Low-temperature vacuum coating device suitable for thermosensitive metal piece

Abstract

The utility model belongs to the technical field of vacuum coating equipment, and particularly relates to a low-temperature vacuum coating device suitable for thermosensitive metal parts, which comprises a cavity, an air exhaust component, a control component and a cooling component, the shell of the cavity is of a double-layer structure, the air exhaust component is communicated with the cavity, and the control component is connected with the cavity; the cooling assembly comprises a cooling pipe and a cooling box, the cooling pipe is arranged in the interlayer of the cavity shell, and the cooling pipe is connected with the cooling box. The air exhaust assembly is used for exhausting air in the cavity so as to establish a required high-vacuum environment to create a vacuum environment, the control assembly is used for monitoring and controlling the operation state and parameters of the whole coating equipment, and the cooling assembly can continuously cool the cavity during coating so as to realize low-temperature vacuum coating.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum coating equipment technology, and specifically relates to a low-temperature vacuum coating device suitable for heat-sensitive metal parts. Background Technology

[0002] Vacuum deposition is a technique for producing thin film materials. In a vacuum deposition chamber, atoms of the material are separated from a heating source and deposited onto the surface of the object to be coated. Vacuum deposition is an important aspect of vacuum applications. It is based on vacuum technology, utilizing physical or chemical methods, and incorporating a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, and magnetron sputtering to provide a new process for thin film preparation for scientific research and practical production. Simply put, vacuum deposition is the method of evaporating or sputtering a metal, alloy, or compound (called a target material) in a vacuum, causing it to solidify and deposit on the object to be coated (called a substrate).

[0003] The products typically coated by vacuum coating are metal products. However, the temperature inside the coating chamber is quite high during the vacuum coating process. For heat-sensitive metals, which cannot withstand high temperatures, deformation can easily occur at high temperatures, making them unsuitable for vacuum coating.

[0004] Therefore, the above-mentioned problems have become technical issues that urgently need to be solved. Utility Model Content

[0005] Purpose of the utility model: In order to overcome the above shortcomings, this utility model provides a low-temperature vacuum coating device suitable for thermosensitive metal parts, which can reduce the temperature inside the control cavity during coating, thus making it suitable for vacuum coating of thermosensitive metal parts.

[0006] Technical solution: In order to achieve the above objectives, this utility model provides a low-temperature vacuum coating device suitable for heat-sensitive metal parts, including a cavity, a vacuum pumping assembly, a control assembly, and a cooling assembly. The outer shell of the cavity has a double-layer structure, the vacuum pumping assembly is connected to the cavity, and the control assembly is connected to the cavity.

[0007] The cooling assembly includes a cooling pipe and a cooling box. The cooling pipe is located in the interlayer of the outer shell of the cavity and is connected to the cooling box.

[0008] The evacuation assembly is used to extract the gas from the cavity to create the required high vacuum environment. The control assembly is used to monitor and control the operating status and parameters of the entire coating equipment, while the cooling assembly can continuously cool the cavity during coating to achieve low-temperature vacuum coating.

[0009] Furthermore, the pumping assembly includes a Roots vacuum pump, a mechanical vacuum pump, and a molecular vacuum pump connected in series via pipes, and the pumping assembly is connected to the bottom of the cavity.

[0010] Furthermore, the control component includes a temperature sensor and a control cabinet. The temperature sensor is located inside the cavity and connected to the control cabinet. It also includes a pressure sensor, a flow meter, and a vacuum gauge located inside the cavity. The control component can rely on these components to monitor and control parameters such as vacuum level, temperature, pressure, and time of the entire equipment.

[0011] Furthermore, the cooling assembly also includes a circulation pump, which is connected to both ends of the cooling pipe. The circulation pump is used to circulate cooling water into the cooling pipe.

[0012] Furthermore, the cavity is equipped with a rotating frame and a turntable. The turntable is rotatably mounted within the cavity, and the rotating frame is mounted on the turntable. The rotating frame has multiple shelves, and a motor is located at the top of the cavity. The motor is connected to the rotating frame via a gear set. The shelves are used to suspend workpieces to be coated, and the rotation of the rotating frame driven by the motor achieves a more uniform coating.

[0013] Furthermore, the cooling pipe is spirally wound within the interlayer of the cavity shell, and a support plate is also arranged around the interlayer. The support plate serves two purposes: firstly, it enhances the structural strength of the cavity shell, and secondly, it assists in cooling.

[0014] As can be seen from the above technical solution, this utility model has the following beneficial effects:

[0015] This utility model provides a low-temperature vacuum coating device suitable for thermosensitive metal parts. It has a simple structure and reasonable design. When the thermosensitive metal is vacuum coated, it can continuously cool the cavity to create a low-temperature vacuum coating environment, thereby avoiding changes in the properties of the thermosensitive metal. The cooling pipe is located in the interlayer of the cavity without encroaching on the internal space of the cavity. At the same time, the addition of support plates ensures the structural strength of the cavity. Attached Figure Description

[0016] Figure 1 This is a front cross-sectional view of a low-temperature vacuum coating apparatus for heat-sensitive metal parts according to the present invention.

[0017] Figure 2 This is a side view of a low-temperature vacuum coating apparatus for heat-sensitive metal parts according to the present invention;

[0018] Figure 3 This is a schematic diagram of the cavity structure described in this utility model.

[0019] In the diagram: 1-Cavity, 11-Rotating frame, 12-Rotating table, 13-Shelf, 14-Motor, 15-Support plate, 2-Evacuation assembly, 21-Roots vacuum pump, 22-Mechanical vacuum pump, 23-Molecular vacuum pump, 3-Control assembly, 31-Temperature sensor, 32-Control cabinet, 4-Cooling assembly, 41-Cooling pipe, 42-Cooling box, 43-Circulation pump. Detailed Implementation

[0020] It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of the invention.

