Exhaust mechanism of semiconductor plastic package mold

Abstract

The utility model relates to the technical field of mold exhaust, and discloses an exhaust mechanism of a semiconductor plastic package mold, which comprises a fixed seat, an exhaust assembly and a filter assembly are arranged in the fixed seat, the exhaust assembly comprises an exhaust pipe, a plurality of exhaust holes are formed in the outer wall of the exhaust pipe, and a sealing plug is slidably connected to the inner wall of the exhaust pipe. A power assembly is arranged at the top of the sealing plug, a plurality of pressure relief holes are formed in the top of the exhaust pipe, a sealing ring is fixedly connected to the top of the exhaust pipe, and the sealing ring is located in the center between the pressure relief holes. According to the utility model, the electric pusher drives the sealing plug to move upwards through the push rod, at the moment, gas in the mold reaches the exhaust groove along the exhaust hole, is filtered by the filter plate and then is discharged out of the fixed seat, and after exhaust is completed, the electric pusher reversely pushes the sealing plug to move downwards to seal the exhaust pipe, so that the effects of automatic exhaust and gas purification are achieved; the problems that traditional manual exhaust is tedious and gas pollutes the environment are solved, and the exhaust efficiency and the environmental protection property are improved.

Description

Technical Field

[0001] This utility model relates to the field of mold venting technology, and in particular to a venting mechanism for semiconductor molding dies. Background Technology

[0002] In the semiconductor packaging field, molding is a key process for protecting chips, enhancing mechanical strength, and achieving electrical isolation. During molding, molten epoxy resin and other packaging materials need to be injected into the mold cavity. If the air in the cavity cannot be discharged in time, it will cause defects such as bubbles, voids, or incomplete filling around the chip, which will seriously affect the reliability and performance of the device. As the semiconductor industry develops towards high density and miniaturization, the structural complexity of molding molds and the requirements for venting accuracy have increased significantly. Traditional venting methods can no longer meet the needs of automated production for efficiency, environmental protection, and stability.

[0003] Existing semiconductor molding compounds typically employ a mechanical passive venting mechanism. This mechanism consists of fixed venting holes located at the edge of the mold cavity, coupled with manually or spring-driven venting valves. For example, some molds use threaded sealing posts at the venting holes, allowing operators to manually unscrew the posts before molding and then manually tighten them after molding. Other molds use a spring-loaded ejector pin venting structure, where the pressure of the molten material during injection pushes the ejector pin to open the venting hole, and the spring returns to its original position to close the passage after the pressure drops.

[0004] However, the aforementioned existing technologies face a fundamental problem in practical applications: the venting process relies on manual operation and lacks an efficient purification mechanism, resulting in both low production efficiency and environmental pollution risks. Manual venting requires operators to monitor the mold status in real time and frequently open and close the venting valve, which not only increases labor costs but also easily leads to untimely venting due to operational delays or errors, causing molding defects. Although the spring-driven passive venting structure can achieve a certain degree of automation, it cannot dynamically adjust the venting timing and pressure according to the melting characteristics of different packaging materials, resulting in poor versatility. At the same time, unfiltered venting directly releases harmful gases volatilized at high temperatures into the workshop environment, which not only fails to meet environmental protection requirements but may also harm the health of operators. Therefore, a venting mechanism for semiconductor molding molds is proposed to solve the above problems. Utility Model Content

[0005] To overcome the above shortcomings, this utility model provides an exhaust mechanism for semiconductor molding dies, which aims to improve the problems of cumbersome manual exhaust and environmental pollution caused by gas pollution in the prior art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] The venting mechanism of a semiconductor molding die includes a fixed base with a vent at the bottom. The vent communicates with the interior of the die and serves as a channel for venting gas from the die. The fixed base contains a venting assembly and a filter assembly, with the filter assembly located above the venting assembly.

[0008] The exhaust assembly includes an exhaust pipe, the bottom of which is fixedly connected to the inside of the fixed base. The inside of the exhaust pipe communicates with the exhaust port. Multiple exhaust holes are provided on the outer wall of the exhaust pipe in a circumferential arrangement. A sealing plug is slidably connected to the inner wall of the exhaust pipe. A power component is provided on the top of the sealing plug. The power component is located at the top of the exhaust pipe. Multiple pressure relief holes are provided on the top of the exhaust pipe in a circumferential arrangement. A sealing ring is fixedly connected to the top of the exhaust pipe and is located at the center between the pressure relief holes.

