Multilayer coated glass photomask coating device

Abstract

The utility model discloses a multilayer coated glass photomask film laminating device, which comprises a film laminating machine body, a quick mounting mechanism is arranged on the film laminating machine body, the quick mounting mechanism comprises a plurality of groups of support plates, a fixing plate, a mounting rod, a connecting shaft, a film rolling roller, a connecting rod and a connecting groove, the support plates are fixed on the top surface of the film laminating machine body, and the fixing plate is fixed on the top surface of the film laminating machine body. According to the multilayer coated glass photomask film covering device, through the innovatively-designed quick mounting mechanism, quick mounting and accurate positioning of the film rolling roller are achieved, the problem that a traditional film covering machine is low in loading and unloading efficiency is effectively solved, the film covering efficiency is improved, and the film covering efficiency is improved. Operators can complete installation of the film winding roller only through simple alignment, and the remodeling efficiency of a production line is greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of multi-layer coated glass photomask production technology, and more specifically, it relates to a multi-layer coated glass photomask coating device. Background Technology

[0002] In the production process of multi-layer coated glass photomasks, the lamination process requires frequent changes of roll film materials of different specifications.

[0003] Traditional laminating machines use a fixed installation method for the film rolls, requiring tedious disassembly and reassembly each time they need to be replaced. This is not only time-consuming and labor-intensive, but also prone to installation errors due to improper operation. This inefficient loading and unloading method severely restricts the improvement of production efficiency.

[0004] Especially in situations where production specifications need to be switched quickly, operators often have to spend a lot of time adjusting the equipment, making it difficult to meet the pace requirements of modern production. Utility Model Content

[0005] (a) Technical problems to be solved

[0006] In view of the problems existing in the prior art, the present invention provides a multi-layer coated glass photomask coating device to solve the technical problems mentioned in the background art.

[0007] (II) Technical Solution

[0008] To achieve the above objectives, this utility model provides the following technical solution: a multi-layer coated glass photomask coating device, comprising a coating machine body, wherein a quick-release mechanism is provided on the coating machine body, the quick-release mechanism comprising a support plate, a fixing plate, mounting rods, a connecting shaft, a film roll, a connecting rod, and a connecting groove; the support plate is provided with multiple sets fixed to the top surface of the coating machine body, the fixing plate abuts against the top surface of the support plate, multiple sets of mounting rods are provided fixed to the inner sides of the support plate and the fixing plate, the connecting shaft rotates on the outer wall of the multiple sets of mounting rods, the film roll is disposed between the multiple sets of support plates, and the connecting rod is fixed to the film roll. At both ends of the film roller, connecting grooves are set on the outer wall of the connecting rod and contact and connect with multiple sets of connecting shafts. A quick-clamping mechanism is set on the outer side of the fixed plate. The quick-clamping mechanism includes an insert rod, a slot, a fixed sleeve, a snap-fit ​​piece, a sliding groove, a sliding sleeve, and a push plate. The insert rod is fixed to the top surface of the support plate and inserts into the fixed plate. Multiple slots are set on the outer wall of the insert rod. The fixed sleeve is fixed to the top surface of the fixed plate and inserts into the insert rod. Multiple snap-fit ​​pieces are set on the inner wall of the fixed sleeve. Multiple sliding grooves are set on the outer wall of the fixed sleeve. The sliding sleeve slides in multiple sliding grooves. Multiple push plates are set on the inner side of the sliding sleeve.

[0009] The present invention is further configured such that a positioning groove is provided on the outer wall of the insertion rod, and a positioning plate is fixedly provided on the inner wall of the fixing sleeve. The positioning groove and the positioning plate are provided in multiple sets and are slidably connected. The cooperation of multiple sets of positioning grooves and positioning plates ensures accurate guidance and stable positioning when the insertion rod is inserted.

[0010] The present invention is further configured such that all of the multiple sets of snap-fit ​​pieces are elastic pieces, and the deformation characteristics of the elastic pieces are used to realize the automatic snap-fit ​​and release function, simplifying the operation steps.

