Wet process substrate clamping device

Abstract

A wet process substrate clamping device comprises a first clamping plate, a second clamping plate, a supporting rod and a compression spring, the first clamping plate is provided with a first clamping part, two first pivoting parts and a first groove, and the first pivoting parts are arranged between the first clamping part and the first groove at intervals; the second clamping plate is provided with a second clamping part, a second pivoting part and a second groove, the second pivoting part is arranged between the second clamping part and the second groove and between the first pivoting parts, and the supporting rod is connected with the first pivoting parts and the second pivoting part in a penetrating mode so that the first clamping plate and the second clamping plate can pivot between the clamping position and the releasing position. The compression spring abuts against the first groove and the second groove, when the first clamping plate and the second clamping plate are pushed by external force, the first clamping plate and the second clamping plate rotate to the releasing position from the clamping position, and when the external force is separated from the first clamping plate and the second clamping plate, the compression spring pushes the first clamping plate and the second clamping plate to rotate to the clamping position. Therefore, substrates with different thicknesses can be clamped and fixed, the clamping area of the substrates is reduced, and wet process processing of the substrates is facilitated.

Description

Technical Field

[0001] This utility model relates to the field of wet semiconductor processing, and in particular to a wet processing substrate clamping device. Background Technology

[0002] In the wet process of semiconductors, the substrate to be processed is often subjected to chemical spraying, electroplating, etching, cleaning or baking, etc. Traditional vertical conveyor clamps the substrate to be processed vertically and transports it along the required path to perform the aforementioned processing operations.

[0003] However, most existing vertical conveyor systems use metal or magnetic clamps to hold and fix substrates. This often results in excessive space usage after clamping the substrate, affecting the wet processing results. Furthermore, the high hardness of metal clamps can easily cause scratches, indentations, or deformation on the substrate surface, thus affecting substrate yield. In addition, because magnetic clamps achieve their clamping effect through magnetic attraction, insufficient clamping force can occur when the substrate is thick, causing the substrate to detach during transport or processing, resulting in substrate damage or affecting the overall process.

[0004] In view of this, the creator has devoted himself to researching and applying theoretical principles to address the shortcomings of the existing technology, and has made every effort to solve the above-mentioned problems, which has become the creator's goal for improvement. Utility Model Content

[0005] The main purpose of this invention is to clamp and fix substrates of different thicknesses, and to effectively reduce the clamping area of ​​the substrate, which is beneficial to wet processing of the substrate.

[0006] To achieve the above objectives, this utility model provides a wet process substrate clamping device, including a first clamping plate, a second clamping plate, a support rod, and a compression spring. The first clamping plate has a first clamping portion, a pair of first pivot portions, and a first groove. The first clamping portion and the first groove are spaced apart along a first direction. Each first pivot portion is spaced apart along a second direction and disposed between the first clamping portion and the first groove along the first direction. The second clamping plate has a second clamping portion, a second pivot portion, and a second groove. The second clamping portion and the second groove are spaced apart along the first direction. The second pivot portion is disposed between the second clamping portion and the first groove along the first direction. The second groove is disposed between each of the first pivot parts along the second direction. The support rod passes through each of the first pivot parts and the second pivot part along the second direction, so that the first clamping plate and the second clamping plate can pivot relative to the support rod between a clamping position and a release position. The two ends of the compression spring are respectively housed in the first groove and the second groove to elastically abut against the first clamping plate and the second clamping plate. When the first clamping plate and the second clamping plate are pushed by an external force, the first clamping plate and the second clamping plate pivot from the clamping position to the release position. When the external force is released from the first clamping plate and the second clamping plate, the compression spring pushes the first clamping plate and the second clamping plate to pivot to the clamping position.

[0007] In one embodiment of the present invention, the first clamping part includes a pair of first clamping arms spaced apart along the second direction, and the second clamping part includes a pair of second clamping arms spaced apart along the second direction, with each first clamping arm corresponding to each second clamping arm.

