Photomask box for storing semiconductor wafer

Abstract

The utility model discloses a photomask box for storing semiconductor wafers, and aims to solve the technical problem that a plurality of plastic boxes are easy to topple over when being carried or transported in the prior art. Comprising a storage box, the top of the storage box is in threaded connection with a sealing cover, an inner cavity of the storage box is in sliding connection with a supporting plate, a plurality of springs are fixedly connected between the bottom face of the inner cavity of the storage box and the supporting plate, three hollow plates are evenly and fixedly connected to the side wall of the storage box, butt joint assemblies are arranged on the hollow plates, and pull-up assemblies are arranged in inner cavities of the hollow plates. A sliding block is fixedly connected to the side wall of the supporting plate, a sliding groove is formed in the inner wall of the storage box, the position, close to the top face, of the side wall of the sliding groove is communicated with the hollow plate, and the sliding block is slidably connected with the sliding groove.

Description

Technical Field

[0001] This utility model belongs to the field of photomask technology, specifically relating to a photomask for storing semiconductor wafers. Background Technology

[0002] Wafers are extremely precise and fragile semiconductor materials. During storage, a stable and clean environment is provided to prevent them from being damaged by physical damage, dust contamination, chemical corrosion, etc., and to prevent scratches, particle adhesion, or chemical changes on the wafer surface caused by external factors, thereby ensuring their performance and quality.

[0003] Currently, the common method for storing wafers is to separate each wafer with foam and store them in plastic boxes for comprehensive protection. However, this method usually involves stacking multiple (usually five) plastic boxes and sealing them with plastic bags. Since the plastic boxes are simply stacked without any corresponding docking structure, they are prone to tipping over when being handled or transported, increasing the probability of wafer movement and thus affecting the storage quality of the wafers.

[0004] Therefore, a photomask box for storing semiconductor wafers was designed to overcome the aforementioned technical shortcomings. Utility Model Content

[0005] (1) Technical problems to be solved

[0006] In view of the shortcomings of the prior art, the purpose of this utility model is to provide a photomask box for storing semiconductor wafers. This photomask box aims to solve the technical problem that multiple plastic boxes are prone to tipping over when being handled or transported in the prior art.

[0007] (2) Technical solution

[0008] To solve the above-mentioned technical problems, this utility model provides a photomask box for storing semiconductor wafers, including a storage box, a sealing cover threaded to the top of the storage box, a support plate slidably connected to the inner cavity of the storage box, multiple springs fixedly connected between the bottom surface of the inner cavity of the storage box and the support plate, three hollow plates evenly fixedly connected to the side wall of the storage box, a docking assembly provided on the hollow plate, and a lifting assembly provided in the inner cavity of the hollow plate.

[0009] Furthermore, a slider is fixedly connected to the side wall of the support plate, and a groove is provided on the inner wall of the storage box. The side wall of the groove is connected to the hollow plate near the top surface, and the slider is slidably connected to the groove.

[0010] Furthermore, the lifting assembly includes a pull rope fixedly connected to the top surface of the slider, with the other end of the pull rope extending into the hollow plate through a groove, and the other end of the pull rope passing through the hollow plate and fixedly connected to a pull ring.

[0011] Furthermore, guide wheels are installed on the inner wall of the hollow slab at the corners where the ropes turn.

[0012] Furthermore, the docking assembly includes a positioning rod fixedly connected to the bottom surface of the hollow plate. Positioning holes are provided on the top surface of the hollow plate. When the storage boxes are stacked, the positioning rod is inserted into the positioning hole.

[0013] Furthermore, magnetic sheets are fixedly connected to the bottom end face of the positioning rod and the bottom surface of the positioning hole cavity, and the magnetic sheets on both sides are attracted to each other.

[0014] Furthermore, a sponge pad is fixedly connected to the bottom surface of the sealing cap.

[0015] (3) Beneficial effects

[0016] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0017] This invention, through the design of storage boxes, sealing covers, support plates, and docking components, allows for the docking and stacking of multiple storage boxes, thereby increasing the stability of the storage boxes and preventing them from falling or tipping over due to external forces. This facilitates subsequent handling, transportation, and packaging, and improves the storage effect on wafers. Attached Figure Description

[0018] Figure 1 This is a perspective view of the stacked storage boxes of this utility model.

[0019] Figure 2 This is a perspective view of a single storage box of this utility model;

[0020] Figure 3 This is a cross-sectional structural diagram of the present invention;

[0021] Figure 4 This is a top view of the present invention;

[0022] Figure 5 This is a front view of the present utility model;

[0023] Figure 6 This utility model Figure 3 Enlarged view of point A in the image.

[0024] The markings in the attached diagram are as follows: 1. Storage box; 2. Sealing cover; 3. Support plate; 4. Spring; 5. Slider; 6. Slide groove; 7. Hollow plate; 8. Pull rope; 9. Pull ring; 10. Guide wheel; 11. Positioning rod; 12. Positioning hole; 13. Magnetic sheet; 14. Sponge pad. Detailed Implementation

[0025] This specific embodiment is a photomask box for storing semiconductor wafers, and its structural schematic diagram is shown below. Figures 1-6As shown, the storage box includes a storage box 1, a sealing cover 2 threadedly connected to the top of the storage box 1, a support plate 3 slidably connected to the inner cavity of the storage box 1, multiple springs 4 fixedly connected between the bottom surface of the inner cavity of the storage box 1 and the support plate 3, three hollow plates 7 evenly fixedly connected to the side wall of the storage box 1, a docking assembly is provided on the hollow plate 7, and a lifting assembly is provided in the inner cavity of the hollow plate 7.

