Hexachlorodisilane pretreatment device

Abstract

The utility model discloses a hexachlorodisilane pretreatment device, and relates to the technical field of semiconductors, through cooperation of a filtering device, a material receiving box, a material pushing mechanism, a compression box, an electric sealing door, a compression mechanism, an electric gate and other parts, hexachlorodisilane is pretreated by the filtering device, and physical impurities fall into the material receiving box below through a waste material outlet. The pushing mechanism pushes waste in the collecting box to the side, away from the waste outlet, of the collecting box. And when the waste materials need to be compressed, the electric sealing door is opened, the material collecting box communicates with the interior of the compression box, and the waste materials enter the compression box. And the compression mechanism compresses the waste materials entering the compression box, and after compression is completed, the electric gate is opened to discharge the compressed waste materials. Physical impurities generated in the hexachlorodisilane pretreatment process are collected, compressed and packaged, centralized treatment is facilitated, and environmental pollution is effectively avoided.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, specifically to a hexachlorosilane pretreatment apparatus. Background Technology

[0002] Hexachlorosilane (Si₂Cl₆) is a crucial raw material in semiconductor and photovoltaic material production. Its production process generates waste containing physical impurities (such as particulate matter and metal fragments), which can pollute the environment if not properly disposed of. While filtration removes impurities in the hexachlorosilane purification process, the remaining physical impurities still require centralized treatment. Currently, there is a lack of effective equipment capable of collecting, compressing, and encapsulating these physical impurities to meet the needs of the waste treatment stage. Utility Model Content

[0003] To address the shortcomings of existing technologies, this application provides a hexachlorosilane pretreatment device, which solves the technical problem of imperfect waste treatment process.

[0004] This application provides a hexachlorosilane pretreatment apparatus, comprising:

[0005] The filter device has a waste outlet at the bottom;

[0006] A receiving bin is located below the waste outlet;

[0007] A pushing mechanism is located on the side of the receiving box near the waste outlet;

[0008] A compression box is disposed at the bottom of the receiving box on the side away from the waste outlet, the compression box having an opening and communicating with the interior of the receiving box;

[0009] An electric sealing door is installed at the bottom of the receiving box for opening and closing the compression box;

[0010] A compression mechanism is provided inside the compression chamber for compressing waste material entering the compression chamber from the receiving box;

[0011] An electric gate is installed at the bottom of the compression chamber for opening and closing the bottom of the compression chamber.

[0012] In the hexachlorosilane pretreatment device provided in this application, the compression mechanism includes two components, which are respectively disposed at both ends of the compression box. The compression parts of both components can be moved relative to each other to the middle of the compression box. In the middle of the compression box, the two compression mechanisms completely compress the waste material. The electric gate is located in the middle of the compression box.

[0013] In the hexachlorosilane pretreatment apparatus provided in this application, the compression mechanism includes a compression motor, a compression rod, and a compression plate. The compression plate is disposed in the compression chamber, the compression rod is inserted through the end of the compression chamber, and the compression motor is disposed outside the compression chamber and is drivenly connected to the compression rod.

[0014] In the hexachlorosilane pretreatment apparatus provided in this application, the pushing mechanism includes a pushing motor and a pushing plate. The pushing motor is disposed outside the receiving box, and the pushing plate is disposed inside the receiving box. The pushing plate is drivenly connected to the pushing motor.

[0015] In the hexachlorosilane pretreatment device provided in this application, the electric sealing door includes a door panel and a push motor. The push motor is drivenly connected to the door panel. The door panel is located at the bottom of the receiving box. The receiving box and the compression box have a height difference. The door panel can move to the opening of the compression box under the push of the push motor.

[0016] In the hexachlorosilane pretreatment device provided in this application, the electric sealing door further includes a slide rail, which is connected to the bottom of the receiving box and is slidably connected to the door panel.

[0017] In the hexachlorosilane pretreatment device provided in this application, a stacking bin is also provided below the electric gate for receiving the compressed material.

[0018] In the hexachlorosilane pretreatment apparatus provided in this application, the stacking bin is transported by a railcar.