[0008] In one embodiment of the present invention, the first clamping part further includes a pair of first clamping pads, and the second clamping part further includes a pair of second clamping pads. Each first clamping pad is disposed in each first clamping arm, and each second clamping pad is disposed in each second clamping arm.

[0009] In one embodiment of the present invention, each first clamping pad includes a first fixing part, a first connecting part and a first supporting part, each first clamping arm has a first through hole, in each first clamping pad the first connecting part is accommodated in the corresponding first through hole, the first fixing part stops on the side of the corresponding first clamping arm away from the second clamping plate, and the first supporting part stops on the side of the corresponding first clamping arm facing the second clamping plate.

[0010] In one embodiment of the present invention, each second clamping pad includes a second fixing part, a second through part and a second supporting part, each second clamping arm has a second through hole, in each second clamping pad the second through part is accommodated in the corresponding second through hole, the second fixing part stops on the side of the corresponding second clamping arm away from the first clamping plate, and the second supporting part stops on the side of the corresponding second clamping arm facing the first clamping plate.

[0011] In one embodiment of the present invention, each first clip and each second clip are made of rubber or silicone.

[0012] In one embodiment of the present invention, each first clamping plate further has a first clearance groove, which is located between each first pivot portion along a second direction to accommodate at least a portion of the second pivot portion.

[0013] In one embodiment of the present invention, each second clamping plate further has a pair of second clearance grooves, each second clearance groove being located on opposite sides of the second pivot portion along the second direction to accommodate at least a portion of each first pivot portion.

[0014] In one embodiment of the present invention, each first pivot portion extends from the first clamping plate toward the second clamping plate and has a first pivot hole, and the second pivot portion extends from the second clamping plate toward the first clamping plate and has a second pivot hole, and each first pivot hole and the second pivot hole are coaxially configured.

[0015] In one embodiment of the present invention, the support rod is sequentially threaded through one first pivot hole, the second pivot hole and the other first pivot hole along the second direction.

[0016] The wet process substrate clamping device of this utility model elastically abuts against the first clamping plate and the second clamping plate by respectively accommodating the two ends of the compression spring in the first groove and the second groove. Therefore, the first clamping part of the first clamping plate and the second clamping part of the second clamping plate can clamp and fix substrates of different thicknesses, and effectively reduce the clamping area of ​​the substrate, which is beneficial to the wet process processing of the substrate. Attached Figure Description

[0017] Figure 1 This is a three-dimensional view of the application of this utility model.

[0018] Figure 2 This is a three-dimensional view of the present invention without the support rod.

[0019] Figure 3 This is an exploded perspective view of the present invention without the support rod.

[0020] Figure 4 This is a side view of the present invention without the support rod.

[0021] Figure 5 This is a cross-sectional side view of the present invention in the release position.

[0022] Figure 6 This is a cross-sectional side view of the present invention in the clamping position.

[0023] Explanation of symbols in the attached diagram:

[0024] 10: First clamping plate;

[0025] 11: First clamping part;

[0026] 111: First clamping arm;

[0027] 1111: First through hole;

[0028] 112: First clamping pad;

[0029] 1121: First fixing part;

[0030] 1122: First connecting part;

[0031] 1123: First support section;

[0032] 12: First pivot part;

[0033] 121: First pivot hole;

[0034] 13: First pressing part;

[0035] 14: First groove;

[0036] 15: First clearance slot;

[0037] 20: Second clamping plate;

[0038] 21: Second clamping part;

[0039] 211: Second clamping arm;

[0040] 2111: Second through hole;

[0041] 212: Second pad;

[0042] 2121: Second fixing part;

[0043] 2122: Second connecting part;

[0044] 2123: Second support section;

[0045] 22: Second pivot part;

[0046] 221: Second pivot hole;

[0047] 23: Second pressing part;

[0048] 24: Second groove;

[0049] 25: Second clearance slot;

[0050] 30: Support rod;

[0051] 40: Compression spring;

[0052] A:Substrate;

[0053] D1: First direction;

[0054] D2: Second direction;

[0055] P1: Clamping position;

[0056] P2: Release position. Detailed Implementation

[0057] In the description of this utility model, it should be understood that the terms front, rear, left, right, front end, rear end, end, longitudinal, transverse, vertical, top, bottom, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting conditions of this utility model.

