Test equipment transferring device

Abstract

A test equipment transferring device comprises a shell, a clamping assembly and a protection plate. The housing comprises a main body and a door sheet. The main body comprises a peripheral wall, a containing space and an opening, the peripheral wall surrounds the containing space and comprises a lower blocking part, an upper end and a lower end, the upper end and the lower end are opposite, the opening is communicated with the containing space and adjoins the upper end, and the lower blocking part is adjoined between the opening and the lower end. The door sheet is arranged on the peripheral wall and can open and close the opening. The clamping assembly comprises an inner box, a sliding piece and a clamping structure. The inner box can be arranged in the containing space in a sliding mode in the first direction and is provided with a driving part. The sliding piece is slidably connected with the inner box. The clamping structure is arranged on the sliding piece. The protection plate can be arranged in the shell in a sliding mode and is provided with an acting part, in the first direction, the driving part is closer to the lower end than the acting part, and the acting part and the driving part are overlapped in the second direction perpendicular to the first direction.

Description

Test equipment transfer device Technical Field

[0001] This invention relates to a transfer device for testing equipment, and particularly to a transfer device for a test head suitable for semiconductor testing. Background Technology

[0002] With advancements in semiconductor technology, semiconductor components in electronic products are becoming increasingly sophisticated. To ensure their reliability, these components must undergo testing to guarantee the functionality of their various functions. A semiconductor component testing system comprises testing equipment and a probe station. The testing equipment contains processing components that perform various signal processing and calculations during the testing process. The probe station houses probe cards, and the semiconductor component is housed within the probe station and can be moved relative to the probe cards. The testing equipment can be moved until the probe cards are electrically connected, at which point the semiconductor component contacts the probe cards for testing.

[0003] Because the testing equipment is large and heavy, it is usually moved with a movable testing equipment transfer device to facilitate the transfer of the testing equipment to different models or probe stations in different locations.

[0004] Typical test equipment transfer devices mainly consist of a housing and a clamping assembly that can be displaced outside the housing to hold the test equipment. As mentioned earlier, due to the extreme weight of the test equipment, the housing is usually equipped with counterweights of corresponding weight to maintain stability after clamping the test equipment and to achieve a labor-saving effect when changing the height of the test equipment. Since the number of counterweights must be changed according to the weight of the test equipment, the test equipment transfer device has an open opening to facilitate the user's replacement of counterweights. However, in addition to accommodating the counterweights, the space inside the housing of the test equipment transfer device must also provide space for the counterweights to move. Therefore, if a person accidentally enters the aforementioned space during the movement of the counterweights, they may suffer a heavy blow or be pinched due to the displacement of the counterweight box containing the counterweights, posing a safety concern and requiring improvement. Summary of the Invention

[0005] This utility model provides a test equipment transfer device, comprising a housing, a clamping assembly, and a protective plate. The housing comprises a main body and a door panel. The main body comprises a peripheral wall, a receiving space, and an opening. The peripheral wall surrounds the receiving space and includes a lower stop, an upper end, and a lower end. The opening communicates with the receiving space and is adjacent to the upper end. The lower stop is adjacent to the opening and the lower end. The door panel is pivotally mounted on the peripheral wall and can open and close the opening. The clamping assembly comprises an inner box, a sliding member, and a clamping structure. The inner box is slidably disposed within the receiving space along a first direction and has a driving part. The sliding member is slidably disposed outside the housing along the first direction and connected to the inner box. The clamping structure is disposed on the sliding member. The protective plate is slidably disposed within the housing along the first direction and has an actuating part. In the first direction, the driving part is closer to the lower end than the actuating part, and the actuating part overlaps with the driving part in a second direction perpendicular to the first direction.

[0006] In this way, when the inner box moves within the outer shell, the protective plate can also change position to block the opening, thus avoiding potential safety issues.

[0007] In some embodiments, the aforementioned opening has a first length in a first direction, and the inner box has a second length in a first direction, the first length being greater than the second length.

[0008] In some embodiments, the aforementioned protective plate has a third length in the first direction, and the sum of the second length and the third length is greater than the first length.

[0009] In some embodiments, the aforementioned clamping assembly further includes a driving assembly disposed within the receiving space and connected between the inner box and the sliding member to drive the inner box and the sliding member to move in the opposite direction along the first direction.

[0010] In some embodiments, the aforementioned drive assembly includes a pulley, a belt, and a drive seat. The pulley is rotatably disposed inside the housing, the belt is wound around the pulley, and one end of the belt is fixed to one side of the drive seat, the inner box is fixed to the other side of the drive seat, and the other end of the belt is fixed to a sliding member.

