High-precision self-centering directional clamping device

Abstract

The high-precision self-centering directional clamping device comprises a base, a centering assembly and a directional assembly, the centering assembly and the directional assembly are respectively arranged on the base, the centering assembly comprises a clamping component and a pressure component, the clamping component and the pressure component form a clamping channel and can be contracted or expanded, and the directional assembly forms a directional channel communicated with the clamping channel. A to-be-clamped part penetrates through the clamping channel from one end and is inserted into the orientation channel, the orientation assembly can form positioning in the circumferential direction of the part, and the pressure component drives the clamping component to clamp or loosen the part with the center line of the clamping channel as the reference. On one hand, on the basis that the clamping channel and the orientation channel are communicated, the part is clamped by taking the center line of the clamping channel as a reference under the condition that the part is positioned in the circumferential direction, errors caused by repeated clamping are effectively reduced, the clamping precision is improved, and the yield of products can be improved; and on the other hand, operation is easy and convenient, clamping efficiency is high, machining difficulty is effectively lowered, and production efficiency is improved.

Description

High-precision self-centering orientation clamping device Technical Field

[0001] This utility model belongs to the field of precision machining technology, specifically relating to a high-precision self-centering orientation clamping device. Background Technology

[0002] In semiconductor industry equipment, whether for cleaning, polishing, or rotary tables, a type of cantilever shaft is used. These shafts have some common characteristics: 1. One end has at least two bearing positions, and the other end is a flat surface, intended for mounting disc-shaped parts or disc-shaped assembly parts with similar fixtures; 2. Due to the high-speed rotation of disc-shaped parts, the machining requirements for this shaft are high in order to control the vibration of the disc-shaped parts. For example, with the bearing position as the reference, the outer circle of the end face has a high degree of concentricity with the reference (0.01 (minimum) - 0.005 (maximum)), and again with the bearing position as the reference, the locating pin on the end face has a high degree of positional accuracy with the reference (0.012 (minimum) - 0.006 (maximum)).

[0003] For the aforementioned shaft-type parts, traditional machining processes typically involve machining the cylindrical portion in one go using a lathe or grinding machine to ensure concentricity. However, for areas requiring secondary machining (bearing seats, planes), CNC machining is necessary for secondary positioning. However, in actual machining, the following technical drawbacks exist:

[0004] 1. Errors are easily generated during secondary positioning processing, which requires a high level of operator proficiency. The processing is difficult, and errors tend to accumulate during multiple positioning operations, resulting in a high probability of product scrap and a high loss rate.

[0005] 2. Each workpiece requires centering and dialing, which involves many steps, low efficiency, and a high probability of misoperation. Summary of the Invention

[0006] The technical problem to be solved by this utility model is to overcome the shortcomings of the prior art and provide a brand-new high-precision self-centering orientation clamping device.

[0007] To solve the above technical problems, the present invention adopts the following technical solution:

[0008] A high-precision self-centering and orientation clamping device includes a base, a centering component and an orientation component respectively disposed on the base. The centering component includes a clamping member with a clamping channel and capable of contracting or opening, and a pressure component. The orientation component forms an orientation channel connected to the clamping channel. The part to be clamped passes through the clamping channel from one end and is inserted into the orientation channel. The orientation component can position the part in the circumferential direction, and the pressure component drives the clamping member to clamp or release the part with the center line of the clamping channel as a reference. The center line of the part coincides with the center line of the clamping channel.

[0009] According to a specific embodiment and preferred aspect of this utility model, the clamping component includes an outer clamping cylinder and an inner clamping cylinder disposed inside the outer clamping cylinder and forming a clamping channel. The inner and outer clamping cylinders are fixedly arranged relative to each other in the circumferential direction. A pressure component drives the outer clamping cylinder and causes the inner clamping cylinder to synchronously contract or open. Here, based on the cooperation of the inner and outer clamping cylinders, it is ensured that the clamping force on the part is evenly distributed.

[0010] Preferably, the outer wall of the inner clamping cylinder has multiple positioning buckles spaced apart around its circumference, and the inner wall of the outer clamping cylinder has multiple positioning grooves extending along its axial direction and spaced apart around the inner clamping cylinder. Each positioning buckle is inserted into its corresponding positioning groove. Here, during workpiece clamping and changing, the outer clamping cylinder does not rotate, meaning that even if there is a concentricity error in the machining of the inner clamping cylinder, the clamping center axis will not change because the inner clamping cylinder does not rotate relative to the outer clamping cylinder, thus improving clamping accuracy.