[0019] This utility model provides a hexachlorosilane pretreatment device. Through the cooperation of components such as a filter, a receiving box, a pushing mechanism, a compression box, an electric sealing door, a compression mechanism, and an electric gate, the filter pretreatments the hexachlorosilane, and physical impurities fall into the receiving box below through the waste outlet. The pushing mechanism pushes the waste in the receiving box to the side away from the waste outlet. When compression of the waste is required, the electric sealing door opens, connecting the receiving box and the compression box, allowing the waste to enter. The compression mechanism compresses the waste entering the compression box. After compression, the electric gate opens, discharging the compressed waste. This device achieves the collection, compression, and encapsulation of physical impurities generated during the hexachlorosilane pretreatment process, facilitating centralized treatment and effectively avoiding environmental pollution. Two compression mechanisms are installed at both ends of the compression box, enabling compression of the waste from both ends, ensuring complete compression in the middle of the compression box, improving the compression effect, reducing the waste volume, and facilitating subsequent processing and storage.

[0020] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and do not limit this application. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the elastic bandage and mepicon structure of this application;

[0023] Figure 2 This is a schematic diagram of the bandage device of this application. Figure 1 ;

[0024] Figure 3 This is a schematic diagram of the bandage device of this application. Figure 2 .

[0025] Figure label:

[0026] 10. Filtration device;

[0027] 20. Receiving box;

[0028] 30. Pushing mechanism; 301. Pushing plate;

[0029] 40. Electric door sealing; 401. Door panel; 402. Drive motor;

[0030] 50. Compression mechanism; 501. Compression motor; 502. Compression rod; 503. Compression plate;

[0031] 60. Electric gate;

[0032] 70. Compression box. Detailed Implementation

[0033] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0034] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0035] It should be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the application. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0036] It should be understood that, in order to clearly describe the technical solutions of the embodiments of this application, the terms "first" and "second" are used in the embodiments of this application to distinguish identical or similar items with essentially the same function and effect. For example, the first groove and the second groove are only used to distinguish different grooves and do not limit their order. Those skilled in the art will understand that the terms "first" and "second" do not limit the quantity or execution order, and the terms "first" and "second" are not necessarily different.

[0037] It should also be further understood that the term “and / or” as used in this application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0038] refer to Figures 1-3 This application provides a hexachlorosilane pretreatment apparatus, comprising: a filter device 10 with a waste outlet at the bottom; a receiving box 20 disposed below the waste outlet; a pushing mechanism 30 disposed on the side of the receiving box 20 near the waste outlet; a compression box 70 disposed at the bottom of the receiving box 20 on the side away from the waste outlet, the compression box 70 having an opening and communicating with the interior of the receiving box 20; an electric sealing door 40 disposed at the bottom of the receiving box 20 for opening and closing the compression box 70; a compression mechanism 50 disposed inside the compression box 70 for compressing the waste entering the compression box 70 from the receiving box 20; and an electric gate 60 disposed at the bottom of the compression box 70 for opening and closing the bottom of the compression box 70.

[0039] In this embodiment, the filter device 10 is a commercially available device, and any device with a screen structure can be selected.

[0040] Through the coordinated operation of components such as the filter device 10, receiving box 20, pushing mechanism 30, compression box 70, electric sealing door 40, compression mechanism 50, and electric gate 60, the filter device 10 pre-treats hexachlorosilane, and physical impurities fall into the receiving box 20 below through the waste outlet. The pushing mechanism 30 pushes the waste in the receiving box 20 to the side of the receiving box 20 away from the waste outlet. When the waste needs to be compressed, the electric sealing door 40 opens, connecting the receiving box 20 with the compression box 70, and the waste enters the compression box 70. The compression mechanism 50 compresses the waste entering the compression box 70. After compression, the electric gate 60 opens, discharging the compressed waste. This process achieves the collection, compression, and packaging of physical impurities generated during the pre-treatment of hexachlorosilane, facilitating centralized treatment and effectively avoiding environmental pollution. Two compression mechanisms 50 are provided and located at both ends of the compression box 70, which can compress the waste from both ends, so that the waste is completely compressed in the middle of the compression box 70, which improves the compression effect, reduces the volume of waste, and facilitates subsequent processing and storage.

[0041] The compression mechanism 50 comprises two units, each positioned at one end of the compression chamber 70. The compression sections of both units can move relative to each other to the center of the compression chamber 70. In the center of the compression chamber 70, the two compression mechanisms 50 completely compress the waste material. An electric gate 60 is located in the center of the compression chamber 70. When waste material enters the compression chamber 70, the compression sections of both units simultaneously move relative to each other to the center of the compression chamber 70, compressing the waste material from both ends until it is completely compressed in the center. The electric gate 60, located in the center of the compression chamber 70, opens after compression to discharge the compressed waste material. This simultaneous compression at both ends improves the compression effect, more effectively reducing the volume of waste material and facilitating subsequent processing and storage. The electric gate 60's central location facilitates the discharge of compressed waste material.

