Gas distribution disc for high-temperature furnace
By setting a scattering protrusion and a multi-stage airflow channel at the center of the gas distribution plate in the high-temperature furnace, the problem of uneven gas distribution in the high-temperature furnace is solved, and uniform gas distribution and flow velocity balance in the high-temperature furnace are achieved, thereby improving the uniformity of gas distribution and flow stability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JINING TIANYUE SEMICONDUCTOR NEW MATERIALS CO LTD
- Filing Date
- 2025-07-25
- Publication Date
- 2026-04-24
AI Technical Summary
Uneven gas distribution inside the high-temperature furnace, with higher pressure in the central area and lower pressure in the peripheral area, results in uneven gas injection and affects the stability of gas flow inside the high-temperature furnace.
A scattering protrusion is set at the center of the gas distribution plate. Through the design of multi-stage airflow channels and connecting air channels, the gas is evenly distributed and the flow rate is balanced. By using the gradually decreasing airflow channels and staggered connecting air channels, the high-speed jet is buffered to ensure the uniform distribution and stable flow of gas in the plane of the gas distribution plate.
It achieves uniform gas distribution and flow velocity balance in the high-temperature furnace, avoids eddies and backflow, improves the uniformity of gas distribution and flow stability, and enhances the gas distribution effect in the high-temperature furnace.
Smart Images

Figure CN224162597U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of gas distribution plate equipment, and in particular to a gas distribution plate for high-temperature furnaces. Background Technology
[0002] In a high-temperature furnace, there is a certain difference between the high-speed zone in the center and the low-speed zone at the edge of a conventional gas distribution plate. Specifically, when gas enters from a single point in the center, it tends to form a high-speed jet in the central region. However, when it flows toward the edge of the gas distribution plate, due to the flow channel design, the gas flow rate in the edge region is significantly less than that in the central region, resulting in uneven gas distribution throughout the high-temperature furnace.
[0003] In addition, the airflow moves from the center to the edge, and the resistance along the way causes the pressure to drop naturally, resulting in higher pressure in the central area and a larger gas ejection volume, while the pressure in the edge area is lower and the ejection volume is smaller, which exacerbates the radial non-uniformity of the gas in the high-temperature furnace. Utility Model Content
[0004] This application provides a gas distribution plate for a high-temperature furnace, which can buffer the phenomenon of high-speed jet generated at the center position during gas intake, realize the uniform distribution of gas flow rate in all parts of the gas distribution plate plane, and balance the gas velocity distribution from the center to the edge, resulting in better gas distribution effect.
[0005] This application provides a gas distribution plate for a high-temperature furnace, including a plate body with a front and a back side. A scattering protrusion is provided at the center of the front side, and multiple airflow channels are arranged in an array around the scattering protrusion. The width of each airflow channel decreases progressively from the inside to the outside. A connecting air passage is also provided on the front side. The connecting air passage is evenly spaced along the circumference of the plate body, connecting adjacent airflow channels and linking the scattering protrusion to the airflow channel near the inner side. Adjacent connecting air passages are staggered in the radial direction of the plate body. The opening size of the connecting air passage is equal to the inner diameter of the connected airflow channel. Both the airflow channel and the connecting air passage have gas distribution holes extending to the back side.
[0006] In one possible implementation, the scattering protrusion is a cone-shaped protrusion that protrudes vertically away from the back surface.
[0007] In one possible implementation, the maximum diameter of the scattering protrusion is φ80-120mm, and the height of the scattering protrusion is 5-10mm.
[0008] In one possible implementation, the width of the innermost airflow channel is 50-70 mm, and the width of the airflow channel decreases by 5-10 mm from the inside to the outside.
[0009] In one possible implementation, the disk body has multiple guide platforms arranged in an array on the front side with the scattering protrusion as the center. The gap between adjacent guide platforms on the same circle forms the connecting air passage, and the gap between guide platforms on adjacent circles forms the airflow passage. The corners of the guide platforms are all rounded. The guide platforms have a drainage structure on the outer side facing the connecting air passage. The drainage structure is a symmetrically distributed arc structure, and a drainage tip is formed at one end near the connecting air passage.
