Refeeding device for liquid phase method silicon carbide single crystal growing furnace

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and discloses a recharging device for a liquid-phase method silicon carbide single crystal growing furnace, which comprises a charging kettle, a feeding stirring rod is rotatably connected in the charging kettle, a dismounting mechanism is arranged on the left side of the charging kettle, a sealing mechanism is arranged in the right side of the charging kettle, and the sealing mechanism is connected with the feeding stirring rod. A feeding hopper is arranged at the top of the feeding kettle, and the dismounting and mounting mechanism comprises a splicing assembly, a fixing assembly, a positioning assembly and a limiting assembly. According to the recharging device for the liquid-phase-method silicon carbide single crystal growth furnace, through the arrangement of the dismounting and mounting mechanism, a worker only needs to pull pull rings on the upper side and the lower side outwards to release positioning of positioning sleeve frames on the front side and the rear side, so that when the device is used, dismounting and mounting treatment on a driving motor can be rapidly completed according to use requirements; and a worker can conveniently overhaul and maintain the driving motor subsequently, the worker can conveniently replace the driving motor, and the fault of the driving motor cannot affect the overall use of the device.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to a refeeding device for a liquid-phase silicon carbide single crystal growth furnace. Background Technology

[0002] A liquid-phase silicon carbide single crystal growth furnace is a device used to prepare high-quality silicon carbide single crystals. It mainly includes a furnace body, a temperature control system, a liquid-phase circulation system, a vacuum pump system, a gas supply system, a seed crystal holder, and an inner furnace. The inner furnace is located in the middle of the furnace body and is heated to a high temperature by a heating structure to store and supply molten silicon carbide raw materials.

[0003] According to the patent application "Refeeding Device for Liquid Phase Silicon Carbide Single Crystal Growth Furnace (Publication No.: CN221566377 U; Application No.: 202323298268.1)", the above application optimized the following issues: "After solid silicon carbide raw material is added to the inner furnace through the existing refeeding device, it will cause fluctuations in the thermal field of the inner furnace cavity, affecting the growth quality and efficiency of silicon carbide single crystal; air will be introduced during the secondary feeding process, which will disrupt the atmosphere inside the single crystal growth furnace cavity, resulting in the generation of bubbles in the molten silicon carbide raw material, affecting the quality and efficiency of crystal growth". However, the refeeding device for the single crystal growth furnace in the above application cannot perform mixing of the added auxiliary materials when the discharge port of the feeding vessel is closed. The auxiliary materials need to be pre-processed, which lacks flexibility and is difficult to meet the diverse needs of different production processes for material addition and mixing. The disassembly and installation of the drive motor may be complicated, requiring a lot of time and effort, and may require the use of various tools or professional personnel. If the drive motor malfunctions, the entire refeeding device may be unusable for an extended period, affecting the production process. Utility Model Content

[0004] The purpose of this invention is to provide a refeeding device for a liquid-phase silicon carbide single crystal growth furnace, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a refeeding device for a liquid-phase silicon carbide single crystal growth furnace, comprising a feeding vessel, a feeding stirring rod rotatably connected inside the feeding vessel, a disassembly and assembly mechanism on the left side of the feeding vessel, a sealing mechanism inside the right side of the feeding vessel, and a feeding hopper on the top of the feeding vessel.

[0006] The assembly and disassembly mechanism includes a splicing component, a fixing component, a positioning component, and a limiting component. The splicing component is located on the left side of the feeding vessel, the fixing component is located on the front and rear sides of the splicing component, the positioning component is located on the upper and lower sides of the fixing component, and the limiting component is located on the outside of the positioning component.

[0007] The closing mechanism includes a closing component and an adjusting component. The closing component is located inside the right side of the feeding vessel, and the adjusting component is located outside the closing component.

[0008] Preferably, the splicing assembly includes a drive motor, which is located on the left side of the feeding vessel. A drive shaft is fixedly connected to the right side of the drive motor and is engaged with the left side of the feeding agitator. A mounting base is fixedly connected to the right side of the outer ring of the drive motor, and a locking block is engaged with the right side of the mounting base. The locking block is fixedly connected to the left side of the feeding vessel.

[0009] Preferably, the fixing component includes a positioning sleeve frame, which is snapped onto the front and rear sides of the mounting base. A movable slide rod is fixedly connected to the right side of the positioning sleeve frame, and the movable slide rod is slidably connected to the left side of the feeding vessel. A movable slider is fixedly connected to the right side of the movable slide rod, and the movable slider is slidably connected to the left side of the feeding vessel. Protruding rods are fixedly connected to the upper and lower sides of the positioning sleeve frame.

