Fitting type heat preservation cylinder

Abstract

The utility model discloses a fitting type thermal insulation cylinder, which relates to the technical field of semiconductors, and comprises a cylinder body and a plurality of support plates fixedly arranged on the cylinder body, the plurality of support plates are uniformly distributed on the cylinder body, a plurality of uniformly distributed thermal insulation grooves are arranged in the cylinder body, and the thermal insulation grooves are uniformly distributed in the cylinder body. A plurality of evenly-distributed built-in grooves are further formed in the cylinder body, connecting grooves are formed in the surfaces, close to the heat preservation grooves, of the built-in grooves, and an annular clamping groove is formed in the surface of the end, close to the supporting plate, of the cylinder body. The temperature adjusting mechanism is used for adjusting the heat preservation performance of the barrel body; the adjusting piece is arranged on the supporting plate; and the transmission mechanism is used for transmitting power of the adjusting piece to the temperature adjusting mechanism. And by arranging the temperature adjusting mechanism, the device can adjust the volume of the heat preservation space between the first heat preservation plate and the second heat preservation plate, so that the heat preservation performance of the device can meet different production heat preservation requirements, and the application range of the device is widened to a certain extent.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a bonding type heat preservation cylinder. Background Technology

[0002] In the semiconductor and photovoltaic industries, single crystal furnaces are core equipment for producing key semiconductor materials such as single crystal silicon. The single crystal growth process requires extremely high temperature control precision. Even slight temperature fluctuations can lead to an increase in crystal defects and crystal orientation shifts, thereby affecting the performance and yield of semiconductor chips. As an important component of single crystal furnaces, the bonded insulation cylinder plays a crucial role in maintaining a stable high-temperature environment inside the furnace and reducing heat loss. Its insulation performance directly affects the quality and efficiency of single crystal growth. However, existing bonded insulation cylinders used in single crystal furnaces have significant technical shortcomings, namely, their insulation performance cannot be adjusted according to actual production insulation requirements. Therefore, improvements are urgently needed. Utility Model Content

[0003] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a fitting heat preservation cylinder, which aims to solve the above-mentioned technical problems.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A type of heat-insulating cylinder includes a cylinder body and support plates fixedly mounted on the cylinder body. Multiple support plates are evenly distributed on the cylinder body. Multiple evenly distributed heat-insulating grooves are formed inside the cylinder body. Multiple evenly distributed internal grooves are also formed on the cylinder body. A connecting groove is formed on the surface of each internal groove near the heat-insulating groove. An annular retaining groove is formed on the surface of the cylinder body near one end of the support plate. The cylinder also includes:

[0006] A temperature regulating mechanism is provided inside the insulation tank, and the temperature regulating mechanism is used to adjust the insulation performance of the cylinder;

[0007] An adjusting element is provided on the support plate;

[0008] A transmission mechanism is provided on the cylinder body, and the transmission mechanism is used to transmit the power of the adjusting component to the temperature regulating mechanism.

[0009] Preferably, the temperature regulating mechanism includes:

[0010] The first insulation board is slidably disposed in the insulation groove, and two symmetrically arranged adaptation grooves are provided on the first insulation board, and an adaptive component is disposed in the adaptation groove.

[0011] The second insulation board is slidably disposed in the insulation groove. The second insulation board also has two symmetrically arranged adaptation grooves, and an adaptive component is also disposed in the adaptation groove of the second insulation board.

[0012] There are two connecting blocks, which are symmetrically distributed in the connecting groove. The connecting blocks are slidably connected to the connecting groove, and the two connecting blocks are respectively fixedly connected to the adjacent first insulation board and second insulation board.

[0013] Preferably, the adaptive component includes:

[0014] The adaptive springs are multiple in number and are equidistantly arranged in the adaptive grooves, and the adaptive springs are always in a compressed state.

[0015] The first adapting plate has two plates, and the two first adapting plates are slidably disposed in the adapting groove of the first insulation plate. The first adapting plate is fixedly connected to the adapting spring in the first insulation plate.

[0016] The second adapting plate has two plates, and the two second adapting plates are slidably disposed in the adapting groove of the second insulation plate. The second adapting plates are fixedly connected to the adapting springs in the second insulation plate.