[0011] The present invention is further configured such that the top ends of the multiple sets of push plates are all arc-shaped, so that the push plates can smoothly push the deformation of the locking piece during the sliding process, thereby reducing frictional loss.

[0012] The present invention is further configured such that a top plate is fixedly provided inside the fixing sleeve, and a compression spring is connected inside the insertion rod. The elastic force of the compression spring provides a stable clamping force to ensure a tight connection between the fixing plate and the support plate.

[0013] The present invention is further configured such that the outer wall of the fixed sleeve is provided with a triggering mechanism, the triggering mechanism including a connecting plate, a limiting plate, a rotating sleeve, a locking plate and a clearance groove. The connecting plate is provided with multiple sets fixed to the outer wall of the sliding sleeve, the limiting plate is fixed to the top of the multiple sets of connecting plates, the rotating sleeve rotates on the outer wall of the fixed sleeve, the locking plate is fixed to the bottom surface of the rotating sleeve and is provided inside the multiple sets of limiting plates, and the clearance groove is provided with multiple sets distributed on the outer wall of the locking plate. By rotating the rotating sleeve, the cooperation relationship between the locking plate and the limiting plate can be controlled to realize the quick unlocking function.

[0014] The present invention is further provided with a push spring connecting the sliding sleeve and the fixed sleeve, and the spring force of the push spring is used to automatically reset the position of the sliding sleeve, so as to ensure that the triggering mechanism can quickly return to the initial state.

[0015] The present invention is further configured such that the area of ​​each of the multiple sets of clearance grooves is larger than that of the limiting plate, providing sufficient space for the limiting plate to move and avoiding jamming during the unlocking process.

[0016] (III) Beneficial Effects

[0017] Compared with the prior art, the present invention provides a multi-layer coated glass photomask coating device, which has the following beneficial effects:

[0018] 1. This multi-layer coated glass photomask coating device achieves rapid installation and precise positioning of the film roll through an innovative quick-installation mechanism, effectively solving the problem of low loading and unloading efficiency of traditional coating machines. Operators only need to perform simple alignment to complete the installation of the film roll, which greatly improves the changeover efficiency of the production line.

[0019] 2. The quick-lock mechanism adopts a composite structure design of elastic locking and sliding positioning, which not only ensures the stability during installation, but also achieves automatic locking through a single press action, avoiding the cumbersome operation of traditional bolt fixing methods. At the same time, the unique positioning groove and positioning plate work together to ensure the concentricity of the film roll installation, fundamentally solving the film coating quality problem caused by installation deviation.

[0020] 3. The triggering mechanism features an innovative design that combines rotational unlocking with elastic reset, enabling one-click quick disassembly of the film roll. During operation, simply rotating the outer sleeve automatically releases all locking structures, simplifying the disassembly process. Furthermore, the push-spring-assisted linkage design ensures that all components can be reset synchronously. The entire process requires no tools and involves no easily damaged parts, improving operational safety and reducing maintenance costs. It is particularly suitable for high-precision coating production lines that require frequent changes in film roll specifications. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of a multi-layer coated glass photomask coating device according to the present invention;

[0022] Figure 2 This is a schematic diagram of the quick-assembly mechanism in this utility model;

[0023] Figure 3 This is a schematic diagram of the disassembled structure of the quick-assembly mechanism in this utility model;

[0024] Figure 4 This is a cross-sectional structural diagram of the fast-delivery truck mechanism of this utility model;

[0025] Figure 5 This is a schematic diagram of the triggering mechanism in this utility model.

[0026] In the diagram: 1. Film coating machine body; 2. Support plate; 3. Fixing plate; 4. Mounting rod; 5. Connecting shaft; 6. Film roll; 7. Connecting rod; 8. Connecting groove; 9. Insert rod; 10. Slot; 11. Fixing sleeve; 12. Snap-fit ​​piece; 13. Sliding groove; 14. Sliding sleeve; 15. Push plate; 16. Positioning groove; 17. Positioning plate; 18. Top plate; 19. Compression spring; 20. Connecting plate; 21. Limiting plate; 22. Rotating sleeve; 23. Locking plate; 24. Clearance groove; 25. Push spring. Detailed Implementation

[0027] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0028] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0029] In this utility model, unless otherwise stated, the orientations used, such as "up" and "down", usually refer to the direction shown in the accompanying drawings, or to the vertical, perpendicular, or gravitational direction; similarly, for ease of understanding and description, "left" and "right" usually refer to the left and right shown in the accompanying drawings; "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model.