[0010] Preferably, the positioning component includes a frame plate, which is fixedly connected to the upper and lower left sides of the feeding vessel. A telescopic slide rod is slidably connected inside the frame plate. A pull ring is fixedly connected to the outer side of the telescopic slide rod. A fixed seat is fixedly connected to the inner side of the telescopic slide rod. A compression spring is fixedly connected to the inner side of the fixed seat. The compression spring is fixedly connected to the inner side of the frame plate and sleeved on the outer ring of the telescopic slide rod. A positioning frame is fixedly connected to the inner side of the fixed seat and sleeved on the outer ring of the protruding rod.

[0011] Preferably, the limiting component includes a limiting slide rod, which is fixedly connected to the outside of the positioning frame. A sleeve is slidably connected to the outer ring of the limiting slide rod, and the sleeve is fixedly connected to the front and rear sides of the frame plate. A limiting piece is fixedly connected to the outside of the limiting slide rod.

[0012] Preferably, the closing component includes a discharge port, which is located at the bottom right side of the feeding vessel. A closing plate is provided inside the right side of the feeding vessel corresponding to the position of the discharge port, and the closing plate is slidably connected to the right side of the feeding vessel.

[0013] Preferably, the adjusting component includes a lever, which is fixedly connected to the outer ring of the closed plate and slidably connected to the outer ring of the feeding vessel. A sealing arc plate is fixedly connected to the top of the outer ring of the lever, and the sealing arc plate is slidably connected to the inner right side of the feeding vessel.

[0014] Compared with the prior art, this utility model provides a refeeding device for a liquid-phase silicon carbide single crystal growth furnace, which has the following beneficial effects:

[0015] 1. This refeeding device for liquid-phase silicon carbide single crystal growth furnace, through its disassembly and assembly mechanism, allows operators to release the positioning of the front and rear positioning frames simply by pulling the upper and lower rings outwards. This enables the device to quickly disassemble and assemble the drive motor as needed, facilitating subsequent inspection and maintenance of the drive motor, and making it easy to replace the drive motor. This ensures that a failure of the drive motor will not affect the overall operation of the device.

[0016] 2. This refeeding device for a liquid-phase silicon carbide single crystal growth furnace, through its closed mechanism, allows the feeding vessel to tilt downwards on the left side during installation. When using the device, the operator can rotate the closing plate inside the feeding vessel on the right side by moving the lever. By controlling whether the closing plate is aligned with the discharge port, the operator can control whether the material in the feeding vessel can be discharged through the discharge port to complete the feeding process. This allows the operator to start the drive motor with the discharge port closed, completing the mixing of the added auxiliary materials in the feeding vessel without pre-processing. At the same time, the setting of the sealing arc plate ensures that the slot corresponding to the lever in the feeding vessel will not cause material leakage, thus guaranteeing the sealing of the feeding vessel. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a front view of the present utility model;

[0019] Figure 2 This is a front sectional view of the present invention;

[0020] Figure 3 This is a partial structural separation diagram of the present invention;

[0021] Figure 4 This is a schematic diagram showing the connection between the splicing components and the fixing components;

[0022] Figure 5 A schematic diagram showing the interaction between the positioning component and the limiting component;

[0023] Figure 6 This is a sectional view of the enclosed component.

[0024] In the diagram: 1. Assembly / disassembly mechanism; 11. Splicing assembly; 1101. Drive motor; 1102. Drive shaft; 1103. Mounting base; 1104. Locking block; 12. Fixing assembly; 1201. Positioning sleeve; 1202. Moving slide bar; 1203. Moving slider; 1204. Protruding rod; 13. Positioning assembly; 1301. Frame plate; 1302. Telescopic slide bar; 1303. Pull ring; 130 4. Fixed base; 1305. Compression spring; 1306. Positioning frame; 14. Limiting assembly; 1401. Limiting slide bar; 1402. Sleeve frame; 1403. Limiting plate; 2. Closing mechanism; 21. Closing assembly; 2101. Discharge port; 2102. Closing plate; 22. Adjusting assembly; 2201. Lever; 2202. Sealing arc plate; 3. Feeding vessel; 31. Feeding stirring rod; 4. Feeding hopper. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0027] This utility model provides a technical solution:

[0028] Example 1

[0029] Combination Figures 1 to 5 A refeeding device for a liquid-phase silicon carbide single crystal growth furnace includes a feeding vessel 3, a feeding stirring rod 31 rotatably connected inside the feeding vessel 3, a disassembly and assembly mechanism 1 on the left side of the feeding vessel 3, a sealing mechanism 2 inside the right side of the feeding vessel 3, and a feeding hopper 4 on the top of the feeding vessel 3.

[0030] The disassembly and assembly mechanism 1 includes a splicing component 11, a fixing component 12, a positioning component 13, and a limiting component 14. The splicing component 11 is located on the left side of the feeding vessel 3, the fixing component 12 is located on the front and rear sides of the splicing component 11, the positioning component 13 is located on the upper and lower sides of the fixing component 12, and the limiting component 14 is located on the outside of the positioning component 13.