[0017] Preferably, the materials of the first insulation board, the second insulation board, the first adapting board, and the second adapting board are all insulation materials.

[0018] Preferably, the adjusting member includes:

[0019] The motor is adjusted and fixedly mounted on the support plate;

[0020] An adjusting shaft is rotatably mounted on the support plate, and the end of the adjusting shaft near the adjusting motor is fixedly connected to the output end of the adjusting motor.

[0021] The drive gear is fixedly mounted on the end of the adjustment shaft away from the adjustment motor.

[0022] Preferably, the transmission mechanism includes:

[0023] An annular locking block is rotatably disposed within the annular locking groove;

[0024] A driven gear is fixedly disposed at one end of the annular locking block away from the cylinder, and the driven gear meshes with the driving gear;

[0025] The driven gear has multiple teeth, and these teeth are evenly distributed circumferentially on the surface of the driven gear near the cylinder.

[0026] The rotating component is located within the built-in groove.

[0027] Preferably, the rotating component includes:

[0028] An internal shaft is located within the internal groove, and one end of the internal shaft is rotatably connected to the cylinder. A double-ended screw is fixedly provided at the other end of the internal shaft, and the threads at both ends of the double-ended screw have opposite directions.

[0029] A transmission gear is fixedly mounted on the built-in shaft, and the transmission gear meshes with the teeth of the shaft.

[0030] The threaded block has two parts, and the two threaded blocks are slidably disposed in the built-in groove. The threaded blocks are threadedly connected to the double-ended screw, and the two threaded blocks are respectively fixedly connected to the adjacent connecting blocks.

[0031] Preferably, the space between the first insulation board and the second insulation board is an insulation space.

[0032] In summary, due to the adoption of the above technical solution, the beneficial effects of this utility model are:

[0033] 1. By incorporating a temperature control mechanism, this device can adjust the volume of the insulation space between the first and second insulation boards, thereby adapting its insulation performance to different production insulation needs and thus improving its applicability to a certain extent.

[0034] 2. By incorporating an adaptive component, when the first and second insulation plates move away from or near each other within the insulation groove, the first and second adaptive plates can slide into or out of the groove under the action of the adaptive spring. This ensures that the first and second adaptive plates are always in contact with the surface of the insulation groove, thereby guaranteeing the insulation performance of the insulation space and, consequently, the insulation stability of the insulation cylinder after adjusting its insulation performance. Attached Figure Description

[0035] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 A three-dimensional structural diagram of a fitted insulation cylinder is shown.

[0037] Figure 2 A front view of a fitted insulation cylinder is shown.

[0038] Figure 3 It shows Figure 2 Sectional view of AA.

[0039] Figure 4 It shows Figure 3 A magnified schematic diagram of the local structure at point A.

[0040] Figure 5 A top view of a fitted insulation cylinder is shown.

[0041] Figure 6 An exploded view of a portion of the structure of a fitted insulation cylinder is shown.

[0042] Legend:

[0043] 1. Cylinder; 2. Support plate; 3. Insulation groove; 4. Internal groove; 5. Connecting groove; 6. Annular groove; 7. First insulation plate; 8. Adaptation groove; 9. Second insulation plate; 10. Insulation space; 11. Connecting block; 12. Adaptation spring; 13. First adapting plate; 14. Second adapting plate; 15. Adjusting motor; 16. Adjusting shaft; 17. Drive gear; 18. Annular groove; 19. Driven gear; 20. Gear teeth; 21. Internal shaft; 22. Double-ended screw; 23. Transmission gear; 24. Threaded block. Detailed Implementation

[0044] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0045] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0046] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a component in between. When a component is considered "connected to" another component, it can be directly connected to the other component or may have a component in between. When a component is considered "set on" another component, it can be directly set on the other component or may have a component in between. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0047] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0048] Reference Figures 1 to 6 The following is a further description of an embodiment of the adhesive heat preservation cylinder of this utility model.