[0021] like Figure 1 As shown: A low-temperature vacuum coating device suitable for heat-sensitive metal parts includes a cavity 1, a vacuum pumping assembly 2, a control assembly 3, and a cooling assembly 4. The outer shell of the cavity 1 has a double-layer structure. The vacuum pumping assembly 2 is connected to the cavity 1, and the control assembly 3 is connected to the cavity 1.

[0022] The cooling assembly 4 includes a cooling pipe 41 and a cooling box 42. The cooling pipe 41 is located in the interlayer of the outer shell of the cavity 1 and is connected to the cooling box 42.

[0023] In this embodiment, the cooling pipe 41 is spirally wound on the cavity 1, and the cooling water in it carries away the heat to achieve cooling. After the cooling water in the cavity 1 is cooled in the cooling box 42, it is sent back into the cooling pipe 41, which effectively reduces the internal temperature and achieves low-temperature vacuum coating. This method is not only suitable for heat-sensitive metal parts, but also for vacuum coating of some plastic products.

[0024] Specifically, the pumping assembly 2 includes a Roots vacuum pump 21, a mechanical vacuum pump 22 and a molecular vacuum pump 23 connected in series via pipes, and the pumping assembly 2 is connected to the bottom of the cavity 1.

[0025] The control component 3 includes a temperature sensor 31 and a control cabinet 32. The temperature sensor 31 is located inside the cavity 1 and connected to the control cabinet 32. It also includes a pressure sensor, a flow meter, and a vacuum gauge located inside the cavity 1.

[0026] like Figure 1 and Figure 2 As shown, the cooling assembly 4 also includes a circulation pump 43, which is connected to both ends of the cooling pipe 41. The circulation pump 43 provides power for the circulation of cooling water.

[0027] like Figure 3 As shown, the cavity 1 is provided with a rotating frame 11 and a turntable 12. The turntable 12 is rotatably disposed within the cavity 1, and the rotating frame 11 is disposed on the turntable 12. The rotating frame 11 is provided with multiple shelves 13, and a motor 14 is provided at the top of the cavity 1. The motor 14 is connected to the rotating frame 11 through a gear set.

[0028] In addition, such as Figure 1 As shown, the cooling pipe 41 is spirally wound in the interlayer of the outer shell of the cavity 1, and a support plate 15 is also arranged around the interlayer. Since the cavity 1 is in a high vacuum environment during operation, the outer shell of the cavity 1 needs to withstand a large air pressure. The support plate 15 provides good support for the outer shell of the cavity 1, and at the same time, the heat inside the cavity 1 can also be discharged through the support plate 15 (similar to heat dissipation fins), thus achieving the purpose of auxiliary cooling.

[0029] The low-temperature vacuum coating device for heat-sensitive metal parts provided by this utility model is used by the operator first opening the cavity 1, placing the workpiece on the rack 13, and then closing the cavity 1. The pumping assembly 2 is then activated to extract the gas from the cavity until the set value is reached, at which point coating can begin. During the coating process, the rotating frame 11 rotates continuously to achieve a more uniform film layer. The circulating pump 43 introduces cooling water into the cooling pipe 41 to continuously lower the temperature and create a low-temperature coating environment.

[0030] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements can be made without departing from the principle of the present utility model, and these improvements should also be considered within the protection scope of the present utility model.

Claims

1. A low-temperature vacuum coating apparatus suitable for heat-sensitive metal parts, characterized in that, It includes a cavity (1), an air extraction assembly (2), a control assembly (3) and a cooling assembly (4). The outer shell of the cavity (1) has a double-layer structure. The air extraction assembly (2) is connected to the cavity (1), and the control assembly (3) is connected to the cavity (1). The cooling assembly (4) includes a cooling pipe (41) and a cooling box (42). The cooling pipe (41) is located in the interlayer of the outer shell of the cavity (1) and is connected to the cooling box (42).

2. The low-temperature vacuum coating apparatus for heat-sensitive metal parts according to claim 1, characterized in that, The pumping assembly (2) includes a Roots vacuum pump (21), a mechanical vacuum pump (22) and a molecular vacuum pump (23) connected in series via pipes. The pumping assembly (2) is connected to the bottom of the cavity (1).

3. The low-temperature vacuum coating apparatus for heat-sensitive metal parts according to claim 1, characterized in that, The control component (3) includes a temperature sensor (31) and a control cabinet (32). The temperature sensor (31) is located inside the cavity (1) and connected to the control cabinet (32). It also includes a pressure sensor, a flow meter, and a vacuum gauge located inside the cavity (1).

4. The low-temperature vacuum coating apparatus for heat-sensitive metal parts according to claim 1, characterized in that, The cooling assembly (4) also includes a circulation pump (43), which is connected to both ends of the cooling pipe (41).

5. A low-temperature vacuum coating apparatus for heat-sensitive metal parts according to claim 1, characterized in that, The cavity (1) is provided with a rotating frame (11) and a turntable (12). The turntable (12) is rotatably disposed in the cavity (1), and the rotating frame (11) is disposed on the turntable (12).

6. A low-temperature vacuum coating apparatus for heat-sensitive metal parts according to claim 5, characterized in that, The rotating frame (11) is provided with multiple shelves (13), and the top of the cavity (1) is provided with a motor (14), which is connected to the rotating frame (11) through a gear set.

7. A low-temperature vacuum coating apparatus for heat-sensitive metal parts according to claim 1, characterized in that, The cooling pipe (41) is spirally wound in the interlayer of the outer shell of the cavity (1), and a support plate (15) is also arranged around the interlayer.

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