Packaging box for electronic optical lens cone

Abstract

The utility model provides a packaging box for electronic optical lens cones, which comprises a box body, a box cover, a box cover and a box cover, and an equipment cavity for accommodating the electronic optical lens cones is arranged in the box body; the controller is arranged on the box body and is configured to be electrically connected with a vacuumizing device of the electron optical lens cone so as to control the vacuumizing device; and the power supply device is arranged on the box body and is configured to supply power to the controller and the vacuumizing device. According to the packaging box, in the transportation process of electronic optical lens cones such as the electronic optical lens cones, on the basis that the safety of hardware structures is guaranteed, the influence of external interference on the lens cones, especially vibration interference, can be greatly reduced; in addition, the electronic optical lens cone can effectively guarantee high vacuum for a long time, so that a machine can be quickly reset at a client conveniently, the installation time is shortened, and the recognition degree at the client is enhanced.

Description

Technical Field

[0001] This utility model relates to the field of packaging and transportation technology for electron optical lens barrels, and in particular to a packaging box for electron optical lens barrels. Background Technology

[0002] In recent years, charged particle beam detection and imaging equipment has been widely used in the semiconductor industry. For example, scanning electron microscopes (SEMs) are commonly used for defect detection in manufactured objects such as chips. The main principle of an SEM is to use a charged particle beam to bombard the surface of the object under test, and to detect the secondary electron signals generated in the bombarded area to obtain various physical and chemical information about the sample itself, such as morphology, composition, and characteristic distribution. Typical applications of charged particle beam detection and imaging equipment include the detection of microscopic patterns and measurement of critical dimensions on semiconductor silicon wafers and photomasks using electron beams in a vacuum, and the detection of open-circuit and short-circuit defects in CMOS integrated circuits.

[0003] Electron optical tubes are a core component of electron beam testing equipment. As electron beam devices, they are characterized by high precision and high composite density. Therefore, during testing on the machine and experimental platform, there are very high requirements for the external environment and platform conditions to ensure that the final image quality is not affected. In addition, the requirements for electron optical tubes during transportation are also very high, especially regarding safety and vibration protection. This is crucial for the rapid and efficient re-operation of the equipment in different locations and for maintaining customer trust. Currently, common methods of transporting electron optical tubes mainly focus on mechanical safety and vibration protection, generally without addressing vacuum requirements. This is unacceptable for long-distance transportation or situations where the customer's site does not support vacuum extraction. Utility Model Content

[0004] In view of the above problems, this utility model is proposed to provide a packaging box for an electron optical lens barrel that overcomes or at least partially solves the above problems. It can be vacuumed using the vacuuming device of the electron optical lens barrel, which can meet the needs of long-distance transportation and can also be used under conditions where vacuuming is not supported.

[0005] Specifically, this utility model provides a packaging box for an electron optical lens barrel, comprising:

[0006] The housing contains a device cavity for accommodating the electron optical lens tube;

[0007] A controller, located on the housing, is configured to be electrically connected to the vacuum pumping device of the electron optical lens barrel to control the vacuum pumping device;

[0008] A power supply device is installed on the housing and configured to supply power to the controller and the vacuum device.

[0009] Optionally, the housing is further provided with a control cavity and a power supply cavity, with the controller disposed in the control cavity and the power supply device disposed in the power supply cavity;

[0010] The control cavity is located above the power supply cavity, and the control cavity and the power supply cavity are located on one side of the device cavity.

[0011] Optionally, the power supply device is a storage battery or a mobile power source;

[0012] The power supply device is connected to a charging interface, which is located on the housing.

[0013] Optionally, the power supply cavity is arranged to accommodate at least two of the power supply devices.

[0014] Optionally, the packaging box further includes:

[0015] A display device is disposed within the control cavity, and the display device is electrically connected to the controller;

[0016] The control cavity has an observation window on its wall that corresponds to the display device.