[0011] Specifically, the inner clamp is an elastic clamp; and / or, the outer clamp is an expansion clamp. This design is convenient to implement and low in cost.

[0012] According to another specific embodiment and preferred aspect of this utility model, the pressure component includes a rotating module rotatably connected to the base and extending circumferentially around the outer clamping cylinder, and a transmission module disposed between the rotating module and the outer clamping cylinder. The outer clamping cylinder is relatively fixed to the base, and as the rotating module rotates around its own center line, the transmission module synchronously squeezes the outer clamping cylinder and transmits pressure to the inner clamping cylinder. This design simplifies operation and ensures uniform force distribution on the outer clamping cylinder.

[0013] Preferably, the centerline of the rotating module coincides with the centerline of the clamping channel; the transmission module includes a cage extending circumferentially around the outer clamping cylinder and multiple rollers embedded in the cage and extending obliquely in the axial direction of the rotating module. Here, through the cooperation of the cage and the multiple rollers, while forming a clamping force transmission, the friction generated during the rotation of the rotating module is reduced, wear is reduced, and service life is extended.

[0014] Specifically, the taper of the rotating module is equal to that of the outer clamp.

[0015] Preferably, a connecting channel is also formed on the base, wherein the outer clamp is threaded to the inner wall of the connecting channel; and the rotating module is threaded to the outer wall of the connecting channel. This facilitates easy assembly and disassembly, and allows for precise adjustment of the displacement of the rotating module and the installation position of the outer clamp.

[0016] Preferably, the orientation component includes an orientation module forming an orientation channel, wherein the orientation module is threadedly connected to the inner wall of the connection channel and fits against one end face of the outer clamp.

[0017] In addition, the inner wall and / or end face of the orientation module are formed with positioning pins that mate with the parts.

[0018] Due to the implementation of the above technical solution, this utility model has the following advantages compared with the prior art:

[0019] Existing technologies are prone to errors in secondary positioning machining, thus requiring highly skilled operators, resulting in high machining difficulty. Furthermore, errors tend to accumulate during multiple positioning operations, leading to a high probability of product scrap and high loss rates. Additionally, each workpiece requires centering and dial indicator work, resulting in numerous steps, low efficiency, and a high probability of operational errors. This application addresses these shortcomings by comprehensively designing a high-precision self-centering orientation clamping device. This device cleverly solves the deficiencies and defects of existing technologies. After adopting this clamping device, the part passes through the clamping channel and is inserted into the orientation channel at one end to form a position along its own axis. Then, a pressure component drives the clamping mechanism... The holding component clamps or releases the part based on the center line of the clamping channel. The center line of the part coincides with the center line of the clamping channel, thus ensuring that the same center line is used as a reference for clamping in multiple clamping operations or batch clamping of parts one by one. Therefore, compared with the prior art, this utility model, on the one hand, is based on the connection between the clamping channel and the orientation channel, and clamps the part based on the center line of the clamping channel under the circumferential positioning of the part, effectively reducing the error caused by repeated clamping, improving clamping accuracy, and helping to improve the product yield. On the other hand, it is simple and convenient to operate, has high clamping efficiency, effectively reduces processing difficulty, and improves production efficiency. Attached Figure Description

[0020] Figure 1 is a three-dimensional structural schematic diagram of the high-precision self-centering orientation clamping device of this utility model;

[0021] Figure 2 is an exploded view of the structure of the high-precision self-centering orientation clamping device of this utility model.

[0022] Figure 3 is a front view schematic diagram of the high-precision self-centering orientation clamping device of this utility model;

[0023] Figure 4 is a schematic cross-sectional view along direction AA in Figure 3;

[0024] Wherein: 1. Base; t 0. Connecting channel;

[0025] 2. Centering component; 20. Clamping component; 200. Outer clamp; c. Positioning groove; 201. Inner clamp; k. Positioning buckle; t1. Clamping channel; 21. Pressure component; 210. Rotation module; 211. Transmission module; j. Cage;

[0026] 3. Orientation component; 30. Orientation module; t 2. Orientation channel; x. Positioning pin. Detailed Implementation

[0027] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0028] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0030] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0031] In this application, unless otherwise expressly specified and limited, "above" or "below" a second feature can mean that the first and second features are in direct contact, or that they are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" of a second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" a second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature. It should be noted that when an element is referred to as "fixed to" or "set on" another element, it can be directly on the other element or there may be an intermediate element present. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element present. The terms "vertical," "horizontal," "above," "below," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible embodiments.