[0009] As a further description of the above technical solution:

[0010] The power unit includes an electric thruster, a bracket is fixedly connected to the outer wall of the electric thruster, the bottom of the bracket is fixedly connected to the top of the exhaust pipe, a push rod is fixedly connected to the output end of the electric thruster, the outer wall of the push rod is slidably connected to the inner wall of the sealing ring, and the bottom of the push rod is fixedly connected to the top of the sealing plug.

[0011] As a further description of the above technical solution:

[0012] The mounting base has an exhaust groove and a placement groove inside. The placement groove is located above the exhaust groove. The bottom of the exhaust pipe is fixedly connected to the center of the bottom of the inner wall of the exhaust groove. The filter assembly is located inside the placement groove.

[0013] As a further description of the above technical solution:

[0014] The filter assembly includes a filter plate, the outer wall of which is slidably connected to the inner wall of the placement groove, and the top of the filter plate is fixedly connected with symmetrical handles.

[0015] As a further description of the above technical solution:

[0016] The filter plate is provided with symmetrical locking posts on both the left and right sides. The outer walls of the locking posts are slidably connected to the fixed base and the inside of the filter plate. The fixed base has multiple sliding grooves inside, and the sliding grooves are all located above the locking posts.

[0017] As a further description of the above technical solution:

[0018] Each locking post has a limit block fixedly connected to its sidewall, and each limit block has a connecting post fixedly connected to its top. The outer wall of each connecting post is slidably connected to the inner wall of the groove.

[0019] As a further description of the above technical solution:

[0020] Each of the connecting columns has a slider fixedly connected to its top, and the bottom of each slider is slidably connected to the top of the fixed base.

[0021] As a further description of the above technical solution:

[0022] Each of the limiting blocks is provided with a return spring on its sidewall. One end of each return spring is fixedly connected to the inside of the fixed base, and the other end of each return spring is fixedly connected to the sidewall of the limiting block.

[0023] This utility model has the following beneficial effects:

[0024] 1. In this utility model, the electric pusher drives the sealing plug to move upward through the push rod. When the sealing plug moves above the exhaust hole, the gas in the mold goes along the exhaust hole to the exhaust groove. After the harmful substances in the gas are filtered out by the filter plate, it is discharged from the fixed seat. After the exhaust is completed, the electric pusher pushes the sealing plug to move below the exhaust hole to seal the exhaust pipe. This achieves the effect of automated exhaust and gas purification, solves the problem of traditional manual exhaust being cumbersome and polluting the environment, and improves exhaust efficiency and environmental protection.

[0025] 2. In this utility model, the operator first pushes the slider outward, which drives the limit block to move through the connecting column, causing the locking column to disengage from the internal hole of the filter plate and compress the return spring. Then, the filter plate is lifted out through the handle, a new filter plate is placed in, and the slider is released. Under the action of the return spring, the locking column is reinserted into the filter plate, achieving the effect of quickly replacing the filter plate. This solves the problem of cumbersome and time-consuming filter plate replacement, and improves maintenance efficiency and equipment operation continuity. Attached Figure Description

[0026] Figure 1 This is a perspective view of the venting mechanism of the semiconductor encapsulation mold proposed in this utility model;

[0027] Figure 2 This is a schematic diagram of the venting groove structure of the venting mechanism of the semiconductor encapsulation mold proposed in this utility model;

[0028] Figure 3 This is a schematic diagram of the venting structure of the venting mechanism of the semiconductor encapsulation mold proposed in this utility model;

[0029] Figure 4 This is a schematic diagram of the locking post structure of the venting mechanism of the semiconductor encapsulation mold proposed in this utility model;

[0030] Figure 5 for Figure 4 Enlarged view of point A in the middle.

[0031] Legend:

[0032] 1. Fixed base; 2. Exhaust groove; 3. Placement groove; 4. Exhaust pipe; 5. Electric actuator; 6. Bracket; 7. Push rod; 8. Sealing ring; 9. Pressure relief hole; 10. Sealing plug; 11. Exhaust hole; 12. Filter plate; 13. Handle; 14. Locking post; 15. Limiting block; 16. Connecting post; 17. Sliding block; 18. Return spring; 19. Slide groove; 20. Exhaust port. Detailed Implementation

[0033] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0034] Reference Figure 1 - Figure 3 The present invention provides an embodiment of a venting mechanism for a semiconductor molding die, comprising a fixed base 1, which is typically made of high-temperature resistant mold steel and has good thermal strength and wear resistance. The fixed base 1 has a vent 20 at its bottom, which adopts a circular through-hole structure with a diameter designed according to the venting requirements of the die. The vent 20 communicates with the interior of the die and serves as a channel for the exhaust of gas inside the die. The fixed base 1 is equipped with a venting component and a filter component, with the filter component located above the venting component, which respectively realizes the functions of gas exhaust and purification.

