Coating fixture and vacuum coating equipment

Abstract

The utility model relates to the technical field of vacuum coating, in particular to a coating fixture and vacuum coating equipment, the coating fixture provided by the embodiment of the utility model is used for positioning an optical element to be coated, and the optical element comprises a first edge and a second edge which are arranged at an included angle; the coating clamp comprises a supporting plate, a first fixing assembly and a second fixing assembly, a containing hole is formed in the supporting plate, a landing edge used for supporting the first edge is arranged on the inner circumferential wall of the containing hole, and an opening used for coating the first edge is formed in the bottom of the containing hole; the first fixing assembly is detachably connected with the supporting plate and used for pressing the first edge. The second fixing assembly is detachably connected with the supporting plate, the second fixing assembly is provided with a positioning structure used for limiting the position of the second edge, the film coating clamp can effectively avoid the situation that an optical element is broken or one end of the optical element is tilted due to centrifugal force, and the stability of film coating quality is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to a coating fixture and vacuum coating equipment. Background Technology

[0002] With the development of high-end optical system applications, the precision requirements for optical components are becoming increasingly stringent. These precision requirements involve a variety of parameters, especially for coated products such as lenses, which involve multiple requirements for the coating layers. The precision requirements for coatings in high-end optical components also vary across different fields and applications. Optical coating involves depositing one or more layers of material onto the surface of an optical component to alter its optical properties or improve its optical performance.

[0003] In existing optical element coating processes, it is typically necessary to coat two mutually perpendicular surfaces of an L-shaped optical element. In actual production, due to the unique structure of the L-shaped optical element, traditional sandwich-type coating fixtures struggle to simultaneously meet the requirements of reliable fixation and uniform coating. Specifically, existing fixtures usually use clamping blocks to directly hold the optical element. This clamping method easily creates stress concentration on the surface of the optical element, especially when the planetary disk rotates at high speed. Due to centrifugal force, the optical element is highly susceptible to breakage at corners or warping at one end, affecting the stability of the coating quality. Utility Model Content

[0004] This invention provides a coating fixture and a vacuum coating equipment. The coating fixture can effectively prevent optical components from breaking or tilting at one end due to centrifugal force, thus ensuring the stability of coating quality.

[0005] This utility model provides a coating fixture for positioning an optical element to be coated. The optical element includes a first side and a second side arranged at an angle. The coating fixture includes: a support plate with a receiving hole, an overlap for supporting the first side on the inner peripheral wall of the receiving hole, and an opening for coating the first side at the bottom of the receiving hole; a first fixing component detachably connected to the support plate for pressing the first side; and a second fixing component detachably connected to the support plate, which has a positioning structure for limiting the position of the second side.

[0006] In one possible implementation, the first fixing component and the second fixing component are connected to the support plate by screws.

[0007] In one possible implementation, the height of the second fixed component is not less than half the height of the second side.

[0008] In one possible implementation, the second fixing component is an integral structure, and the positioning structure is a positioning hole, which is used to allow the second side to pass through and to limit the position of the second side.

[0009] In one possible implementation, the second fixing component includes: a first positioning member detachably connected to the support plate; and a second positioning member detachably connected to the first positioning member.

[0010] In one possible implementation, the positioning structure includes: a first positioning groove provided on a first positioning member; a second positioning groove provided on a second positioning member; the first positioning groove and the second positioning groove cooperate to form a receiving space for accommodating and restricting the position of the second side.

[0011] In one possible implementation, the first fixed component is positioned away from the second side.

[0012] In one possible implementation, the size of the receiving hole is larger than the size of the first side.

[0013] In one possible implementation, clearance grooves are provided at the four corners of the receiving hole.

[0014] Secondly, this utility model provides a vacuum coating apparatus, including: a vacuum chamber; a planetary disk disposed within the vacuum chamber; and the aforementioned coating fixture disposed on the planetary disk.

