Micro-focus X-ray source space radiation intensity test board

Abstract

The utility model relates to a micro-focus X-ray source space radiation intensity test board, and belongs to the technical field of X-ray source manufacturing. Comprising a base, a vertically-arranged fixing rod is arranged on the base, an X-ray generator is arranged on the fixing rod, an arc-shaped guide rail is arranged on the base, a first sliding block is arranged on the arc-shaped guide rail, a vertical guide rail is arranged on the first sliding block, a second sliding block is arranged on the vertical guide rail, and a transverse guide rail is arranged on the side face of the second sliding block. A third sliding block is arranged on the transverse guide rail, a detector is arranged on the third sliding block, and the detector is used for detecting the beam outlet angle and the space radiation intensity distribution of a radiation source emitted by the X-ray generator. And the arc-shaped guide rail is an arc section made by taking an emission point of the X-ray generator as a circle center. The transverse guide rail is perpendicular to the tangent line of the arc-shaped guide rail. The device is convenient to operate, can test the beam-out angle and the spatial intensity distribution of the radiation source, and saves time and labor.

Description

A micro-focus X-ray source space radiation intensity testing platform Technical Field

[0001] This utility model relates to a micro-focus X-ray source space radiation intensity testing station, belonging to the field of X-ray source manufacturing technology. Background Technology

[0002] Micro-focus X-ray sources are high-performance X-ray generating devices that reduce the size of the X-ray focus to the micrometer level (typically ≤10μm) through precise design. Their core advantage lies in high-resolution imaging capabilities, and they are widely used in fields such as industrial inspection, semiconductor manufacturing, and medical diagnostics.

[0003] During the factory testing of micro-focus X-ray sources, it is necessary to test the beam exit angle and spatial radiation intensity distribution of the X-ray source. Summary of the Invention

[0004] The technical problem to be solved by this utility model is to provide a micro-focus X-ray source spatial radiation intensity testing station that is easy to operate and can test the beam angle and spatial intensity distribution of the X-ray source, saving time and effort.

[0005] The technical solution adopted by this utility model to solve the above problems is as follows: a micro-focus X-ray source spatial radiation intensity testing platform, including a base, a vertically arranged fixed rod on the base, an X-ray generator on the fixed rod, an arc-shaped guide rail on the base, a first slider on the arc-shaped guide rail, a vertical guide rail on the first slider, a second slider on the vertical guide rail, a transverse guide rail on the side of the second slider, a third slider on the transverse guide rail, and a detector on the third slider. The detector detects the beam angle and spatial radiation intensity distribution of the X-ray source emitted by the X-ray generator.

[0006] The arc-shaped guide rail is an arc segment centered on the emission point of the X-ray generator.

[0007] The tangent of the transverse guide rail is perpendicular to that of the arc-shaped guide rail.

[0008] A vertical cylinder is provided on the side of the vertical guide rail. The extension rod of the vertical cylinder is fixedly connected to the second slider. The vertical cylinder drives the second slider to move along the vertical guide rail.

[0009] Compared with the prior art, the advantages of this utility model are: a micro-focus X-ray source spatial radiation intensity testing station is easy to operate and can test the beam angle and spatial intensity distribution of the X-ray source, saving time and effort. Attached Figure Description

[0010] Figure 1 is a schematic diagram of a micro-focus X-ray source space radiation intensity testing platform according to an embodiment of the present invention;

[0011] In the figure, 1 is the base, 2 is the arc-shaped guide rail, 3 is the first slider, 4 is the second slider, 5 is the vertical guide rail, 6 is the third slider, 7 is the detector, 8 is the horizontal guide rail, 9 is the fixing rod, and 10 is the X-ray generator. Detailed Implementation