[0031] The splicing component 11 includes a drive motor 1101, which is located on the left side of the feeding vessel 3. A drive shaft 1102 is fixedly connected to the right side of the drive motor 1101 and is engaged with the left side of the feeding stirring rod 31. A mounting base 1103 is fixedly connected to the right side of the outer ring of the drive motor 1101. A locking block 1104 is engaged with the right side of the mounting base 1103 and is fixedly connected to the left side of the feeding vessel 3. The fixing component 12 includes a positioning sleeve. Frame 1201, positioning sleeve 1201 is snapped into the front and rear sides of mounting base 1103. A movable slide rod 1202 is fixedly connected to the right side of positioning sleeve 1201, and the movable slide rod 1202 is slidably connected to the left side of the feeding vessel 3. A movable slider 1203 is fixedly connected to the right side of the movable slide rod 1202, and the movable slider 1203 is slidably connected to the left side of the feeding vessel 3. Protruding rods 1204 are fixedly connected to the upper and lower sides of positioning sleeve 1201. Positioning assembly 13 includes a frame plate 1. 301, the frame plate 1301 is fixedly connected to the upper and lower left sides of the feeding vessel 3. A telescopic slide rod 1302 is slidably connected inside the frame plate 1301. A pull ring 1303 is fixedly connected to the outer side of the telescopic slide rod 1302. A fixing seat 1304 is fixedly connected to the inner side of the telescopic slide rod 1302. A compression spring 1305 is fixedly connected to the inner side of the fixing seat 1304. The compression spring 1305 is fixedly connected to the inner side of the frame plate 1301 and is sleeved on the telescopic slide rod 1302. The outer ring of 302 has a positioning frame 1306 fixedly connected to the inner side of the fixed base 1304. The positioning frame 1306 is sleeved on the outer ring of the protrusion 1204. The limiting component 14 includes a limiting slide rod 1401. The limiting slide rod 1401 is fixedly connected to the outside of the positioning frame 1306. The outer ring of the limiting slide rod 1401 is slidably connected to a sleeve 1402. The sleeve 1402 is fixedly connected to the front and rear sides of the frame plate 1301. The outer side of the limiting slide rod 1401 is fixedly connected to a limiting piece 1403.

[0032] Furthermore, by simply pulling the pull rings 1303 on both the upper and lower sides outwards, the positioning of the front and rear positioning sleeves 1201 can be released. This allows for quick disassembly and assembly of the drive motor 1101 as needed, facilitating subsequent inspection and maintenance of the drive motor 1101 and its replacement. This ensures that a malfunction of the drive motor 1101 will not affect the overall use of the device.

[0033] Example 2

[0034] See Figure 1 , Figure 2 and Figure 6 Furthermore, based on Embodiment 1, the closing mechanism 2 includes a closing component 21 and an adjusting component 22. The closing component 21 is located inside the right side of the feeding vessel 3, and the adjusting component 22 is located outside the closing component 21.

[0035] The closing component 21 includes a discharge port 2101, which is located at the bottom right side of the feeding vessel 3. A closing plate 2102 is provided inside the right side of the feeding vessel 3 at the position corresponding to the discharge port 2101. The closing plate 2102 is slidably connected to the inside right side of the feeding vessel 3. The adjusting component 22 includes a lever 2201, which is fixedly connected to the outer ring of the closing plate 2102 and slidably connected to the outer ring of the feeding vessel 3. A sealing arc plate 2202 is fixedly connected to the top of the outer ring of the lever 2201 and slidably connected to the inside right side of the feeding vessel 3.

[0036] Furthermore: When the feeding vessel 3 is installed, its left side is tilted downwards. When using the device, the operator can rotate the closing plate 2102 inside the right side of the feeding vessel 3 by moving the lever 2201. By controlling whether the closing plate 2102 and the discharge port 2101 are aligned, the operator can control whether the material in the feeding vessel 3 can be discharged through the discharge port 2101 to complete the feeding. This allows the operator to start the drive motor 1101 when the discharge port 2101 is closed, and complete the mixing of the added auxiliary materials in the feeding vessel 3 without pre-processing. At the same time, the setting of the sealing arc plate 2202 ensures that the slot opened in the feeding vessel 3 corresponding to the lever 2201 will not cause material leakage, thus ensuring the sealing of the feeding vessel 3.

[0037] In actual operation, when this device is in use and the drive motor 1101 needs to be disassembled, the operator first pulls the pull rings 1303 on both sides outward. The pull rings 1303 move outward, which drives the fixed seat 1304 and the positioning frame 1306 outward through the telescopic slide rod 1302. The positioning frame 1306 moves outward and disengages from the connection of the protruding rod 1204. Then the operator moves the positioning sleeves 1201 on both sides outward. The positioning sleeves 1201 move forward and disengage from the mounting seat 1103. Then the operator can move the drive motor 1101 to the left. The drive motor 1101 moves to the left, which drives the drive clamp shaft 1102 to the left until the drive clamp shaft 1102 disengages from the feeding stirring rod 31. At this time, the disassembly of the positioning sleeve 1201 is completed.

