Vertical online heat treatment equipment

By using inert and antioxidant gases to create an oxygen-free environment in a vertical online heat treatment device, combined with water cooling and air cooling, the oxidation and stress problems in the metal wire annealing process are solved, improving the oxidation resistance and stress uniformity of the metal wire and ensuring the reliability of semiconductor products.

CN224160661UActive Publication Date: 2026-04-24SHENZHEN TIMES MINXIN TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SHENZHEN TIMES MINXIN TECH CO LTD
Filing Date
2025-05-26
Publication Date
2026-04-24

AI Technical Summary

Technical Problem

In existing technologies, metal wires undergo severe surface oxidation during high-temperature annealing, forming an uneven oxide layer that affects bonding strength and stress distribution, leading to a decline in semiconductor product performance.

Method used

Vertical online heat treatment equipment is used to form an oxygen-free environment and gas wall on the surface of the metal wire through inert gas and anti-oxidation gas, so as to achieve isothermal annealing and anti-oxidation treatment. Combined with water cooling and air cooling, stress is eliminated.

Benefits of technology

It effectively prevents metal wire oxidation, improves bonding strength and stress uniformity, and ensures the reliability and performance stability of semiconductor products.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses vertical online heat treatment equipment which comprises a machine table and a heating mechanism, a pay-off mechanism and a take-up mechanism are arranged on the machine table, the heating mechanism comprises a heat preservation pipe and an air distribution pipe, the heat preservation pipe is fixedly connected with the machine table, a heat conduction pipe is arranged in the heat preservation pipe in a sleeved mode, and a first heating device is installed between the heat preservation pipe and the heat conduction pipe. The heat conduction pipe is communicated with a first air nozzle and arranged on the outer side of the air distribution pipe in a sleeving mode, multiple rows of first air distribution holes are formed in the air distribution pipe, the first air distribution holes are communicated with the interior of the heat conduction pipe, the two ends of the air distribution pipe are sleeved with a first sleeve and a second sleeve respectively, and the first sleeve is communicated with a second air nozzle. The second sleeve is communicated with a third air nozzle, and a cooling mechanism is arranged on the machine table and located between the second sleeve and the take-up mechanism. The utility model provides vertical online heat treatment equipment which is used for synchronously carrying out heat treatment for resisting oxidation and relieving stress on a metal wire during annealing.
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Description

Technical Field

[0001] This utility model relates to the field of metal heat treatment equipment, and in particular to a vertical online heat treatment equipment. Background Technology

[0002] The military and semiconductor industries have extremely stringent performance requirements for high-precision metal wires, necessitating annealing processes to eliminate internal stress and optimize grain structure to improve conductivity and ductility. Current technologies typically employ open-air high-temperature furnaces to directly heat the metal wires, followed by natural or forced air cooling.

[0003] However, during the heating stage, the surface of the metal wire is directly exposed to an oxygen-containing space, where it undergoes a violent oxidation reaction with oxygen, forming an oxide layer of uneven thickness. This oxide layer reduces the surface density of the wire, leading to a decrease in the bonding strength of the semiconductor bonding wire and affecting the reliability of the finished product. Furthermore, open heating exacerbates the lattice distortion inside the metal wire, causing uneven stress distribution and affecting the performance indicators of the semiconductor product. Utility Model Content

[0004] The purpose of this invention is to provide a vertical online heat treatment device that simultaneously performs anti-oxidation and stress relief heat treatment on metal wires during annealing.

[0005] The technical solution adopted by the vertical online heat treatment equipment disclosed in this utility model is:

[0006] The device includes a machine base and a heating mechanism. The machine base is equipped with a wire feeding mechanism and a wire take-up mechanism. The heating mechanism includes a heat insulation pipe and a gas distribution pipe. The heat insulation pipe is fixedly connected to the machine base. A heat-conducting pipe is sleeved inside the heat insulation pipe. A first heating device is installed between the heat insulation pipe and the heat-conducting pipe. A first gas nozzle is connected to the heat-conducting pipe. The heat-conducting pipe is sleeved on the outside of the gas distribution pipe. Multiple rows of first gas distribution holes are opened on the gas distribution pipe. The first gas distribution holes are connected to the inside of the heat-conducting pipe. A first sleeve and a second sleeve are respectively sleeved at both ends of the gas distribution pipe. A second gas nozzle is connected to the first sleeve. The wire feeding mechanism is close to the first sleeve. A third gas nozzle is connected to the second sleeve. The machine base is equipped with a cooling mechanism located between the second sleeve and the wire take-up mechanism.