[0012] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

[0013] As shown in Figure 1, a micro-focus X-ray source spatial radiation intensity testing stage in this embodiment includes a base 1, on which a vertically arranged fixing rod 9 is fixed. An X-ray generator 10 is mounted on the side of the fixing rod 9. An arc-shaped guide rail 2 is provided on the top edge of the base 1. The arc-shaped guide rail 2 is an arc segment centered on the emission point of the X-ray generator 10. A first slider 3 is provided on the arc-shaped guide rail 2, and a vertical guide rail 5 is fixed on the first slider 3. A second slider 4 is fitted on the vertical guide rail 5. A horizontal guide rail 8 is fixed on the side of the second slider 4, and a third slider 6 is fitted on the horizontal guide rail 8. A detector 7 is mounted on the top of the third slider 6. The first slider can move arc-shaped along the arc-shaped guide rail, thereby driving the detector to move arc-shaped; the second slider can move vertically along the vertical guide rail, thereby driving the detector to move vertically; the third slider can move horizontally along the horizontal guide rail, thereby driving the detector to move horizontally. The moving detector 7 works in conjunction with the X-ray generator 10, enabling the detector to detect the beam angle and spatial radiation intensity distribution of the X-ray source emitted by the X-ray generator.

[0014] The tangents of the aforementioned transverse guide rail and the arc-shaped guide rail are perpendicular.

[0015] The curved guide rail, vertical guide rail, and horizontal guide rail are all equipped with test start position and test end position.

[0016] A vertical cylinder is installed on the side of the vertical guide rail. The extension rod of the vertical cylinder fixes the second slider, and the vertical cylinder drives the second slider to move along the vertical guide rail. Alternatively, several limiting holes are opened on the side of the vertical guide rail, evenly spaced along the height direction of the vertical guide rail. The operator moves the second slider along the vertical guide rail, and after it reaches the position, a limiting rod is inserted into the limiting hole. The limiting rod is located at the bottom of the second slider to prevent the second slider from sliding down.

[0017] Testing process:

[0018] Step 1: Set the position of the third slider on the horizontal guide rail, which is the horizontal position of the detector;

[0019] Step 2: Set the position of the second slider on the vertical guide rail, that is, the vertical position of the detector;

[0020] Step 3: Start testing from the position to be tested on the curved guide rail, and record the test data during the process;

[0021] Step 4: When the first slider moves from the start position to the end position, continue from Step 2; when the vertical guide rail test range is completed, continue from Step 1. When the horizontal guide rail test range is completed, the test ends.

[0022] By following the steps described above, the beam exit angle of the X-ray source emitted by the X-ray generator and the radiation intensity distribution in that space can be measured. This application is easy to operate and saves time and effort.

[0023] In addition to the above embodiments, this utility model also includes other implementation methods. All technical solutions formed by equivalent transformation or equivalent substitution should fall within the protection scope of the claims of this utility model.

Claims

1. A micro-focus X-ray source space radiation intensity testing stage, characterized in that: The device includes a base, on which a vertically arranged fixed rod is mounted, on which an X-ray generator is mounted, on which an arc-shaped guide rail is mounted, on which a first slider is mounted, on which a vertical guide rail is mounted, on which a second slider is mounted, on which a transverse guide rail is mounted, on which a third slider is mounted, and on which a detector is mounted, the detector detecting the beam angle and spatial radiation intensity distribution of the X-ray source emitted by the X-ray generator.

2. The micro-focal X-ray source space radiation intensity testing stage according to claim 1, characterized in that: The arc-shaped guide rail is an arc segment centered on the emission point of the X-ray generator.

3. The micro-focal X-ray source space radiation intensity testing stage according to claim 1, characterized in that: The tangent of the transverse guide rail is perpendicular to that of the arc-shaped guide rail.

4. The micro-focal X-ray source space radiation intensity testing stage according to claim 1, characterized in that: A vertical cylinder is provided on the side of the vertical guide rail. The extension rod of the vertical cylinder is fixedly connected to the second slider. The vertical cylinder drives the second slider to move along the vertical guide rail.

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