Ceramic sample fork

Abstract

The utility model discloses a ceramic sample fork, which relates to the technical field of wafer processing equipment, aims to solve the problem of wafer positioning, and comprises a main body, the main body is made of a ceramic material and is formed by integrally forming a pair of arm forks and a fixed end, the pair of arm forks is symmetrically arranged on the two sides of the fixed end. The arm fork is arranged to be in an arc shape, a step is arranged on the inner wall of the arm fork, and the vertical face of the step is arranged to be a slope. By arranging the steps with the slope of 75 degrees and matching the positioning holes and the positioning columns, accurate positioning of the wafer is achieved, and the problem that the wafer is damaged due to inaccurate positioning in the processing process is avoided.

Description

A ceramic sample fork Technical Field

[0001] This utility model relates to the technical field of ceramic sample forks, specifically a ceramic sample fork. Background Technology

[0002] In semiconductor manufacturing, wafers need to be processed on specific heating equipment. Traditional sample forks are mostly made of metal, but in certain high-temperature or special environments, ceramic materials are widely used due to their excellent high-temperature resistance and corrosion resistance. However, existing ceramic sample forks still have shortcomings in terms of positioning accuracy, collision protection, and installation stability, which may lead to wafer damage or inaccurate positioning during processing. Summary of the Invention

[0003] To solve the above problems, namely the problems mentioned in the background art, this utility model proposes a ceramic sample fork, including a main body, the main body being made of ceramic material, the main body being integrally formed of a pair of arm forks and a fixed end, the pair of arm forks being symmetrically arranged on both sides of the fixed end;

[0004] The arm fork is configured as an arc shape, and the inner wall of the arm fork is provided with steps, and the vertical surface of the steps is configured as a slope.

[0005] The fixed end is provided with mounting holes for installation.

[0006] A further feature of this invention is that the slope is set to 75 degrees.

[0007] A further feature of this invention is that: the fixed end is provided with symmetrical slots on both sides; the fixed end is provided with at least one pair of blind holes on the side away from the fork; a rubber plug is inserted into the blind hole; the end of the rubber plug extends out of the blind hole; the middle section of the rubber plug is provided with a cylindrical shape with an outer diameter not less than the inner diameter of the blind hole; and the two ends of the rubber plug are provided with a segmental shape with an outer diameter less than the inner diameter of the blind hole.

[0008] A further feature of this invention is that the fixed end is provided with a positioning hole for positioning.

[0009] A further feature of this invention is that a positioning plug is inserted into the positioning hole, the end of the positioning plug extends out of the positioning hole, one end of the positioning plug extending out of the positioning hole is set to a conical shape, and the part of the positioning plug located in the positioning hole is set to a cylindrical shape with an outer diameter not less than the inner diameter of the blind hole and a segmental shape with an outer diameter less than the inner diameter of the blind hole.

[0010] The beneficial technical effects of this utility model are as follows: By combining the 75-degree inclined steps with positioning holes and positioning posts, precise wafer positioning is achieved, avoiding wafer damage due to inaccurate positioning during processing. By inserting a rubber positioning plug into the positioning hole and setting a groove on the heating device, when the wafer's falling position deviates, the positioning plug can bend and deform to cushion the underside of the fork, avoiding the risk of the ceramic sample fork body shattering from a sudden impact, while also protecting the wafer from damage. By setting slots on both sides of the fixed end and hooks on the heating device, and by utilizing the elastic deformation of the protruding rubber plug to increase the force between the hooks and slots, the stability of the sample fork in the mounting groove is improved, avoiding inaccurate positioning or wafer damage caused by shaking. Attached Figure Description

[0011] Figure 1 shows a schematic diagram of the overall structure of this scheme.

[0012] Figure 2 shows a cross-sectional view of the fork arm section.

[0013] Figure 3 shows a schematic diagram of the positioning hole structure.

[0014] Figure 4 shows a schematic diagram of the internal structure of the fixed end.