[0030] Please see Figures 1-5 A multi-layer coated glass photomask coating device includes a coating machine body 1. The coating machine body 1 is equipped with a quick-release mechanism, which includes a support plate 2, a fixing plate 3, mounting rods 4, a connecting shaft 5, a film roller 6, a connecting rod 7, and a connecting groove 8. Multiple sets of support plates 2 are fixed to the top surface of the coating machine body 1. The fixing plate 3 abuts against the top surface of the support plate 2. Multiple sets of mounting rods 4 are fixed to the inner sides of the support plate 2 and the fixing plate 3. The connecting shaft 5 rotates on the outer wall of the multiple sets of mounting rods 4. The film roller 6 is disposed between the multiple sets of support plates 2. The connecting rod 7 is fixed to both ends of the film roller 6. The connecting groove 8 is disposed on the outer wall of the connecting rod 7 and connects to the multiple sets of support plates 2. The connecting shaft 5 is in contact with the fixed plate 3. A quick-locking mechanism is provided on the outside of the fixed plate 3. The quick-locking mechanism includes a rod 9, a slot 10, a fixed sleeve 11, a snap-fit ​​piece 12, a sliding groove 13, a sliding sleeve 14, and a push plate 15. The rod 9 is fixed to the top surface of the support plate 2 and is inserted into the fixed plate 3. Multiple slots 10 are provided on the outer wall of the rod 9. The fixed sleeve 11 is fixed to the top surface of the fixed plate 3 and is inserted into the rod 9. Multiple snap-fit ​​pieces 12 are provided on the inner wall of the fixed sleeve 11. Multiple sliding grooves 13 are provided on the outer wall of the fixed sleeve 11. The sliding sleeve 14 slides in multiple sliding grooves 13. Multiple push plates 15 are provided on the inner side of the sliding sleeve 14.

[0031] The outer wall of the insertion rod 9 is provided with a positioning groove 16, and the inner wall of the fixing sleeve 11 is fixedly provided with a positioning plate 17. The positioning groove 16 and the positioning plate 17 are provided in multiple sets and are slidably connected. The precise positioning and guidance of the insertion rod 9 when it is inserted is achieved through the cooperation of the positioning groove 16 and the positioning plate 17.

[0032] All sets of snap-fit ​​pieces 12 are set as elastic pieces, which realize automatic snap-fit ​​and release functions by utilizing the elastic deformation characteristics.

[0033] The tops of the multiple push plates 15 are all set to be arc-shaped, so that the push plates 15 can smoothly push the snap-fit ​​piece 12 to deform.

[0034] A top plate 18 is fixedly installed inside the fixed sleeve 11, and a compression spring 19 is connected inside the insertion rod 9. The elastic force of the compression spring 19 provides a stable pressing effect.

[0035] In this embodiment, during use, the connecting grooves 8 at both ends of the film roll 6 are connected to the outer wall of the connecting shaft 5 provided on the inner side of the support plate 2. Then, the fixing plate 3 and the insertion rod 9 are inserted, so that the connecting shaft 5 provided on the inner side of the fixing plate 3 abuts against the outer wall of the connecting groove 8. Subsequently, the insertion rod 9 is inserted into the fixing sleeve 11. The outer wall of the insertion rod 9 pushes the deformation of multiple sets of snap-fit ​​pieces 12. At the same time, multiple sets of push plates 15 and positioning plates 17 slide in the positioning groove 16. When the multiple sets of snap-fit ​​pieces 12 move to the outside of the snap-fit ​​groove 10, they reset to lock the insertion rod 9. At the same time, the compression spring 19 is squeezed by the top plate 18 to lock the fixing plate 3, thus completing the quick installation of the film roll 6.

