AOI detection light source and detection system

Abstract

The utility model relates to the technical field of optical detection, in particular to an AOI detection light source and a detection system. The detection light source comprises a first light source, a second light source and a third light source; part of light emitted by the first light source is condensed by the cylindrical mirror and obliquely reflected by the semi-reflecting and semi-transmitting mirror to form a first light beam; the two groups of second light sources are symmetrically arranged, and light emitted by each group of second light sources is obliquely reflected by the first light guide surface and the second light guide surface in sequence and then converged to form a second light beam; the two third light sources are symmetrically arranged, light emitted by each third light source is obliquely reflected by the third light guide surface and then converged to form a third light beam, and the third light beam is located on the side, away from the first light beam, of the second light beam; the total angle of the first light beam, the second light beam and the third light beam is larger than or equal to 160 degrees. According to the AOI detection light source disclosed by the utility model, due to the unique optical design, light rays up to 160 degrees can be incident to a defect area in a convergent form, so that a camera can conveniently capture defect characteristic information.

Description

Technical Field

[0001] This utility model relates to the field of optical inspection technology, and in particular to an AOI inspection light source and inspection system. Background Technology

[0002] In the field of semiconductor silicon wafers, the detection of micro-short and micro-defects (such as defects formed by the aggregation of impurities or point defects, dislocations, and stacking faults) is particularly critical. These defects are often extremely small in size, typically only tens of micrometers or even just a few micrometers, posing a significant challenge to their detection.

[0003] In the quality inspection of front-end circuitry of PCBs, detecting defects such as blister coating and copper underlay is equally challenging. Blister coating defects are usually caused by insufficiently thin resist layers or uneven pattern distribution during electroplating, leading to direct short circuits and severely impacting PCB performance and yield. Copper underlay defects, on the other hand, may be caused by uneven electroplating or poor copper quality, affecting the conductivity and reliability of the PCB.

[0004] Traditional inspection methods struggle to detect these minute anomalies, leading the industry to adopt more advanced inspection technologies. While AOI optical inspection systems can non-destructively inspect for defects using high-resolution camera imaging, they still cannot detect defects such as micro-shorts, capsules, and undercopper layers encountered in the quality inspection of semiconductor silicon wafers and front-end circuitry of PCBs. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of existing AOI optical inspection systems in the background technology, which cannot detect defects such as micro-shorts, capsules, and bottom copper encountered in the quality inspection of semiconductor silicon wafers and PCB front-end circuits. It provides an AOI inspection light source and inspection system, which adopts a unique optical design to concentrate up to 160 degrees of light onto the imaging surface, thereby ensuring multi-angle incidentness and uniformity of the defect area, making it easy for the camera to capture defect feature information.

[0006] In a first aspect, the present invention provides an AOI detection light source, comprising:

[0007] The first light source emits a portion of its light rays, which are then focused by a cylindrical mirror and then obliquely reflected by a semi-reflective lens to form the first beam.

[0008] Two sets of second light sources are symmetrically arranged. The light emitted by each set of second light sources is reflected obliquely by the first light guide surface and the second light guide surface in sequence to form a second beam. The two sets of second beams are symmetrical with respect to the first beam.

[0009] Two sets of third light sources are symmetrically arranged. The light emitted by each set of third light sources is reflected at an angle by a third light guide surface and then converges to form a third beam. The third beam is located on the side of the second beam away from the first beam, and the two sets of third beams are symmetrical with respect to the first beam.

[0010] The first beam, the second beam, and the third beam converge to the same side, and the total angle of the first beam, the second beam, and the third beam is greater than or equal to 160 degrees.

[0011] This invention provides an AOI (Automated Optical Inspection) light source that, through a unique optical design, uses multiple light sources to form multiple converging beams, increasing the overall beam angle. This allows light rays up to 160 degrees to converge and strike the defect area, facilitating the camera's capture of defect feature information. In a preferred embodiment, the surface of the inspected object is positioned perpendicular to the main optical path of the first beam. When light rays from the first, second, and third beams at different angles strike the inspected object, the overall beam simultaneously illuminates the front and sides of the uneven structure, enabling the camera to clearly image the structure and easily identify defects on the inspected object.