[0010] In one possible implementation, the air distribution hole is a frustoconical through hole, and the diameter of the air distribution hole gradually increases from one end of the front side to one end of the back side.
[0011] In one possible implementation, the diameter of the air distribution hole at one end on the front side is 10%-20% larger than the diameter at one end on the back side.
[0012] In one possible implementation, the air distribution hole on the airflow channel is defined as the first air distribution hole, and the air distribution hole on the connecting air passage is defined as the second air distribution hole, wherein in the radial direction of the disc, the diameter of the first air distribution hole gradually increases from the inside to the outside, and the diameter of the second air distribution hole is equal to the diameter of the first air distribution hole near the outside.
[0013] In one possible implementation, the diameter of the innermost first air distribution hole near the front end is φ6-15mm, and the diameter of the first air distribution hole increases by 1-3mm from the inner side to the outer side.
[0014] Beneficial effects: Compared with the prior art, the gas distribution plate for high-temperature furnaces provided in this application can effectively buffer the high-speed jet generated at the center of the plate during air intake by setting a scattering protrusion at the center of the plate. On the front of the gas distribution plate, the single airflow is evenly distributed to multiple directions along the connecting air passage, realizing the first coarse-grained uniform distribution of gas. Subsequently, the gas flows outward through the airflow channels with progressively decreasing widths. The widest airflow channel near the center is used to adapt to the high flow rate at the center, effectively reducing the inner ring velocity. This can avoid the excessive concentration of flow in the central area, which can lead to eddies or backflow phenomena, and can ensure the stability of the initial flow state. The progressively decreasing design can gradually reduce the cross-sectional area of the airflow, maintain the flow velocity of the outer ring airflow channel, and compensate for the velocity attenuation caused by the increase in path and friction, thereby achieving the purpose of balancing the gas velocity distribution from the center to the edge, resulting in better gas distribution effect.
[0015] These and other objects, features and advantages of this utility model will be fully realized through the following detailed description. Attached Figure Description
[0016] Figure 1 A three-dimensional structural schematic diagram of the gas distribution plate for the high-temperature furnace of this application is shown.
[0017] Figure 2 A top view of the gas distribution plate for the high-temperature furnace of this application is shown.
[0018] Figure 3 A cross-sectional structural schematic diagram of the gas distribution plate for the high-temperature furnace of this application is shown. Detailed Implementation
[0019] The following description is intended to disclose the present invention so that those skilled in the art can implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art. The basic principles of the present invention defined in the following description can be applied to other embodiments, modifications, improvements, equivalents, and other technical solutions that do not depart from the spirit and scope of the present invention.
[0020] Those skilled in the art should understand that, in the disclosure of this specification, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the above terms should not be construed as limitations on this utility model.
[0021] It is understood that the term "a" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element can be one, while in another embodiment, the number of the element can be multiple, and the term "a" should not be understood as a limitation on the number.
[0022] refer to Figures 1 to 3This application provides a gas distribution plate for a high-temperature furnace, including a plate body 10. The plate body 10 has a front side 11 and a back side 12 facing each other. Inside the high-temperature furnace, the front side 11 of the plate body 10 faces downward, and the gas in the furnace directly hits the center of the front side 11 of the plate body 10 from below. The plate body 10 has a scattering protrusion 13 at the center of the front side 11, and multiple airflow channels 101 are arranged in an array around the scattering protrusion 13. The width of the airflow channels 101 decreases gradually from the inner circle to the outer circle. The plate body 10 also has connecting air passages 102 on the front side 11. The connecting air passages 102 are evenly spaced along the circumference of the plate body 10 and connect adjacent airflow channels 101, and connect the scattering protrusion 13 and the airflow channel 101 near the inner side. In the radial direction of the plate body 10, adjacent connecting air passages 102 are staggered to prevent gas from flowing quickly to the edge along the shortest path, thereby forcing the gas at each location to experience similar flow paths. The flow path and mixing process are described, wherein the opening size of the connecting airway 102 is equal to the inner diameter of the connected airflow channel 101. Specifically, for the innermost connecting airway 102, the outer opening size is equal to the inner diameter (i.e., channel width) of the innermost airflow channel 101. However, the inner opening size of the innermost connecting airway 102 is not subject to this constraint. For other connecting airways 102, the inner opening size is equal to the width of the adjacent inner airflow channel 101, and the outer opening size is equal to the width of the adjacent outer airflow channel 101. Both the airflow channel 101 and the connecting airway 102 have air distribution holes 103 extending to the back surface 12.