[0038] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. A refeeding device for a liquid-phase silicon carbide single crystal growth furnace, comprising a feeding vessel (3), characterized in that: The feeding vessel (3) is rotatably connected to a feeding stirring rod (31), a disassembly and assembly mechanism (1) is provided on the left side of the feeding vessel (3), a sealing mechanism (2) is provided on the right side of the feeding vessel (3), and a feeding hopper (4) is provided on the top of the feeding vessel (3). The disassembly and assembly mechanism (1) includes a splicing component (11), a fixing component (12), a positioning component (13), and a limiting component (14). The splicing component (11) is located on the left side of the feeding vessel (3). The fixing component (12) is located on the front and rear sides of the splicing component (11). The positioning component (13) is located on the upper and lower sides of the fixing component (12). The limiting component (14) is located on the outside of the positioning component (13). The closing mechanism (2) includes a closing component (21) and an adjusting component (22). The closing component (21) is located inside the right side of the feeding vessel (3), and the adjusting component (22) is located outside the closing component (21).

2. The refeeding device for a liquid-phase silicon carbide single crystal growth furnace according to claim 1, characterized in that: The splicing assembly (11) includes a drive motor (1101), which is located on the left side of the feeding vessel (3). A drive shaft (1102) is fixedly connected to the right side of the drive motor (1101). The drive shaft (1102) is engaged with the left side of the feeding stirring rod (31). A mounting base (1103) is fixedly connected to the right side of the outer ring of the drive motor (1101). A locking block (1104) is engaged with the right side of the mounting base (1103). The locking block (1104) is fixedly connected to the left side of the feeding vessel (3).

3. The refeeding device for a liquid-phase silicon carbide single crystal growth furnace according to claim 1, characterized in that: The fixing component (12) includes a positioning sleeve (1201), which is snapped onto the front and rear sides of the mounting base (1103). A movable slide rod (1202) is fixedly connected to the right side of the positioning sleeve (1201), which is slidably connected to the left side of the feeding vessel (3). A movable slider (1203) is fixedly connected to the right side of the movable slide rod (1202), which is slidably connected to the left side of the feeding vessel (3). A protruding rod (1204) is fixedly connected to the upper and lower sides of the positioning sleeve (1201).

4. The refeeding device for a liquid-phase silicon carbide single crystal growth furnace according to claim 1, characterized in that: The positioning component (13) includes a frame plate (1301), which is fixedly connected to the upper and lower sides of the left side of the feeding vessel (3). A telescopic slide rod (1302) is slidably connected inside the frame plate (1301). A pull ring (1303) is fixedly connected to the outside of the telescopic slide rod (1302). A fixed seat (1304) is fixedly connected to the inside of the telescopic slide rod (1302). A compression spring (1305) is fixedly connected to the inside of the fixed seat (1304). The compression spring (1305) is fixedly connected to the inside of the frame plate (1301). The compression spring (1305) is sleeved on the outer ring of the telescopic slide rod (1302). A positioning frame (1306) is fixedly connected to the inside of the fixed seat (1304). The positioning frame (1306) is sleeved on the outer ring of the protruding rod (1204).

5. A refeeding device for a liquid-phase silicon carbide single crystal growth furnace according to claim 1, characterized in that: The limiting component (14) includes a limiting slide rod (1401), which is fixedly connected to the outside of the positioning frame (1306). A sleeve (1402) is slidably connected to the outer ring of the limiting slide rod (1401). The sleeve (1402) is fixedly connected to the front and rear sides of the frame plate (1301). A limiting piece (1403) is fixedly connected to the outside of the limiting slide rod (1401).

6. A refeeding device for a liquid-phase silicon carbide single crystal growth furnace according to claim 1, characterized in that: The closing component (21) includes a discharge port (2101), which is located at the bottom right side of the feeding vessel (3). A closing plate (2102) is provided on the right side of the feeding vessel (3) at the position corresponding to the discharge port (2101). The closing plate (2102) is slidably connected to the right side of the feeding vessel (3).

7. A refeeding device for a liquid-phase silicon carbide single crystal growth furnace according to claim 1, characterized in that: The adjustment component (22) includes a lever (2201), which is fixedly connected to the outer ring of the closing plate (2102). The lever (2201) is slidably connected to the outer ring of the feeding vessel (3). A sealing arc plate (2202) is fixedly connected to the top of the outer ring of the lever (2201), and the sealing arc plate (2202) is slidably connected to the inner right side of the feeding vessel (3).

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