[0032] As shown in Figures 1 to 4, the high-precision self-centering orientation clamping device involved in this embodiment includes a base 1, a centering component 2 and an orientation component 3 respectively disposed on the base 1.

[0033] Specifically, the base 1 is hollow in the middle, and a connecting channel t0 extending along its own center line is formed in the middle of the base 1. The outer wall of the connecting channel t0 that is higher than the base 1 and the inner wall of the connecting channel t0 are respectively formed with threads.

[0034] In this example, the centering component 2 includes a clamping member 20 with a clamping channel t1 and a pressure member 21 that can be contracted or opened. The pressure member 21 drives the clamping member 20 to clamp or release the part with the center line of the clamping channel t1 as a reference, so that the center line of any part coincides with the center line of the clamping channel.

[0035] In some specific embodiments, the clamping component 20 includes an outer clamping cylinder 200 threadedly connected to the inner wall of the connecting channel t 0, and an inner clamping cylinder 201 disposed inside the outer clamping cylinder 200 and forming the clamping channel t 1. The inner clamping cylinder 201 and the outer clamping cylinder 200 are fixedly arranged relative to each other in the circumferential direction. The pressure component 21 drives the outer clamping cylinder 200 and causes the inner clamping cylinder 201 to contract or open synchronously. Here, based on the cooperation of the inner and outer clamping cylinders, it is ensured that the clamping force on the part is evenly distributed.

[0036] For ease of implementation, the outer wall of the inner clamping cylinder 201 has multiple positioning buckles k spaced apart around its circumference, and the inner wall of the outer clamping cylinder 200 has multiple positioning grooves c extending along its axial direction and spaced apart around the inner clamping cylinder 201. The inner clamping cylinder 201 is bent outward from the top to hang on the top of the outer clamping cylinder 200, and each positioning buckle k is inserted into the corresponding positioning groove c; the number of positioning buckles k is less than or equal to the number of positioning grooves c. Here, during the clamping and workpiece changing process, the outer clamping cylinder does not rotate, meaning that even if there is a concentricity error in the machining of the inner clamping cylinder, the clamping center axis will not change because the inner clamping cylinder does not rotate relative to the outer clamping cylinder, thus improving clamping accuracy.

[0037] Meanwhile, the inner clamp 201 is an elastic clamp with a straight cylindrical design and a circumferential notch; the outer clamp 200 is an expansion clamp, and both the elastic clamp and the expansion clamp can refer to existing elastic clamp and expansion clamp structures.

[0038] In this example, the pressure component 21 includes a rotating module 210 rotatably connected to the base 1 and extending circumferentially around the outer clamping cylinder 200, and a transmission module 211 disposed between the rotating module 210 and the outer clamping cylinder 200. The outer clamping cylinder 200 is fixed to the base 1 by threads, and as the rotating module 210 rotates around its own center line, the transmission module 211 synchronously compresses the outer clamping cylinder 200. Through the inward deformation of the outer clamping cylinder 200, the pressure is transmitted to the inner clamping cylinder 201. This design simplifies operation and ensures that the outer clamping cylinder is subjected to uniform force.

[0039] In some specific embodiments, the centerline of the rotating module 210 coincides with the centerline of the clamping channel t1, and the rotating module 210 and the outer clamp 200 have the same taper. The rotating module 210 uses a tightening nut that matches the thread on the outer wall of the connecting channel t0, which is higher than the base 1. The transmission module 211 includes a retainer j that extends circumferentially around the outer clamp 200 and forms multiple grooves circumferentially, and multiple rollers (not shown in the figure, but easily understood) that are embedded in the retainer j and extend obliquely in the axial direction of the rotating module 210. Here, through the cooperation of the retainer and the multiple rollers, the friction generated during the rotation of the rotating module is reduced, wear is reduced, and service life is extended while forming the clamping force transmission. In other specific embodiments, the taper formed by the rotating module 210 and the outer clamp 200 can also be used to compress the outer clamp to form a clamping force during the rotation adjustment and displacement of the rotating module.

[0040] In this example, the orientation component 3 forms an orientation channel 2 that communicates with the clamping channel 1. The part to be clamped passes through the clamping channel 1 from one end and is inserted into the orientation channel 2, wherein the orientation component 3 is able to form a positioning in the circumferential direction of the part.

