Cleanness detection device for mother board

Abstract

The utility model relates to the technical field of mother disc cleaning detection, in particular to a mother disc cleanliness detection device which comprises a detection table and a mother disc placed on one side of the detection table, a detection disc is arranged at the upper end of the detection table, a detection station groove used for loading the mother disc is arranged above the detection disc, and the detection station groove is connected with the detection table. The periphery of the detection disc is provided with a detection module for detecting the cleanliness of the mother disc, the detection module comprises an industrial camera, a camera extension support plate, a connection platform, two groups of support columns and a support base, the support base is fixed at the upper end of the detection platform and is located at one side of the detection disc, and the support columns are fixed on the industrial camera. The two sets of supporting columns are fixed to the upper end of the supporting base, the connecting platform is fixed to the upper ends of the supporting columns, the camera extending support plate is fixedly installed at the upper end of the connecting platform, and the industrial camera is fixedly embedded into the front end of the camera extending support plate and located over the detection disc.

Description

Technical Field

[0001] This utility model relates to the field of mother disk cleaning detection technology, and in particular to a cleanliness detection device for mother disks. Background Technology

[0002] The master disc, also known as the master plate or glass master disc, is the original disc used to create the copy disc during the optical disc duplication process. It is a high-precision glass substrate with high gloss and high cleanliness, obtained through high-precision grinding, polishing, and ultra-clean cleaning. In order to promote green and environmentally friendly production, the master disc is often reused repeatedly. During the photolithography process, the master disc needs to be cleaned before applying the photoresist to remove the photoresist adhering to the master disc from the previous photolithography process. The degree of cleaning determines the quality of the master disc in the next recording. Therefore, testing the cleanliness of the master disc after cleaning is an important step.

[0003] Currently, Chinese patent CN219979145U discloses an optical disc testing auxiliary device, which includes a housing, a rotating rod rotatably connected inside the housing, a disc fixedly mounted on the surface of the rotating rod, a first fixing post fixedly connected to the side of the disc, a first collar rotatably connected to the surface of the first fixing post, a connecting rod fixedly connected to the surface of the first collar, a second collar fixedly connected to the side of the connecting rod, and a second fixing post rotatably connected inside the second collar.

[0004] Currently, no testing equipment directly applicable to master discs has been found. This equipment effectively solves the problem of limited detection range of optical discs due to the fixed detection range, which leads to detection omissions. The position of the detector can be adjusted left and right, thus expanding the detection range and ensuring that every position of the optical disc can be detected, thereby improving the quality of the product after inspection. However, the above-mentioned testing equipment has limitations; the detector in this equipment cannot be directly used to detect the cleanliness of master discs. Utility Model Content

[0005] In view of the above situation and to overcome the shortcomings of the prior art, the purpose of this utility model is to provide a cleanliness detection device for mother discs. The above technical objective is achieved through the following technical solution:

[0006] A cleanliness testing device for a mother disc includes a testing platform and a mother disc placed on one side of the testing platform. A testing tray is located at the upper end of the testing platform, and a testing station slot for loading the mother disc is located above the testing tray. A testing module for testing the cleanliness of the mother disc is located around the testing tray. The testing module includes an industrial camera, a camera extension bracket plate, a connecting platform, support columns, and a support base. The support base is fixed to the upper end of the testing platform and is located on one side of the testing tray. Two sets of support columns are provided and fixed to the upper end of the support base. The connecting platform is fixed to the upper end of the support columns. The camera extension bracket plate is mounted and fixed to the upper end of the connecting platform. The industrial camera is embedded and fixed to the front end of the camera extension bracket plate, and the industrial camera is located directly above the testing tray.

[0007] Furthermore, the upper end of the testing station is provided with a mother plate gripping module, which includes a first gripping suction cup and a second gripping suction cup. The upper ends of the first gripping suction cup and the second gripping suction cup are provided with gripping linkages for fixing the mother plate gripping module.

[0008] Furthermore, a lifting block is fixedly provided on one side of the gripping linkage. The lifting block drives the gripping linkage, the first gripping suction cup, and the second gripping suction cup to move. An electric lifting control component is provided on the outside of the lifting block. The lifting block is slidably installed outside the limit rod inside the electric lifting control component. The electric lifting control component controls the lifting block through a servo motor and a lead screw. A connecting block is fixedly provided at the rear end of the electric lifting control component. A first linear module is provided on one side of the connecting block.

[0009] Furthermore, a mother disc feeding module is provided below the mother disc, the mother disc feeding module includes a second linear module and a feeding tray, the second linear module is located below one side of the first linear module, and the feeding tray is installed above the second linear module.

[0010] Furthermore, the upper end of the testing station is provided with a mother disc collection frame, and the inside of the mother disc collection frame is provided with a partition, which divides the inside of the mother disc collection frame into a qualified area and an unqualified area.

[0011] Furthermore, a supplementary light column is provided on one side of the detection plate, and the lower end of the supplementary light column is provided with a light column base fixed to the upper end of the detection platform.

