Substrate carrying mechanism

Abstract

The utility model belongs to the technical field of semiconductor manufacturing processes, and provides a substrate carrying mechanism which comprises a first carrying assembly and a second carrying assembly, the first carrying assembly comprises a guide part, a driving mechanism and a first moving part, the first moving part is in sliding fit with the guide part, and the driving mechanism drives the first moving part to move in the X direction through a synchronous belt; the second carrying assembly is connected to the first moving part and comprises a second moving part, and the second moving part can ascend and descend in the Z direction; and the paddle body is connected to the second moving part and used for carrying the substrate carrying boat, the substrate carrying boat can enter and exit from the substrate processing equipment along the X direction along with the paddle body, and the X direction is perpendicular to the Z direction. In the invention, the first carrying assembly comprises the guide part, the driving mechanism and the first moving part, the sliding fit of the first moving part and the guide part ensures the moving precision of the slide glass boat in the X direction, the driving mechanism drives the first moving part to move in the X direction through the synchronous belt, lubricating grease is not needed, the abrasion is smaller, the maintenance cost is reduced, and the field is saved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing process technology, specifically to a substrate handling mechanism. Background Technology

[0002] The substrate handling mechanism is used to feed the wafer carrier boat into or out of the substrate processing equipment. In related technologies, the horizontal movement of the wafer carrier boat in substrate handling mechanisms adopts a gear and rack scheme, which suffers from problems such as tooth surface wear, high lubrication requirements, and high maintenance costs. At the same time, the gear and rack mechanism requires a large mounting surface, so the frame part providing the mounting surface occupies a large area, resulting in a large overall footprint for the substrate handling mechanism, which is not conducive to the overall layout of the production line. Utility Model Content

[0003] The purpose of this application is to provide a substrate handling mechanism that reduces maintenance costs.

[0004] To solve the above-mentioned technical problems, this application provides a substrate handling mechanism, comprising:

[0005] A first conveying assembly, comprising a guide portion, a drive mechanism, and a first moving portion, wherein the first moving portion is slidably engaged with the guide portion, and the drive mechanism drives the first moving portion to move along the X direction via a synchronous belt;

[0006] A second transport assembly is connected to the first moving part. The second transport assembly includes a second moving part that is capable of moving up and down along the Z direction.

[0007] The propeller body is connected to the second moving part and is used to carry the substrate carrier boat. The substrate carrier boat can move in and out of the substrate processing equipment along the X direction with the propeller body.

[0008] In related substrate handling mechanisms, the horizontal movement of the wafer carrier boat uses a gear and rack system, which suffers from problems such as tooth surface wear, high lubrication requirements, and high maintenance costs. In contrast, the substrate handling mechanism of this application includes a first handling component comprising a guide, a drive mechanism, and a first moving part. The sliding fit between the first moving part and the guide ensures high straightness and stability of the wafer carrier boat's movement in the X direction, reducing vibration. The drive mechanism drives the first moving part along the X direction via a synchronous belt. Synchronous belt transmission requires no lubrication and experiences less wear over long-term use, thus reducing maintenance costs. Furthermore, the elimination of the gear and rack frame significantly reduces space requirements and allows for better adaptation to overall production line layouts.

[0009] Optionally, the second transport component is located within the projection range of the first transport component along the X direction.

[0010] Optionally, the first moving part includes a first frame and a second frame, the second conveying component is mounted on the first frame, the second frame is connected to the side of the first frame facing away from the second conveying component, and the second frame extends obliquely from top to bottom away from the first frame.

[0011] Optionally, the substrate transport mechanism further includes:

[0012] A fall arrestor is connected to the first moving part. The fall arrestor has a telescopic part extending in the Z direction. The telescopic part can limit at least one of the propeller body and the second moving part in the Z direction when it is extended.

[0013] Optionally, the propeller body includes two propeller shafts arranged side by side, the propeller shafts extending in the X direction, and at least a portion of the propeller shafts being able to engage with the lugs of the slide carrier to restrict the movement of the slide carrier in the Y direction.

[0014] Optionally, the upper surface of the paddle shaft has a protrusion that can be fitted into the lug of the slide boat.

[0015] Optionally, the protrusion extends with a uniform cross-section along the X direction.

[0016] Optionally, the propeller shaft is provided with a telescopic latch, which can at least partially engage with the lug of the slide boat to restrict the relative movement of the slide boat and the propeller shaft in the X direction.