[0026] like Figure 3 As shown, a slider 5 is fixedly connected to the side wall of the support plate 3, and a groove 6 is provided on the inner wall of the storage box 1. The side wall of the groove 6 near the top surface is connected to the hollow plate 7, and the slider 5 is slidably connected to the groove 6. By utilizing the sliding connection between the slider 5 and the groove 6, the support plate 3 is limited while being lifted, and the support plate 3 also has high stability, avoiding swinging, offset, jamming and other phenomena.

[0027] like Figure 3 and Figure 6 As shown, the lifting assembly includes a pull rope 8 fixedly connected to the top surface of the slider 5. The other end of the pull rope 8 extends into the hollow plate 7 through the slide groove 6. The other end of the pull rope 8 passes through the hollow plate 7 and is fixedly connected to a pull ring 9.

[0028] Specifically, when it is necessary to remove the wafer, in order to prevent the wafer on the support plate 3 from being located too deep inside the storage box 1, the pull ring 9 can be pulled. The pull rope 8 drives the support plate 3 to move upward, and at the same time the spring 4 is stretched, so as to easily lift the wafer out of the storage box 1, thus achieving the purpose of convenient retrieval and placement.

[0029] Guide wheels 10 are installed on the inner wall of the hollow plate 7 at the corners of the pull rope 8. The guide wheels 10 can reduce the friction between the pull rope 8 and the hollow plate 7, thereby extending the service life of the pull rope 8.

[0030] like Figure 3 and Figure 6 As shown, the docking assembly includes a positioning rod 11 fixedly connected to the bottom surface of the hollow plate 7. The top surface of the hollow plate 7 is provided with positioning holes 12. When the storage boxes 1 are stacked, the positioning rod 11 is inserted into the positioning hole 12.

[0031] like Figure 6 As shown, magnetic sheets 13 are fixedly connected to the bottom end face of the positioning rod 11 and the bottom surface of the inner cavity of the positioning hole 12, respectively, and the magnetic sheets 13 on both sides are magnetically attracted to each other. By setting up the docking assembly, it is convenient to play a positioning and fixing role when multiple storage boxes 1 are stacked. Moreover, the magnetic sheets 13 on both sides have strong magnetism. When the magnetic sheets 13 are attracted, a little force is needed to pull out the upper storage box 1 to achieve the purpose of auxiliary fixing and improve stability.

[0032] like Figure 3As shown, a sponge pad 14 is fixedly connected to the bottom surface of the sealing cover 2. The sponge pad 14 has good elastic properties. After the sealing cover 2 is tightened, the sponge pad 14 is compressed to squeeze the wafer and achieve the purpose of assisting in tightening.

[0033] Working principle: When placing wafers, the wafers are separated by foam and placed in storage box 1. The spring 4 is compressed by pressure, which drives the support plate 3 to descend. After the wafers are placed, the sealing cover 2 is tightened. At the same time, the sponge pad 14 is used to press the wafers downward. At this time, the spring 4 is compressed again, so that the support plate 3 and the sponge pad 14 form a relative compressive force, which plays a role in squeezing and fixing the wafers.

[0034] When multiple storage boxes 1 need to be stacked, they are stacked directly, and the positioning rod 11 is inserted into the positioning hole 12 on the lower hollow plate 7. At the same time, the magnetic pieces 13 on both sides attract each other, which plays an auxiliary role in fixing and further improves the stability when stacking.

[0035] All technical features in this embodiment can be freely combined according to actual needs.

[0036] The above embodiments are preferred implementations of this utility model. In addition, this utility model can also be implemented in other ways. Any obvious substitutions without departing from the concept of this technical solution are within the protection scope of this utility model.

Claims

1. A photomask box for storing semiconductor wafers, comprising a storage box (1), characterized in that: The storage box (1) is threaded with a sealing cap (2) at the top. The storage box (1) is slidably connected with a support plate (3). Multiple springs (4) are fixedly connected between the bottom surface of the storage box (1) and the support plate (3). Three hollow plates (7) are evenly fixedly connected to the side wall of the storage box (1). A docking assembly is provided on the hollow plate (7). A lifting assembly is provided in the inner cavity of the hollow plate (7).

2. The photomask box for storing semiconductor wafers according to claim 1, characterized in that: The support plate (3) has a slider (5) fixedly connected to its side wall. The storage box (1) has a groove (6) on its inner wall. The side wall of the groove (6) is connected to the hollow plate (7) near the top surface. The slider (5) is slidably connected to the groove (6).

3. The photomask box for storing semiconductor wafers according to claim 2, characterized in that: The lifting assembly includes a pull rope (8) fixedly connected to the top surface of the slider (5). The other end of the pull rope (8) extends into the hollow plate (7) through the groove (6). The other end of the pull rope (8) passes through the hollow plate (7) and is fixedly connected to a pull ring (9).

4. The photomask box for storing semiconductor wafers according to claim 3, characterized in that: The hollow plate (7) is equipped with guide wheels (10) at the corner of the pull rope (8).

5. The photomask box for storing semiconductor wafers according to claim 1, characterized in that: The docking assembly includes a positioning rod (11) fixedly connected to the bottom surface of the hollow plate (7). The top surface of the hollow plate (7) is provided with positioning holes (12). When the storage boxes (1) are stacked, the positioning rod (11) is inserted into the positioning hole (12).

6. The photomask box for storing semiconductor wafers according to claim 5, characterized in that: The bottom end face of the positioning rod (11) and the bottom surface of the inner cavity of the positioning hole (12) are respectively fixedly connected with magnetic sheets (13), and the magnetic sheets (13) on both sides are magnetically attracted to each other.

7. The photomask box for storing semiconductor wafers according to claim 1, characterized in that: A sponge pad (14) is fixedly connected to the bottom surface of the sealing cover (2).

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