[0058] As used herein, terms such as first, second, third, fourth, and fifth describe various components, parts, regions, hierarchies, or sections, and these components, parts, regions, hierarchies, or sections should not be limited by these terms. These terms are used only to distinguish one element, component, region, hierarchy, or section from another. Unless the context clearly indicates otherwise, the use of terms such as first, second, third, fourth, and fifth herein does not imply order or sequence.

[0059] Unless otherwise defined, terms such as "substantially" and "approximately" are used to describe and narrate small changes. When used in connection with an event or situation, the term may include the exact moment the event or situation occurred, or the point in time from which the event or situation occurred. For example, when used in connection with a numerical value, the term may include a range of variation less than or equal to ±10% of the value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%.

[0060] The detailed description and technical content of this utility model will be explained in conjunction with the accompanying drawings. However, the accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this utility model.

[0061] This utility model provides a wet process substrate clamping device for clamping a substrate A for wet process processing (such as spraying, electroplating, etching, cleaning, baking, etc.). Please refer to [reference needed]. Figures 1 to 4 As shown, the wet process substrate clamping device of this utility model includes a first clamping plate 10, a second clamping plate 20, a support rod 30 and a compression spring 40.

[0062] In this embodiment, the first clamping plate 10 is rectangular, but this invention is not limited thereto, and the shape of the first clamping plate 10 can be adjusted according to different needs. The first clamping plate 10 has a first clamping part 11, a pair of first pivot parts 12, a first pressing part 13, and a first groove 14. The first groove 14 is formed on the first pressing part 13. The first clamping part 11 and the first pressing part 13 are spaced apart at both ends of the first clamping plate 10 along a first direction D1, that is, the first clamping part 11 and the first groove 14 are spaced apart. Each first pivot part 12 is spaced apart along a second direction D2, and each first pivot part 12 is disposed between the first clamping part 11 and the first groove 14 of the first pressing part 13 along the first direction D1. In this embodiment, the first direction D1 and the second direction D2 are substantially perpendicular to each other, but this invention is not limited thereto, as long as the first direction D1 and the second direction D2 are intersecting rather than parallel. In other words, the line connecting each of the first pivot portions 12 in this embodiment is actually perpendicular to the line connecting the first clamping portion 11 and the first pressing portion 13.

[0063] In this embodiment, the second clamping plate 20 is rectangular, but this invention is not limited thereto, and the shape of the second clamping plate 20 can be adjusted accordingly to meet different needs. The second clamping plate 20 has a second clamping portion 21, a second pivot portion 22, a second pressing portion 23, and a second groove 24. The second groove 24 is formed on the second pressing portion 23. The second clamping portion 21 and the second pressing portion 23 are spaced apart at both ends of the second clamping plate 20 along the first direction D1, that is, the second clamping portion 21 and the second groove 24 are spaced apart. The second pivot portion 22 is disposed between the second groove 24 of the second clamping portion 21 and the second pressing portion 23 along the first direction D1, and the second pivot portion 22 is disposed between each of the first pivot portions 12 along the second direction D2. In other words, in this embodiment, the second pivot portion 22, the second clamping portion 21 and the second pressing portion 23 are actually located on the same straight line, while each of the first pivot portions 12 and the second pivot portions 22 are actually located on another straight line, but this utility model is not limited thereto.

