Structure of lamp tube quick plug wire adaptive to semiconductor CVD (Chemical Vapor Deposition) process equipment

Abstract

The utility model discloses a lamp tube fast plug wire structure adapted to semiconductor CVD process equipment, which comprises an equipment main body and a lamp tube, a connecting groove is arranged in the equipment main body, the end part of the lamp tube can be inserted into the connecting groove, the connecting groove and the lamp tube are in threaded fit, a first electric contact is arranged at the bottom of the connecting groove, and a second electric contact is arranged at the bottom of the connecting groove. A first electric contact is arranged at the end of the lamp tube, a second electric contact is arranged at the end of the lamp tube, the first electric contact can make contact with the second electric contact so that the lamp tube can be powered on, a baffle capable of rotating is arranged on the surface of the first electric contact, when the lamp tube is inserted into the connecting groove, the baffle can rotate, and the end of the connecting groove and the end of the lamp tube are in an inverted-T shape. The baffle can shield the first electric contact, so that when the lamp tube is not installed, dust is prevented from being attached to the first electric contact, meanwhile, when the lamp tube is installed, the baffle can wipe the first electric contact, and the stability of connection between the first electric contact and the second electric contact is guaranteed.

Description

Technical Field

[0001] This utility model belongs to the field of CVD equipment technology, specifically a structure for a quick-connect cable for lamps adapted to semiconductor CVD process equipment. Background Technology

[0002] Traditional CVD equipment typically uses flange bolts to fix the lamps, but this method has certain drawbacks. Under long-term high-temperature operation, the electrical contacts are prone to oxidation, leading to poor contact and affecting the stability of current transmission. Furthermore, when the lamps need to be disassembled for maintenance, they are easily exposed to air and attract dust and other contaminants. These impurities adhere to the electrode or lamp surface, interfering with normal lamp illumination, reducing their efficiency and lifespan, and ultimately affecting the quality of thin film deposition. Utility Model Content

[0003] To address the problems mentioned in the background art, this utility model provides the following technical solution: a structure for a quick-connect cable for a lamp tube adapted to semiconductor CVD process equipment, comprising an equipment body and a lamp tube. The equipment body has a connecting groove, and the end of the lamp tube can be inserted into the connecting groove, with the two threaded together. A first electrical contact is provided at the bottom of the connecting groove, and a second electrical contact is provided at the end of the lamp tube. The first electrical contact can contact the second electrical contact to energize the lamp tube. A rotatable baffle is provided on the surface of the first electrical contact, and the baffle can rotate when the lamp tube is inserted into the connecting groove.

[0004] Preferably, both the connecting groove and the end of the lamp tube are U-shaped, the opening of the connecting groove is larger, and the first electrical contact is located on the smaller end of the connecting groove.

[0005] Preferably, a fixed shaft is fixedly connected to the baffle, and the fixed shaft extends into the larger end of the connecting groove.

[0006] Preferably, an annular groove is provided at the end of the lamp tube, and the fixing shaft can be inserted into the annular groove.

[0007] Preferably, the end of the fixed shaft is provided with a first tooth surface, and the side wall of the annular groove is provided with a second tooth surface.

[0008] Compared with the prior art, the beneficial effects of this utility model are:

[0009] When this device is implemented, the baffle can shield the first electrical contact to prevent dust from sticking to the first electrical contact when the lamp is not installed. At the same time, when the lamp is installed, the baffle can also wipe the first electrical contact, ensuring the stability of the connection between the first electrical contact and the second electrical contact. Attached Figure Description

[0010] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0011] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0012] Figure 2 This is a schematic diagram of the fit between the fixed shaft and the annular groove of this utility model;