[0035] The exhaust assembly includes an exhaust pipe 4 made of stainless steel. The bottom of the exhaust pipe 4 is fixedly connected to the inside of the fixed base 1 by welding. The inside of the exhaust pipe 4 communicates with the exhaust port 20 to guide the orderly discharge of gas from the mold. The outer wall of the exhaust pipe 4 has multiple exhaust holes 11 arranged in a circular pattern to discharge the gas in the exhaust pipe 4 to the exhaust groove 2. A sealing plug 10 is slidably connected to the inner wall of the exhaust pipe 4. The sealing plug 10 is made of high-temperature resistant ceramic. A power component is provided on the top of the sealing plug 10 to control the opening and closing of the exhaust holes 11. The power component is located at the top of the exhaust pipe 4. The top of the exhaust pipe 4 has multiple pressure relief holes 9 to balance the air pressure and assist gas discharge when the sealing plug 10 is open. The pressure relief holes 9 are arranged in a circular pattern. A sealing ring 8 is fixedly connected to the top of the exhaust pipe 4. The sealing ring 8 is made of high-temperature resistant rubber to ensure the sealing of the push rod 7 during movement. The sealing ring 8 is located at the center between the pressure relief holes 9. The location and power components include an electric thruster 5, which is a device that converts electrical energy into linear motion. The electric thruster 5 is existing technology and will not be described in detail here. The outer wall of the electric thruster 5 is fixedly connected to a bracket 6 by bolts. The bracket 6 is made of metal. The bottom of the bracket 6 is fixedly connected to the top of the exhaust pipe 4 by bolts to support and fix the electric thruster 5. The output end of the electric thruster 5 is fixedly connected to a push rod 7 by bolts. The push rod 7 is made of stainless steel. The outer wall of the push rod 7 is slidably connected to the inner wall of the sealing ring 8. The bottom of the push rod 7 is fixedly connected to the top of the sealing plug 10 to transmit the power of the electric thruster 5. The fixed base 1 has an exhaust groove 2 and a placement groove 3 inside. The exhaust groove 2 is used to collect the gas discharged from the exhaust hole 11. The placement groove 3 is used to install the filter assembly. The placement groove 3 is located above the exhaust groove 2. The bottom of the exhaust pipe 4 is fixedly connected to the center of the bottom of the inner wall of the exhaust groove 2. The filter assembly is located inside the placement groove 3.

[0036] Specifically, when using the venting mechanism of this semiconductor molding die, after the molding die completes the molding process, the motor inside the electric actuator 5 drives the lead screw to rotate, and its output end drives the push rod 7 to move upward. Under the pulling force of the output end of the electric actuator 5, the push rod 7 drives the sealing plug 10 to slide upward on the inner wall of the vent pipe 4. When the sealing plug 10 moves upward from its initial position to above the vent hole 11, the sealing plug 10 no longer blocks the vent hole 11. At this time, the gas generated in the mold due to the molding process flows straight into the vent pipe 4 through the vent port 20 under the action of internal air pressure. The gas entering the vent pipe 4 continues to move upward. After reaching the position of the vent hole 11, it is discharged straight out from the vent pipe 4 towards the vent groove 2. The gas entering the vent groove 2 flows upward and first passes through the filter plate 12 in the placement groove 3. Under the action of buoyancy and air pressure difference, the gas passes straight through the filter plate 12 from below to above. The filter plate 12, with its porous structure, intercepts harmful substances in the gas on its surface. The purified gas continues to move upward and is discharged from the fixed base 1 through the exhaust channel at the top of the fixed base 1, completing the exhaust process. After exhaust, the output end of the electric pusher 5 extends downward, pushing the push rod 7 to move downward, which in turn moves the sealing plug 10 downward. When the sealing plug 10 moves downward to below the exhaust hole 11, the outer wall of the sealing plug 10 fits tightly against the inner wall of the exhaust pipe 4, completely blocking the exhaust hole 11 and sealing the exhaust pipe 4. This prevents gas leakage or the entry of external impurities in the mold during subsequent operations. Through the precise drive of the electric pusher 5 and the up-and-down movement of the sealing plug 10, the exhaust process is automatically controlled. At the same time, the filter plate 12 is used to purify the exhaust gas, achieving the effect of automated exhaust and purification of the exhaust gas, ensuring the safety and environmental protection of the semiconductor molding process.