[0017] Optionally, the telescopic clip is disposed on the protrusion.

[0018] Optionally, the second conveying assembly further includes a lead screw and a driver. The lead screw is disposed on the first moving part, and the second moving part cooperates with the lead screw to move up and down under the drive of the driver. Attached Figure Description

[0019] Figure 1 A schematic diagram of a specific embodiment of the substrate handling mechanism provided in this application;

[0020] Figure 2 for Figure 1 Schematic diagram of the paddle and substrate carrier boat in the substrate handling mechanism;

[0021] Figure 3 for Figure 2 A magnified view of a portion of region A in the middle;

[0022] Figure 4 for Figure 1 A schematic diagram of the substrate transport vessel used in the substrate handling mechanism;

[0023] in, Figures 1-4 The reference numerals in the attached figures are as follows;

[0024] 1-First conveying assembly; 11-Guide section; 12-Drive mechanism; 13-First moving section; 131-First frame; 132-Second frame;

[0025] 2-Second conveying assembly; 21-Second moving part; 22-Lead screw;

[0026] 3-Paddle body; 31-Paddle shaft; 31a-Step wall;

[0027] a-Protruding part; b-Recessed part; b1-Closed end wall; c-Telescopic clip; d-Slot;

[0028] 01-chip boat; 011-boat body; 012-boat ears. Detailed Implementation

[0029] To enable those skilled in the art to better understand the technical solutions of this application, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] Please refer to Figure 1 , Figure 1 This is a schematic diagram of a specific embodiment of the substrate transport mechanism provided in this application.

[0031] This embodiment provides a substrate handling mechanism, including:

[0032] The first transport assembly 1 includes a guide part 11, a drive mechanism 12 and a first moving part 13. The first moving part 13 is slidably engaged with the guide part 11, and the drive mechanism 12 drives the first moving part 13 to move along the X direction via a synchronous belt.

[0033] The second transport assembly 2 is connected to the first moving part 13. The second transport assembly 2 includes a second moving part 21, which is capable of moving up and down along the Z direction.

[0034] The propeller body 3 is connected to the second moving part 21. The propeller body 3 is used to carry the substrate carrier boat 01. The substrate carrier boat 01 can move in and out of the substrate processing equipment along the X direction with the propeller body 3. The X direction and the Z direction are perpendicular to each other.

[0035] In related substrate handling mechanisms, the horizontal movement of the wafer carrier 01 uses a gear and rack system, which suffers from problems such as tooth surface wear, high lubrication requirements, and high maintenance costs. In this embodiment, the substrate handling mechanism includes a first handling component 1 comprising a guide part 11, a drive mechanism 12, and a first moving part 13. The sliding fit between the first moving part 13 and the guide part 11 ensures high straightness and stability of the wafer carrier 01's movement in the X direction, reducing vibration. The drive mechanism 12 drives the first moving part 13 to move along the X direction via a synchronous belt. Synchronous belt drives do not require grease and experience less wear over long-term use, thus reducing maintenance costs. Furthermore, using a synchronous belt drive eliminates the need for a rack that provides a large mounting surface, significantly reducing space requirements and allowing for better adaptation to overall production line layouts.

[0036] The first transport component 1 is used to move the substrate carrier 01 along the X direction, and the second transport component 2 is used to move the substrate carrier 01 up and down along the Z direction. During operation, the second transport component 2 can first move the substrate carrier 01 up and down along the Z direction so that the substrate carrier 01 is opposite to the inlet and outlet of the substrate processing equipment. Then, the first transport component 1 can move the substrate carrier 01 in and out of the substrate processing equipment along the X direction to improve the transport efficiency of the substrate carrier 01.

[0037] In related substrate handling mechanisms, the lifting mechanism is located on one side of the horizontal moving mechanism. The pursuit of lifting height sacrifices structural compactness. These factors result in a large footprint for the substrate handling mechanism, which is not conducive to the overall layout of the production line.

[0038] In the embodiments of this application, the second transport component 2 is located within the projection range of the first transport component 1 along the X direction.

[0039] Thus, the second transport component 2 does not need to occupy space in the Y direction separately, and its width is smaller than that of the first transport component 1, thereby achieving the purpose of reducing the size of the substrate transport mechanism, improving the structural compactness of the substrate transport mechanism, and reducing the space occupied by the substrate transport mechanism.