[0007] As a preferred embodiment, the heat pipe is equipped with an air distribution component and a plug at both ends, the air distribution pipe passes through the air distribution component and the plug, the air distribution component has a plurality of second air distribution holes communicating with the interior, the second air distribution holes are communicating with the interior of the heat pipe, and the first air nozzle is communicating with the interior of the air distribution component.

[0008] As a preferred embodiment, the first sleeve is provided with a first air distribution ring, and an annular groove is provided on the outer side of the first air distribution ring. The annular groove communicates with the inside of the sleeve, and a plurality of first through holes are provided at the bottom of the annular groove.

[0009] As a preferred embodiment, a second air distribution ring is provided inside the second sleeve, the second air distribution ring is fitted on the air distribution pipe, and a plurality of second through holes are opened on the second air distribution ring, the second through holes communicating with the inside of the second sleeve.

[0010] As a preferred embodiment, the inner wall of the second air distribution ring extends into a limiting ring, and two symmetrically placed third air distribution rings are fitted inside the second air distribution ring. The two third air distribution rings respectively abut against the two ends of the limiting ring. Multiple through grooves are opened on the third air distribution rings, and the through grooves communicate with the inside of the second air distribution ring.

[0011] As a preferred embodiment, a limiting member is provided on the outer side of the second air distribution ring, the limiting member abutting against one of the third air distribution rings, and the air distribution tube abutting against the other third air distribution ring.

[0012] As a preferred embodiment, the machine is equipped with a cleaning mechanism and a drying mechanism, which are located between the cooling mechanism and the winding mechanism.

[0013] As a preferred embodiment, the cooling mechanism includes a first circulating water supply device and a first water tank. The first circulating water supply device is placed inside the machine base. A second water tank is provided inside the first water tank. The edge of the second water tank is higher than the edge of the first water tank. A first drain pipe is connected to the first water tank. A first water supply pipe is connected to the second water tank. The first drain pipe and the first water supply pipe are respectively connected to the return water port and the outlet water port of the first circulating water supply device. The second water tank is close to the second sleeve.

[0014] As a preferred embodiment, the cleaning mechanism includes a second circulating water supply device and a third water tank. The second circulating water supply device is placed inside the machine base. A fourth water tank is provided inside the third water tank. The edge of the fourth water tank is higher than the edge of the third water tank. A second drain pipe is connected to the third water tank. A second water supply pipe is connected to the fourth water tank. The second drain pipe and the second water supply pipe are respectively connected to the return water inlet and the outlet water outlet of the second circulating water supply device. The third water tank is close to the first water tank.

[0015] As a preferred embodiment, the drying mechanism includes a first mounting base and a second mounting base, both of which are fixedly connected to the machine base. The first mounting base is provided with an air guide seat, and a fourth air nozzle is connected to the air guide seat. An air guide pipe passes through the air guide seat, and multiple air vents are opened on the air guide pipe. The air vents are connected to the air guide seat. The second mounting base is provided with a second heating device, and a drying channel passes through the second heating device.

[0016] The beneficial effects of the vertical online heat treatment equipment disclosed in this utility model are:

[0017] After the wire feeding mechanism guides the metal wire through the first sleeve, it passes through the continuous processing channel formed by the first sleeve, the air distribution pipe and the second sleeve in sequence. Finally, after the cooling mechanism completes the heat treatment, the wire is wound up by the take-up mechanism.

[0018] During operation, the first gas nozzle injects inert gas into the annular gap between the heat pipe and the gas distribution pipe. The gas permeates evenly into the gas distribution pipe through multiple rows of gas distribution holes to form a stable oxygen-free environment. The first heating device heats the heat pipe and the inert gas, so that the heat energy is conducted through the pipe wall to build a uniform temperature field in the gas distribution pipe, thereby realizing the isothermal annealing treatment of the metal wire in the oxygen-free space.