[0037] Reference Figure 4 and Figure 5The filter assembly includes a filter plate 12, which consists of a metal frame and a filter medium. The metal frame is made of stainless steel, and the filter medium is activated carbon and a HEPA filter screen, used to intercept harmful substances generated during exhaust. The outer wall of the filter plate 12 is slidably connected to the inner wall of the placement groove 3. The top of the filter plate 12 is fixedly connected to symmetrical handles 13, which are made of engineering plastic with anti-slip textures for easy gripping and operation. The left and right sides of the filter plate 12 are provided with symmetrical locking posts 14, which are made of stainless steel and are used to achieve mechanical locking of the filter plate 12. The outer walls of the locking posts 14 are slidably connected to the fixed base 1 and the inside of the filter plate 12. The fixed base 1 has multiple sliding grooves 19 inside, which provide sliding tracks for the connecting posts 16. The sliding grooves 19 are all located above the locking posts 14, and the side walls of the locking posts 14 are fixedly connected to... A limiting block 15, made of metal, is used to limit the displacement range of the locking post 14 and transmit the elastic force of the return spring 18. A connecting post 16 is fixedly connected to the top of each limiting block 15 to transmit the displacement of the slider 17 to the limiting block 15. The outer wall of the connecting post 16 is slidably connected to the inner wall of the slide groove 19. A slider 17, made of metal, is fixedly connected to the top of each connecting post 16. The slider 17 is made of metal and has anti-slip texture on its surface to receive the operating force of the operator and drive the connecting post 16 to move. The bottom of the slider 17 is slidably connected to the top of the fixed base 1. A return spring 18 is provided on the side wall of each limiting block 15. The return spring 18 is made of spring steel. One end of the return spring 18 is fixedly connected to the inside of the fixed base 1, and the other end of the return spring 18 is fixedly connected to the side wall of the limiting block 15 to push the limiting block 15 and the locking post 14 to reset after the slider 17 is released.

[0038] Specifically, when the filter plate 12 needs to be replaced, the operator first grasps the four sliders 17 on both sides of the filter plate 12 and applies a horizontal pushing force outward. Under the action of the operator's pushing force, the sliders 17 slide linearly outward from the initial position close to the center of the filter plate 12 along the sliding plane at the top of the fixed seat 1. The displacement of the sliders 17 is transmitted to the limiting block 15 through the connecting column 16. The displacement of the limiting block 15, on the one hand, drives the locking column 14 to move outward from the fixed seat 1, so that the locking column 14 gradually disengages from the locking hole inside the filter plate 12. On the other hand, when the limiting block 15 moves outward, it compresses the return spring 18. When the locking column 14 is completely disengaged from the locking hole of the filter plate 12, the filter plate 12 loses its mechanical constraint. The operator then grasps the handle 13 and applies an upward pulling force to remove the old filter plate 12 from the placement slot 3. Subsequently, the operator takes the new filter plate 12 and... Align the filter plate 12 with the inlet of the placement slot 3 and apply downward force until the bottom of the filter plate 12 contacts the bottom of the placement slot 3. At this time, the operator releases the hand holding the slider 17, and the return spring 18 releases the stored elastic potential energy, pushing the limit block 15 to return to the direction of the filter plate 12. The limit block 15 drives the connecting column 16 and the slider 17 to slide inward synchronously. As the limit block 15 returns to its original position, the locking column 14 moves towards the filter plate 12 and inserts into the locking holes on the left and right sides of the filter plate 12, thereby mechanically fixing the filter plate 12. When the locking column 14 is fully inserted into the locking hole, the slider 17 returns to its initial position, and the filter plate 12 is stably fixed inside the placement slot 3, completing the replacement operation of the filter plate 12. Through the above process, the coordinated movement of the slider 17, the connecting column 16, the limit block 15 and the return spring 18 is used to realize the quick disassembly and installation of the filter plate 12, effectively improving the maintenance efficiency of the exhaust mechanism.

[0039] Working principle: When using the exhaust structure of the exhaust mechanism of the semiconductor molding die, after the die is finished, the electric pusher 5 drives the push rod 7 to move upward, which in turn drives the sealing plug 10 to slide upward on the inner wall of the exhaust pipe 4. When the sealing plug 10 moves above the exhaust hole 11, the gas in the die is discharged into the exhaust pipe 4 through the exhaust port 20, and then discharged into the exhaust groove 2 along the exhaust hole 11. After passing through the filter plate 12, the harmful substances in the gas are filtered out, and then it continues to be discharged upward, and finally discharged outside the fixed seat 1. After the exhaust is completed, the electric pusher 5 pushes the sealing plug 10 downward to the bottom of the exhaust hole 11 to complete the sealing of the exhaust pipe 4, thereby achieving the effect of automatic exhaust and purification of the exhaust gas.

