1. A second long slide groove 101 is formed at the top of the first long slide groove 100. A connecting groove 102 is formed on one side of the top of the second long slide groove 101. An L-shaped rod 5 is located inside the first long slide groove 100 and is slidably connected to the worktable 1. The moving structure also includes a threaded rod 13, which is located inside the second long slide groove 101. Both ends of the threaded rod 13 are rotatably connected to the worktable 1. A gear 3 14 is fixedly connected to the outer side of one end of the threaded rod 13. The gear 3 14 passes through the connecting groove 102 and meshes with the gear 2 11. A connecting block 130 is provided on one side of the gear 3 14. The connecting block 130 is threadedly connected to the outer side of the threaded rod 13. The bottom end of the connecting block 130 is fixedly connected to the L-shaped rod 5. The connecting block 130 is located inside the second long slide groove 101 and is slidably connected to the worktable 1.

[0025] Specifically, when gear 2 11 rotates, gear 2 11 meshes with gear 3 14. Gear 3 14 drives threaded rod 13 to rotate in long slide groove 2 101. Threaded rod 13 is threadedly connected to connecting block 130. Connecting block 130 drives hollow limiting slide bar 4 on L-shaped rod 5 to move. Hollow limiting slide bar 4 slides in limiting sleeve 600, realizing the movement of multiple gas nozzles 400, which can blow the inner wall of stainless steel pipe.

[0026] Example: Figure 1 - Figure 2 As shown, the endotracheal connection structure includes a short tube 8, which is rotatably connected to the other end of the hollow limiting slide bar 4 via a sealed bearing. A fixing seat 9 is fixedly connected to the outside of the short tube 8, and the fixing seat 9 is fixedly connected to the outside of the L-shaped rod 5. A gas delivery hose 10 is fixedly connected to one end of the short tube 8.

[0027] Specifically, the gas delivery hose 10 is connected to an external gas supply device. Gas enters the hollow limiting slide bar 4 through the gas delivery hose 10 and the short pipe 8, and is then blown out through multiple gas nozzles 400. When the hollow limiting slide bar 4 rotates, the short pipe 8 prevents the gas delivery hose 10 from rotating.

[0028] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A semiconductor-grade stainless steel tube purging fixture, characterized in that: The system includes a workbench (1), with a clamping structure on one side of the top of the workbench (1) and a hollow limiting slide rod (4) on the other side of the top of the workbench (1). Multiple gas nozzles (400) are mounted on the outer side of one end of the hollow limiting slide rod (4). A limiting sleeve (600) is slidably connected to the outer side of the hollow limiting slide rod (4). A mounting frame (6) is rotatably connected to the outer side of the limiting sleeve (600). The mounting frame (6) is fixedly connected to the top of the workbench (1). A gear 1 (7) is fixedly connected to the outside of the limiting sleeve (600). The gear 1 (7) is located inside the mounting box frame (6). A gear 2 (11) is meshed with the bottom of the gear 1 (7). A driving component is provided on the outside of the gear 2 (11). An L-shaped rod (5) is rotatably connected to the outside of the other end of the hollow limiting slide rod (4). A moving structure is provided between the L-shaped rod (5) and the gear 2 (11). An air pipe connection structure is provided at the other end of the hollow limiting slide rod (4).

2. The semiconductor-grade stainless steel tube purging fixture according to claim 1, characterized in that: The clamping structure includes two hydraulic rods (2), both of which are fixedly connected to the top of the workbench (1), and clamps (3) are installed at the telescopic ends of both hydraulic rods (2).

3. The semiconductor-grade stainless steel tube purging fixture according to claim 1, characterized in that: The driving component includes a forward and reverse motor (12), which is disposed on one side of the mounting box frame (6). The forward and reverse motor (12) is fixedly connected to the top of the workbench (1). The output end of the forward and reverse motor (12) passes through one side of the mounting box frame (6) and extends into the interior of the mounting box frame (6). The forward and reverse motor (12) is rotatably connected to the mounting box frame (6). The output end of the forward and reverse motor (12) is fixedly connected to gear two (11).

4. The semiconductor-grade stainless steel tube purging fixture according to claim 1, characterized in that: The movable structure includes a long slide groove one (100), which is opened on one side of the worktable (1). A long slide groove two (101) is formed at the top inside the long slide groove one (100). A connecting groove (102) is formed on one side of the top of the long slide groove two (101). The L-shaped rod (5) is disposed inside the long slide groove one (100) and is slidably connected to the worktable (1).

5. The semiconductor-grade stainless steel tube purging fixture according to claim 4, characterized in that: The movable structure also includes a threaded rod (13), which is disposed inside the second long slide groove (101). Both ends of the threaded rod (13) are rotatably connected to the worktable (1). A gear three (14) is fixedly connected to the outer side of one end of the threaded rod (13). The gear three (14) passes through the connecting groove (102) and meshes with the gear two (11). A connecting block (130) is provided on one side of the gear three (14). The connecting block (130) is threadedly connected to the outer side of the threaded rod (13). The bottom end of the connecting block (130) is fixedly connected to the L-shaped rod (5). The connecting block (130) is disposed inside the second long slide groove (101) and slidably connected to the worktable (1).

6. The semiconductor-grade stainless steel tube purging fixture according to claim 1, characterized in that: The tracheal connection structure includes a short tube (8), which is rotatably connected to the other end of the hollow limiting slide rod (4) via a sealed bearing. A fixing seat (9) is fixedly connected to the outside of the short tube (8), and the fixing seat (9) is fixedly connected to the outside of the L-shaped rod (5). A gas delivery hose (10) is fixedly connected to one end of the short tube (8).

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