[0019] The second and third air nozzles inject anti-oxidation gas into the first and second sleeves respectively. When the metal wire enters the gas distribution pipe through the first sleeve, the anti-oxidation gas evenly coats the outside of the metal wire, thus performing anti-oxidation treatment on the metal wire. The flow of anti-oxidation gas forms an air wall at the inlet of the first sleeve, preventing outside air from entering the gas distribution pipe through the first sleeve.

[0020] Since the metal wire is at a high temperature when it is led out of the second sleeve after annealing, the second sleeve covers the outside of the metal wire with another layer of anti-oxidation gas to prevent the high-temperature metal wire from contacting oxygen and improve the anti-oxidation effect of the metal wire. The flow of anti-oxidation gas forms an air wall at the outlet of the second sleeve, which prevents outside air from entering the gas distribution pipe through the second sleeve. In addition, the air wall generated by the second sleeve can perform the first air cooling of the metal wire, thereby achieving simultaneous anti-oxidation and stress relief heat treatment of the metal wire.

[0021] Finally, the cooling mechanism performs a second cooling on the metal wire after the first cooling, and then winds the metal wire into the take-up mechanism. Attached Figure Description

[0022] Figure 1 This is a structural schematic diagram of a vertical online heat treatment device according to this utility model.

[0023] Figure 2 This is a schematic diagram of the wire feeding mechanism of a vertical online heat treatment equipment according to this utility model.

[0024] Figure 3 This is a schematic diagram of the heating mechanism structure of a vertical online heat treatment device according to this utility model.

[0025] Figure 4 This is a partial sectional view of the heating mechanism of a vertical online heat treatment device according to this utility model.

[0026] Figure 5 This utility model relates to a vertical online heat treatment device. Figure 3 (Area A) Enlarged view.

[0027] Figure 6 This utility model relates to a vertical online heat treatment device. Figure 3 (Area B) Enlarged view.

[0028] Figure 7 This is a cross-sectional view of the cooling mechanism of a vertical online heat treatment device according to this utility model.

[0029] Figure 8 This is a cross-sectional view of the cleaning mechanism of a vertical online heat treatment device according to this utility model.

[0030] Figure 9 This is a cross-sectional view of the drying mechanism of a vertical online heat treatment device according to this utility model.

[0031] Figure 10 This utility model relates to a take-up mechanism for a vertical online heat treatment device. Detailed Implementation

[0032] The present invention will be further described and illustrated below with reference to specific embodiments and the accompanying drawings:

[0033] Please refer to Figure 1 and Figure 2 .

[0034] The present invention discloses a vertical online heat treatment device, including a machine base 1 and a heating mechanism 3.

[0035] The machine base 1 is equipped with a wire feeding mechanism 2, which includes a wire feeding motor 21 and a wire feeding reel 22. The wire feeding motor 21 is fixedly connected to the machine base 1, and the output shaft of the wire feeding motor 21 is detachably connected to the center of the wire feeding reel 22. The wire feeding reel 22 winds up the metal wire 15 to be processed. The wire feeding motor 21 drives the wire feeding reel 22 to rotate, thereby guiding the metal wire 15 into the heating mechanism 3.

[0036] Furthermore, the heating mechanism 3 is placed on the machine base 1, and three first guide wheels 11 are rotatably connected to the machine base 1. One of the first guide wheels 11 is close to the top of the heating mechanism 3, and the other two first guide wheels 11 are close to the wire feeding wheel 22.

[0037] Please refer to Figures 1-6 .

[0038] The heating mechanism 3 includes a heat insulation pipe 31 and a gas distribution pipe 33; a mounting bracket is fixedly connected to the machine base 1, the heat insulation pipe 31 is fixedly connected to the mounting bracket of the machine base 1, a heat conduction pipe 32 is sleeved inside the heat insulation pipe 31, and the two ends of the heat conduction pipe 32 pass through the two ends of the heat insulation pipe 31 respectively. The mounting bracket is fixedly connected to the outside of the heat conduction pipe 32; the diameter of the heat insulation pipe 31 is larger than the diameter of the heat conduction pipe 32, so that an annular gap is formed between the inner wall of the heat insulation pipe 31 and the outer side of the heat conduction pipe 32. A first heating device is installed in the annular gap between the heat insulation pipe 31 and the heat conduction pipe 32. In this embodiment, the first heating device is preferably composed of multiple ceramic heating plates, and the multiple ceramic heating plates surround the outside of the heat conduction pipe 32.