[0064] The support rod 30 passes through each of the first pivot portions 12 and the second pivot portions 22 along the second direction D2, thereby preventing the first clamping plate 10 and the second clamping plate 20 from disengaging from each other, and allowing the first clamping plate 10 and the second clamping plate 20 to pivot relative to the support rod 30 between a clamping position P1 and a releasing position P2. Specifically, the support rod 30 is a round rod for pivoting the first clamping plate 10 and the second clamping plate 20. More specifically, each first pivot portion 12 extends from the first clamping plate 10 toward the second clamping plate 20, and each first pivot portion 12 has a first pivot hole 121. The second pivot portion 22 extends from the second clamping plate 20 toward the first clamping plate 10, and the second pivot portion 22 has a second pivot hole 221. The first pivot holes 121 and the second pivot holes 221 are coaxially arranged and located on the same straight line. In this way, the support rod 30 can sequentially pass through one of the first pivot holes 121, the second pivot hole 221 and the other first pivot hole 121 along the second direction D2, so that the first clamping plate 10 and the second clamping plate 20 can rotate relative to the support rod 30, thereby pivoting between the clamping position P1 and the release position P2.

[0065] The two ends of the compression spring 40 are respectively housed in the first groove 14 of the first pressing part 13 and the second groove 24 of the second pressing part 23, so that the two ends of the compression spring 40 elastically abut against the first clamping plate 10 and the second clamping plate 20 respectively. Specifically, the first groove 14 is formed on the side of the first pressing part 13 of the first clamping plate 10 facing the second clamping plate 20, while the second groove 24 is formed on the side of the second pressing part 23 of the second clamping plate 20 facing the first clamping plate 10. In this way, the compression spring 40 can elastically abut against the first clamping plate 10 and the second clamping plate 20, thereby applying a preload force to the first pressing part 13 and the second pressing part 23, so that the first clamping plate 10 and the second clamping plate 20 can be held in a clamping position P1 to clamp the substrate A, i.e. Figure 2 and Figure 4 As shown.

[0066] Please continue reading. Figure 5 and Figure 6 The figures shown are cross-sectional side views of the wet process substrate clamping device of this utility model in the release position P2 and the clamping position P1, respectively.

[0067] like Figure 5As shown, when the first pressing part 13 of the first clamping plate 10 and the second pressing part 23 of the second clamping plate 20 are pushed by an external force (which can be manual pressing or mechanical pressing), the first clamping plate 10 and the second clamping plate 20 together compress the compression spring 40, and pivot from the clamping position P1 to the release position P2 with the first pivot part 12 and the second pivot part 22 as fulcrums respectively. At this time, the first clamping part 11 and the second clamping part 21 are in an open state, thereby releasing the substrate A, or allowing the substrate A to be placed between the two for clamping and fixing.

[0068] like Figure 6 As shown, when the external force disengages from the first clamping plate 10 and the second clamping plate 20, the compression spring 40 can use its own elastic force to push the first pressing part 13 of the first clamping plate 10 and the second pressing part 23 of the second clamping plate 20, thereby allowing the first clamping plate 10 and the second clamping plate 20 to pivot back from the release position P2 to the clamping position P1, respectively, with the first pivot part 12 and the second pivot part 22 as fulcrums. At this time, the first clamping part 11 and the second clamping part 21 are in a closed state, thereby clamping and fixing the substrate A, or abutting against each other when the substrate A is not placed between them.

[0069] In this embodiment, the first clamping part 11 includes a pair of first clamping arms 111 spaced apart along the second direction D2, and the second clamping part 21 includes a pair of second clamping arms 211 spaced apart along the second direction D2, but the present invention is not limited thereto. Each first clamping arm 111 is respectively configured corresponding to each second clamping arm 211, so when in the clamping position P1, each first clamping arm 111 of the first clamping part 11 and each second clamping arm 211 of the second clamping part 21 jointly clamp the substrate A. Therefore, since the first clamping plate 10 and the second clamping plate 20 clamp and fix the substrate A by the elastic force of the compression spring 40 through the first clamping part 11 and the second clamping part 21, the first clamping plate 10 and the second clamping plate 20 can clamp and fix the substrate A with different thicknesses. That is, as long as the length of the first clamping plate 10 and the second clamping plate 20 is designed, the thickness of the substrate A that it is suitable for clamping can be calculated, thereby making it applicable to the processing of substrates A with various thicknesses. In addition, since the first clamping part 11 and the second clamping part 21 respectively include each first clamping arm 111 and each second clamping arm 211, the clamping area of ​​the substrate A can be effectively reduced while ensuring that the substrate A can be firmly clamped, which is beneficial to the wet processing of the substrate A.