[0012] In summary, this utility model has the following beneficial effects:

[0013] Based on the principle of image comparison, this utility model provides an automatic detection device that can automatically transport, inspect, and classify master discs. It has a high degree of automation, smooth operation logic, and ensures detection efficiency and quality. This utility model can meet the requirements of batch detection, effectively guarantee the quality of master discs after cleaning, and improve the quality of master disc burning process. Attached Figure Description

[0014] The accompanying drawings, which are provided to further illustrate the present invention and form part of this application, do not constitute an undue limitation of the present invention. In the drawings:

[0015] Figure 1 This is a perspective view of the present invention;

[0016] Figure 2 This is a side view of the present invention;

[0017] Figure 3 This is a top view of the present invention.

[0018] In the diagram, 1. Inspection table; 2. Mother disc; 3. Inspection tray; 4. Inspection station slot; 5. Industrial camera; 6. Camera extension bracket plate; 7. Connecting platform; 8. Support column; 9. Support base; 10. First gripping suction cup; 11. Second gripping suction cup; 12. Gripping linkage; 13. Lifting block; 14. Electric lifting control component; 15. Connecting block; 16. First linear module; 17. Second linear module; 18. Feed tray; 19. Mother disc collection frame; 20. Partition plate; 21. Supplementary lighting column; 22. Light column base. Detailed Implementation

[0019] The foregoing and other technical contents, features and effects of this utility model are described in conjunction with the appendix below. Figure 1 To be continued Figure 3 The detailed description of the embodiments will make this clear. All structural details mentioned in the following embodiments are based on the accompanying drawings.

[0020] Exemplary embodiments of the present invention will now be described with reference to the accompanying drawings. Example

[0021] A cleanliness testing device for mother discs, the main supporting structure of the device is the testing platform 1. This device is mainly used to test the cleanliness of the mother disc 2 after cleaning. The mother disc 2 to be tested is initially placed on one side of the testing platform 1.

[0022] Preferably, a feeding module for the mother disc 2 is provided below the mother disc 2. The feeding module for the mother disc 2 includes a second linear module 17 and a feeding tray 18. The second linear module 17 is located below one side of the first linear module 16, and the feeding tray 18 is installed above the second linear module 17.

[0023] In this embodiment, the second linear module 17 is composed of a lead screw, a servo motor, a slide rail, and other structures. The structure is a technical content that should be well known to those skilled in the art, so it will not be disclosed here. The second linear module 17 can control the movement of the feed tray 18. The mother tray 2 to be tested is loaded on the upper end of the feed tray 18 and transported by the second linear module 17 to the position to be gripped.

[0024] The upper end of the testing station 1 is equipped with a mother plate 2 gripping module. The mother plate 2 gripping module includes a first gripping suction cup 10 and a second gripping suction cup 11. The upper ends of the first gripping suction cup 10 and the second gripping suction cup 11 are equipped with gripping connecting rods 12 for fixing the mother plate 2 gripping module. When the mother plate 2 gripping module performs the gripping action, the first gripping suction cup 10 and the second gripping suction cup 11 simultaneously contact the surface of the mother plate 2, and both simultaneously adhere to the surface of the mother plate 2 and are firmly fixed on the mother plate 2.

[0025] A lifting block 13 is fixedly provided on one side of the gripping link 12. The lifting block 13 drives the gripping link 12, the first gripping suction cup 10, and the second gripping suction cup 11 to move. An electric lifting control component 14 is provided on the outside of the lifting block 13. The lifting block 13 is slidably installed outside the limit rod inside the electric lifting control component 14. The electric lifting control component 14 controls the lifting block 13 through a servo motor and a lead screw. A connecting block 15 is fixedly provided at the rear end of the electric lifting control component 14. A first linear module 16 is provided on one side of the connecting block 15.

[0026] In this embodiment, the structure of the second linear module 17 is the same as that of the first linear module 16, only the function is different. The first linear module 16 is mainly used to control the movement of the connecting block 15, and then control the electric lifting control component 14 and the front end of the mother disk 2 gripping module to move. The first linear module 16 controls the mother disk 2 gripping module to reach the position to be gripped on the mother disk 2 on the first linear module 16. The electric lifting control component 14 controls the mother disk 2 gripping module to descend. The first gripping suction cup 10 and the second gripping suction cup 11 firmly adhere to the surface of the mother disk 2. Subsequently, the electric lifting control component 14 controls the height of the mother disk 2 to rise again. The first linear module 16 controls the mother disk 2 gripping module to drive the mother disk 2 to the inspection station.

[0027] The upper end of the testing table 1 is provided with a testing plate 3, and above the testing plate 3 is a testing station slot 4 for loading the mother plate 2. A supplementary light column 21 is provided on one side of the testing plate 3, and the lower end of the supplementary light column 21 is provided with a light column base 22 fixed to the upper end of the testing table 1. The mother plate 2 gripping module transports the module to be tested to the testing station slot 4. Then, the mother plate 2 gripping module moves away from the testing station slot 4 to prevent the structure of the mother plate 2 gripping module from obstructing the field of view for obtaining image information of the surface of the mother plate 2 during the testing process.