[0011] In some embodiments, the aforementioned driving part is a cylinder extending along the second direction.

[0012] In some embodiments, the aforementioned inner box further has a buffer portion disposed on the outer surface of the inner box.

[0013] In some embodiments, the aforementioned housing further includes a guide member having a guide groove extending along a first direction, the guide member being disposed on the inner surface of the main body, and the protective plate being slidably accommodated within the guide groove.

[0014] In some embodiments, the aforementioned functional part is located at the end of the protective plate near the upper end in the first direction.

[0015] In some embodiments, the functional part of the aforementioned protective plate is formed by bending one end of the protective plate.

[0016] In some embodiments, the test equipment transfer device further includes a cover disposed at the end of the protective plate away from the upper end in a first direction. Attached Figure Description

[0017] Figure 1 is a three-dimensional view of an embodiment of the test equipment transfer device of this utility model located in the first position.

[0018] Figure 2 is a cross-sectional schematic diagram of an embodiment of the test equipment transfer device of this utility model located in the first position.

[0019] Figure 3 is a magnified view of the circled area 3 in Figure 2.

[0020] Figure 4 is a partial cross-sectional view of an embodiment of the test equipment transfer device of this utility model located in the first position.

[0021] Figure 5 is a three-dimensional view of an embodiment of the test equipment transfer device of this utility model located in the second position.

[0022] Figure 6 is a cross-sectional view of an embodiment of the test equipment transfer device of this utility model in the second position.

[0023] Figure 7 is a partial cross-sectional view of an embodiment of the test equipment transfer device of this utility model located in the second position.

[0024] Among them, the attached figures are labeled

[0025] 10: Outer shell

[0026] 11: Main Body

[0027] 111: Zhou Bi

[0028] 1111: Lower block

[0029] 1112: Top

[0030] 1113: Lower end

[0031] 112: Containment Space

[0032] 113: Opening

[0033] 12: Door panel

[0034] 20: Clamping assembly

[0035] 21: Inner Box

[0036] 211: Driving Department

[0037] 212: Open Port

[0038] 213: Buffer section

[0039] 22: Slider

[0040] 23: Clamping structure

[0041] 24: Drive components

[0042] 241: Pulley

[0043] 242: Band

[0044] 243: Drive seat

[0045] 30: Protective plate

[0046] 31: Functional Part

[0047] 32: Covering component

[0048] 40: Guiding Components

[0049] 41: Linear guide rail

[0050] 42: Linear Slider

[0051] 43: Guide components

[0052] 431: Guide groove

[0053] D1: First Direction

[0054] D2: Second Direction

[0055] L1: First Length

[0056] L2: Second Length

[0057] L3: Third Length

[0058] P1: First position

[0059] P2: Second position

[0060] T: Testing equipment

[0061] W: Counterweight Detailed Implementation

[0062] Before the present invention is described in detail in various embodiments, please note that in the following description, the accompanying drawings of the present invention are only for illustrative purposes and are not necessarily drawn to scale, and not all details are necessarily shown in the drawings.

[0063] The orientation or similar terms used in this utility model, such as "front", "back", "left", "right", "top", "bottom", "inner", "outer", and "side", indicate the location or positional relationship based on the location or positional relationship shown in the accompanying drawings. They are only for the purpose of facilitating explanation and understanding, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, or be used to limit this utility model.

[0064] The use of the quantifiers "a" or "an" in the description of components and parts in this utility model is for convenience and to provide the general meaning of the scope of the invention; in this utility model, it should be interpreted as including one or at least one, and the concept of a single element also includes plural cases, unless it clearly indicates otherwise. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "plural" means two or more.

[0065] The terms "combination," "integration," or "assembly" used in this utility model mainly include those that can be separated without damaging the components after connection, or those that make the components inseparable after connection. These are options that those with ordinary knowledge in the art can choose based on the material of the components to be connected or the assembly requirements.

[0066] This invention provides a test equipment transfer device for transferring test equipment T suitable for semiconductor testing. The test equipment transfer device can hold and transfer the test equipment T.