[0039] Furthermore, in this embodiment, the heat pipe 32 is preferably made of metal. Traditional equipment uses a ceramic tube as a heat barrier medium to separate the first heating device from the metal wire 15. Due to the inherent low thermal conductivity of ceramic materials, it is easy to cause uneven heating of the metal wire 15. The heat pipe 32 made of metal can establish a balanced heat conduction path by utilizing its high thermal conductivity, thus solving the problem of poor thermal conductivity of ceramics.

[0040] A first air nozzle 322 is connected to the heat pipe 32. An air distribution component 321 and a plug 324 are respectively installed at both ends of the heat pipe 32. The first air nozzle 322 is connected to the interior of the air distribution component 321.

[0041] Furthermore, the heat pipe 32 is sleeved on the outside of the air distribution pipe 33. The air distribution pipe 33 has multiple rows of first air distribution holes 331. Each row of first air distribution holes 331 surrounds the outside of the air distribution pipe 33. The inside of the air distribution pipe 33 is connected to the inside of the heat pipe 32 through the first air distribution holes 331.

[0042] Furthermore, the air distribution component 321 is provided with a plurality of second air distribution holes 323 that communicate with the interior of the air distribution component 321, and the second air distribution holes 323 communicate with the interior of the heat pipe 32; the two ends of the air distribution pipe 33 pass through the air distribution component 321 and the plug 324 respectively, and the plurality of second air distribution holes 323 are arranged around the outside of the air distribution pipe 33.

[0043] Furthermore, the diameter of the heat pipe 32 is larger than the diameter of the air distribution pipe 33, so that an annular gap is formed between the inner wall of the heat pipe 32 and the outer side of the air distribution pipe 33, and the air distribution component 321 and the plug 324 seal the annular gap between the heat pipe 32 and the air distribution pipe 33.

[0044] Inert gas is injected into the first gas nozzle 322. The inert gas passes through the first gas nozzle 322, the interior of the gas distribution component 321, and the second gas distribution hole 323, and enters the annular gap between the heat-conducting pipe 32 and the gas distribution pipe 33. After the inert gas is evenly distributed in the annular gap between the heat-conducting pipe 32 and the gas distribution pipe 33, the inert gas permeates evenly into the gas distribution pipe 33 through multiple rows of gas distribution holes to form a stable oxygen-free environment. The first heating device heats the heat-conducting pipe 32 and the inert gas, so that the heat energy is conducted through the pipe wall to build a uniform temperature field in the gas distribution pipe 33, thereby realizing the isothermal annealing treatment of the metal wire 15 in the oxygen-free space.

[0045] Please refer to Figures 3-6 .

[0046] The two ends of the air distribution pipe 33 are respectively fitted with a first sleeve 4 and a second sleeve 5.

[0047] The first sleeve 4 is fitted onto one end of the air distribution pipe 33. A second air nozzle 41 is connected to the first sleeve 4, and the second air nozzle 41 is connected to the interior of the first sleeve 4. A first air distribution ring 42 is provided inside the first sleeve 4. An annular groove is provided on the outer side of the first air distribution ring 42, and the annular groove is connected to the interior of the sleeve. Multiple first through holes 421 are provided at the bottom of the annular groove, and the multiple first through holes 421 surround the outer side of the first air distribution ring 42. One end of the air distribution pipe 33 touches the first air distribution ring 42.

[0048] By injecting antioxidant gas into the second nozzle 41, the antioxidant gas passes through the interior of the second nozzle 41 and the first sleeve 4 and enters the surrounding groove. After the antioxidant gas is evenly distributed in the surrounding groove, it is injected into the interior of the first gas distribution ring 42 through multiple first through holes 421. The flow of antioxidant gas forms an air wall at the entrance of the first sleeve 4, preventing outside air from entering the gas distribution pipe 33 through the first sleeve 4. When the metal wire 15 enters the gas distribution pipe 33 through the first sleeve 4, the antioxidant gas evenly wraps around the outside of the metal wire 15, thus performing antioxidant treatment on the metal wire 15. The design of the first gas distribution ring 42 can weaken the impact force of the flow of antioxidant gas and prevent the high-speed flow of antioxidant gas from breaking the metal wire 15. Furthermore, the design of multiple first through holes 421 arranged around the metal wire 15 can evenly spray the antioxidant gas on the outside of the metal wire 15.