[0015] The coating fixture provided by this utility model initially positions the first side of the optical element through the receiving hole, and provides a stable support surface for the optical element through the overlapping edge, avoiding stress concentration that may occur with direct clamping by traditional sandwich-type fixtures. Since the overlapping edge is located on the inner peripheral wall of the receiving hole, the first side of the optical element only contacts the overlapping edge and not the bottom of the receiving hole. This support method significantly reduces the risk of damage to the optical element. The open design at the bottom of the receiving hole allows the coating material to directly reach the surface to be coated, without affecting the uniformity of the coating due to obstruction by the clamping structure. Furthermore, the first fixing component presses down on the first side of the optical element, cooperating with the support of the overlapping edge, while the second fixing component supports and fixes the second side of the optical element through the positioning structure. Together, they ensure the stability of the optical element during the high-speed rotation of the planetary disk, effectively preventing the optical element from breaking or tilting at one end due to centrifugal force, thereby ensuring the stability of the coating quality. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0017] Figure 1 This is a three-dimensional structural diagram of a coating fixture and optical element provided by this utility model.

[0018] Figure 2 yes Figure 1 A schematic diagram of the three-dimensional structure from another angle.

[0019] Figure 3 This is a schematic diagram of the planar structure of a coating fixture and optical element provided by this utility model.

[0020] Figure 4 This is a top view schematic diagram of a coating fixture and optical element provided by this utility model.

[0021] Figure 5 This is a three-dimensional structural diagram of a support plate provided by this utility model.

[0022] Figure 6 yes Figure 5 A magnified schematic diagram of the structure at point A.

[0023] Figure 7 This is a structural schematic diagram of a second fixing component provided by this utility model.

[0024] Figure 8 This is a schematic diagram of another second fixing component provided by this utility model.

[0025] Figure 9 This is a schematic diagram of the structure of a vacuum coating equipment provided by this utility model.

[0026] Figure label:

[0027] a, Optical element; a1, First side; a2, Second side; Z, First direction; X, Second direction; Y, Third direction;

[0028] 1. Support plate; 11. Receiving hole; 12. Overlap edge; 13. Clearance groove;

[0029] 2. First fixed component;

[0030] 3. Second fixing component; 31. Positioning hole; 32. First positioning element; 321. First positioning groove; 33. Second positioning element; 331. Second positioning groove;

[0031] 4. Vacuum chamber;

[0032] 5. Planetary disk. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0034] The following is combined with Figure 1-8 This invention provides a coating fixture for positioning an optical element a to be coated. The optical element a includes a first side a1 and a second side a2 arranged at an angle. Specifically, the first side a1 is perpendicular to the second side a2, forming an L-shaped structure. Alternatively, the first side a1 can also form an acute or obtuse angle with the second side a2.

[0035] The coating fixture includes a support plate 1, a first fixing component 2, and a second fixing component 3, wherein:

[0036] The support plate 1 is provided with a receiving hole 11, and the inner peripheral wall of the receiving hole 11 is provided with an overlap 12 for supporting the first side a1. The bottom of the receiving hole 11 has an opening for coating the first side a1. Specifically, the support plate 1 is used to support the optical element a. The support plate 1 can be fixed on the planetary disk 5, or it can be detachably connected to the planetary disk 5, or it can be part of the planetary disk 5.

[0037] The first fixing component 2 is detachably connected to the support plate 1 and is used to press the first side a1.

[0038] The second fixing component 3 is detachably connected to the support plate 1, and the second fixing component 3 is provided with a positioning structure for limiting the position of the second side a2.

[0039] In this embodiment of the invention, the first side a1 of the optical element a is initially positioned by the receiving hole 11, and the overlapping edge 12 provides a stable support surface for the optical element a, avoiding stress concentration that may occur with direct clamping by traditional sandwich clamps. Since the overlapping edge 12 is located on the inner peripheral wall of the receiving hole 11, the first side a1 of the optical element a only contacts the overlapping edge 12 and not the bottom of the receiving hole 11. This support method significantly reduces the risk of damage to the optical element a. The open design at the bottom of the receiving hole 11 allows the coating material to directly reach the surface to be coated, without affecting the uniformity of the coating due to obstruction by the clamping structure. Furthermore, the first fixing component 2 presses the first side a1 of the optical element a, cooperating with the support of the overlapping edge 12. The second fixing component 3 supports and fixes the second side a2 of the optical element a through the positioning structure, jointly ensuring the stability of the optical element a during the high-speed rotation of the planetary disk 5, effectively preventing the optical element a from breaking or tilting at one end due to centrifugal force, thereby ensuring the stability of the coating quality.

