Conveying platform and semiconductor production system

Abstract

The utility model provides a conveying platform and a semiconductor production system. The conveying platform comprises a conveying track, a first magnet array and a second magnet array. The conveying track comprises a linear motor, a movement assembly and a guide assembly; the moving assembly is movably arranged on the guide assembly; the linear motor can drive the motion assembly to reciprocate along the guide assembly; the first magnet array is arranged below the motion assembly; the second magnet array is arranged on the conveying track, and the second magnet array and the first magnet array are arranged at an interval; the second magnet array extends along the movement direction of the movement assembly; mutual exclusion force is generated between the first magnet array and the second magnet array, partial stress of the moving assembly in the vertical direction can be counteracted, friction between the moving assembly and the guiding assembly is reduced, then few dust particles are generated between the moving assembly and the guiding assembly, the dust particles can be prevented from polluting production devices or production equipment, and the production efficiency is improved. And the cleanliness of the production environment can be improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing equipment technology, and in particular to a conveying platform and a semiconductor manufacturing system. Background Technology

[0002] In semiconductor manufacturing processes, the cleanliness requirements for various production equipment and environments are very high. However, traditional belt-driven or chain-driven conveyor platforms generate dust particles during operation. Furthermore, the greater the load they bear, the greater the friction, resulting in even more dust particles being generated. For example, during manufacturing, dust particles may adhere to the surfaces of carrier boards, carrier board fixtures, etc., leading to a decrease in device yield; or they may force production equipment to be shut down for cleaning, affecting production capacity. Utility Model Content

[0003] To address the aforementioned technical problems, this application provides a conveying platform and a semiconductor manufacturing system.

[0004] A first aspect of this application provides a transport platform, including a transport track, a first magnet array, and a second magnet array;

[0005] The conveying track includes a linear motor, a motion component, and a guide component; the motion component is movably mounted on the guide component; the linear motor can drive the motion component to reciprocate along the guide component;

[0006] The first magnet array is disposed below the motion component;

[0007] The second magnet array is disposed on the conveying track and spaced apart from the first magnet array; the second magnet array extends along the direction of movement of the moving component;

[0008] The first magnet array and the second magnet array generate a repulsive force, which can counteract the partial force on the moving component in the vertical direction and reduce the friction between the moving component and the guiding component.

[0009] In some embodiments of this application, the conveying track further includes a mounting plate and a support frame; the mounting plate is disposed on the support frame; the stator of the linear motor is mounted on the mounting plate, and the mover of the linear motor is mounted on the motion assembly.

[0010] In some embodiments of this application, the motion component includes a support portion and a first guide portion; the first guide portion is disposed below the support portion.

[0011] In some embodiments of this application, there are multiple first guide portions; the multiple first guide portions are spaced apart.

[0012] In some embodiments of this application, the motion component further includes a fixing plate; the fixing plate is disposed between the two first guide portions.

[0013] In some embodiments of this application, the guide assembly includes a second guide portion and a support mounting portion; the support mounting portion is disposed below the second guide portion and is used to support and fix the second guide portion.

[0014] In some embodiments of this application, the second guide portion is a guide shaft; there are multiple support mounting portions, which are spaced apart.

[0015] In some embodiments of this application, the guiding components are in multiple groups, and the multiple groups of guiding components are spaced apart and arranged in parallel; the second magnet array is in multiple groups; every two groups of the second magnet array are arranged on both sides of the guiding components at intervals.

[0016] In some embodiments of this application, each group of the second magnet arrays may provide the same or different magnetic forces.

[0017] A second aspect of this application provides a semiconductor manufacturing system including the aforementioned conveying platform.

[0018] Compared with the prior art, the present invention has the following advantages and beneficial effects: The conveying platform of this application includes a conveying track, a first magnet array, and a second magnet array; the conveying track includes a linear motor, a motion component, and a guide component; the motion component is movably mounted on the guide component; the linear motor can drive the motion component to reciprocate along the guide component; the first magnet array is mounted below the motion component; the second magnet array is mounted on the conveying track and spaced apart from the first magnet array; the second magnet array extends along the motion direction of the motion component; the first magnet array and the second magnet array generate a repulsive force, which can offset part of the force on the motion component in the vertical direction, reduce the friction between the motion component and the guide component, and thus generate less dust particles between the motion component and the guide component, which can prevent dust particles from contaminating the production device or production equipment and improve the cleanliness of the production environment.

[0019] It should be understood that the above general description and the following detailed description are merely exemplary and explanatory, and do not limit this document. Attached Figure Description

[0020] The accompanying drawings, which form part of this document, are used to provide a further understanding of the document. The illustrative embodiments and descriptions herein are used to explain the document and do not constitute an undue limitation thereof. In the drawings:

[0021] Figure 1 This is a schematic diagram of the structure of a conveying platform provided in an exemplary embodiment of this application;

[0022] Figure 2 yes Figure 1 Enlarged view at point A in the middle;

[0023] Figure 3 This is a front view of the delivery platform provided in an exemplary embodiment of this application.