[0012] As a preferred embodiment of this utility model, the third light source and the third light guide surface are located on the side of the first light guide surface away from the second light source.

[0013] As a preferred embodiment of this utility model, the third light guide surface and the first light guide surface are disposed on the same light guide component.

[0014] As a preferred embodiment of this utility model, the semi-reflective lens has an angle α with the main direction of the first beam, where α = 45°.

[0015] As a preferred embodiment of this utility model, the first light guide surface, the second light guide surface, and the third light guide surface all extend along the first direction; the projection of the first light guide surface in the first direction is a straight line; and the projections of the second light guide surface and the third light guide surface in the first direction are concave curves.

[0016] As a preferred embodiment of the present invention, the first beam, the second beam, and the third beam are all converging beams extending along a first direction, and the first beam, the second beam, and the third beam converge in the same focusing area.

[0017] As a preferred embodiment of this utility model, the first light source, the second light source, and the third light source each include a plurality of LED beads arranged sequentially along the first direction; the light-emitting side of the LED beads is provided with a strip-shaped Fresnel lens.

[0018] As a preferred embodiment of this utility model, the two second light guide surfaces are symmetrically arranged, and there is a space between the two second light guide surfaces for the first light beam to pass through.

[0019] As a preferred embodiment of this utility model, the two third light guide surfaces are symmetrically arranged, and there is a space between the two third light guide surfaces for the first light beam and the second light beam to pass through.

[0020] As a preferred embodiment of this utility model, it includes a housing, and a light outlet is provided on one side of the housing, from which the first light beam, the second light beam and the third light beam are emitted.

[0021] As a preferred embodiment of this utility model, the height of the semi-reflective mirror relative to the light outlet is greater than the height of the second light guide surface relative to the light outlet.

[0022] As a preferred embodiment of this utility model, the height of the second light guide surface relative to the light outlet is greater than the height of the third light guide surface relative to the light outlet.

[0023] As a preferred embodiment of this utility model, a first plate and a second plate are provided on one side of the outer shell, which are flush with each other, and the light outlet is located between the first plate and the second plate; one set of the third light sources is disposed on the inner wall of the first plate, and another set of the third light sources is disposed on the inner wall of the second plate.

[0024] As a preferred embodiment of this utility model, the outer shell is further provided with a camera port, and the camera port is opposite to the light outlet.

[0025] In a second aspect, the present invention provides an AOI detection system, including a camera and an AOI detection light source as described above; the camera is located on the side of the semi-reflective lens facing away from the first light source, and the camera is located on the reverse extension line of the main direction of the first beam.

[0026] As a preferred embodiment of the present invention, it also includes an object to be inspected, which is located on the main optical path of the first beam, and the first beam, the second beam and the third beam are all directed toward the object to be inspected.

[0027] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0028] This invention provides an AOI (Automated Optical Inspection) light source that, through a unique optical design, uses multiple light sources to form multiple converging beams, increasing the overall beam angle. This allows light rays up to 160 degrees to converge and strike the defect area, facilitating the camera's capture of defect feature information. In a preferred embodiment, the surface of the inspected object is positioned perpendicular to the main optical path of the first beam. When light rays from the first, second, and third beams at different angles strike the inspected object, the overall beam simultaneously illuminates the front and sides of the uneven structure, enabling the camera to clearly image the structure and easily identify defects on the inspected object. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the external shape of the AOI detection light source described in this utility model;

[0030] Figure 2 This is a schematic diagram of the structure of the AOI detection light source described in this utility model;

[0031] Figure 3 This is a cross-sectional view of the AOI detection light source described in this utility model;

[0032] Figure 4 This is a schematic diagram of the illumination of the AOI detection system described in this utility model.