[0049] The wire feeding mechanism 2 is close to the first sleeve 4, and one of the first guide wheels 11 is close to the top of the first sleeve 4.

[0050] The second sleeve 5 is connected to a third air nozzle 51, which is connected to the interior of the second sleeve 5. A second air distribution ring 52 is fitted inside the second sleeve 5, with one end of the second air distribution ring 52 fitted onto the other end of the air distribution pipe 33. The diameter of the inner wall of the second sleeve 5 is larger than the diameter of the second air distribution ring 52, so that an annular gap is formed between the inner wall of the second sleeve 5 and the outer side of the second air distribution ring 52. The second air distribution ring 52 is provided with a plurality of second through holes 521, which are connected to the interior of the second sleeve 5.

[0051] Furthermore, the inner wall of the second air distribution ring 52 extends into a limiting ring, and two symmetrically placed third air distribution rings 53 are fitted inside the second air distribution ring 52. The two third air distribution rings 53 respectively abut against the two ends of the limiting ring. Multiple through grooves 531 are opened on the third air distribution rings 53. The through grooves 531 are close to the limiting ring and communicate with the interior of the second air distribution ring 52. The third air distribution ring 53 is provided with a waist-cinching structure, so that an annular gap is formed between the waist-cinching structure of the third air distribution ring 53 and the inner wall of the second air distribution ring 52. The through grooves 531 are located on the waist-cinching structure of the third air distribution ring 53.

[0052] Furthermore, a limiting member 54 is sleeved on the outer side of the second air distribution ring 52. The limiting member 54 has a hole that is coaxial with the third air distribution ring 53. The limiting member 54 touches one of the third air distribution rings 53, and the other end of the air distribution tube 33 touches the other third air distribution ring 53. The limiting member 54 limits the two third air distribution rings 53 within the second air distribution ring 52.

[0053] By injecting antioxidant gas into the third nozzle 51, the antioxidant gas sequentially passes through the interior of the second nozzle 41 and the second sleeve 5, entering the annular gap between the second sleeve 5 and the second air distribution ring 52. After the antioxidant gas is evenly distributed in the annular gap between the second sleeve 5 and the second air distribution ring 52, the antioxidant gas is injected through multiple second through holes 521 and evenly distributed in the annular gap between the two third air distribution rings 53 and the second air distribution ring 52, distributing the antioxidant gas in the two third air distribution rings 53. The antioxidant gas is injected into the interior of the first air distribution ring 42 through multiple through slots 531. The flow of antioxidant gas forms an air wall at the outlet of the second sleeve 5, preventing outside air from entering the air distribution pipe 33 through the second sleeve 5. The metal wire 15 passes through... When the second sleeve 5 is discharged, the temperature of the metal wire 15 is relatively high. The anti-oxidation gas is then evenly wrapped around the outside of the metal wire 15 again, which performs a second anti-oxidation treatment on the metal wire 15. This prevents the high-temperature metal wire 15 from contacting oxygen and improves the anti-oxidation effect of the metal wire 15. The flow rate of the third air nozzle 51 is greater than that of the second air nozzle 41. The second air distribution ring 52 is needed to weaken the impact force of the anti-oxidation gas flow and then divert the anti-oxidation gas to two third air distribution rings 53 to prevent the high-speed flow of the anti-oxidation gas from breaking the metal wire 15. The large flow rate of the third air nozzle 51 can provide the first air cooling for the metal wire 15. The design of multiple through slots 531 arranged around the metal wire 15 can evenly spray the anti-oxidation gas on the outside of the metal wire 15.

[0054] Please refer to Figure 1 and Figure 7 .

[0055] A second guide wheel 12 is rotatably connected to the machine base 1. The second guide wheel 12 is located below the second sleeve 5. The machine base 1 is equipped with a cooling mechanism 6, which includes a first circulating water supply device and a first water tank 61. The first circulating water supply device is placed inside the machine base 1. A second water tank 62 is provided inside the first water tank 61. The edge of the second water tank 62 is higher than the edge of the first water tank 61. The second guide wheel 12 is located between the second water tank 62 and the second sleeve 5. A first drain pipe 611 is connected to the first water tank 61, and a first water supply pipe 621 is connected to the second water tank 62. The first drain pipe 611 and the first water supply pipe 621 pass into the machine base 1 and are respectively connected to the return water port and the outlet water port of the first circulating water supply device. In this embodiment, it is preferred that the first drain pipe 611 and the first water supply pipe 621 are both rigid water pipes, so that the first drain pipe 611 and the first water supply pipe 621 can support the first water tank 61 and the second water tank 62.