[0015] The attached diagram includes the following reference numerals: 1. Arm fork; 2. Fixed end; 3. Step; 4. Positioning hole; 5. Mounting hole; 6. Rubber plug; 7. Slot; 8. Positioning plug. Detailed Implementation

[0016] Preferred embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0017] This utility model proposes a ceramic sample fork, the main body of which is made of ceramic material. It consists of a fixed end 2 and arm forks 1 symmetrically arranged on both sides. The arm forks 1 are arc-shaped and concentric with the wafer and heating equipment. The inner wall of the arm fork 1 is provided with a step 3. The vertical surface of the step 3 is set with a 75-degree slope to ensure that the edge of the wafer falls completely into the horizontal surface of the step 3, and to ensure that the arm fork can carry the wafer into the heating equipment. The mounting hole 5 of the fixed end is used to install the main body on the transport equipment.

[0018] The fixed end 2 is provided with a positioning hole and a positioning post is provided on the heating equipment, which enables the arm fork 1 to accurately drop the wafer onto the heating equipment. When the position of the arm fork 1 deviates, the positioning post is inserted into the positioning hole 4 to limit the fall of the arm fork 1 and play a physical limiting role to avoid damaging the wafer.

[0019] A rubber positioning plug 8 is inserted into the positioning hole 4. The positioning plug 8 extends out of the positioning hole by at least one-third of its total length. The extended part is set as a cone shape, and the middle section is set as a segment shape. A groove is set on the heating device. When the arm fork 1 carries the wafer to the accurate position of the heating device and falls, the positioning plug 8 can fall into the groove precisely. When the position is offset, the segment shape of the positioning plug 8 is bent and deformed by pressure, and it is placed under the arm fork 1 to prevent the ceramic sample fork body from being broken by instantaneous impact, and also to avoid damage to the wafer.

[0020] The fixed end 2 is provided with slots 7 on both sides, and corresponding hooks are provided in the heating equipment. This allows for pre-fixation before the sample fork is installed through bolts and mounting holes. The protruding rubber plug 6 is squeezed and deformed after the fixed end 2 is inserted into the mounting groove of the transport equipment. The rubber plug 6 releases a reverse force under the elastic deformation, which increases the force between the hook and the slot 7. This prevents shaking due to the pre-reserved fit gap between the fixed end 2 and the mounting groove. Then, it can be completely fixed through the mounting hole 5 and bolts.

[0021] Although the present invention has been described with reference to preferred embodiments, various modifications can be made to it and components can be replaced with equivalents without departing from the scope of the present invention. In particular, the technical features mentioned in the various embodiments can be combined in any manner as long as there is no structural conflict. The present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0022] In the description of this utility model, terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," which indicate direction or positional relationships, are based on the direction or positional relationships shown in the accompanying drawings. These are used merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation; therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0024] The term "comprising" or any other similar term is intended to cover non-exclusive inclusion, such that a process, article, or apparatus / device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to those processes, articles, or apparatus / devices.

[0025] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.

Claims

1. A ceramic sample fork, comprising a body, characterized in that: The main body is made of ceramic material and is integrally formed by a pair of arm forks (1) and a fixed end (2). The pair of arm forks (1) are symmetrically arranged on both sides of the fixed end. The arm forks (1) are arc-shaped and the inner wall of the arm forks (1) is provided with a step (3), and the vertical surface of the step (3) is set as a slope. The fixed end (2) is provided with a mounting hole (5) for installation.

2. The ceramic sample fork according to claim 1, characterized in that: The slope is set to 70 to 80 degrees.

3. A ceramic sample fork according to claim 1, characterized in that: The fixed end (2) is symmetrically provided with slots (7) on both sides. The fixed end (2) away from the arm fork (1) is provided with at least a pair of blind holes. A rubber plug (6) is inserted into the blind hole. The end of the rubber plug (6) extends out of the blind hole. The middle section of the rubber plug (6) is provided with a cylindrical shape with an outer diameter not less than the inner diameter of the blind hole. The two ends of the rubber plug (6) are provided with a segment shape with an outer diameter less than the inner diameter of the blind hole.

4. A ceramic sample fork according to claim 1, characterized in that: The fixed end (2) is also provided with a positioning hole (4) for positioning.

5. A ceramic sample fork according to claim 4, characterized in that: A positioning plug (8) is inserted into the positioning hole (4). The end of the positioning plug (8) extends out of the positioning hole (4). One end of the positioning plug (8) extending out of the positioning hole (4) is set to a conical shape. The part of the positioning plug (8) located in the positioning hole (4) is set to a cylindrical shape with an outer diameter not less than the inner diameter of the blind hole and a segmental shape with an outer diameter less than the inner diameter of the blind hole.

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