[0024] In the picture:

[0025] 100, Support frame; 201, Linear motor; 2011, Stator; 2012, Mover; 202, Motion assembly; 2021, Bearing part; 2022, First guide part; 2023, Fixing plate; 203, Guide assembly; 2031, Second guide part; 2032, Support mounting part; 300, First magnet array; 400, Second magnet array. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this application can be arbitrarily combined with each other.

[0027] In semiconductor manufacturing processes, the cleanliness requirements for various production equipment and environments are very high. However, traditional belt-driven or chain-driven conveyor platforms generate dust particles during operation. Furthermore, the greater the load they bear, the greater the friction, resulting in even more dust particles being generated. For example, during manufacturing, dust particles may adhere to the surfaces of carrier boards, carrier board fixtures, etc., leading to a decrease in device yield; or they may force production equipment to be shut down for cleaning, affecting production capacity.

[0028] Based on this, an exemplary embodiment of this application provides a conveying platform, which includes a conveying track, a first magnet array, and a second magnet array; the conveying track includes a linear motor, a motion component, and a guide component; the motion component is movably disposed on the guide component; the linear motor can drive the motion component to reciprocate along the guide component; the first magnet array is disposed below the motion component; the second magnet array is disposed on the conveying track and spaced apart from the first magnet array; the second magnet array extends along the motion direction of the motion component; a mutual repulsive force is generated between the first magnet array and the second magnet array, which can offset part of the force on the motion component in the vertical direction, reduce the friction between the motion component and the guide component, thereby generating less dust particles between the motion component and the guide component, preventing dust particles from contaminating production devices or production equipment, and improving the cleanliness of the production environment.

[0029] Example 1:

[0030] An exemplary embodiment of this application provides a delivery platform, such as... Figure 1 and 2 As shown, the conveying platform includes a conveying track, a first magnet array 300, and a second magnet array 400; the conveying track includes a linear motor 201, a motion component 202, a guide component 203, a mounting plate, and a support frame 100; the mounting plate is mounted on the support frame 100; the stator 2011 of the linear motor 201 is mounted on the mounting plate, and the mover 2012 of the linear motor 201 is mounted on the motion component 202; the motion component 202 is movably mounted on the guide component 203; the linear motor 201 can drive the motion component 202 to reciprocate along the guide component 203. The first magnet array 300 is disposed below the motion component 202; the second magnet array 400 is disposed on the conveying track and spaced apart from the first magnet array 300; the second magnet array 400 extends along the motion direction of the motion component 202, and its length is consistent with the motion stroke of the motion component 202; the magnetic poles of the side of the first magnet array 300 facing the second magnet array 400 and the side of the second magnet array 400 facing the first magnet array 300 are the same, so that the first magnet array 300 and the second magnet array 400 generate a repulsive force, which can counteract part of the force on the motion component 202 in the vertical direction and reduce the friction between the motion component 202 and the guide component 203; thereby, fewer dust particles are generated between the motion component 202 and the guide component 203, which can prevent dust particles from contaminating the production device or production equipment and improve the cleanliness of the production environment.

[0031] Preferably, both the first magnet array 300 and the second magnet array 400 are Heilbeck arrays. This significantly enhances the magnetic field strength of the first magnet array 300 and the second magnet array 400, thereby increasing the mutual repulsion between the first magnet array 300 and the second magnet array 400, allowing the motion component 202 to carry a greater weight of items. At the same time, when the motion component 202 carries items of the same weight, the friction between the motion component 202 and the guide component 203 is smaller, resulting in fewer dust particles.

[0032] like Figure 2 and 3 As shown, the motion assembly 202 includes a support portion 2021 and a first guide portion 2022; the first guide portion 2022 is disposed below the support portion 2021. The guide assembly 203 includes a second guide portion 2031 and a support mounting portion 2032; the support mounting portion 2032 is disposed below the second guide portion 2031 and is used to support and fix the second guide portion 2031. Preferably, the second guide portion 2031 is a guide shaft, and the first guide portion 2022 is a guide sleeve, the first guide portion 2022 is sleeved on the second guide portion 2031, and can slide along the second guide portion 2031. Multiple support mounting parts 2032 are provided. Preferably, the support mounting parts 2032 are block-shaped, with their lower surfaces fixed to the mounting plate and their upper surfaces used to fix the second guide part 2031. Multiple support mounting parts 2032 are spaced apart to provide multi-point support for the second guide part 2031, so that the second guide part 2031 maintains good coaxiality, and the moving component 202 moves more smoothly along the second guide part 2031, thereby avoiding the generation of dust particles.