[0056] The metal wire 15, which has undergone annealing on the heating mechanism 3, passes around the second guide wheel 12. The first circulating water supply device injects water into the second water tank 62 through the first water supply pipe 621. By increasing the water flow rate of the first water supply pipe 621, a water surge is generated in the second water tank 62, allowing the water surge to contact the second guide wheel 12 and perform a second water cooling on the metal wire 15 on the second guide wheel 12. The overflowing water flows from the edge of the second water tank 62 into the first water tank 61 and flows back to the first circulating water supply device through the first drain pipe 611.

[0057] Please refer to Figure 1 , Figure 7 and Figure 8 .

[0058] A third guide wheel 13 is rotatably connected to the machine base 1. The third guide wheel 13 is close to the second guide wheel 12. A cleaning mechanism 7 is provided on the machine base 1. The third guide wheel 13 is located between the second guide wheel 12 and the cleaning mechanism 7. The cleaning mechanism 7 includes a second circulating water supply device and a third water tank 71. The second circulating water supply device is placed inside the machine base 1. The third water tank 71 is fixedly connected to the machine base 1. A fourth water tank 72 is provided inside the third water tank 71. Grooves are provided on both sides of the fourth water tank 72. The edge of the fourth water tank 72 is higher than the edge of the third water tank 71. A second drain pipe 711 is connected to the third water tank 71. A second water supply pipe 721 is connected to the fourth water tank 72. The second drain pipe 711 and the second water supply pipe 721 pass into the machine base 1 and are respectively connected to the return water port and the outlet water port of the second circulating water supply device.

[0059] After the second cooling process, the metal wire 15 passes through the third guide wheel 13 and then through two grooves. The second circulating water supply device injects water into the fourth water tank 72 through the second water supply pipe 721. By increasing the water flow rate in the second water supply pipe 721, a water surge is generated in the fourth water tank 72, allowing the water surge to contact the metal wire 15 and clean the impurities attached to the metal wire 15. In addition, an anti-sticking agent can be added to the water source of the second circulating water supply device to effectively prevent the metal wire 15 from sticking together when it is wound in the take-up mechanism 9. The overflowing water flows from the edge of the fourth water tank 72 into the third water tank 71 and flows back into the second circulating water supply device through the second drain pipe 711.

[0060] Please refer to Figure 1 and Figure 9 .

[0061] The machine base 1 is equipped with a drying mechanism 8, which is close to the cleaning mechanism 7. The cleaning mechanism 7 is located between the drying mechanism 8 and the cooling mechanism 6. The drying mechanism 8 includes a first mounting base 81 and a second mounting base 82, both of which are fixedly connected to the machine base 1.

[0062] Furthermore, the first mounting base 81 is close to the cleaning mechanism 7. The first mounting base 81 is provided with an air guide seat 811. A fourth air nozzle 813 is connected to the air guide seat 811. The fourth air nozzle 813 is connected to the interior of the air guide seat 811. An air guide tube 812 passes through the air guide seat 811. Multiple air vents are opened on the air guide tube 812. The air vents are connected to the interior of the air guide seat 811.

[0063] Furthermore, the first mounting base 81 is located between the cleaning mechanism 7 and the second mounting base 82, and the second mounting base 82 is provided with a second heating device 821, through which a drying channel passes.

[0064] After cleaning, the metal wire 15 passes through the air guide pipe 812 and the drying channel in sequence. High-pressure air is injected into the air guide seat 811 through the fourth air nozzle 813. The high-pressure air is injected into the air guide pipe 812 through multiple air vents, blowing away the liquid adhering to the metal wire 15. The second heating device 821 heats the metal wire 15 in the drying channel at low temperature, thereby eliminating the risk of liquid corrosion of the metal wire 15 and ensuring the dryness of the metal wire 15.

[0065] Please refer to Figure 1 and Figure 10 .