[0040] When the filter plate 12 needs to be replaced, the operator first pushes the four sliders 17 on both sides of the filter plate 12 outward. The displacement of the sliders 17 causes the connecting column 16 to move outward along the inner wall of the slide groove 19, which in turn causes the limiting block 15 to move as well. The displacement of the limiting block 15 causes the locking column 14 to disengage from the hole inside the filter plate 12, and also causes the return spring 18 to be compressed. After the locking column 14 is completely disengaged from the hole of the filter plate 12, the operator can lift the filter plate 12 upward through the handle 13. Then, after placing the new filter plate 12 into the placement groove 3, the operator releases the sliders 17. Under the reset force of the return spring 18, the limiting block 15 pushes the locking column 14 into the hole of the filter plate 12, thereby completing the fixation of the filter plate 12 and achieving the effect of quickly replacing the filter plate 12.

[0041] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A venting mechanism for a semiconductor molding compound, comprising a fixed base (1), characterized in that: The bottom of the fixed base (1) is provided with an exhaust port (20), which is connected to the inside of the mold and serves as a channel for the exhaust of gas inside the mold. The fixed base (1) is provided with an exhaust component and a filter component, with the filter component located above the exhaust component. The exhaust assembly includes an exhaust pipe (4), the bottom of which is fixedly connected to the inside of the fixed base (1). The inside of the exhaust pipe (4) is connected to the exhaust port (20). The outer wall of the exhaust pipe (4) is provided with a plurality of exhaust holes (11), which are distributed in a circumferential manner. A sealing plug (10) is slidably connected to the inner wall of the exhaust pipe (4). A power assembly is provided on the top of the sealing plug (10). The power assembly is located on the top of the exhaust pipe (4). A plurality of pressure relief holes (9) are provided on the top of the exhaust pipe (4), which are distributed in a circumferential manner. A sealing ring (8) is fixedly connected to the top of the exhaust pipe (4), which is located at the center between the pressure relief holes (9).

2. The venting mechanism of the semiconductor molding die according to claim 1, characterized in that: The power assembly includes an electric thruster (5), a bracket (6) is fixedly connected to the outer wall of the electric thruster (5), the bottom of the bracket (6) is fixedly connected to the top of the exhaust pipe (4), a push rod (7) is fixedly connected to the output end of the electric thruster (5), the outer wall of the push rod (7) is slidably connected to the inner wall of the sealing ring (8), and the bottom of the push rod (7) is fixedly connected to the top of the sealing plug (10).

3. The venting mechanism of the semiconductor molding die according to claim 1, characterized in that: The fixed base (1) has an exhaust groove (2) and a placement groove (3) inside. The placement groove (3) is located above the exhaust groove (2). The bottom of the exhaust pipe (4) is fixedly connected to the center of the bottom of the inner wall of the exhaust groove (2). The filter assembly is located inside the placement groove (3).

4. The venting mechanism of the semiconductor molding die according to claim 3, characterized in that: The filter assembly includes a filter plate (12), the outer wall of which is slidably connected to the inner wall of the placement groove (3), and the top of the filter plate (12) is fixedly connected with symmetrical handles (13).

5. The venting mechanism of the semiconductor molding die according to claim 4, characterized in that: The filter plate (12) is provided with symmetrical locking posts (14) on both the left and right sides. The outer walls of the locking posts (14) are slidably connected to the fixed base (1) and the filter plate (12). The fixed base (1) is provided with multiple sliding grooves (19), and the sliding grooves (19) are all located above the locking posts (14).

6. The venting mechanism of the semiconductor molding die according to claim 5, characterized in that: Each locking post (14) has a limiting block (15) fixedly connected to its side wall, and each limiting block (15) has a connecting post (16) fixedly connected to its top. The outer wall of each connecting post (16) is slidably connected to the inner wall of the slide groove (19).

7. The venting mechanism of the semiconductor molding die according to claim 6, characterized in that: Each of the connecting columns (16) has a slider (17) fixedly connected to its top, and the bottom of each slider (17) is slidably connected to the top of the fixed base (1).

8. The venting mechanism of the semiconductor molding die according to claim 6, characterized in that: Each of the limiting blocks (15) is provided with a reset spring (18) on its side wall. One end of each reset spring (18) is fixedly connected to the inside of the fixed base (1), and the other end of each reset spring (18) is fixedly connected to the side wall of the limiting block (15).

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