[0033] Marked in the image:

[0034] 1-Outer shell;

[0035] 11-end plate; 12-camera port; 13-light outlet; 14-first plate body; 15-second plate body;

[0036] 2-LED light source;

[0037] 21 - First light source; 22 - Second light source; 23 - Third light source;

[0038] 3- Semi-reflective translucent lens;

[0039] 4-Cylindrical mirror;

[0040] 5-First light guide surface;

[0041] 6-Second light guide surface;

[0042] 7-Third light guide surface;

[0043] 8-Fresnel lens;

[0044] 9-Camera;

[0045] 10 - Item to be inspected. Detailed Implementation

[0046] The present invention will be further described in detail below with reference to specific embodiments. However, it should not be construed as limiting the scope of the present invention to the following embodiments; all technologies implemented based on the content of the present invention fall within the scope of the present invention.

[0047] Unless otherwise specified, the use of terms such as "upper," "lower," "left," "right," "center," "inner," and "outer" to indicate orientation or positional relationships in the description of specific embodiments of this utility model is based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product / equipment / device is typically placed during use. These terms are merely for the purpose of facilitating the description of the utility model solution or simplifying the description in specific embodiments, enabling those skilled in the art to quickly understand the solution, and do not indicate or imply that a specific device / component / element must have a specific orientation, or be constructed and operated in a specific positional relationship. Therefore, they should not be construed as limitations on this utility model.

[0048] Furthermore, the use of terms such as "horizontal," "vertical," "suspended," and "parallel" does not imply that the corresponding device / component / element must be absolutely horizontal, vertical, suspended, or parallel, but rather that it can be slightly tilted or have a deviation. For example, "horizontal" merely means that its direction is more horizontal relative to "vertical," not that the structure must be completely horizontal, but can be slightly tilted. Alternatively, it can be simplified to mean that the corresponding device / component / element, when set in a "horizontal," "vertical," "suspended," or "parallel" direction, can have an error / deviation of ±10% relative to the corresponding direction, more preferably within ±8%, more preferably within ±6%, more preferably within ±5%, and more preferably within ±4%. As long as the corresponding device / component / element is within the error / deviation range, it can still achieve its function in the present invention.

[0049] Furthermore, the use of terms such as "first," "second," and "third" in terminology is merely for distinguishing descriptions of identical or similar components and should not be interpreted as emphasizing or implying the relative importance of a particular component.

[0050] Furthermore, in the description of the embodiments of this utility model, "several", "multiple", and "several" represent at least two. The number can be any number, such as two, three, four, five, six, seven, eight, or nine, and can even exceed nine.

[0051] Furthermore, in the description of the technical solution of this utility model, unless otherwise explicitly specified / limited / restricted, the terms "set up," "install," "connect," "link," "equipped with," "laid out," and "arranged" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to common connection methods in the art, such as welding, riveting, bolting, and threaded connections. Such connections can be mechanical, electrical, or communication connections; they can be direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication between two components.

[0052] Example 1

[0053] like Figures 1 to 4 As shown, this embodiment provides an AOI detection light source, including a first light source 21, a second light source 22, and a third light source 23. Part of the light emitted by the first light source 21 is focused by a cylindrical mirror 4 and then obliquely reflected by a semi-reflective lens 3 to form a first beam. Two sets of second light sources 22 are symmetrically arranged, and the light emitted by each set of second light sources 22 is obliquely reflected by a first light guide surface 5 and a second light guide surface 6 to form a second beam. The two sets of second beams are symmetrical with respect to the first beam. Two sets of third light sources 23 are symmetrically arranged, and the light emitted by each set of third light sources 23 is obliquely reflected by a third light guide surface 7 to form a third beam. The third beam is located on the side of the second beam away from the first beam, and the two sets of third beams are symmetrical with respect to the first beam. The first beam, the second beam, and the third beam converge to the same side, and the total angle of the first beam, the second beam, and the third beam is greater than or equal to 160 degrees.

[0054] The first light source 21, the second light source 22, and the third light source 23 can all be LED light sources 2, which emit directional divergent beams to one side through LED chips or LED beads. After the divergent beams travel a certain distance in space, they can form a large area of ​​surface light.