[0066] Two fourth guide wheels 14 are rotatably connected to the machine base 1. One of the fourth guide wheels 14 is close to the second processing device. The machine base 1 is equipped with a take-up mechanism 9. The other fourth guide wheel 14 is close to the take-up mechanism 9. The take-up mechanism 9 includes a lead screw device 91 and a take-up wheel 92. The lead screw device 91 is placed inside the machine base 1. A slide block 911 is slidably connected to the lead screw device 91. A take-up motor is fixedly connected to the slide block 911. The output shaft of the take-up motor passes through the machine base 1. The output shaft of the take-up motor is detachably connected to the center of the take-up wheel 92. The take-up wheel 92 winds up the processed metal wire 15.

[0067] The lead screw device 91 drives the slide block 911 to slide back and forth, so that the metal wire 15 is arranged in a high density on the outside of the take-up reel 92; the take-up motor drives the take-up reel 92 to rotate, thereby winding up the metal wire 15.

[0068] Please refer to Figures 1-10 .

[0069] The metal wire 15, guided by the pay-off reel 22, passes around the three first guide reels and is then threaded into the first sleeve 4. The metal wire 15 then travels sequentially through the continuous processing channel formed by the first sleeve 4, the first air distribution ring 42, the air distribution pipe 33, the two third air distribution rings 53, and the second sleeve 5. After annealing, the metal wire 15 passes around the second and third guide reels and then sequentially passes through the cleaning mechanism 7 and the drying mechanism 8.

[0070] The metal wire 15, guided by the pay-off reel 22 through three first guide wheels, is oriented into the first sleeve 4. The metal wire 15 travels along the processing path through the continuous processing channel formed by the first sleeve 4, the first air distribution ring 42, the air distribution pipe 33, the two third air distribution rings 53, and the second sleeve 5 to complete the annealing process. Subsequently, the metal wire 15 turns around the second and third guide wheels to achieve path change, sequentially passes through the cleaning mechanism 7 for surface treatment, and passes through the drying mechanism 8 for dehumidification and drying. Finally, it is precisely guided by two fourth guide wheels and wound into the take-up reel 92.

[0071] This utility model provides a vertical online heat treatment device. After the wire feeding mechanism guides the metal wire through the first sleeve, it passes through the continuous processing channel formed by the first sleeve, the air distribution pipe and the second sleeve in sequence. Finally, after the heat treatment is completed by the cooling mechanism, the wire is wound up by the winding mechanism.

[0072] During operation, the first gas nozzle injects inert gas into the annular gap between the heat pipe and the gas distribution pipe. The gas permeates evenly into the gas distribution pipe through multiple rows of gas distribution holes to form a stable oxygen-free environment. The first heating device heats the heat pipe and the inert gas, so that the heat energy is conducted through the pipe wall to build a uniform temperature field in the gas distribution pipe, thereby realizing the isothermal annealing treatment of the metal wire in the oxygen-free space.

[0073] The second and third air nozzles inject anti-oxidation gas into the first and second sleeves respectively. When the metal wire enters the gas distribution pipe through the first sleeve, the anti-oxidation gas evenly coats the outside of the metal wire, thus performing anti-oxidation treatment on the metal wire. The flow of anti-oxidation gas forms an air wall at the inlet of the first sleeve, preventing outside air from entering the gas distribution pipe through the first sleeve.

[0074] Since the metal wire is at a high temperature when it is led out of the second sleeve after annealing, the second sleeve covers the outside of the metal wire with another layer of anti-oxidation gas to prevent the high-temperature metal wire from contacting oxygen and improve the anti-oxidation effect of the metal wire. The flow of anti-oxidation gas forms an air wall at the outlet of the second sleeve, which prevents outside air from entering the gas distribution pipe through the second sleeve. In addition, the air wall generated by the second sleeve can perform the first air cooling of the metal wire, thereby achieving simultaneous anti-oxidation and stress relief heat treatment of the metal wire.

[0075] Finally, the cooling mechanism performs a second cooling on the metal wire after the first cooling, and then winds the metal wire into the take-up mechanism.

[0076] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit the scope of protection of this utility model. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the essence and scope of the technical solutions of this utility model.