[0017] Optionally, the packaging box further includes:

[0018] A support base is disposed within the device cavity. The support base is provided with a vacuum cavity for inserting the electron optical lens barrel and a vacuum cavity exhaust port communicating with the vacuum cavity.

[0019] Optionally, the electron optical lens barrel is sealed to the insertion port of the vacuum cavity;

[0020] A sealing plug is provided at the exhaust port of the vacuum chamber, or the exhaust port of the vacuum chamber is connected to the vacuum pumping device through a pipeline.

[0021] Optionally, the packaging box further includes:

[0022] A support frame is disposed within the device cavity and configured to support the electron optical lens barrel;

[0023] A filler is disposed within the cavity of the device;

[0024] Fasteners configured to securely connect the electro-optical lens barrel to the support base and / or the support frame.

[0025] Optionally, the packaging box further includes:

[0026] Shock-absorbing balls are disposed at the bottom of the housing; and / or,

[0027] Corner damping components are installed at the corners of the housing.

[0028] Optionally, the enclosure may be made of wood, aluminum, or steel.

[0029] The packaging box for electron optical lens barrels of this invention includes a controller and a power supply. The controller can control the vacuum pumping device of the electron optical lens barrel, and the power supply can power both the controller and the vacuum pumping device during transportation. This ensures the vacuum state of the electron optical lens barrel, allowing for vacuuming at any time, meeting the needs of long-distance transportation, and enabling use even in conditions where vacuuming is not supported. In other words, this packaging box for electron optical lens barrels can guarantee a long-term and effective high vacuum for electron optical lens barrels, facilitating rapid re-installation of equipment at the customer's location, shortening installation time, and enhancing customer acceptance.

[0030] Furthermore, the packaging box for the electron optical lens barrel of this utility model also includes a support base, support frame, filler, fasteners, etc. inside the equipment cavity, and shock-absorbing balls are set on the outside of the box. This can treat the electron optical lens barrel in terms of mechanical safety and vibration protection, thus protecting the electron optical lens barrel. Therefore, the packaging box of this utility model can meet the requirements of long-term transportation and rapid vacuuming by the customer while ensuring safety and shock resistance.

[0031] Furthermore, in the packaging box for the electron optical lens tube of this invention, the power supply cavity is arranged to accommodate at least two power supply devices, allowing for adjustments to the capacity of the power supply devices based on varying transportation distances and times. In other words, the power supply cavity is pre-reserved, enabling the installation of a corresponding number of power supply devices as needed to meet length transportation requirements and reduce potential risks.

[0032] Furthermore, the packaging box for the electron optical lens tube of this utility model has a reserved charging interface and observation window, which facilitates the charging and discharging operation of the power supply device and the reading of vacuum readings.

[0033] Furthermore, the packaging box for electron optical microscope tubes of this utility model is not only applicable to the packaging and transportation of electron optical microscope tubes in electron microscope equipment in the field of chip defect monitoring, but also applicable to the packaging and transportation of electron optical microscope tubes in the field of chip measurement and laboratory electron microscope equipment.

[0034] The above and other objects, advantages and features of this utility model will become more apparent to those skilled in the art from the following detailed description of specific embodiments of this utility model in conjunction with the accompanying drawings. Attached Figure Description

[0035] The following sections will describe some specific embodiments of the present invention in a detailed manner by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or components. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0036] Figure 1 This is a schematic structural diagram of a packaging box according to an embodiment of the present utility model;

[0037] Figure 2 This is a schematic structural diagram of a packaging box according to an embodiment of the present utility model.

[0038] In the attached image:

[0039] Packaging box 100, electron optical lens tube 200, box body 110, equipment cavity 111, control cavity 112, power supply cavity 113, support base 120, vacuum chamber exhaust port 121, sealing plug 122, support frame 130, filler 140, controller 150, observation window 151, high voltage line 152, power supply device 160, charging interface 161, shock absorption ball 170. Detailed Implementation

[0040] The following reference Figure 1 and Figure 2 This description pertains to a packaging box for an electron optical lens barrel according to an embodiment of the present invention. In this description, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature, that is, include one or more of that feature. In the description of the present invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified. When a feature "includes or contains" one or more of the features it encompasses, unless otherwise specifically described, this indicates that other features are not excluded and may be further included.