[0055] Part of the light emitted from the first light source 21 is first focused by the cylindrical mirror 4, and then obliquely reflected by the semi-reflective lens 3 to form the first beam. The cylindrical mirror 4 refers to an optical element having a cylindrical shape in at least one cross-section. The cylindrical mirror 4 is typically a strip-shaped structure extending in a certain direction and can be used to focus or diffuse light from a strip-shaped light source. In this embodiment, the cylindrical mirror 4 is a type of cylindrical lens with focusing function, including but not limited to plano-convex cylindrical lenses, biconvex cylindrical lenses, or meniscus lenses. Figure 2 and Figure 3 As shown, the cylindrical mirror 4 in the figure extends along the first direction and is a plano-convex cylindrical lens. Through the focusing effect of the cylindrical mirror 4, the light beam emitted by the first light source 21 changes from a divergent state to a converging state. The semi-reflective lens 3 is located in front of the converging point of the converging light beam, that is, the first light beam formed after reflection by the semi-reflective lens 3 is also a converging light beam.

[0056] Tilt reflection refers to a type of reflection where the incident direction of the light beam is different from the reflection direction on the reflecting surface. Tilt reflection can make the reflected light beam have a different optical path from the incident light beam, thereby illuminating a designated position. The reflecting surface includes the semi-reflective lens 3, the first light guide surface 5, the second light guide surface 6, and the third light guide surface 7 described in this embodiment.

[0057] The semi-reflective mirror 3 is an optical element capable of partially transmitting and partially reflecting light. It is sometimes also called a semi-transparent mirror, a beam splitter, or a beam splitter. Through the effect of partial reflection, when the light beam emitted by the first light source 21, after being focused by the cylindrical mirror 4, is obliquely incident on the semi-reflective mirror 3, part of the light beam will be reflected by the semi-reflective mirror 3 to form a first light beam. The principal direction of the first light beam has an angle α with the semi-reflective mirror 3. The angle α is preferably 10°≤a≤80°, more preferably 30°≤a≤60°, and even more preferably a=45°.

[0058] When a=45°, the main direction of the beam emitted by the first light source 21 after being focused by the cylindrical mirror 4 is perpendicular to the main direction of the first beam. In terms of optical system arrangement, the rectangular space inside the rectangular shell can be fully utilized, making the structure more compact. The rectangular shell is also convenient for transportation and storage.

[0059] There are two sets of second light sources 22, which are symmetrically arranged relative to the first beam. For each set of second light sources 22, the light emitted by it is reflected by the first light guide surface 5 and the second light guide surface 6 in sequence to form a second beam. At least one of the first light guide surface 5 and the second light guide surface 6 has a converging effect on the light, so that the second beam formed after two reflections is a converging beam. The two sets of second beams are symmetrically arranged on both sides of the first beam, so that the overall beam formed by the first beam and the second beam has a larger total angle.

[0060] Preferably, the first light guide surface 5 is a plane, and the second light guide surface 6 is a strip-shaped concave surface, through which light is converged; this allows a larger surface light to be formed on the second light guide surface 6, which is beneficial for increasing the convergence beam angle of the second beam. The aforementioned strip-shaped concave surface refers to a reflective surface that extends along the first direction and whose projection in the first direction is a concave curve.

[0061] There are two sets of third light sources 23, symmetrically arranged relative to the first beam. For each set of third light sources 23, the emitted light is reflected by the third light guide surface 7 to form a third beam. The third light guide surface 7 has a converging effect on the light, making the third beam a convergent beam. Figure 4 As shown, the third beam is symmetrically arranged on both sides of the first beam, and the third beam is located on the side of the second beam away from the first beam. The total angle of the overall beam can be further increased through the third beam; the third light guide surface 7 can be a strip concave surface as described above.

[0062] In this embodiment, the total angle of the first beam, the second beam, and the third beam refers to the angle between the outermost rays on both sides of the overall beam they form.