[0049] A type of heat-insulating cylinder includes a cylinder body 1. It should be noted that in use, the cylinder body 1 is inserted into a single-crystal furnace, and a support plate 2 is fixedly mounted on the cylinder body 1. Multiple support plates 2 are provided and evenly distributed on the cylinder body 1. Multiple evenly distributed heat-insulating grooves 3 are formed inside the cylinder body 1. Multiple evenly distributed internal grooves 4 are also formed on the cylinder body 1. A connecting groove 5 is formed on the surface of the internal groove 4 near the heat-insulating groove 3. An annular retaining groove 6 is formed on the surface of the cylinder body 1 near the support plate 2. The device also includes:

[0050] An adjusting member is disposed on the support plate 2, the adjusting member comprising:

[0051] The adjusting motor 15 is fixedly mounted on the support plate 2. It should be noted that the adjusting motor 15 is electrically connected to an external control device.

[0052] An adjusting shaft 16 is rotatably mounted on the support plate 2, and one end of the adjusting shaft 16 near the adjusting motor 15 is fixedly connected to the output end of the adjusting motor 15.

[0053] The drive gear 17 is fixedly mounted on the end of the adjustment shaft 16 away from the adjustment motor 15.

[0054] A transmission mechanism is disposed on the cylinder 1, and the transmission mechanism includes:

[0055] An annular locking block 18 is rotatably disposed within the annular locking groove 6;

[0056] Driven gear 19 is fixedly disposed at one end of the annular locking block 18 away from the cylinder 1, and driven gear 19 meshes with driving gear 17;

[0057] The tooth 20 has multiple teeth, and the multiple teeth 20 are evenly distributed circumferentially on the surface of the driven gear 19 near the cylinder 1.

[0058] A rotating component, located within the built-in groove 4, comprises:

[0059] An internal shaft 21 is located in the internal groove 4, and one end of the internal shaft 21 is rotatably connected to the cylinder 1. A double-ended screw 22 is fixedly provided at the other end of the internal shaft 21, and the threads at both ends of the double-ended screw 22 are opposite in direction.

[0060] The transmission gear 23 is fixedly mounted on the built-in shaft 21, and the transmission gear 23 meshes with the teeth 20;

[0061] There are two threaded blocks 24, and the two threaded blocks 24 are slidably disposed in the built-in groove 4. The threaded blocks 24 are threadedly connected to the double-ended screw 22, and the two threaded blocks 24 are respectively fixedly connected to the adjacent connecting blocks 11.

[0062] During operation, staff can adjust the performance of the insulation cylinder according to actual production needs. The specific process is as follows: the adjustment motor 15 is started by external control equipment, which causes the adjustment shaft 16, which is fixedly connected to the output end of the adjustment motor 15, to rotate. This, in turn, drives the drive gear 17, which is fixedly connected to the adjustment shaft 16, to rotate. Through the meshing between the drive gear 17 and the driven gear 19, the driven gear 19 rotates. Through the meshing between the teeth 20 on the driven gear 19 and the transmission gear 23, the transmission gear 23 rotates. This causes the built-in shaft 21, which is fixedly connected to the transmission gear 23, to rotate. This causes the double-ended screw 22, which is fixedly connected to the built-in shaft 21, to rotate. Through the threaded transmission between the double-ended screw 22 and the two threaded blocks 24, the two threaded blocks 24 move away from or closer to each other.

[0063] A temperature regulating mechanism is disposed within the insulation tank 3. The temperature regulating mechanism is used to adjust the insulation performance of the cylinder 1. The temperature regulating mechanism includes:

[0064] The first insulation board 7 is slidably disposed in the insulation groove 3, and two symmetrically arranged adaptation grooves 8 are provided on the first insulation board 7, and an adaptive component is disposed in the adaptation groove 8.

[0065] The second insulation board 9 is slidably disposed in the insulation groove 3. Two symmetrically arranged adaptation grooves 8 are also provided on the second insulation board 9, and an adaptive component is also provided in the adaptation groove 8 of the second insulation board 9. The space between the first insulation board 7 and the second insulation board 9 is the insulation space 10.

[0066] There are two connecting blocks 11, and the two connecting blocks 11 are symmetrically distributed in the connecting groove 5. The connecting blocks 11 are slidably connected to the connecting groove 5, and the two connecting blocks 11 are respectively fixedly connected to the adjacent first insulation board 7 and second insulation board 9.