[0070] Further explanation: the first clamping part 11 also includes a pair of first clamping pads 112, and the second clamping part 21 also includes a pair of second clamping pads 212. Each first clamping pad 112 is respectively disposed on each first clamping arm 111, and each second clamping pad 212 is respectively disposed on each second clamping arm 211. Thus, the first clamping part 11 and the second clamping part 21 can jointly clamp the substrate A using each first clamping pad 112 and each second clamping pad 212, thereby further reducing the clamping area of ​​the substrate A. In this embodiment, each first clamping pad 112 and each second clamping pad 212 is made of rubber or silicone material, thereby preventing damage to the substrate A when clamping it. However, the material of the first clamping pad 112 and the second clamping pad 212 is not limited to the above; any elastic or soft material is acceptable.

[0071] Specifically, each first clamping pad 112 includes a first fixing portion 1121, a first connecting portion 1122, and a first supporting portion 1123. The outer diameter of the first connecting portion 1122 is smaller than that of the first fixing portion 1121 and the first supporting portion 1123. In this embodiment, the first fixing portion 1121 is in the form of a rivet, but this invention is not limited thereto. Each first clamping arm 111 has a first through hole 1111 with an inner diameter corresponding to the outer diameter of the first connecting portion 1122. In each first clamping pad 112, the first connecting portion 1122 is accommodated within the corresponding first through hole 1111, the first fixing portion 1121 stops on the side of the corresponding first clamping arm 111 away from the second clamping plate 20 to fix it to the corresponding first clamping arm 111, and the first supporting portion 1123 stops on the side of the corresponding first clamping arm 111 facing the second clamping plate 20 to clamp the substrate A.

[0072] Each second clamping pad 212 includes a second fixing portion 2121, a second through portion 2122, and a second support portion 2123. The outer diameter of the second through portion 2122 is smaller than that of the second fixing portion 2121 and the second support portion 2123. In this embodiment, the second fixing portion 2121 is in the form of a rivet, but this invention is not limited thereto. Each second clamping arm 211 has a second through hole 2111 with an inner diameter corresponding to the outer diameter of the second through portion 2122. In each second clamping pad 212, the second through portion 2122 is accommodated within the corresponding second through hole 2111, the second fixing portion 2121 stops on the side of the corresponding second clamping arm 211 away from the first clamping plate 10 to fix it to the corresponding second clamping arm 211, and the second support portion 2123 stops on the side of the corresponding second clamping arm 211 facing the first clamping plate 10 to clamp the substrate A.

[0073] Furthermore, each first clamping plate 10 also has a first clearance groove 15, and each second clamping plate 20 also has a pair of second clearance grooves 25. The first clearance grooves 15 are located between each first pivot portion 12 along the second direction D2, so as to accommodate at least a portion of the second pivot portion 22 of the second clamping plate 20 without interference. Each second clearance groove 25 is located on opposite sides of the second pivot portion 22 along the second direction D2, so as to accommodate at least a portion of each first pivot portion 12 of the first clamping plate 10 without interference.

[0074] The wet process substrate clamping device of this utility model elastically abuts against the first clamping plate 10 and the second clamping plate 20 by respectively accommodating the two ends of the compression spring 40 in the first groove 14 and the second groove 24. Therefore, the first clamping part 11 of the first clamping plate 10 and the second clamping part 21 of the second clamping plate 20 can clamp and fix the substrate A with different thicknesses, and effectively reduce the clamping area of ​​the substrate A, which is beneficial to the wet process processing of the substrate A.