[0063] Preferably, the first beam, the second beam, and the third beam converge in the same focusing area. This focusing area can be a linear area or a strip-shaped area with a certain width, and the total converging beam angle of the first beam, the second beam, and the third beam is greater than or equal to 160 degrees. The converging beam angle refers to the angle between the edge rays on both sides of the converging beam. Preferably, the projections of the second beam and the first beam in the first direction are continuous, that is, the overall beam formed by the first beam and the second beam contains rays at any angle within the range of the converging beam angle.

[0064] In summary, the AOI inspection light source provided in this embodiment, through a unique optical design, uses multiple sets of light sources to form multiple converging beams, thereby increasing the overall beam angle. This allows light rays of up to 160 degrees to converge and strike the defect area, facilitating the camera 9's capture of defect feature information. In a preferred embodiment, the surface of the object under inspection 10 can be positioned perpendicular to the main optical path of the first beam. When light rays at different angles from the first, second, and third beams strike the object under inspection 10, the overall beam can simultaneously illuminate the front and sides of the uneven structure, enabling the camera 9 to clearly image the structure and thus easily identify defects on the object under inspection 10.

[0065] Those skilled in the art will understand that, through the partial transmission effect of the semi-reflective mirror 3, when the incident light beam is absorbed and reflected by the object, part of the reflected light that hits the semi-reflective mirror 3 can be transmitted out. The transmitted reflected light can be obtained by the camera 9 or other detection devices, thereby imaging or other detection of the object.

[0066] In some embodiments, the third light source 23 and the third light guide surface 7 are located on the side of the first light guide surface 5 away from the second light source 22.

[0067] like Figure 3 and Figure 4 As shown, by setting the third light source 23 and the third light guide surface 7 on the side of the first light guide surface 5 away from the second light source 22, the optical path of the third beam formed by them can be reduced to illuminate the focusing area. Furthermore, since the third light guide surface 7 is closer to the focusing area than the second light guide surface 6, the third beam can have a larger tilt angle relative to the first beam, thereby increasing the total angle of the overall beam formed by the first beam, the second beam, and the third beam.

[0068] Preferably, the third light guide surface 7 and the first light guide surface 5 are disposed on the same light guide component, such as... Figure 3As shown, a first light guide surface 5 and a third light guide surface 7 can be respectively provided on two surfaces on different sides of the same light guide component, so that the light-emitting side of the third light source 23 faces the light guide component, thereby forming a third beam with a larger tilt angle relative to the first beam.

[0069] In some embodiments, the first light guide surface 5, the second light guide surface 6, and the third light guide surface 7 all extend along a first direction; the projection of the first light guide surface 5 in the first direction is a straight line; the projections of the second light guide surface 6 and the third light guide surface 7 in the first direction are concave curves; and the first beam, the second beam, and the third beam are all converging beams extending along the first direction.

[0070] A converging beam is a beam of light that converges along a region. In this embodiment, the first beam, the second beam, and the third beam all converge toward a linear or strip-shaped region, and the first beam, the second beam, and the third beam converge in the same focusing region, so that the overall beam they form is a converging beam.

[0071] The first light source 21, the second light source 22, and the third light source 23 each include a plurality of LED beads arranged sequentially along the first direction; a strip-shaped Fresnel lens 8 is provided on the light-emitting side of the LED beads.

[0072] A linear arrangement of several LED beads can form a linear illumination, which, in conjunction with the first light guide surface 5, the second light guide surface 6, and the third light guide surface 7, can form a strip-shaped converging beam. A Fresnel lens 8 is placed on the light-emitting side of the LED beads, which can focus the light and thus reduce the beam angle of the beam emitted by the LED beads.

[0073] In some embodiments, two second light guide surfaces 6 are symmetrically arranged, and there is a space between the two second light guide surfaces 6 for the first light beam to pass through; two third light guide surfaces 7 are symmetrically arranged, and there is a space between the two third light guide surfaces 7 for the first light beam and the second light beam to pass through.