[0023] In this way, the high-speed jet generated by the intake air can be scattered or buffered by the scattering protrusion 13 at the center of the disk 10, and the single airflow can be evenly distributed to multiple directions around the circumference of the disk 10 through the connecting air channels 102. For example, it can be evenly distributed to six directions through six connecting air channels 102, which can achieve the first coarse-grained uniform distribution of gas on the front side 11 of the disk 10, thus laying the foundation for subsequent fine distribution. Subsequently, the gas enters the airflow channel 101 through the connecting air channels 102. Since the width of the airflow channel 101 gradually decreases from the inner circle to the outer circle, it can pass through the innermost side. The wider airflow channel 101 is adapted to the high flow rate at the center, thereby effectively reducing the inner flow velocity and avoiding excessive flow concentration in the central area, which could lead to eddies or backflow. This ensures the stability of the initial gas flow state. Then, the staggered connecting air channels 102, combined with the gradually decreasing width of the airflow channel 101, gradually reduce the gas flow cross-sectional area, thereby maintaining the flow velocity of the outer airflow channel 101 to compensate for the velocity attenuation caused by increased path and friction. Ultimately, this achieves the goal of balancing the gas velocity distribution from the center to the edge, resulting in better gas separation.
[0024] In one embodiment, the scattering protrusion 13 is a cone-shaped protrusion that protrudes vertically away from the back surface 12. Gas is scattered from the tip of the cone along the inclined surface of the cone. More preferably, the maximum diameter of the scattering protrusion 13 is φ80-120mm, and the height of the scattering protrusion 13 is 5-10mm. These parameters are only for reference in one specific embodiment, and those skilled in the art can make adaptive adjustments according to the actual situation.
[0025] In one embodiment, the width of the innermost airflow channel 101 is 50-70 mm, and the width of the airflow channel 101 decreases by 5-10 mm from the inside to the outside.
[0026] In one embodiment, the disk body 10 has multiple guide platforms 20 arranged in an array on the front side 11 with the scattering protrusion 13 as the center. The gap between adjacent guide platforms 20 on the same circle forms the connecting air passage 102, and the gap between guide platforms 20 on adjacent circles forms the airflow passage 101. The corners of the guide platforms 20 are rounded to ensure smooth gas flow. The guide platforms 20 have a flow-guiding structure 21 on the outer side facing the connecting air passage 102 to guide the airflow outward. The flow-guiding structure 21 is a symmetrically distributed arc-shaped structure with a flow-guiding tip at one end near the connecting air passage 102. This allows the airflow on both sides to be smoothly mixed through the flow-guiding structure 21, avoiding direct collisions that could cause turbulence and lead to local gas flow disturbance.
[0027] In one embodiment, the gas distribution hole 103 is a frustoconical through hole, wherein the diameter of the gas distribution hole 103 gradually increases from one end of the front side 11 to one end of the back side 12. That is, the gas distribution hole 103 is funnel-shaped, which can significantly enhance the lateral diffusion ability of gas after leaving the gas distribution hole 103, so that the gas can spread more quickly and evenly to the entire furnace chamber of the high-temperature furnace, thereby ensuring uniform gas distribution everywhere.
[0028] In one embodiment, the diameter of the air distribution hole 103 at one end of the front side 11 is 10%-20% larger than the diameter at one end of the back side 12.
[0029] In one embodiment, the air distribution hole 103 on the airflow channel 101 is defined as the first air distribution hole 1031, and the air distribution hole 103 on the connecting air channel 102 is defined as the second air distribution hole 1032. In the radial direction of the disk body 10, the diameter of the first air distribution hole 1031 gradually increases from the inside to the outside, and the diameter of the second air distribution hole 1032 is equal to the diameter of the first air distribution hole 1031 near the outside. Thus, this gradual diameter design can effectively limit the problem of excessive flow in the central area, increase the air output in the edge area, and ensure that the air output on the back side 12 of the entire air distribution disk is approximately the same.