[0036] Please see Figures 4-5 As one implementation of the triggering mechanism: the outer wall of the fixed sleeve 11 is provided with a triggering mechanism, which includes a connecting plate 20, a limiting plate 21, a rotating sleeve 22, a locking plate 23, and a clearance groove 24. The connecting plate 20 is provided with multiple sets fixed to the outer wall of the sliding sleeve 14, the limiting plate 21 is fixed to the top of multiple sets of connecting plates 20, the rotating sleeve 22 rotates on the outer wall of the fixed sleeve 11, the locking plate 23 is fixed to the bottom surface of the rotating sleeve 22 and is provided inside the multiple sets of limiting plates 21, and the clearance groove 24 is provided with multiple sets distributed on the outer wall of the locking plate 23. The unlocking function is realized by rotating the rotating sleeve 22 to drive the locking plate 23 to move.

[0037] A push spring 25 is provided between the sliding sleeve 14 and the fixed sleeve 11, and the elastic force of the push spring 25 is used to realize the automatic reset of the sliding sleeve 14.

[0038] The area of ​​each of the multiple clearance grooves 24 is larger than that of the limiting plate 21, providing sufficient space for the limiting plate 21 to move and avoid jamming.

[0039] More specifically, when disassembling the film roll 6, rotating the rotating sleeve 22 causes the locking plate 23 to rotate, causing multiple sets of clearance grooves 24 to move to the inside of the limiting plate 21, so that the multiple sets of limiting plates 21 release their contact with the outer wall of the locking plate 23, releasing the restriction on the sliding sleeve 14. The sliding sleeve 14 is pushed along the sliding groove 13 by the push spring 25, and the sliding sleeve 14 pushes multiple sets of push plates 15 to slide along the positioning groove 16. The top of the multiple sets of push plates 15 pushes the snap-fit ​​piece 12 to deform and disengage from the snap-fit ​​groove 10, releasing the snap-fit ​​on the insertion rod 9. The elastic reset of the compression spring 19 pushes the insertion rod 9 to separate from the fixing sleeve 11. Then the fixing plate 3 is removed, and the film roll 6 can be disassembled.

[0040] In summary, during use or operation of the overall equipment: When in use, connect the connecting grooves 8 at both ends of the film roll 6 to the outer wall of the connecting shaft 5 set inside the support plate 2. Then, insert the fixing plate 3 and the insertion rod 9 so that the connecting shaft 5 set inside the fixing plate 3 abuts against the outer wall of the connecting groove 8. Subsequently, the insertion rod 9 is inserted into the fixing sleeve 11. The outer wall of the insertion rod 9 pushes the deformation of multiple sets of snap-fit ​​pieces 12. At the same time, multiple sets of push plates 15 and positioning plates 17 slide in the positioning groove 16. When the multiple sets of snap-fit ​​pieces 12 move to the outside of the snap-fit ​​groove 10, they reset to lock the insertion rod 9. At the same time, the top plate 18 squeezes the compression spring 19 to lock the fixing plate 3, thus completing the quick installation of the film roll 6.

[0041] When disassembling the film roll 6, rotating the rotating sleeve 22 causes the locking plate 23 to rotate, causing multiple sets of clearance grooves 24 to move to the inside of the limiting plate 21, so that the multiple sets of limiting plates 21 release their contact with the outer wall of the locking plate 23 and release the restriction on the sliding sleeve 14. The sliding sleeve 14 is pushed to slide along the sliding groove 13 by the push spring 25. The sliding sleeve 14 pushes multiple sets of push plates 15 to slide along the positioning groove 16. The top of the multiple sets of push plates 15 pushes the snap-fit ​​piece 12 to deform and disengage from the snap-fit ​​groove 10, releasing the snap-fit ​​on the insertion rod 9. The elastic reset of the compression spring 19 pushes the insertion rod 9 to separate from the fixing sleeve 11. Then the fixing plate 3 is removed, and the film roll 6 can be disassembled.