[0074] Preferably, at the opposite edge positions of the two second light guide surfaces 6, the first beam and the second beam are continuous, that is, the edge rays of the first beam passing between the two second light guide surfaces 6 have the same or similar optical paths as the edge rays of the second beam. For this purpose, a sectional surface inclined relative to the main optical path of the first beam can be provided on the opposite sides of the two light guide members provided with the second light guide surfaces 6, and the included angle of the sectional surface is greater than the included angle of the edge rays of the first beam passing between the two second light guide surfaces 6.

[0075] Preferably, at the opposite edge positions of the two third light guiding surfaces 7, the second light beam and the third light beam are continuous, that is, the edge light rays of the second light beam passing between the two third light guiding surfaces 7 and the edge light rays of the third light beam have the same or similar optical paths. For this purpose, inclined cutting surfaces can be provided on the opposite side edges of the light guiding members provided with the third light guiding surfaces 7, and the included angle of the cutting surfaces is greater than the included angle of the edge light rays of the second light beam passing between the two third light guiding surfaces 7.

[0076] In some embodiments, it includes a housing 1, and a light exit 13 is provided on one side of the housing 1. The first light beam, the second light beam, and the third light beam are all emitted from the light exit 13.

[0077] Each optical component can be installed inside the housing 1, and the housing 1 plays a role in protecting and maintaining the relative positions of the components stable. A light exit 13 is provided on one side of the housing 1, and the light exit 13 can be made of a light-transmitting material, such as a transparent material; the size of the light exit 13 is set relatively large so that the first light beam, the second light beam, and the third light beam can be emitted from the light exit 13.

[0078] Preferably, the height of the semi-transmissive semi-reflective lens 3 relative to the light exit 13 is greater than the height of the second light guiding surface 6 relative to the light exit 13; the height of the second light guiding surface 6 relative to the light exit 13 is greater than the height of the third light guiding surface 7 relative to the light exit 13.

[0079] The heights of the semi-transmissive semi-reflective lens 3, the second light guiding surface 6, and the third light guiding surface 7 relative to the light exit 13 decrease in sequence, making the distribution of each light beam distinct; by blocking the excess light on both sides of the first light beam through the light guiding member where the second light guiding surface 6 is located and blocking the excess light on one side of the second light beam through the light guiding member where the third light guiding surface 7 is located, the overlap between each light beam can be reduced, and the uniformity of the light output can be improved.

[0080] In some embodiments, a first plate body 14 and a second plate body 15 that are flush with each other are provided on one side of the housing 1, and the light exit 13 is located between the first plate body 14 and the second plate body 15; a group of third light sources 23 are provided on the inner wall of the first plate body 14, and another group of third light sources 23 are provided on the inner wall of the second plate body 15.

[0081] The first plate body 14 and the second plate body 15 are located on the same side of the housing 1, the first plate body 14 and the second plate body 15 are flush with each other and there is a gap between them, and this gap is the light exit 13; the two groups of third light sources 23 are respectively provided on the inner walls of the plates on both sides of the light exit 13, which can make the height difference between the third light sources 23 and the light exit 13 smaller, thereby reducing the height of the third light guiding surface 7.

[0082] Preferably, a camera port 12 is further provided on the housing 1, and the camera port 12 is opposite to the light exit 13.

[0083] Light transmitted from the semi-reflective mirror 3 can be emitted from the camera port 12 and captured by a detection device, such as a camera 9, to form an image. The camera port 12 is made of a light-transmitting material, such as a transparent material; the size of the camera port 12 is relatively smaller than the size of the light exit port 13.

[0084] Specifically, the outer shell 1 can be a rectangular block, including four sides and two end plates 11. Light outlet 13 and camera outlet 12 can be respectively provided on the two opposite sides. Air cooling or liquid cooling pipes can be provided on the end plates 11. The pipes pass through the inside of the light source to absorb the heat of the light source for cooling.

[0085] The AOI detection light source provided in this embodiment has a unique optical design that is reflected in at least the following aspects:

[0086] 1) The light emitted by the second light source 22 is reflected twice to form a second beam, and the third light source 23 and the third light guide surface 7 are located on the side of the first light guide surface 5 away from the second light source 22. Under the condition of forming a larger total angle, the space can be made more fully and the optical system can be made more compact.