[0041] In some specific embodiments, the orientation component 3 includes an orientation module 30 forming an orientation channel t 2, wherein the orientation module 30 is threadedly connected to the inner wall of the connection channel t 0 and fits against one end face of the outer clamp 200.

[0042] In addition, the inner wall and / or end face of the orientation module 30 are formed with positioning pins x that mate with the part to form positioning in the circumferential direction of the part.

[0043] In summary, by adopting this clamping device, the part is passed through the clamping channel and inserted into the directional channel at one end to form a position in its own axial direction. Then, the clamping component is driven by the pressure component to clamp or release the part with the center line of the clamping channel as the reference. This ensures that the clamping is completed with the same center line as the reference in multiple clamping or batch clamping of parts one by one. Therefore, compared with the prior art, this utility model, on the one hand, is based on the connection between the clamping channel and the directional channel, and clamps the part with the center line of the clamping channel as the reference while forming a circumferential position for the part. This effectively reduces the error caused by repeated clamping, improves the clamping accuracy, and helps to improve the product yield. On the other hand, it is simple and convenient to operate, has high clamping efficiency, effectively reduces the processing difficulty, and improves production efficiency.

[0044] The present utility model has been described in detail above, with the aim of enabling those skilled in the art to understand its contents and implement it. However, this description should not be construed as limiting the scope of protection of the present utility model. All equivalent changes or modifications made in accordance with the spirit and essence of the present utility model should be included within the scope of protection of the present utility model.

Claims

1. A high-precision self-centering orientation clamping device, characterized in that, It includes a base, a centering component and an orientation component respectively disposed on the base. The centering component includes a clamping member with a clamping channel and capable of retracting or opening, and a pressure component. The orientation component forms an orientation channel that communicates with the clamping channel. The part to be clamped passes through the clamping channel from one end and is inserted into the orientation channel. The orientation component can position the part in the circumferential direction, and the pressure component drives the clamping member to clamp or release the part with the center line of the clamping channel as a reference. The center line of the part coincides with the center line of the clamping channel.

2. The high-precision self-centering orientation clamping device according to claim 1, characterized in that, The clamping component includes an outer clamping cylinder and an inner clamping cylinder disposed inside the outer clamping cylinder and forming the clamping channel, wherein the inner clamping cylinder and the outer clamping cylinder are fixedly disposed relative to each other in the circumferential direction, and the pressure component drives the outer clamping cylinder and causes the inner clamping cylinder to contract or open synchronously.

3. The high-precision self-centering orientation clamping device according to claim 2, characterized in that, The outer wall of the inner clamping cylinder has a plurality of positioning buckles spaced apart around its circumference, and the inner wall of the outer clamping cylinder has a plurality of positioning grooves extending along its own axis and spaced apart around the inner clamping cylinder, with each positioning buckle inserted into the corresponding positioning groove.

4. The high-precision self-centering orientation clamping device according to claim 2 or 3, characterized in that, The inner clamp is an elastic clamp; and / or the outer clamp is an expansion clamp.

5. The high-precision self-centering orientation clamping device according to claim 2, characterized in that, The pressure component includes a rotating module rotatably connected to the base and extending circumferentially around the outer clamping cylinder, and a transmission module disposed between the rotating module and the outer clamping cylinder. The outer clamping cylinder is fixed relative to the base, and as the rotating module rotates around its own center line, the transmission module synchronously squeezes the outer clamping cylinder and transmits the pressure to the inner clamping cylinder.

6. The high-precision self-centering orientation clamping device according to claim 5, characterized in that, The centerline of the rotating module coincides with the centerline of the clamping channel; the transmission module includes a retainer extending circumferentially around the outer clamping cylinder and a plurality of rollers embedded in the retainer and extending obliquely upward in the axial direction of the rotating module.

7. The high-precision self-centering orientation clamping device according to claim 5, characterized in that, The rotating module has the same taper as the outer clamp.

8. The high-precision self-centering orientation clamping device according to claim 5, characterized in that, A connecting channel is also formed on the base, wherein the outer clamp is threaded to the inner wall of the connecting channel; and the rotating module is threaded to the outer wall of the connecting channel.

9. The high-precision self-centering orientation clamping device according to claim 8, characterized in that, The orientation component includes an orientation module forming the orientation channel, wherein the orientation module is threadedly connected to the inner wall of the connection channel and fits against one end face of the outer clamp.

10. The high-precision self-centering orientation clamping device according to claim 9, characterized in that, The inner wall and / or end face of the orientation module are formed with positioning pins that mate with the parts.

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