[0067] Referring to Figures 1 and 4, Figure 1 is a perspective view of an embodiment of the test equipment transfer device of the present invention located in a first position; Figure 4 is a partial cross-sectional view of an embodiment of the test equipment transfer device of the present invention located in a first position. The test equipment transfer device includes a housing 10, a clamping assembly 20, and a protective plate 30. The housing 10 includes a main body 11 and a door 12. The main body 11 includes a peripheral wall 111, a receiving space 112, and an opening 113. The peripheral wall 111 surrounds the receiving space 112 and includes a lower stop 1111, an upper end 1112, and a lower end 1113. The opening 113 communicates with the receiving space 112 and is adjacent to the upper end 1112. The lower stop 1111 is adjacent to the opening 113 and the lower end 1113. The door 12 is pivotally disposed on the peripheral wall 111 and can open and close the opening 113. The clamping assembly 20 includes an inner box 21, a sliding member 22, and a clamping structure 23. The inner casing 21 is slidably disposed within the receiving space 112 along the first direction D1 and has a driving part 211. The sliding member 22 is slidably disposed outside the outer casing 10 along the first direction D1 and is connected to the inner casing 21. The clamping structure 23 is disposed on the sliding member 22. The protective plate 30 is slidably disposed within the outer casing 10 along the first direction D1 and has an actuating part 31. In the first direction D1, the driving part 211 is closer to the lower end 1113 than the actuating part 31, and the actuating part 31 and the driving part 211 overlap in the second direction D2 perpendicular to the first direction D1.

[0068] Referring to Figures 1, 4, 5 to 7, Figure 5 is a perspective view of an embodiment of the test equipment transfer device of the present invention in the second position; Figure 6 is a cross-sectional view of an embodiment of the test equipment transfer device of the present invention in the second position; Figure 7 is a partial cross-sectional view of an embodiment of the test equipment transfer device of the present invention in the second position. The specific operation of the test equipment transfer device is described below. The clamping component 20 of the test equipment transfer device can be displaced between the first position P1 and the second position P2. In the first position P1, the sliding member 22 is closer to the upper end 1112 of the outer shell 10 body 11 compared to the sliding member 22 in the second position P2. In the first position P1, the inner box 21 is closer to the lower end 1113 of the outer shell 10 body 11 compared to the inner box 21 in the second position P2. Furthermore, in the first position P1, the protective plate 30 naturally falls to the lower end 1113 due to its own weight. In this state, the driving part 211 of the inner box 21 is located below the working part 31 of the protective plate 30.

[0069] In this way, referring to Figures 1, 4, 5 and 7, when the sliding member 22 moves from the first position P1 to the second position P2, the inner box 21 is driven from the lower end 1113 near the main body 11 to the upper end 1112 of the main body 11. As the inner box 21 moves towards the upper end 1112 along the first direction D1, the driving part 211 of the inner box 21 will contact the working part 31 of the protective plate 30. When the inner box 21 continues to move, the driving part 211 of the inner box 21 can push the working part 31 of the protective plate 30 and drive the protective plate 30 to move towards the upper end 1112 along with the inner box 21. When the inner box 21 moves to the upper end 1112, the protective plate 30 can remain in the position of blocking the opening 113, preventing the lower side of the inner box 21 from having an open space. Furthermore, when the inner casing 21 moves from its upper end 1112 towards its lower end 1113, the protective plate 30, under its own weight, remains against the moving part 211 of the inner casing 21 and moves with the inner casing 21 towards its lower end 1113. Thus, when the inner casing 21 moves within the outer casing 10, the protective plate 30 changes position to block the opening 113, reducing the chance of operators accidentally entering the lower space of the inner casing 21, avoiding potential safety problems, thereby improving safety and meeting the safety assessment standard set by the Semiconductor Equipment and Materials International (SEMI) – SEMI S2 certification.

[0070] SEMI S2 certification aims to assess the safety and environmental impact of semiconductor manufacturing equipment, ensuring the safety of semiconductor equipment and materials during use to protect operators from potential hazards. The SEMI S2 certification standard covers safety requirements at various levels, including electrical safety, chemical management, machinery safety, and environmental hygiene. By obtaining SEMI S2 certification, semiconductor manufacturers can ensure their equipment complies with international standards, improve the quality and reliability of their products, ensure safety during the use of the test head transfer device, and minimize accidents and risks. Furthermore, obtaining SEMI S2 certification enhances user trust in the equipment supplier, showcasing its leading technology and advantages to the international market.

[0071] Referring to Figures 1 and 2, Figure 2 is a cross-sectional schematic diagram of an embodiment of the test equipment transfer device of this utility model located in a first position. The outer casing 10 is used to mount the clamping assembly 20 and the protective plate 30. In some embodiments, the main body 11 of the outer casing 10 is a hollow hexahedron, and its appearance is generally that of a long column extending along a first direction D1. In these embodiments, the direction perpendicular to the upper end 1112 and the lower end 1113 of the main body 11 is the first direction D1. In some embodiments, the upper end 1112 of the main body 11 of the outer casing 10 may be provided with a lifting ring to facilitate the transfer of the test equipment transfer device by hanging large tools and equipment. In some embodiments, the lower end 1113 of the main body 11 of the outer casing 10 may be provided with a rolling element to facilitate the movement of the test equipment transfer device.