[0041] Unless otherwise expressly specified and limited, the terms "set," "install," "connect," "link," "fix," and "couple" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art should be able to understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0042] Furthermore, in the description of this embodiment, "above" or "below" the second feature can include direct contact between the first and second features, or it can include contact between the first and second features through another feature between them. That is, in the description of this embodiment, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," or "below" of the second feature can mean the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0043] In the description of this embodiment, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0044] Figure 1 This is a schematic structural diagram of a packaging box for an electron optical lens barrel according to an embodiment of the present invention, as shown below. Figure 1 As shown, this embodiment of the invention provides a packaging box 100 for an electron optical microscope tube. The electron optical microscope tube 200 can be used in electron microscope equipment for chip defect monitoring, or in electron microscope equipment for chip measurement and laboratory use. The electron optical microscope tube is a core component of an electron microscope (SEM / TEM), controlling the focusing, deflection, and imaging of the electron beam through an electromagnetic lens system; its performance directly determines the microscope's resolution and imaging quality.

[0045] In this embodiment of the invention, the packaging box 100 includes a box body 110, a controller 150, and a power supply device 160. The box body 110 contains a device cavity 111 for accommodating the electron optical lens barrel 200. The electron optical lens barrel 200 is placed in the device cavity 111 to ensure its mechanical safety. The controller 150 is mounted on the box body 110 and configured to be electrically connected to the vacuum pump of the electron optical lens barrel 200 to control the vacuum pump. The vacuum pump of the electron optical lens barrel 200 is typically an ion pump. During the transportation of the electron optical lens barrel 200, the controller 150 can control the vacuum pump to operate or stop, or control the operation of the vacuum pump based on the vacuum level inside the electron optical lens barrel 200, to ensure the vacuum level of the electron optical lens barrel 200. After the electron optical lens barrel 200 arrives at its destination, it is vacuumed to ensure rapid use at the customer's location. Even if the customer's location lacks vacuuming capabilities, rapid re-installation can be performed at the customer's location, shortening installation time, etc. A power supply unit 160 is mounted on the housing 110 and configured to supply power to the controller 150 and the vacuum pumping device. The power supply unit 160 stores electrical energy to ensure the operation of the vacuum pumping device and the controller 150.

[0046] The packaging box 100 for the electron optical lens barrel 200 in this embodiment of the invention includes a controller 150 and a power supply device 160. The controller 150 controls the vacuum pumping device of the electron optical lens barrel 200, and the power supply device 160 provides power to the controller 150 and the vacuum pumping device during transportation. This ensures the vacuum state of the electron optical lens barrel 200, allowing for vacuuming at any time, meeting the needs of long-distance transportation, and enabling use even in conditions where vacuuming is not supported. In other words, the packaging box 100 for the electron optical lens barrel 200 can ensure the long-term and effective maintenance of a high vacuum for the electron optical lens barrel 200 and other related equipment, facilitating rapid re-installation of the equipment at the customer's location, shortening installation time, and enhancing customer acceptance.

[0047] In some embodiments of this utility model, such as Figure 1 As shown, to facilitate the installation of the electron optical lens tube 200, controller 150, and power supply device 160, the housing 110 also includes a control cavity 112 and a power supply cavity 113. The controller 150 is located in the control cavity 112, and the power supply device 160 is located in the power supply cavity 113. By providing the control cavity 112 and the power supply cavity 113, not only is the processing, manufacturing, and assembly of the packaging box 100 facilitated, but it also helps to protect the controller 150, power supply device 160, and other equipment.