[0075] In summary, the foregoing disclosure of this utility model is intended to enable those skilled in the art to clearly understand the technical content of this utility model and implement it accordingly, and is not intended to limit the scope of patent protection of this utility model. In addition, this utility model may have other embodiments not listed. Without departing from the spirit and essence of this utility model, those skilled in the art should be able to devise various corresponding changes and modifications based on this utility model, but all such changes and modifications should fall within the scope of protection of the patent application filed for this utility model.

Claims

1. A wet process substrate clamping device, characterized in that, include: A first clamping plate has a first clamping portion, a pair of first pivot portions and a first groove. The first clamping portion and the first groove are spaced apart along a first direction, and each of the first pivot portions is spaced apart along a second direction and disposed between the first clamping portion and the first groove along the first direction. A second clamping plate has a second clamping portion, a second pivot portion and a second groove. The second clamping portion and the second groove are spaced apart along the first direction. The second pivot portion is disposed between the second clamping portion and the second groove along the first direction and between each of the first pivot portions along the second direction. A support rod, passing through each of the first pivot portions and the second pivot portion along the second direction, allows the first clamping plate and the second clamping plate to pivot relative to the support rod between a clamping position and a releasing position; and A compression spring, the two ends of which are respectively housed in the first groove and the second groove to elastically abut against the first clamping plate and the second clamping plate; When the first clamping plate and the second clamping plate are pushed by an external force, the first clamping plate and the second clamping plate pivot from the clamping position to the release position; When the external force disengages from the first clamping plate and the second clamping plate, the compression spring pushes the first clamping plate and the second clamping plate to pivot to the clamping position.

2. The wet process substrate clamping device according to claim 1, characterized in that, The first clamping part includes a pair of first clamping arms spaced apart along the second direction, and the second clamping part includes a pair of second clamping arms spaced apart along the second direction, with each of the first clamping arms corresponding to each of the second clamping arms.

3. The wet process substrate clamping device according to claim 2, characterized in that, The first clamping part further includes a pair of first clamping pads, and the second clamping part further includes a pair of second clamping pads. Each of the first clamping pads is disposed in each of the first clamping arms, and each of the second clamping pads is disposed in each of the second clamping arms.

4. The wet process substrate clamping device according to claim 3, characterized in that, Each of the first clamping pads includes a first fixing part, a first connecting part, and a first supporting part. Each of the first clamping arms has a first through hole. In each of the first clamping pads, the first connecting part is accommodated in the corresponding first through hole. The first fixing part stops on the side of the corresponding first clamping arm away from the second clamping plate, and the first supporting part stops on the side of the corresponding first clamping arm facing the second clamping plate.

5. The wet process substrate clamping device according to claim 3, characterized in that, Each of the second clamping pads includes a second fixing part, a second through part, and a second support part. Each of the second clamping arms has a second through hole. In each of the second clamping pads, the second through part is accommodated in the corresponding second through hole. The second fixing part stops on the side of the corresponding second clamping arm away from the first clamping plate, and the second support part stops on the side of the corresponding second clamping arm facing the first clamping plate.

6. The wet process substrate clamping device according to claim 3, characterized in that, Each of the first and second pads is made of rubber or silicone.

7. The wet process substrate clamping device according to claim 1, characterized in that, Each of the first clamping plates also has a first clearance groove located between the first pivot portions along the second direction for accommodating at least a portion of the second pivot portion.

8. The wet process substrate clamping device according to claim 1, characterized in that, Each of the second clamping plates also has a pair of second clearance slots, each of the second clearance slots being located on opposite sides of the second pivot portion along the second direction to accommodate at least a portion of each of the first pivot portions.

9. The wet process substrate clamping device according to claim 1, characterized in that, Each of the first pivot portions extends from the first clamping plate toward the second clamping plate and has a first pivot hole, and the second pivot portion extends from the second clamping plate toward the first clamping plate and has a second pivot hole, and the first pivot hole and the second pivot hole are coaxially configured.

10. The wet process substrate clamping device according to claim 9, characterized in that, The support rod is sequentially threaded through one of the first pivot holes, the second pivot hole, and the other first pivot hole along the second direction.

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