[0072] Referring to Figures 1 and 2, the clamping component 20 is mounted on the housing 10 and used to clamp the test device T and drive the test device T to move along the first direction D1.

[0073] Referring to Figures 1 and 2, the inner box 21 of the clamping assembly 20 is used to house the counterweight W to achieve a balanced state with the testing equipment T. In some embodiments, the inner box 21 is a box structure with an external shape corresponding to the receiving space 112 of the main body 11. In these embodiments, the inner box 21 has an opening 212. When the inner box 21 is housed in the main body 11 of the outer shell 10, the opening 212 of the inner box 21 faces the same side of the peripheral wall 111 with an opening 113. Thus, when the inner box 21 is displaced in the first direction D1 to the position corresponding to the opening 113, the opening 212 of the inner box 21 corresponds to the opening 113 of the main body 11, allowing the operator to take the counterweight W in the inner box 21 through the opening 113 and the opening 212.

[0074] Referring to Figures 1, 2 and 5, in some embodiments, the opening 113 of the main body 11 has a first length L1 in the first direction D1, and the inner box 21 has a second length L2 in the first direction D1. The first length L1 is greater than the second length L2, thereby allowing the opening 212 of the inner box 21 to be fully exposed in the opening 113 of the main body 11 for easy operation.

[0075] Referring to Figures 1 and 5, the sliding member 22 outside the main body 11 is used to mount the clamping structure 23 and can move in the opposite direction to the inner box 21 inside the main body 11. That is, when the inner box 21 inside the main body 11 moves from the lower end 1113 to the upper end 1112 along the first direction D1, the sliding member 22 moves from the upper end 1112 to the lower end 1113.

[0076] Referring to Figures 1 and 2, in some embodiments, the slider 22 has a flat plate structure. In these embodiments, the outer shell 10 further includes a guide assembly 40, which includes a linear slide rail 41 and a linear slider 42. The linear slide rail 41 extends along a first direction D1 and is disposed outside the main body 11. The linear slider 42 is slidably fitted onto the linear slide rail 41 along the first direction D1, and the slider 22 is then fixed to the linear slider 42. In this way, the guide assembly 40 can guide the slider 22 to move stably along the first direction D1.

[0077] Referring to Figures 1 and 2, in some embodiments, in order to realize the reverse linkage between the inner box 21 and the sliding member 22, the clamping assembly 20 further includes a driving assembly 24. The driving assembly 24 is disposed in the receiving space 112 of the outer shell 10 and connected between the inner box 21 and the sliding member 22 to drive the inner box 21 and the sliding member 22 to move in the opposite direction along the first direction D1.

[0078] Referring to Figures 1 and 2, in some embodiments, the drive assembly 24 includes a pulley 241 and a belt 242. The pulley 241 is rotatably disposed within the main body 11 of the housing 10, the belt 242 is wound around the pulley 241, and one end of the belt 242 is fixed to the inner box 21, while the other end of the belt 242 is fixed to the sliding member 22. Thus, the inner box 21 and the sliding member 22 are linked in opposite directions through the connection of the drive assembly 24.

[0079] Referring to Figures 1 and 2, in some embodiments, the drive assembly 24 further includes a drive seat 243, which is a plate structure. One side of the drive seat 243 is fixedly connected to the inner box 21, and one end of the belt body 242 is fixed to the other side of the drive seat 243, thereby facilitating the connection between the drive assembly 24 and the inner box 21.

[0080] Referring to Figures 1 to 3 and Figure 5, Figure 3 is a partial enlarged view of the circled area 3 in Figure 2. In some embodiments, the protective plate 30 is a plate structure. In these embodiments, the protective plate 30 has a third length L3 in the first direction D1, and the sum of the second length L2 and the third length L3 is greater than the first length L1 (i.e., L2 + L3 > L1). Therefore, when the inner box 21 is displaced to the second position P2, the protective plate 30 can reliably block the opening 113, ensuring that no space is created between the lower side of the inner box 21 and the lower stop 1111, reducing the possibility of the operator being struck or pinched by the falling inner box 21.