[0033] The number of first guide portions 2022 can be configured in various ways. For example, there can be multiple first guide portions 2022; multiple first guide portions 2022 can be spaced apart; preferably, there can be two first guide portions 2022, which are arranged opposite each other on both sides of the support portion 2021. In this case, the first magnet array 300 can be installed below the two first guide portions 2022; or, there can be four first guide portions 2022, which are respectively arranged at the four corners of the support portion 2021, and a fixing plate 2023 is provided between the two first guide portions 2022 on the side with the same movement direction as the moving component 202. In this case, the first magnet array 300 can be installed below the first guide portions 2022 and the fixing plate 2023.

[0034] The number of guide components 203 can be configured in various ways. For example, there can be multiple sets of guide components 203, spaced apart and arranged in parallel. Alternatively, there can be a single set of guide components 203, for instance, with the guide components 203 positioned in the center of the mounting plate, the stator 2011 of the linear motor 201 positioned on both sides of the guide components 203, the first guide portion 2022 positioned in the center below the support portion 2021, and the mover 2012 of the linear motor 201 positioned on both sides of the first guide portion 2022; in this case, the number of first guide portions 2022 can be one. Preferably, as... Figure 2 As shown, there are two sets of guide components 203, which are arranged in parallel and spaced apart.

[0035] Correspondingly, the number of second magnet arrays 400 can be configured in various ways. For example, there are four groups of second magnet arrays 400; each pair of second magnet arrays 400 is spaced apart on both sides of the guide component 203 to provide multiple supports for the moving component 202 and reduce friction between the moving component 202 and the guide component 203. Alternatively, there can be two groups of second magnet arrays 400, arranged opposite each other on opposite sides of the mounting plate. Preferably, each group of second magnet arrays 400 provides the same magnetic force, thus generating equal repulsive forces between the first magnet array 300 and the second magnet array 400, resulting in a uniform force distribution on the moving component 202 in the vertical direction.

[0036] Example 2:

[0037] Based on Embodiment 1 described above, this embodiment differs from Embodiment 1 in that different groups of the second magnet arrays 400 can provide different magnetic forces. For example, when the item carried on the support portion 2021 is not located at the center of the support portion 2021, or when the center of gravity of the carried item is biased towards one side of the guide component 203, the second magnet array 400 on the side closer to the center of gravity of the carried item can generate a greater magnetic force to ensure that the guide components 203 on both sides are balanced, making the movement of the moving component 202 more stable and generating fewer dust particles.

[0038] Example 3:

[0039] An exemplary embodiment of this application provides a semiconductor manufacturing system, including the conveying platform in embodiment 1 or 2, which generates fewer dust particles during movement, thereby improving the cleanliness of the production environment.

[0040] In this application, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that an article or device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or device. Without further limitation, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the article or device that includes said element.

[0041] Although preferred embodiments of this application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this application.

[0042] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if these modifications and variations fall within the scope of the claims of this application and their equivalents, the intent of this application also includes these modifications and variations.

Claims

1. A conveying platform, characterized in that, Includes a transport track, a first magnet array, and a second magnet array; The conveying track includes a linear motor, a motion component, and a guide component; the motion component is movably mounted on the guide component; the linear motor can drive the motion component to reciprocate along the guide component; The first magnet array is disposed below the motion component; The second magnet array is disposed on the conveying track and spaced apart from the first magnet array; the second magnet array extends along the direction of movement of the moving component; The first magnet array and the second magnet array generate a repulsive force, which can counteract the partial force on the moving component in the vertical direction and reduce the friction between the moving component and the guiding component.

2. The conveying platform according to claim 1, characterized in that, The conveying track also includes a mounting plate and a support frame; the mounting plate is disposed on the support frame; the stator of the linear motor is mounted on the mounting plate, and the mover of the linear motor is mounted on the motion assembly.

3. The conveying platform according to claim 1, characterized in that, The motion component includes a support portion and a first guide portion; the first guide portion is disposed below the support portion.

4. The conveying platform according to claim 3, characterized in that, There are multiple first guide portions; the multiple first guide portions are arranged at intervals.

5. The conveying platform according to claim 4, characterized in that, The motion component further includes a fixing plate; the fixing plate is disposed between the two first guide portions.

6. The conveying platform according to claim 1, characterized in that, The guide assembly includes a second guide portion and a support mounting portion; the support mounting portion is disposed below the second guide portion and is used to support and fix the second guide portion.

7. The conveying platform according to claim 6, characterized in that, The second guide part is a guide shaft; there are multiple support mounting parts, which are spaced apart.

8. The conveying platform according to claim 1, characterized in that, The guide components are in multiple sets, and the multiple sets of guide components are spaced apart and arranged in parallel; the second magnet array is in multiple sets; every two sets of the second magnet array are arranged on both sides of the guide components at intervals.

9. The conveying platform according to claim 8, characterized in that, Each group of the second magnet array can provide the same or different magnetic force.

10. A semiconductor manufacturing system, characterized in that, Includes the conveying platform as described in any one of claims 1 to 9.

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