[0040] The X, Z, and Y directions are all perpendicular to each other, which allows the substrate handling mechanism to adapt to both horizontal and vertical handling actions.

[0041] In other embodiments, the X, Z, and Y directions may not be perpendicular to each other. For example, the X direction may have a certain angle with the horizontal direction to achieve oblique boat retrieval and launching.

[0042] Depend on Figure 1 As can be seen, in this embodiment, the guide part 11 includes two parallel linear guide rails, which extend along the X direction and have a gap between them. The first moving part 13 slides with the two linear guide rails and is located between the two linear guide rails.

[0043] As set up above, the two linear guides can guide the first moving part 13 and improve the movement accuracy of the substrate carrier boat 01 in the X direction. The first moving part 13 is located between the two linear guides, and the second transport assembly 2 is connected to the first moving part 13. Therefore, the second transport assembly 2 is also located between the two linear guides, so that the second transport assembly 2 is located within the projection range of the first transport assembly 1 in the X direction. The second transport assembly 2 does not need to occupy the Y direction space separately, which improves the structural compactness of the substrate transport mechanism.

[0044] The drive mechanism 12 includes a drive motor, a drive pulley, and a driven pulley. The drive motor can be a servo motor, a stepper motor, or a DC motor, etc. The synchronous belt can be a flexible transmission belt with a toothed structure. The drive pulley is connected to the output shaft of the drive motor, and the driven pulley is rotatably connected to the guide part 11. The drive pulley and the driven pulley are arranged along the X direction. Both the drive pulley and the driven pulley mesh with the synchronous belt. The linear motion part of the synchronous belt is fixedly connected to the first moving part 13.

[0045] Thus, the output shaft of the drive motor drives the drive pulley to rotate. Under the meshing action of the drive pulley and the timing belt, the timing belt moves, driving the first moving part 13 to move along the X direction. Through the above design, the drive mechanism 12 can efficiently and stably drive the first moving part 13 to move precisely along the X direction.

[0046] In some embodiments, the drive mechanism 12 may further include a tensioning device, which includes a tensioning wheel for adjusting the tension of the synchronous belt to ensure transmission stability. At the same time, the position of the tensioning wheel is adjustable, and it can adjust its position according to the slack of the belt during operation to adjust the tension, further improving the working condition adaptability of the drive mechanism 12 and increasing the maintenance cycle of the drive mechanism 12 to better adapt to the continuous production rhythm.

[0047] Please continue to refer to this. Figure 1 In some embodiments of this application, the first moving part 13 includes a first frame 131 and a second frame 132. The second transport component 2 is installed on the first frame 131, and the second frame 132 is connected to the side of the first frame 131 facing away from the second transport component 2. The second frame 132 extends obliquely from top to bottom away from the first frame 131.

[0048] Thus, the first frame 131 forms the installation base for the second transport component 2, ensuring the installation stability of the second transport component 2; the second frame 132 is connected to the side of the first frame 131 facing away from the second transport component 2, and the second frame 132 extends inclined from top to bottom away from the first frame 131. Thus, the first frame 131 and the second frame 132 form a triangular structure that is wider at the bottom and narrower at the top. The second frame 132 plays a role in strengthening the structure of the first frame 131, improving the structural stability of the first frame 131, further improving the installation stability of the second transport component 2, and further improving the motion stability of the propeller body 3 and the slide boat 01.

[0049] The first frame 131 and the second frame 132 can be fixed by welding, and the connection is reliable.

[0050] Furthermore, in some embodiments of this application, the substrate transport mechanism further includes:

[0051] The anti-fall mechanism is connected to the first moving part 13. The anti-fall mechanism has a telescopic part extending in the Z direction. The telescopic part can limit at least one of the propeller body 3 and the second moving part 21 in the Z direction when it is extended.