[0048] In some embodiments of this utility model, the control cavity 112 is located on the upper side of the power supply cavity 113, and the control cavity 112 and the power supply cavity 113 are located on one side of the equipment cavity 111. This arrangement achieves a reasonable layout of the packaging box 100, making the packaging box 100 structurally compact while ensuring packaging.

[0049] In some embodiments of this utility model, the power supply device 160 is a storage battery or a power bank. Further, the power supply device 160 is connected to a charging interface 161, which is located on the housing 110. By providing the charging interface 161, the power supply device 160 can be recharged as needed, depending on its internal power level. Before packaging, and when the power supply device 160 is low on power, it can be charged directly using the charging interface 161 without needing to be removed, significantly improving operational convenience.

[0050] In some embodiments of this invention, the power supply cavity 113 is arranged to accommodate at least two power supply devices 160. Because the power supply cavity 113 is arranged to accommodate at least two power supply devices 160, the capacity of the power supply devices 160 can be increased or decreased depending on the transportation distance and time. In other words, the power supply cavity 113 is pre-reserved, allowing for the installation of a corresponding number of power supply devices 160 as needed, meeting the requirements for long-distance transportation and reducing potential risks.

[0051] In some embodiments of this invention, the power supply device 160 is placed separately and surrounded by protective material. The controller 150 and the vacuum pump can be electrically connected via a high-voltage line 152.

[0052] In some embodiments of this utility model, the packaging box 100 further includes a display device disposed within the control cavity, and the display device is electrically connected to the controller 150. An observation window 151, corresponding to the display device, is provided on the cavity wall of the control cavity 112. The display device can display the vacuum state inside the electron optical tube 200. The vacuum state of the electron optical tube 200 can be observed through the display interface of the display device via the observation window 151, facilitating the transport personnel to understand the status of the electron optical tube 200 at any time and ensuring the safe transport of the electron optical tube 200. Furthermore, the display device may be integrated into the controller 150, or it may be disposed independently of the controller 150.

[0053] In some embodiments of this invention, the display device may be a display screen. In some alternative embodiments of this invention, the display device may be an indicator light.

[0054] In some embodiments of this utility model, the packaging box 100 further includes a support base 120 disposed within the equipment cavity 111. The support base 120 is provided with a vacuum cavity for inserting the electron optical lens barrel 200, and a vacuum cavity exhaust port 121 communicating with the vacuum cavity. The vacuum cavity provided on the support base 120 allows one end of the electron optical lens barrel 200 to be inserted, preventing the portion of the electron optical lens barrel 200 exposed to the atmosphere from being contaminated.

[0055] In some embodiments of this utility model, the electron optical lens barrel 200 is sealed to the insertion port of the vacuum chamber to prevent air leakage at the electron optical lens barrel 200, but this cannot guarantee the protection effect on the part of the electron optical lens barrel 200 exposed to the atmosphere.

[0056] In some embodiments of this utility model, such as Figure 2 As shown, a sealing plug 122 is provided at the exhaust port 121 of the vacuum chamber. When packaging the electron optical lens tube 200, the vacuum chamber can be directly evacuated using a vacuum pumping device, and then sealed with the sealing plug to maintain a certain degree of vacuum in the vacuum chamber.

[0057] In some other embodiments of this utility model, the vacuum chamber exhaust port 121 is connected to the vacuum pumping device through a pipeline, so that the vacuum chamber can be evacuated at all times to protect the part of the electron optical lens barrel 200 exposed to the atmosphere.

[0058] In some embodiments of this utility model, such as Figure 1 and Figure 2 As shown, the packaging box 100 also includes a support frame 130, filler 140, and fasteners. The support frame 130 is disposed within the device cavity 111 and configured to support the electron optical lens barrel 200. The filler 140 is disposed within the device cavity 111. The fasteners are configured to securely connect the electron optical lens barrel 200 to the support base 120 and / or the support frame 130.