[0028] The detection module for detecting the cleanliness of the mother plate 2 is located around the detection plate 3. The detection module includes an industrial camera 5, a camera extension bracket plate 6, a connecting platform 7, support columns 8, and a support base 9. The support base 9 is fixed to the upper end of the detection table 1 and is located on one side of the detection plate 3. There are two sets of support columns 8, which are fixed to the upper end of the support base 9. The connecting platform 7 is fixed to the upper end of the support columns 8. The camera extension bracket plate 6 is installed and fixed to the upper end of the connecting platform 7. The industrial camera 5 is embedded and fixed to the front end of the camera extension bracket plate 6 and is located directly above the detection plate 3.

[0029] In this embodiment, when the mother disk 2 to be inspected enters the inspection station 4, the industrial camera 5 acquires image information of the surface of the mother disk 2, and analyzes the cleanliness of the surface of the mother disk 2 through the background image comparison method, thereby determining whether the previous mother disk 2 cleaning step is qualified.

[0030] The upper end of the testing station 1 is provided with a master disk collection frame 19. The inside of the master disk collection frame 19 is provided with a partition 20, which divides the inside of the master disk collection frame 19 into a qualified area and an unqualified area. After the master disk 2 is tested, the master disk 2 grabbing module transports the tested master disk 2 into the master disk collection frame 19 and selects to put it into different partitions according to the cleanliness judgment result of the master disk 2.

[0031] The above description is a further detailed explanation of the present utility model in conjunction with specific embodiments, and it should not be considered that the specific implementation of the present utility model is limited to this. For those skilled in the art to which the present utility model pertains and related fields, any extensions, operation methods, and data substitutions made based on the technical solution concept of the present utility model should fall within the protection scope of the present utility model.

Claims

1. A cleanliness detection device for mother discs, characterized in that: The device includes a testing platform (1) and a mother plate (2) placed on one side of the testing platform (1). The testing platform (1) has a testing tray (3) at its upper end. The testing tray (3) has a testing station slot (4) for loading the mother plate (2) above it. The testing tray (3) has a testing module for testing the cleanliness of the mother plate (2) around it. The testing module includes an industrial camera (5), a camera extension bracket plate (6), a connecting platform (7), a support column (8), and a support base (9). The support base (9) is fixed to the upper end of the testing platform (1) and is located on one side of the testing tray (3). There are two sets of support columns (8), and the two sets of support columns (8) are fixed to the upper end of the support base (9). The connecting platform (7) is fixed to the upper end of the support column (8). The camera extension bracket plate (6) is installed and fixed to the upper end of the connecting platform (7). The industrial camera (5) is embedded and fixed to the front end of the camera extension bracket plate (6). The industrial camera (5) is located directly above the testing tray (3).

2. The cleanliness detection device for mother discs according to claim 1, characterized in that: The upper end of the testing station (1) is provided with a mother plate (2) gripping module. The mother plate (2) gripping module includes a first gripping suction cup (10) and a second gripping suction cup (11). The upper ends of the first gripping suction cup (10) and the second gripping suction cup (11) are provided with gripping connecting rods (12) for fixing the mother plate (2) gripping module.

3. The cleanliness detection device for mother discs according to claim 2, characterized in that: A lifting block (13) is fixedly provided on one side of the gripping link (12). The lifting block (13) drives the gripping link (12), the first gripping suction cup (10), and the second gripping suction cup (11) to move. An electric lifting control component (14) is provided on the outside of the lifting block (13). The lifting block (13) is slidably installed outside the limiting rod inside the electric lifting control component (14). The electric lifting control component (14) controls the lifting block (13) through a servo motor and a lead screw. A connecting block (15) is fixedly provided at the rear end of the electric lifting control component (14). A first linear module (16) is provided on one side of the connecting block (15).

4. The cleanliness detection device for mother discs according to claim 3, characterized in that: The mother disk (2) is provided with a mother disk (2) feeding module below it. The mother disk (2) feeding module includes a second linear module (17) and a feeding tray (18). The second linear module (17) is located below one side of the first linear module (16), and the feeding tray (18) is installed above the second linear module (17).

5. The cleanliness detection device for mother discs according to claim 1, characterized in that: The upper end of the testing station (1) is provided with a mother plate collection frame (19), and the inside of the mother plate collection frame (19) is provided with a partition (20), which divides the inside of the mother plate collection frame (19) into a qualified area and an unqualified area.

6. The cleanliness detection device for mother discs according to claim 1, characterized in that: The detection plate (3) is provided with a supplementary light column (21) on one side, and the lower end of the supplementary light column (21) is provided with a light column base (22) fixed to the upper end of the detection table (1).

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