[0052] In this embodiment, the substrate handling mechanism is equipped with an anti-fall mechanism. When the height of the substrate carrier boat 01 needs to be adjusted, the telescopic part can be retracted first, so that the anti-fall mechanism avoids the paddle body 3 and the second moving part 21, thus preventing the anti-fall mechanism from interfering with the Z-direction movement of the paddle body 3 and the second moving part 21. In this way, the second handling component 2 can control the paddle body 3 and the second moving part 21 to move in the Z-direction, thereby realizing the height adjustment of the substrate carrier boat 01. When the substrate carrier boat 01 is adjusted to the required height, the telescopic part can be extended, and the lower end wall of at least one of the paddle body 3 and the second moving part 21 can abut against the telescopic part, thereby interfering with the Z-direction movement of the paddle body 3 and the second moving part 21, preventing the substrate carrier boat 01 from falling, improving the positional accuracy of the substrate carrier boat 01, and improving the safety performance of the substrate handling mechanism.

[0053] The specific structure of the fall arrestor is not limited. For example, the fall arrestor can be a cylinder / hydraulic cylinder / electric cylinder structure, with the push rod of the cylinder / hydraulic cylinder / electric cylinder forming a telescopic part. Alternatively, a manual pin can be used, and the first handling component 1 is provided with corresponding storage holes and limit holes.

[0054] Please refer to Figures 2-4 , Figure 2 for Figure 1 Schematic diagram of the paddle and substrate carrier boat in the substrate handling mechanism; Figure 3 for Figure 2 A magnified view of a portion of region A in the middle; Figure 4 for Figure 1A schematic diagram of the substrate transport vessel used in the substrate transport mechanism.

[0055] In some embodiments of this application, the paddle body 3 includes two paddle rods 31 arranged side by side. The paddle rods 31 extend along the X direction, and at least a portion of the paddle rods 31 can be fitted with the lugs 012 of the slide boat 01 to restrict the movement of the slide boat 01 in the Y direction. The X, Z and Y directions are all perpendicular to each other.

[0056] Depend on Figures 2-4 As can be seen, the slide carrier boat 01 includes a boat body 011 and boat ears 012 located on both sides of the boat body 011. The boat ears 012 have a recessed portion b facing downwards. At least part of the propeller rod 31 can be inserted into the corresponding recessed portion b, thereby limiting the boat ears 012 and the propeller rod 31 in the Z and Y directions. This allows the boat ears 012 to be stably supported on the corresponding propeller rod 31, improving the connection stability between the propeller body 3 and the slide carrier boat 01.

[0057] Please continue to refer to this. Figures 2-3 In some embodiments of this application, the upper surface of the paddle 31 has a protrusion a, which can be fitted into the lug 012 of the carrier boat 01.

[0058] As described above, the upper surface of the propeller 31 forms stepped walls 31a on both sides of the protrusion a in the Y direction. In the installed state, the protrusion a and the recessed part b are fitted together, and the lower surface of the lug 012 is at least partially supported by the stepped walls 31a, thereby limiting the lug 012 and the propeller 31 in the Z and Y directions and improving the installation stability of the slide boat 01. At the same time, only the protrusion a and the recessed part b in the propeller 31 are fitted together, so the size of the recessed part b can be reduced, the size of the lug 012 can be reduced, and thus the volume of the slide boat 01 can be reduced.

[0059] Furthermore, in some embodiments of this application, the protrusion a extends at a constant cross-section along the X direction.

[0060] As described above, the protrusion a can also serve as a guide, allowing the substrate carrier boat 01 to move relative to the propeller 31 along the axial direction of the propeller 31, that is, along the X direction, which facilitates the installation or detachment of the substrate carrier boat 01 and the propeller body 3, and facilitates the entry and exit of the substrate carrier boat 01 into the substrate processing equipment.

[0061] Please continue to refer to this. Figure 2 and Figure 3 In some embodiments of this application, the paddle 31 is provided with a telescopic clip c, which can at least partially embed into the lug 012 of the slide boat 01 to limit the relative movement of the slide boat 01 and the paddle 31 in the X direction.

[0062] As set above, the engagement of the telescopic clip c and the boat lug 012 limits the movement of the paddle body 3 and the sheet carrier boat 01 in the X direction, preventing the sheet carrier boat 01 from moving in the extension direction of the paddle rod 31, improving the connection stability between the paddle body 3 and the sheet carrier boat 01, and ensuring that the sheet carrier boat 01 can move synchronously with the movement of the paddle body 3. When it is necessary to send the sheet carrier boat 01 into the furnace cavity, the telescopic clip c can be controlled to disengage from the boat lug 012 of the sheet carrier boat 01, allowing the sheet carrier boat 01 to move relative to the paddle rod 31, facilitating the separation of the sheet carrier boat 01 from the paddle body 3.