[0087] 2) The heights of the semi-reflective mirror 3, the second light guide surface 6, and the third light guide surface 7 relative to the light outlet 13 decrease sequentially, and each beam is formed by surface light after reflection, making the distribution of each beam distinct. By using the light guide component where the second light guide surface 6 is located to block the excess light on both sides of the first beam, and the light guide component where the third light guide surface 7 is located to block the excess light on one side of the second beam, the overlap between each beam can be reduced, and the uniformity of light output can be improved.

[0088] 3) Each beam has a large beam convergence angle. When the first beam, the second beam, and the third beam converge in the same focusing area, by adjusting the shape and orientation of each optical component, light rays at any angle within the beam convergence angle range can be included in the overall beam, resulting in better uniformity of the light ray angle.

[0089] Example 2

[0090] This embodiment provides an AOI detection system, including a camera 9 and an AOI detection light source as described in Embodiment 1; the camera 9 is located on the side of the semi-reflective lens 3 facing away from the first light source 21, and the camera 9 is located on the reverse extension line of the main direction of the first beam.

[0091] Camera 9 is used to acquire light transmitted from the semi-reflective mirror 3, thereby forming an image; specifically, camera 9 is oriented toward camera port 12.

[0092] Preferably, the system further includes an object to be inspected 10, which is located on the main optical path of the first beam, and the first beam, the second beam, and the third beam are all directed toward the object to be inspected 10.

[0093] After the first, second, and third beams illuminate the object 10, some of the light is reflected by the object 10 and illuminates the semi-reflective lens 3 in the opposite direction to the first beam. Some of the light illuminating the semi-reflective lens 3 is transmitted through the lens 3 and is projected onto the photosensitive element of the camera 9 to form an image. Thus, a high-definition image of a local area on the object 10 can be obtained. Because the overall beam convergence angle is large, the defect features of the local area on the object 10 can be clearly displayed.

[0094] In a preferred embodiment, the AOI detection light source includes a housing 1. Two opposing surfaces of the housing 1 are respectively provided with a light-emitting port 13 and a camera port 12, which are arranged opposite each other. The object to be inspected 10 is located outside the light-emitting port 13 and opposite to it, while the camera 9 is located outside the camera port 12 and opposite to it. Figure 4 As shown, inside the housing 1, a semi-reflective lens 3 is provided between the light outlet 13 and the camera port 12. The semi-reflective lens 3 is inclined to the line connecting the centers of the light outlet 13 and the camera port 12, and the inclination angle is preferably 45°. A first light source 21 is provided on the left or right side of the semi-reflective lens 3. The light emitted by the first light source 21 is focused by the cylindrical mirror 4 and then directed onto the semi-reflective lens 3. Part of the light is reflected by the semi-reflective lens 3 and emitted from the light outlet 13. The light beam reflected by the semi-reflective lens 3 is the aforementioned first light beam. Two sets of second light sources 22 and two sets of third light sources 23 are respectively provided on both sides of the line connecting the centers of the light outlet 13 and the camera port 12. The second light source 22 and the first light guide surface 5 are respectively connected. The light source 22 is coupled with the second light guide surface 6. The first light guide surface 5 faces upward and the second light guide surface 6 faces downward. The light emitted by the second light source 22 is reflected by the first light guide surface 5 and the second light guide surface 6 in sequence and then emitted from the light outlet 13. The light beam reflected by the second light guide surface 6 is the second light beam mentioned above. The two sets of second light beams are distributed on both sides of the first light beam. The third light source 23 is coupled with the third light guide surface 7. The third light guide surface 7 faces the light outlet 13 and the third light source 23 faces upward. The light emitted by the third light source 23 is reflected by the third light guide surface 7 and then emitted from the light outlet 13. The third light guide surface 7 is located on the side of the first light guide surface 5 away from the second light source 22. The third light guide surface 7 and the first light guide surface 5 are located on the same light guide component.