[0013] In the diagram: 1. Main body of the equipment; 2. Connecting groove; 3. First electrical contact; 4. Baffle; 5. Fixed shaft; 6. Lamp tube; 7. Second electrical contact; 8. Circular groove. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0015] Depend on Figure 1-2 This utility model discloses a structure for a quick-connect cable for a lamp tube adapted to a semiconductor CVD process equipment, including an equipment body 1 and a lamp tube 6. The equipment body 1 has a connecting groove 2, and the end of the lamp tube 6 can be inserted into the connecting groove 2 with a threaded connection. A first electrical contact 3 is provided at the bottom of the connecting groove 2, and a second electrical contact 7 is provided at the end of the lamp tube 6. The first electrical contact 3 can contact the second electrical contact 7 to energize the lamp tube 6. A rotatable baffle 4 is provided on the surface of the first electrical contact 3, and the baffle 4 can rotate when the lamp tube 6 is inserted into the connecting groove 2.

[0016] When this device is implemented, the baffle 4 can shield the first electrical contact 3 to prevent dust from sticking to the first electrical contact 3 when the lamp tube 6 is not installed. At the same time, when the lamp tube 6 is installed, the baffle 4 can also wipe the first electrical contact 3 to ensure the stability of the connection between the first electrical contact 3 and the second electrical contact 7.

[0017] The baffle 4 is in contact with the first electrical contact 3, and the baffle 4 can be made of ceramic material to ensure that the baffle 4 can maintain its original state under high temperature environment.

[0018] Both the end of the connecting groove 2 and the lamp tube 6 are convex, with the opening of the connecting groove 2 being larger, and the first electrical contact 3 located on the smaller end of the connecting groove 2.

[0019] A fixed shaft 5 is fixedly connected to the baffle 4, and the fixed shaft 5 extends into the larger end of the connecting groove.

[0020] An annular groove 8 is provided at the end of the lamp tube 6, and the fixing shaft 5 can be inserted into the annular groove 8.

[0021] The fixed shaft 5 has a first toothed surface at its end and a second toothed surface inside the side wall of the annular groove 8.

[0022] When the lamp tube 6 is installed, the lamp tube 6 is connected to the connecting groove 2 by rotation, so that before the first electrical contact 3 and the second electrical contact 7 come into contact, the second tooth surface engages with the first tooth surface, thereby causing the baffle 4 to rotate to one side, ensuring that the first electrical contact 3 and the second electrical contact 7 can make stable contact.

[0023] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0024] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A structure for a quick-connect lamp for semiconductor CVD process equipment, comprising a main body (1) and a lamp (6), characterized in that: The main body (1) of the device has a connecting groove (2) inside. The end of the lamp tube (6) can be inserted into the connecting groove (2) and the two are threaded together. A first electrical contact (3) is provided at the bottom of the connecting groove (2), and a second electrical contact (7) is provided at the end of the lamp tube (6). The first electrical contact (3) can contact the second electrical contact (7) so that the lamp tube (6) is energized. A rotatable baffle (4) is provided on the surface of the first electrical contact (3), and the baffle (4) can rotate when the lamp tube (6) is inserted into the connecting groove (2).

2. The structure of the quick-connect cable for lamps adapted to semiconductor CVD process equipment according to claim 1, characterized in that: The ends of the connecting groove (2) and the lamp tube (6) are both convex. The opening of the connecting groove (2) is larger, and the first electrical contact (3) is located on the smaller end of the connecting groove (2).

3. The structure of the quick-connect cable for lamps adapted to semiconductor CVD process equipment according to claim 2, characterized in that: A fixed shaft (5) is fixedly connected to the baffle (4), and the fixed shaft (5) extends into the larger end of the connecting groove.

4. The structure of a quick-connect cable for lamps adapted to semiconductor CVD process equipment according to claim 3, characterized in that: An annular groove (8) is provided at the end of the lamp tube (6), and the fixed shaft (5) can be inserted into the annular groove (8).

5. The structure of a quick-connect cable for lamps adapted to semiconductor CVD process equipment according to claim 4, characterized in that: The fixed shaft (5) has a first tooth surface at its end and a second tooth surface in the side wall of the annular groove (8).

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