[0063] Depend on Figure 2 and Figure 3 As can be seen, in this embodiment, the telescopic clip c is provided on the protrusion a, the boat ear 012 of the carrier boat 01 is provided with a slot d, the slot d is provided on the closed end wall b1 of the recess b, and the telescopic clip c can extend and retract along the height direction of the protrusion a.

[0064] Specifically, the telescopic clip c can be an electrically controlled telescopic component that allows for telescopic movement without manual operation, ensuring safety in automated operations.

[0065] Please continue to refer to this. Figure 1 In some embodiments of this application, the second conveying assembly 2 further includes a lead screw 22 and a driver. The lead screw 22 is disposed on the first moving part 13, and the second moving part 21 cooperates with the lead screw 22 and can move up and down under the drive of the driver.

[0066] The driver can be a drive motor, with the output shaft of the drive motor connected to the lead screw 22; the second moving part 21 can be a nut, with the second moving part 21 threadedly connected to the lead screw 22. The drive unit drives the lead screw 22 to rotate, and the second moving part 21 can move along the extension direction of the lead screw 22 under the action of the thread, thereby realizing the position adjustment of the second output part 21 in the Z direction and improving the motion accuracy of the second output part 21 in the Z direction.

[0067] Please continue to refer to this. Figure 4 In other embodiments of this application, multiple wafer carrier boats 01 can be stacked along the Z direction, and multiple wafer carrier boats 01 can be transported by the same substrate handling mechanism at one time, thereby improving work efficiency.

[0068] The above are merely preferred embodiments of this application. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. A substrate transport mechanism, characterized in that, include: The first transport assembly (1) includes a guide (11), a drive mechanism (12) and a first moving part (13). The first moving part (13) is slidably engaged with the guide (11), and the drive mechanism (12) drives the first moving part (13) to move along the X direction via a synchronous belt. The second transport assembly (2) is connected to the first moving part (13). The second transport assembly (2) includes a second moving part (21) which is capable of moving up and down along the Z direction. The propeller body (3) is connected to the second moving part (21). The propeller body (3) is used to carry the substrate carrier boat (01). The substrate carrier boat (01) can enter and exit the substrate processing equipment along the X direction with the propeller body (3).

2. The substrate handling mechanism according to claim 1, characterized in that, The second transport component (2) is located within the projection range of the first transport component (1) along the X direction.

3. The substrate handling mechanism according to claim 1, characterized in that, The first moving part (13) includes a first frame (131) and a second frame (132). The second transport component (2) is mounted on the first frame (131). The second frame (132) is connected to the side of the first frame (131) facing away from the second transport component (2). The second frame (132) extends obliquely from top to bottom away from the first frame (131).

4. The substrate handling mechanism according to any one of claims 1-3, characterized in that, The substrate transport mechanism also includes: A fall arrestor is connected to the first moving part (13). The fall arrestor has a telescopic part extending in the Z direction. The telescopic part can limit at least one of the propeller body (3) and the second moving part (21) in the Z direction when it is extended.

5. The substrate transport mechanism according to any one of claims 1-3, characterized in that, The paddle body (3) includes two paddle rods (31) arranged side by side, the paddle rods (31) extending in the X direction, and at least part of the paddle rods (31) can be fitted with the lugs (012) of the slide boat (01) to restrict the slide boat (01) from moving in the Y direction.

6. The substrate handling mechanism according to claim 5, characterized in that, The upper surface of the paddle (31) has a protrusion (a) that can be fitted into the lug (012) of the slide boat (01).

7. The substrate handling mechanism according to claim 6, characterized in that, The protrusion (a) extends with a uniform cross section along the X direction.

8. The substrate handling mechanism according to claim 6, characterized in that, The paddle (31) is provided with a telescopic clip (c), which can be at least partially embedded in the lug (012) of the slide boat (01) to restrict the relative movement of the slide boat (01) and the paddle (31) in the X direction.

9. The substrate handling mechanism according to claim 8, characterized in that, The telescopic clip (c) is disposed on the protrusion (a).

10. The substrate transport mechanism according to any one of claims 1-3, characterized in that, The second conveying assembly (2) further includes a lead screw (22) and a driver. The lead screw (22) is disposed on the first moving part (13). The second moving part (21) cooperates with the lead screw (22) and can move up and down under the drive of the driver.

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