[0081] Referring to Figures 1 to 3, in some embodiments, the guiding assembly 40 further includes a guide member 43 having a guide groove 431 extending along a first direction D1. The guide member 43 is disposed on the inner surface of the peripheral wall 111 of the main body 11, and the protective plate 30 is slidably accommodated within the guide groove 431. In this way, the protective plate 30 can be reliably displaced along the first direction D1 by being guided by the guide member 43. In some embodiments, there are two guide members 43, which are arranged in parallel opposite directions, with opposite sides of the protective plate 30 respectively accommodated within the guide groove 431 of each guide member 43.

[0082] Referring to Figures 3 and 4, in some embodiments, the driving part 211 of the inner box 21 is a cylinder extending along the second direction D2. In these embodiments, the functional part 31 of the protective plate 30 is formed by bending one end of the protective plate 30 near the upper end 1112 in the first direction D1.

[0083] Referring to Figures 1 and 4, in some embodiments, the driving part 211 of the inner box 21 is made of thermosetting polyurethane elastomer (PU). In these embodiments, the inner box 21 further has a buffer part 213, which has the same shape and material as the driving part 211. The buffer part 213 is located on the outer surface of the inner box 21 near the upper end 1112 in the first direction D1, while the driving part 211 is located on the outer surface of the inner box 21 near the lower end 1113 in the first direction D1. In this way, the buffer part 213 can provide a cushioning effect when the inner box 21 is moved to the upper end 1112 of the outer shell 10 body 11.

[0084] Referring to Figures 2 and 4, in some embodiments, the test equipment transfer device further includes a covering member 32, which is disposed at the end of the protective plate 30 away from the upper end 1112 in the first direction D1, that is, at the opposite end of the protective plate 30 where the functional part 31 is disposed. Therefore, when the protective plate 30 is displaced to the lower end 1113, the covering member 32 can prevent the end of the protective plate 30 from being damaged by impact, thus extending its service life.

Claims

1. A test equipment transfer device, characterized in that, The device comprises: an outer shell, including: a main body, including a perimeter wall, a receiving space and an opening, the perimeter wall surrounding the receiving space and including a lower stop, an upper end and a lower end opposite each other, the opening communicating with the receiving space and adjacent to the upper end, the lower stop adjacent to the opening and the lower end; and a door panel pivotally disposed on the perimeter wall and capable of opening and closing the opening; a clamping assembly, including: an inner box slidably disposed within the receiving space along a first direction and having a driving part; a sliding member slidably disposed outside the outer shell along the first direction and connected to the inner box; and a clamping structure disposed on the sliding member; and a protective plate slidably disposed within the outer shell along the first direction and having an actuating part, wherein, in the first direction, the driving part is closer to the lower end than the actuating part, and the actuating part overlaps with the driving part in a second direction perpendicular to the first direction.

2. The test equipment transfer device as described in claim 1, characterized in that, The opening has a first length in the first direction, and the inner box has a second length in the first direction, the first length being greater than the second length.

3. The test equipment transfer device as described in claim 2, characterized in that, The protective plate has a third length in the first direction, and the sum of the second length and the third length is greater than the first length.

4. The test equipment transfer device as described in claim 1, characterized in that, The clamping assembly also includes a driving assembly disposed within the receiving space and connected between the inner box and the sliding member to drive the inner box and the sliding member to move in the opposite direction along the first direction.

5. The test equipment transfer device as described in claim 4, characterized in that, The drive assembly includes a pulley, a belt, and a drive seat. The pulley is rotatably disposed inside the housing. The belt is wound around the pulley, and one end of the belt is fixed to one side of the drive seat. The inner box is fixed to the other side of the drive seat, and the other end of the belt is fixed to the sliding member.

6. The test equipment transfer device as described in claim 1, characterized in that, The driving part is a cylinder extending along the second direction.

7. The test equipment transfer device as described in claim 1, characterized in that, The inner box also has a buffer section located on the outer surface of the inner box.

8. The test equipment transfer device as described in claim 1, characterized in that, The housing also includes a guide member having a guide groove extending along the first direction. The guide member is disposed on the inner surface of the main body, and the protective plate is slidably accommodated within the guide groove.

9. The test equipment transfer device as described in claim 1, characterized in that, The functional part is located at the end of the protective plate near the upper end in the first direction.

10. The test equipment transfer device as described in claim 1, characterized in that, The functional part of the protective plate is formed by bending one end of the protective plate.

11. The test equipment transfer device as described in claim 9, characterized in that, It also includes a covering element disposed at the end of the protective plate away from the upper end in the first direction.

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