Claims

1. A vertical online heat treatment device, characterized in that, include; A machine platform, wherein the machine platform is equipped with a wire feeding mechanism and a wire take-up mechanism; The heating mechanism includes a heat-insulating pipe and a gas distribution pipe. The heat-insulating pipe is fixedly connected to the machine base. A heat-conducting pipe is sleeved inside the heat-insulating pipe. A first heating device is installed between the heat-insulating pipe and the heat-conducting pipe. A first gas nozzle is connected to the heat-conducting pipe. The heat-conducting pipe is sleeved on the outside of the gas distribution pipe. Multiple rows of first gas distribution holes are opened on the gas distribution pipe. The first gas distribution holes are connected to the inside of the heat-conducting pipe. A first sleeve and a second sleeve are respectively sleeved at both ends of the gas distribution pipe. The first sleeve is connected to a second air nozzle, and the wire feeding mechanism is located near the first sleeve; The second sleeve is connected to a third air nozzle, and the machine base is equipped with a cooling mechanism located between the second sleeve and the take-up mechanism.

2. The vertical online heat treatment equipment as described in claim 1, characterized in that, The heat pipe is equipped with an air distribution component and a plug at both ends. The air distribution pipe passes through the air distribution component and the plug. The air distribution component has multiple second air distribution holes that communicate with the interior. The second air distribution holes communicate with the interior of the heat pipe. The first air nozzle communicates with the interior of the air distribution component.

3. The vertical online heat treatment equipment as described in claim 2, characterized in that, The first sleeve is provided with a first air distribution ring, and an annular groove is provided on the outer side of the first air distribution ring. The annular groove communicates with the inside of the sleeve, and a plurality of first through holes are provided at the bottom of the annular groove.

4. The vertical online heat treatment equipment as described in claim 3, characterized in that, The second sleeve is fitted with a second air distribution ring, which is fitted onto the air distribution pipe. The second air distribution ring has multiple second through holes, which communicate with the inside of the second sleeve.

5. The vertical online heat treatment equipment as described in claim 4, characterized in that, The inner wall of the second air distribution ring extends into a limiting ring. Two symmetrically placed third air distribution rings are fitted inside the second air distribution ring. The two third air distribution rings respectively abut against the two ends of the limiting ring. Multiple through grooves are opened on the third air distribution rings, and the through grooves communicate with the inside of the second air distribution ring.

6. The vertical online heat treatment equipment as described in claim 5, characterized in that, A limiting member is sleeved on the outer side of the second air distribution ring. The limiting member contacts one of the third air distribution rings, and the air distribution tube contacts the other third air distribution ring.

7. A vertical online heat treatment apparatus as described in any one of claims 1 or 6, characterized in that, The machine is equipped with a cleaning mechanism and a drying mechanism, which are located between the cooling mechanism and the winding mechanism.

8. The vertical online heat treatment equipment as described in claim 7, characterized in that, The cooling mechanism includes a first circulating water supply device and a first water tank. The first circulating water supply device is placed inside the machine base. A second water tank is provided inside the first water tank. The edge of the second water tank is higher than the edge of the first water tank. A first drain pipe is connected to the first water tank. A first water supply pipe is connected to the second water tank. The first drain pipe and the first water supply pipe are respectively connected to the return water port and the outlet water port of the first circulating water supply device. The second water tank is close to the second sleeve.

9. A vertical online heat treatment device as described in claim 8, characterized in that, The cleaning mechanism includes a second circulating water supply device and a third water tank. The second circulating water supply device is placed inside the machine base. A fourth water tank is provided inside the third water tank. The edge of the fourth water tank is higher than the edge of the third water tank. A second drain pipe is connected to the third water tank. A second water supply pipe is connected to the fourth water tank. The second drain pipe and the second water supply pipe are respectively connected to the return water inlet and the outlet water outlet of the second circulating water supply device. The third water tank is close to the first water tank.

10. A vertical online heat treatment device as described in claim 9, characterized in that, The drying mechanism includes a first mounting base and a second mounting base, both of which are fixedly connected to the machine base. The first mounting base is provided with an air guide seat, and a fourth air nozzle is connected to the air guide seat. An air guide pipe passes through the air guide seat, and multiple air vents are opened on the air guide pipe. The air vents are connected to the air guide seat. The second mounting base is provided with a second heating device, and a drying channel passes through the second heating device.