[0067] When the two threaded blocks 24 move away from or move closer to each other, the two connecting blocks 11 fixedly connected to the two threaded blocks 24 move away from or move closer to each other, which in turn causes the first insulation plate 7 and the second insulation plate 9 fixedly connected to the two connecting blocks 11 to move away from or move closer to each other. This adjusts the volume of the insulation space 10 between the first insulation plate 7 and the second insulation plate 9, thereby adjusting the insulation performance of the insulation cylinder. By providing a temperature adjustment mechanism, this device can adjust the volume of the insulation space 10 between the first insulation plate 7 and the second insulation plate 9, thus adapting the insulation performance of this device to different production insulation needs, thereby improving the applicability of this device to a certain extent.

[0068] The adaptive component includes:

[0069] There are multiple adaptive springs 12, and the multiple adaptive springs 12 are equidistantly arranged in the adaptive groove 8, and the adaptive springs 12 are always in a compressed state;

[0070] Two first adapting plates 13 are provided, and the two first adapting plates 13 are slidably disposed in the adapting groove 8 of the first insulation plate 7. The first adapting plates 13 are fixedly connected to the adapting springs 12 in the first insulation plate 7.

[0071] There are two second adaptation plates 14, and the two second adaptation plates 14 are slidably disposed in the adaptation groove 8 of the second insulation plate 9. The second adaptation plates 14 are fixedly connected to the adaptation spring 12 in the second insulation plate 9.

[0072] When the first insulation plate 7 and the second insulation plate 9 are far apart or close together in the insulation groove 3, the adaptive component allows the first adaptive plate 13 and the second adaptive plate 14 to slide into or out of the adaptive groove 8 under the action of the adaptive spring 12. This ensures that the first adaptive plate 13 and the second adaptive plate 14 are always in contact with the surface of the insulation groove 3, thereby ensuring the insulation performance of the insulation space 10 and thus ensuring the insulation stability of the insulation cylinder after adjusting the insulation performance.

[0073] It should be noted that the materials of the first insulation board 7, the second insulation board 9, the first adapting board 13, and the second adapting board 14 are all insulation materials, such as high-purity graphite. Using high-purity graphite as the material for the first insulation board 7, the second insulation board 9, the first adapting board 13, and the second adapting board 14 can effectively ensure the insulation performance of the insulation cylinder.

[0074] Working Principle: During operation, the operator can adjust the performance of the insulation cylinder according to actual production needs. The specific process is as follows: An external control device starts the regulating motor 15, causing the regulating shaft 16, which is fixedly connected to the output end of the regulating motor 15, to rotate. This, in turn, drives the drive gear 17, which is fixedly connected to the regulating shaft 16, to rotate. Through the meshing between the drive gear 17 and the driven gear 19, the driven gear 19 rotates. Through the meshing between the teeth 20 on the driven gear 19 and the transmission gear 23, the transmission gear 23 rotates, thereby causing the inner... The rotation of the shaft 21 drives the double-headed screw 22, which is fixedly connected to the internal shaft 21, to rotate. Through the threaded transmission between the double-headed screw 22 and the two threaded blocks 24, the two threaded blocks 24 move away from each other or move closer to each other. This causes the two connecting blocks 11, which are fixedly connected to the two threaded blocks 24 respectively, to move away from each other or move closer to each other. This causes the first insulation plate 7 and the second insulation plate 9, which are fixedly connected to the two connecting blocks 11 respectively, to move away from each other or move closer to each other. This adjusts the volume of the insulation space 10 between the first insulation plate 7 and the second insulation plate 9, thereby adjusting the insulation performance of the insulation cylinder.

[0075] When the first insulation plate 7 and the second insulation plate 9 are far apart or close together in the insulation groove 3, the adaptive component allows the first adaptive plate 13 and the second adaptive plate 14 to slide into or out of the adaptive groove 8 under the action of the adaptive spring 12. This ensures that the first adaptive plate 13 and the second adaptive plate 14 are always in contact with the surface of the insulation groove 3, thereby ensuring the insulation performance of the insulation space 10 and thus ensuring the insulation stability of the insulation cylinder after adjusting the insulation performance.