[0059] In this embodiment of the invention, the electron optical lens barrel 200 is fixed and supported by fasteners and the support frame 130 and support base 120. This means the outer frame of the electron optical lens barrel 200 is fixed, and other spaces are softly filled with foam particles or soft plastic fillers 140 to reduce external impact. This provides packaging protection for the electron optical lens barrel 200 in terms of mechanical safety and vibration protection. Furthermore, priority is given to fixing the stress points of the electron optical lens barrel 200. The fasteners can be screws, which lock the electron optical lens barrel 200 onto the support base 120.

[0060] In some embodiments of this utility model, the packaging box 100 also includes shock-absorbing balls 170, corner shock absorbers, etc. The shock-absorbing balls 170 are disposed at the bottom of the box body 110. For the shock-absorbing balls 170, the appropriate number and installation position are selected according to the weight of the load. The corner shock absorbers are disposed at the corners of the box body 110; corner shock absorbers can be installed at each corner of the box body 110.

[0061] In some embodiments of this utility model, the box body 110 is made of wood, aluminum, or steel. The box body 110 is preferably made of wood, which reduces the cost of the packaging box 100. Of course, the box body 110 can also be made of aluminum or iron, which would provide higher security.

[0062] The packaging box 100 of this utility model embodiment can ensure the safety of the electronic optical tube 200 and other electronic optical tubes during transportation, while significantly reducing the impact of external interference on the tube, especially vibration interference; it can also ensure that the electronic optical tube maintains a high vacuum for a long time, which facilitates the rapid re-installation of the machine at the customer's site, shortens the installation time, and enhances the customer's acceptance.

[0063] In some embodiments of this utility model, after the packaging box 100 is fully packaged, it can be transported by air cushion vehicle for long-distance transportation and by simple vehicle for short-distance transportation.

[0064] Therefore, those skilled in the art should recognize that although many exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications conforming to the principles of the present invention can be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all such other variations or modifications.

Claims

1. A packaging box for an electron optical lens tube, characterized in that, include: The housing contains a device cavity for accommodating the electron optical lens tube; A controller, located on the housing, is configured to be electrically connected to the vacuum pumping device of the electron optical lens barrel to control the vacuum pumping device; A power supply device is installed on the housing and configured to supply power to the controller and the vacuum device.

2. The packaging box according to claim 1, characterized in that, The enclosure also includes a control chamber and a power supply chamber, with the controller located in the control chamber and the power supply device located in the power supply chamber. The control cavity is located above the power supply cavity, and the control cavity and the power supply cavity are located on one side of the device cavity.

3. The packaging box according to claim 2, characterized in that, The power supply device is a storage battery or a mobile power source; The power supply device is connected to a charging interface, which is located on the housing.

4. The packaging box according to claim 2, characterized in that, The power supply cavity is arranged to accommodate at least two of the power supply devices.

5. The packaging box according to claim 2, characterized in that, Also includes: A display device is disposed within the control cavity, and the display device is electrically connected to the controller; The control cavity has an observation window on its wall that corresponds to the display device.

6. The packaging box according to claim 1, characterized in that, Also includes: A support base is disposed within the device cavity. The support base is provided with a vacuum cavity for inserting the electron optical lens barrel and a vacuum cavity exhaust port communicating with the vacuum cavity.

7. The packaging box according to claim 6, characterized in that, The electron optical lens barrel is sealed to the insertion port of the vacuum cavity; A sealing plug is provided at the exhaust port of the vacuum chamber, or the exhaust port of the vacuum chamber is connected to the vacuum pumping device through a pipeline.

8. The packaging box according to claim 6, characterized in that, Also includes: A support frame is disposed within the device cavity and configured to support the electron optical lens barrel; A filler is disposed within the cavity of the device; Fasteners configured to securely connect the electro-optical lens barrel to the support base and / or the support frame.

9. The packaging box according to claim 1, characterized in that, Also includes: Shock-absorbing balls are installed at the bottom of the housing; And / or, Corner damping components are installed at the corners of the housing.

10. The packaging box according to claim 1, characterized in that, The enclosure is made of wood, aluminum, or steel.

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