[0040] like Figure 3 and 4 As shown, specifically, the first fixing component 2 presses the optical element a in the first direction Z, and the second fixing component 3 positions the optical element a in the second direction X and the third direction Y in the horizontal plane, wherein the first direction Z is a vertical direction and is perpendicular to the horizontal plane, and the second direction X is perpendicular to the third direction Y.

[0041] In related technologies, for ultra-wide-angle optical elements a, which have a first side a1 and a second side a2 set at an angle, traditional sandwich-type coating fixtures are used during vacuum coating. These fixtures directly clamp the optical element a using clamping blocks. This clamping method easily causes stress concentration on the surface of the optical element a. Especially when the planetary disk 5 rotates at high speed, the centrifugal force can easily cause the optical element a to break at the corner or cause one end of the optical element a to lift up, affecting the stability of the coating quality.

[0042] In this invention, a reliable support for the first side a1 of the optical element a is achieved by providing a receiving hole 11 and an overlap 12 on the support plate 1. Specifically, the overlap 12 on the inner peripheral wall of the receiving hole 11 provides a stable support surface for the first side a1 of the optical element a, avoiding scratches that may be caused by direct contact between the optical element a and the bottom of the receiving hole 11. The bottom opening design ensures that the coating material can be directly deposited on the coating surface of the first side a1, ensuring coating uniformity. The detachable connection design of the first fixing component 2 and the second fixing component 3 allows the fixture to adapt to optical elements a of different sizes and facilitates installation and disassembly. Especially in practical applications, when it is necessary to replace optical elements a of different specifications, the operator can easily adjust or replace the fixing components, improving production efficiency. During the rotation of the planetary disk 5 of the vacuum coating equipment, this structural design can effectively prevent the optical element a from being displaced or deformed due to centrifugal force.

[0043] In some embodiments, the first fixing component 2 and the second fixing component 3 are connected to the support plate 1 by screws.

[0044] In this invention, by specifically defining the first fixing component 2 and the second fixing component 3 as being connected to the support plate 1 using screws, a reliable connection structure is provided. The screw connection offers high strength, capable of withstanding the centrifugal force generated by the rotation of the planetary disk 5 during the coating process. Secondly, the screw connection allows for precise control of the clamping force of the fixing components, avoiding excessive stress on the optical element a. Thirdly, the screw connection facilitates adjustment of the fixing component's position, adapting to optical elements a of different sizes. In actual production, operators can achieve the optimal fixing effect by adjusting the screw tightness according to the specific dimensions of the optical element a. Furthermore, the screw connection structure is simple and easy to maintain; even after long-term use and wear, the screws can be easily replaced, ensuring connection reliability.

[0045] Optionally, the first fixing component 2 and the support plate 1 can also be detachably connected by snap-fit, and the second fixing component 3 and the support plate 1 can also be detachably connected by snap-fit.

[0046] In some embodiments, the height of the second fixing component 3 is not less than half the height of the second side a2.

[0047] This invention specifies the height requirement for the second fixing component 3, which is not less than half the height of the second side a2. Since the second side a2 of the optical element a is in a vertical or inclined state, sufficient height support is required to prevent deformation or breakage under centrifugal force. The height of the second fixing component 3, reaching half the height of the second side a2, provides sufficient supporting torque to effectively resist the centrifugal force generated by the rotation of the planetary disk 5. Secondly, this height design also considers the convenience of actual operation, ensuring support without excessively increasing the overall height of the clamp, facilitating the installation and removal of the optical element a by operators. In the actual coating process, this design significantly reduces the risk of breakage of the optical element a at corners.