[0095] For ease of description, "upper" and "lower" in this embodiment refer to... Figure 4 In actual use, "above" and "below" are not limited to vertical positions in space. Depending on the placement, they can refer to left and right, front and back, etc.

[0096] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An AOI (Automated Optical Inspection) light source, characterized in that, include: The first light source (21) emits a portion of light that is focused by a cylindrical mirror (4) and then obliquely reflected by a semi-reflective lens (3) to form the first beam. Two sets of second light sources (22) are symmetrically arranged. The light emitted by each set of second light sources (22) is reflected obliquely by the first light guide surface (5) and the second light guide surface (6) in sequence to form a second beam. The two sets of second beams are symmetrical with respect to the first beam. Two sets of third light sources (23) are symmetrically arranged. The light emitted by each set of third light sources (23) is reflected obliquely by the third light guide surface (7) and converges to form a third beam. The third beam is located on the side of the second beam away from the first beam. The two sets of third beams are symmetrical with respect to the first beam. The first beam, the second beam, and the third beam converge to the same side, and the total angle of the first beam, the second beam, and the third beam is greater than or equal to 160 degrees.

2. The AOI detection light source according to claim 1, characterized in that, The third light source (23) and the third light guide surface (7) are located on the side of the first light guide surface (5) away from the second light source (22).

3. The AOI detection light source according to claim 2, characterized in that: The third light guide surface (7) and the first light guide surface (5) are disposed on the same light guide component; And / or, The semi-reflective lens (3) has an angle α with the main direction of the first beam, where α = 45°.

4. The AOI detection light source according to claim 1, characterized in that, The first light guide surface (5), the second light guide surface (6) and the third light guide surface (7) all extend along the first direction; the projection of the first light guide surface (5) in the first direction is a straight line; the projections of the second light guide surface (6) and the third light guide surface (7) in the first direction are concave curves; The first beam, the second beam, and the third beam are all converging beams extending along a first direction, and the first beam, the second beam, and the third beam converge in the same focusing area; The first light source (21), the second light source (22) and the third light source (23) each include a plurality of LED beads arranged sequentially along the first direction; the light-emitting side of the LED beads is provided with a strip-shaped Fresnel lens (8).

5. The AOI detection light source according to claim 1, characterized in that, The two second light guide surfaces (6) are symmetrically arranged, and there is a space between the two second light guide surfaces (6) for the first light beam to pass through; The two third light guide surfaces (7) are symmetrically arranged, and there is a space between the two third light guide surfaces (7) for the first light beam and the second light beam to pass through.

6. The AOI detection light source according to any one of claims 1-5, characterized in that, Includes a housing (1), and a light outlet (13) is provided on one side of the housing (1), from which the first light beam, the second light beam and the third light beam are emitted.

7. The AOI detection light source according to claim 6, characterized in that, The height of the semi-reflective mirror (3) relative to the light outlet (13) is greater than the height of the second light guide surface (6) relative to the light outlet (13); The height of the second light guide surface (6) relative to the light outlet (13) is greater than the height of the third light guide surface (7) relative to the light outlet (13).

8. The AOI detection light source according to claim 6, characterized in that: The outer shell (1) has a first plate (14) and a second plate (15) that are flush with each other on one side, and the light outlet (13) is located between the first plate (14) and the second plate (15); one set of the third light source (23) is disposed on the inner wall of the first plate (14), and another set of the third light source (23) is disposed on the inner wall of the second plate (15); And / or, The outer casing (1) is also provided with a camera port (12), and the camera port (12) is opposite to the light outlet (13).

9. An AOI (Automated Optical Inspection) system, characterized in that, Includes a camera (9) and an AOI detection light source as described in any one of claims 1-8; the camera (9) is located on the side of the semi-reflective lens (3) facing away from the first light source (21), and the camera (9) is located on the reverse extension line of the main direction of the first beam.

10. The AOI detection system according to claim 9, characterized in that, It also includes the test object (10), which is located on the main optical path of the first beam, and the first beam, the second beam and the third beam are all directed toward the test object (10).

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