[0042] Of all the solutions mentioned above, those involving the connection between two components can be selected according to the actual situation, such as welding, bolt and nut connection, bolt or screw connection, or other known connection methods, which will not be elaborated here. For all the fixed connections mentioned above, welding is preferred. Although embodiments of this utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this utility model. The scope of this utility model is defined by the appended claims and their equivalents.

Claims

1. A multi-layer coated glass mask film coating device, comprising a film coating machine body (1), characterized in that: The laminating machine body (1) is equipped with a quick-assembly mechanism, which includes a support plate (2), a fixing plate (3), mounting rods (4), a connecting shaft (5), a film roller (6), a connecting rod (7), and a connecting groove (8). The support plate (2) is provided with multiple sets of fixed parts on the top surface of the laminating machine body (1), the fixing plate (3) abuts against the top surface of the support plate (2), the mounting rods (4) are provided with multiple sets of fixed parts on the inner sides of the support plate (2) and the fixing plate (3), the connecting shaft (5) rotates on the outer wall of the multiple sets of mounting rods (4), the film roller (6) is arranged between the multiple sets of support plates (2), the connecting rods (7) are fixed at both ends of the film roller (6), and the connecting groove (8) is arranged on the outer wall of the connecting rod (7) and contacts and connects with the multiple sets of connecting shafts (5). A quick-locking mechanism is provided on the outside of the fixed plate (3). The quick-locking mechanism includes a plug rod (9), a slot (10), a fixed sleeve (11), a snap-fit ​​piece (12), a sliding groove (13), a sliding sleeve (14), and a push plate (15). The plug rod (9) is fixed on the top surface of the support plate (2) and plugged into the fixed plate (3). The slot (10) is provided with multiple sets distributed on the outer wall of the plug rod (9). The fixed sleeve (11) is fixed on the top surface of the fixed plate (3) and plugged into the plug rod (9). The snap-fit ​​piece (12) is provided with multiple sets fixed on the inner wall of the fixed sleeve (11). The sliding groove (13) is provided with multiple sets distributed on the outer wall of the fixed sleeve (11). The sliding sleeve (14) slides in multiple sets of sliding grooves (13). The push plate (15) is provided with multiple sets fixed on the inner side of the sliding sleeve (14).

2. The multilayer coated glass photomask coating device according to claim 1, characterized in that: The outer wall of the insertion rod (9) is provided with a positioning groove (16), and the inner wall of the fixing sleeve (11) is fixedly provided with a positioning plate (17). The positioning groove (16) and the positioning plate (17) are provided with multiple sets and are slidably connected.

3. The multi-layer coated glass mask coating device according to claim 2, characterized in that: All of the aforementioned snap-fit ​​pieces (12) are configured as elastic pieces.

4. The multilayer coated glass photomask coating device according to claim 3, characterized in that: The top of each of the multiple push plates (15) is set to be arc-shaped.

5. The multilayer coated glass photomask coating device according to claim 4, characterized in that: A top plate (18) is fixed inside the fixed sleeve (11), and a compression spring (19) is connected inside the insert rod (9).

6. The multi-layer coated glass mask coating apparatus of claim 5, wherein: The outer wall of the fixed sleeve (11) is provided with a triggering mechanism. The triggering mechanism includes a connecting plate (20), a limiting plate (21), a rotating sleeve (22), a locking plate (23), and a clearance groove (24). The connecting plate (20) is provided with multiple sets fixed to the outer wall of the sliding sleeve (14). The limiting plate (21) is fixed to the top of multiple sets of connecting plates (20). The rotating sleeve (22) rotates on the outer wall of the fixed sleeve (11). The locking plate (23) is fixed to the bottom surface of the rotating sleeve (22) and is provided inside the multiple sets of limiting plates (21). The clearance groove (24) is provided with multiple sets distributed on the outer wall of the locking plate (23).

7. The multilayer coated glass photomask coating device according to claim 6, characterized in that: A push spring (25) is provided between the sliding sleeve (14) and the fixed sleeve (11).

8. The multi-layer coated glass mask coating apparatus of claim 7, wherein: The area of ​​each of the multiple relief grooves (24) is larger than that of the limiting plate (21).

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