[0048] In some embodiments, the second fixing component 3 is an integral structure, and the positioning structure is a positioning hole 31, which is used to allow the second side a2 to pass through and to restrict the position of the second side a2.

[0049] This invention provides an integrated structure for the second fixing component 3, using a positioning hole 31 to restrict the position of the second side a2. The integrated structure offers high strength and minimal deformation under centrifugal force, providing more stable fixation of the second side a2. Secondly, the positioning hole 31 has a simple structure, facilitating processing and maintenance. Thirdly, the positioning hole 31 allows for precise control of the position of the second side a2, ensuring a correct angular relationship with the first side a1. In practical applications, this integrated structure is particularly suitable for mass-produced, dimensionally stable optical elements a, improving production efficiency. The design of the positioning hole 31 can also be customized with different shapes and sizes to accommodate optical elements a of varying specifications.

[0050] In some embodiments, the second fixing component 3 includes: a first positioning member 32, which is detachably connected to the support plate 1; and a second positioning member 33, which is detachably connected to the first positioning member 32.

[0051] This invention provides a split-type structure for the second fixing component 3, including a detachably connected first positioning member 32 and a second positioning member 33. The split-type structure offers greater adjustment freedom, accommodating optical elements a of different sizes and angles. Secondly, the detachable connection design of the two positioning members allows operators to easily install and remove the optical element a, especially for optical elements a with irregular shapes or dimensional tolerances. Thirdly, when a positioning member is worn or damaged, it can be replaced individually, reducing maintenance costs. In actual production, this split-type structure is particularly suitable for multi-variety, small-batch production, or occasions requiring frequent replacement of optical elements a of different specifications.

[0052] Furthermore, the positioning structure includes: a first positioning groove 321 provided on the first positioning member 32; a second positioning groove 331 provided on the second positioning member 33; the first positioning groove 321 and the second positioning groove 331 cooperate to form a receiving space for accommodating and restricting the position of the second side a2.

[0053] This embodiment of the invention specifically describes the positioning structure of the split-type second fixing component 3. A receiving space is formed by providing mutually cooperating positioning grooves on the first positioning member 32 and the second positioning member 33. The receiving space formed by the cooperation of the two positioning grooves can accurately define the position of the second side a2, preventing displacement during the coating process. Secondly, the design of the positioning grooves can be customized according to the specific shape of the optical element a, ensuring a tight fit with the second side a2. Thirdly, the two-piece positioning groove structure facilitates the loading and unloading of the optical element a; the operator can first place the second side a2 into one positioning groove, and then complete the fixing through the other positioning groove. In practical applications, this structural design significantly improves positioning accuracy and operational convenience.

[0054] In some embodiments, the first fixing component 2 is positioned away from the second side a2.

[0055] This invention defines the specific position of the first fixing component 2, namely, it is positioned away from the second side a2. This layout design has significant technical advantages: First, pressing the first side a1 at a position away from the second side a2 generates a larger torque, more effectively preventing the optical element a from tilting under centrifugal force; second, this positional design avoids interference with the second fixing component 3, allowing the two fixing components to function independently; third, it facilitates installation and adjustment by operators, improving work efficiency. In practical applications, this layout design significantly improves the fixing stability of the optical element a, especially when the planetary disk 5 rotates at high speed.

[0056] In some embodiments, the size of the receiving hole 11 is larger than the size of the first side a1.

[0057] This invention specifies that the size of the receiving hole 11 is larger than the size of the first side a1. This design takes into account important factors in actual production: First, considering the heating effect during the coating process, the optical element a and the fixture may experience thermal expansion; the reserved gap can prevent thermal stress from damaging the optical element a. Second, the appropriate gap facilitates the installation and removal of the optical element a by operators, reducing the risk of scratches. Third, this design also considers the machining tolerances of the optical element a, enabling the fixture to accommodate elements with dimensional fluctuations within a certain range. In practical applications, this dimensional design significantly improves product yield and reduces scrap caused by mechanical damage during installation.

[0058] In some embodiments, clearance grooves 13 are provided at the four corners of the receiving hole 11.