[0030] A ring of first air distribution holes 1031 can be provided in each airflow channel 101. At this time, the diameter of the second air distribution hole 1032 is equal to the diameter of the first air distribution hole 1031 near the adjacent outer side.
[0031] Alternatively, two or more concentric rings of first air distribution holes 1031 can be arranged within each airflow channel 101. In this case, the diameter of the second air distribution hole 1032 is equal to the diameter of the first air distribution hole 1031 adjacent to the outer ring, that is, equal to the diameter of the first air distribution hole 1031 in the innermost ring of the outer airflow channel 101.
[0032] In one embodiment, the diameter of the innermost first air distribution hole 1031 near the front surface 11 is φ6-15mm, and the diameter of the first air distribution hole 1031 increases by 1-3mm from the inner side to the outer side.
[0033] It should be noted that the terms "first" and "second" used in this application are for descriptive purposes only and do not indicate any order. They should not be construed as indicating or implying relative importance, and can be interpreted as names.
[0034] Those skilled in the art should understand that the embodiments of the present invention described above and shown in the accompanying drawings are merely examples and do not limit the present invention. The advantages of the present invention have been fully and effectively realized. The functions and structural principles of the present invention have been shown and explained in the embodiments, and any modifications or variations may be made to the implementation of the present invention without departing from the stated principles.
Claims
1. A gas distribution plate for a high-temperature furnace, characterized in that, The device includes a disc having a front and a back side. A scattering protrusion is located at the center of the front side, and multiple airflow channels are arranged in an array around the scattering protrusion. The width of each airflow channel decreases progressively from the inside out. A connecting airway is also located on the front side, evenly spaced along the circumference of the disc, connecting adjacent airflow channels and linking the scattering protrusion to the airflow channel near the inner side. Adjacent connecting airways are staggered in the radial direction of the disc. The opening size of each connecting airway is equal to the inner diameter of the connected airflow channel. Both the airflow channels and the connecting airways have air distribution holes extending to the back side.
2. The gas distribution plate for a high-temperature furnace as described in claim 1, characterized in that, The scattering protrusion is a cone-shaped protrusion that protrudes vertically away from the back surface.
3. The gas distribution plate for a high-temperature furnace as described in claim 2, characterized in that, The maximum diameter of the scattering protrusion is φ80-120mm, and the height of the scattering protrusion is 5-10mm.
4. The gas distribution plate for a high-temperature furnace as described in claim 1, characterized in that, The width of the innermost airflow channel is 50-70mm, and the width of the airflow channel decreases by 5-10mm from the inside to the outside.
5. The gas distribution plate for a high-temperature furnace as described in claim 1, characterized in that, The disk body has multiple guide platforms arranged in an array on the front side with the scattering protrusion as the center. The gap between adjacent guide platforms on the same circle forms the connecting air passage, and the gap between guide platforms on adjacent circles forms the airflow passage. The corners of the guide platforms are all rounded. The guide platforms have a drainage structure on the outer side facing the connecting air passage. The drainage structure is a symmetrically distributed arc structure, and a drainage tip is formed at one end near the connecting air passage.
6. The gas distribution plate for a high-temperature furnace as described in claim 1, characterized in that, The air distribution hole is a frustoconical through hole, and the diameter of the air distribution hole gradually increases from one end of the front side to one end of the back side.
7. The gas distribution plate for a high-temperature furnace as described in claim 6, characterized in that, The diameter of the air distribution hole at one end on the front side is 10%-20% larger than the diameter at one end on the back side.
8. The gas distribution plate for a high-temperature furnace as described in claim 6 or 7, characterized in that, The air distribution hole on the airflow channel is defined as the first air distribution hole, and the air distribution hole on the connecting air passage is defined as the second air distribution hole. In the radial direction of the disc, the diameter of the first air distribution hole increases gradually from the inside to the outside, and the diameter of the second air distribution hole is equal to the diameter of the first air distribution hole near the outside.
9. The gas distribution plate for a high-temperature furnace as described in claim 8, characterized in that, The diameter of the innermost first air distribution hole near the front end is φ6-15mm, and the diameter of the first air distribution hole increases by 1-3mm from the inner side to the outer side.