[0076] The above description of the embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A type of heat-insulating cylinder, comprising a cylinder body (1) and support plates (2) fixedly disposed on the cylinder body (1), wherein multiple support plates (2) are provided and the multiple support plates (2) are evenly distributed on the cylinder body (1), characterized in that, The cylinder (1) has multiple evenly distributed insulation grooves (3) inside, and multiple evenly distributed internal grooves (4) are also provided on the cylinder (1). A connecting groove (5) is provided on the surface of the internal groove (4) near the insulation groove (3). An annular groove (6) is provided on the surface of the cylinder (1) near the support plate (2). The cylinder also includes: A temperature control mechanism is installed in the insulation tank (3) and is used to adjust the insulation performance of the cylinder (1). An adjusting element is provided on the support plate (2); A transmission mechanism is provided on the cylinder (1), which is used to transmit the power of the adjusting member to the temperature regulating mechanism.

2. The adhesive-fit insulation cylinder according to claim 1, characterized in that, The temperature control mechanism includes: The first insulation board (7) is slidably disposed in the insulation groove (3), and two symmetrically arranged adaptation grooves (8) are opened on the first insulation board (7), and an adaptive component is disposed in the adaptation groove (8); The second insulation board (9) is slidably disposed in the insulation groove (3). Two symmetrically arranged adaptation grooves (8) are also opened on the second insulation board (9), and an adaptive component is also provided in the adaptation groove (8) of the second insulation board (9). There are two connecting blocks (11), and the two connecting blocks (11) are symmetrically distributed in the connecting groove (5). The connecting blocks (11) are slidably connected to the connecting groove (5), and the two connecting blocks (11) are fixedly connected to the adjacent first insulation board (7) and second insulation board (9) respectively.

3. The adhesive-fit insulation cylinder according to claim 2, characterized in that, The adaptive component includes: There are multiple adaptation springs (12), and the multiple adaptation springs (12) are equidistantly arranged in the adaptation groove (8), and the adaptation springs (12) are always in a compressed state; Two first adapting plates (13) are provided, and the two first adapting plates (13) are slidably disposed in the adapting groove (8) of the first insulation plate (7). The first adapting plates (13) are fixedly connected to the adapting spring (12) in the first insulation plate (7). There are two second adaptation plates (14), and the two second adaptation plates (14) are slidably disposed in the adaptation groove (8) of the second insulation plate (9). The second adaptation plates (14) are fixedly connected to the adaptation spring (12) in the second insulation plate (9).

4. The adhesive-fit insulation cylinder according to claim 3, characterized in that, The materials of the first insulation board (7), the second insulation board (9), the first adapting board (13), and the second adapting board (14) are all insulation materials.

5. A type of heat-insulating cylinder according to claim 4, characterized in that, The adjusting element includes: Adjustment motor (15) is fixedly mounted on the support plate (2); An adjusting shaft (16) is rotatably mounted on the support plate (2), and one end of the adjusting shaft (16) near the adjusting motor (15) is fixedly connected to the output end of the adjusting motor (15); The drive gear (17) is fixedly mounted on the end of the adjusting shaft (16) away from the adjusting motor (15).

6. The adhesive-fit insulation cylinder according to claim 5, characterized in that, The transmission mechanism includes: An annular locking block (18) is rotatably disposed within the annular locking groove (6); A driven gear (19) is fixedly disposed at one end of the annular block (18) away from the cylinder (1), and the driven gear (19) meshes with the driving gear (17); The teeth (20) are multiple, and the multiple teeth (20) are evenly distributed circumferentially on the surface of the driven gear (19) near the cylinder (1); The rotating component is located within the built-in groove (4).

7. A bonding-type heat-insulating cylinder according to claim 6, characterized in that, The rotating component includes: An internal shaft (21) is located in the internal groove (4), and one end of the internal shaft (21) is rotatably connected to the cylinder (1). A double-ended screw (22) is fixedly provided at the other end of the internal shaft (21), and the threads at both ends of the double-ended screw (22) are opposite in direction. The transmission gear (23) is fixedly mounted on the built-in shaft (21), and the transmission gear (23) meshes with the teeth (20); Two threaded blocks (24) are provided, and the two threaded blocks (24) are slidably disposed in the built-in groove (4). The threaded blocks (24) are threadedly connected to the double-ended screw (22), and the two threaded blocks (24) are respectively fixedly connected to the adjacent connecting block (11).

8. A fitted heat-insulating cylinder according to claim 7, characterized in that, The space between the first insulation board (7) and the second insulation board (9) is the insulation space (10).

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