[0059] In this invention, by providing clearance grooves 13 at the four corners of the receiving hole 11, direct contact between the optical element a and the corners of the receiving hole 11 is avoided, preventing stress concentration at the corners from damaging the optical element a. Secondly, the clearance grooves 13 also provide operators with more operating space, facilitating the installation and removal of the optical element a. Thirdly, the design of the clearance grooves 13 can also reduce the accumulation of debris generated during processing. In practical applications, this detailed design significantly improves the service life and operational safety of the optical element a.

[0060] like Figure 9 As shown, this utility model embodiment provides a vacuum coating equipment, including: a vacuum chamber 4; a planetary disk 5 disposed in the vacuum chamber 4; and the aforementioned coating fixture disposed on the planetary disk 5.

[0061] This invention provides a complete vacuum coating equipment solution, organically integrating the coating fixture with core components such as the vacuum chamber 4 and the planetary disk 5. This system integration offers significant technical advantages: First, by setting the coating fixture on the planetary disk 5, reliable fixation and precise positioning of the specially shaped optical element a are achieved; second, the complete equipment solution ensures the stability and repeatability of the coating process; third, this integrated design facilitates standardized production and widespread application of the equipment. In actual production, this complete equipment solution provides reliable technical support for the mass production of specially shaped optical elements a.

[0062] In actual production, the working process of this fixture is as follows: First, the operator places the first side a1 of the optical element a on the overlap 12 inside the receiving hole 11. Since the overlap 12 is located on the inner peripheral wall of the receiving hole 11, this structure avoids direct contact between the optical element a and the bottom of the receiving hole 11. In production practice, it has been found that this support method can effectively prevent scratches on the optical element a.

[0063] The first fixing component 2 is detachably connected to the support plate 1 using screws. In practical applications, the operator controls the clamping force by adjusting the tightness of the screws. When handling optical elements a of different sizes, the first fixing component 2 of different specifications can be replaced as needed. This detachable design demonstrates good adaptability in production, especially when frequent replacement of different batches of optical elements a is required, greatly improving work efficiency.

[0064] The design of the second fixing component 3 offers two options: an integrated structure and a separate structure. In the integrated design, the second fixing component 3 has a positioning hole 31 through which the second side a2 of the optical element a passes for positioning. This structure is suitable for mass production and is simple and straightforward to operate. In the separate design, the second fixing component 3 includes a first positioning member 32 and a second positioning member 33, each with a positioning groove that cooperates to form a receiving space. This structure facilitates the installation and removal of the optical element a and is particularly suitable for multi-variety, small-batch production.

[0065] In this embodiment, the height of the second fixing component 3 is designed to be no less than half the height of the second side a2 of the optical element a. This design is based on experience from actual production: when the planetary disk 5 rotates at high speed, the optical element a will be subjected to a large centrifugal force. If the height of the second fixing component 3 is too low, the optical element a is prone to breakage at the corner. Through practical verification, when the support height reaches half the height of the second side a2, it can provide sufficient support for the optical element a.

[0066] The size of the receiving hole 11 is designed to be larger than the size of the first side a1 of the optical element a. During the actual coating process, both the optical element a and the fixture will undergo thermal expansion due to heating. The reserved gap can avoid the compressive stress generated during thermal expansion and contraction. Practice has shown that this design can effectively reduce the damage rate of the optical element a.

[0067] The clearance grooves 13 located at the four corners of the receiving hole 11 play a crucial role in practical applications. Specifically, when installing optical element a, the clearance grooves 13 provide buffer space, reducing the chance of contact between the element and the corners. Especially during mass production, operators may experience imprecise installation due to fatigue or other reasons; in this case, the clearance grooves 13 effectively prevent the optical element a from being scratched by the corners. Simultaneously, the presence of the clearance grooves 13 facilitates the cleaning of debris generated during processing, reducing equipment maintenance time.

[0068] This embodiment also provides an overall solution for a vacuum coating equipment. The coating equipment includes a vacuum chamber 4, a planetary disk 5, and the aforementioned coating fixture. Specifically, the planetary disk 5 is installed inside the vacuum chamber 4, and the coating fixture is mounted on the planetary disk 5. During actual operation, the planetary disk 5 both rotates on its own axis and revolves around the sun; this combined motion helps improve the uniformity of the coating.

[0069] The working process of this embodiment is explained in detail below:

[0070] Install optical element a:

[0071] First, the operator places the first side a1 of the optical element a into the receiving hole 11, supporting it on the lap edge 12. Since the receiving hole 11 is larger than the first side a1, the installation process is relatively easy. Next, the operation is performed according to the selected second fixing component 3: when using an integrated structure, the second side a2 is passed through the positioning hole 31; when using a split structure, the second side a2 is first placed into the positioning groove of the first positioning member 32, and then the second positioning member 33 is installed, so that the two positioning grooves form a complete receiving space. Finally, the first fixing component 2 is installed and tightened with screws.

[0072] Coating process:

[0073] Secure the coating fixture with optical element a installed onto the planetary disk 5, and check that all connections are tight. Close the vacuum chamber 4, and after evacuating to the required vacuum level, start the heating system to evaporate the coating material. During this process, the planetary disk 5 rotates and revolves, ensuring that the coating material is uniformly deposited on the surface of optical element a.

[0074] Replace the workpiece:

[0075] After coating the first side a1, open vacuum chamber 4 and remove the coating fixture. Remove the fixing assembly, take out optical element a, and adjust the orientation of optical element a so that the second side a2 is inserted into receiving hole 11 for coating. This sequential coating method ensures that both surfaces to be coated achieve good coating results.

[0076] Specifically, when the lengths of the first side a1 and the second side a2 are equal, one set of coating fixtures can be used to coat the first side a1 and the second side a2 respectively. When the lengths of the first side a1 and the second side a2 are not equal, two sets of coating fixtures can be used to coat the first side a1 and the second side a2 respectively.

[0077] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without any creative effort.

[0078] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A coating fixture for positioning an optical element to be coated, the optical element comprising a first side and a second side arranged at an included angle, characterized in that, The coating fixture includes: A support plate (1) is provided with a receiving hole (11), and an overlap (12) for supporting the first side is provided on the inner peripheral wall of the receiving hole (11). The bottom of the receiving hole (11) has an opening for coating the first side. The first fixing component (2) is detachably connected to the support plate (1) and is used to press the first side; The second fixing component (3) is detachably connected to the support plate (1) and is provided with a positioning structure for limiting the position of the second side.

2. The coating fixture according to claim 1, characterized in that, The first fixing component (2) and the second fixing component (3) are connected to the support plate (1) by screws.

3. The coating fixture according to claim 1, characterized in that, The height of the second fixing component (3) is not less than half the height of the second side.

4. The coating fixture according to claim 3, characterized in that, The second fixing component (3) is an integral structure, and the positioning structure is a positioning hole (31). The positioning hole (31) is used to allow the second side to pass through and to restrict the position of the second side.

5. The coating fixture according to claim 3, characterized in that, The second fixing component (3) includes: The first positioning element (32) is detachably connected to the support plate (1); The second positioning element (33) is detachably connected to the first positioning element (32).

6. The coating fixture according to claim 5, characterized in that, The positioning structure includes: The first positioning groove (321) is provided on the first positioning member (32); The second positioning groove (331) is provided on the second positioning member (33); The first positioning groove (321) and the second positioning groove (331) cooperate to form a receiving space for accommodating and restricting the position of the second side.

7. The coating fixture according to claim 1, characterized in that, The first fixing component (2) is positioned away from the second side.

8. The coating fixture according to any one of claims 1-7, characterized in that, The size of the receiving hole (11) is larger than the size of the first side.

9. The coating fixture according to any one of claims 1-7, characterized in that, The four corners of the receiving hole (11) are provided with clearance grooves (13).

10. A vacuum coating apparatus, characterized in that, include: Vacuum chamber (4); Planetary disk (5) is disposed inside the vacuum chamber (4); The coating fixture as described in any one of claims 1-9 is disposed on the planetary disk (5).

Images