[0042] The compression mechanism 50 includes a compression motor 501, a compression rod 502, and a compression plate 503. The compression plate 503 is disposed within a compression chamber 70, and the compression rod 502 is inserted through the end of the compression chamber 70. The compression motor 501 is disposed outside the compression chamber 70 and is driven by the compression rod 502. When the compression motor 501 is energized, it drives the compression rod 502 to move. The compression rod 502, inserted through the end of the compression chamber 70, drives the compression plate 503 disposed within the compression chamber 70 to compress the waste material. By controlling the rotation direction and amount of the compression motor 501, the movement direction and distance of the compression plate 503 can be controlled, thereby achieving the compression operation of the waste material. This structural design makes the compression operation simple and reliable. The motor drive allows for precise control of the compression force and degree, ensuring the stability and reliability of the compression effect.

[0043] In some embodiments, the pushing mechanism 30 includes a pushing motor and a pushing plate 301. The pushing motor is disposed outside the receiving box 20, and the pushing plate 301 is disposed inside the receiving box 20. The pushing plate 301 is drivenly connected to the pushing motor. After the pushing motor is powered on, it drives the pushing plate 301 disposed inside the receiving box 20 to move. The pushing plate 301 pushes the waste material collected in the receiving box 20 towards the side of the receiving box 20 away from the waste outlet until the waste material is pushed into the compression box 70. The pushing mechanism 30 can effectively push the waste material in the receiving box 20 into the compression box 70, ensuring that the waste material can smoothly enter the compression box 70 for compression processing, improving the working efficiency of the equipment, and has a simple structure and is easy to operate.

[0044] The electric sealing door 40 includes a door panel 401 and a push motor 402. The push motor 402 is driven and connected to the door panel 401. The door panel 401 is located at the bottom of the receiving box 20. The receiving box 20 and the compression box 70 have a height difference. The door panel 401 can move to the opening of the compression box 70 under the push of the push motor 402.

[0045] When the drive motor 402 is energized, it drives the door panel 401 located at the bottom of the receiving box 20 to move. Due to the height difference between the receiving box 20 and the compression box 70, the door panel 401 can move to the opening of the compression box 70 under the push of the drive motor 402, realizing the connection between the receiving box 20 and the compression box 70, allowing the waste material in the receiving box 20 to enter the compression box 70; when it is necessary to close, the drive motor 402 drives the door panel 401 in the reverse direction, causing it to return to the bottom of the receiving box 20, closing the channel between the receiving box 20 and the compression box 70.

[0046] The electric sealing door 40 also includes a slide rail, which is connected to the bottom of the receiving box 20 and is slidably connected to the door panel 401.

[0047] The rail is connected to the bottom of the receiving box 20 and is slidably connected to the door panel 401. When the push motor 402 drives the door panel 401 to move, the door panel 401 slides on the rail, making the movement of the door panel 401 smoother and more stable.

[0048] In some embodiments, a stacking bin is also provided below the electric gate 60 for receiving the compressed material. After the waste material in the compression box 70 is compressed, the electric gate 60 opens, and the compressed material falls from the bottom of the compression box 70 into the stacking bin below, where it is received and stored.

[0049] The stacking bins are transported via railcars. The stacking bins are placed on railcars, which move along the tracks. When it is necessary to transport or process the compressed material inside the stacking bins, the railcars move along the tracks, transporting the stacking bins to the designated location.

[0050] Although embodiments of this application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A hexachlorosilane pretreatment apparatus, characterized in that, include: The filter device has a waste outlet at the bottom; A receiving bin is located below the waste outlet; A pushing mechanism is located on the side of the receiving box near the waste outlet; A compression box is disposed at the bottom of the receiving box on the side away from the waste outlet, the compression box having an opening and communicating with the interior of the receiving box; An electric sealing door is installed at the bottom of the receiving box for opening and closing the compression box; A compression mechanism is provided inside the compression chamber for compressing waste material entering the compression chamber from the receiving box; An electric gate is installed at the bottom of the compression chamber for opening and closing the bottom of the compression chamber.

2. The hexachlorosilane pretreatment apparatus according to claim 1, characterized in that, The compression mechanism includes two components, which are respectively located at both ends of the compression chamber. The compression parts of both components can be moved relative to each other to the middle of the compression chamber. In the middle of the compression chamber, the two compression mechanisms completely compress the waste material. The electric gate is located in the middle of the compression chamber.

3. The hexachlorosilane pretreatment apparatus according to claim 2, characterized in that, The compression mechanism includes a compression motor, a compression rod, and a compression plate. The compression plate is disposed in the compression chamber, the compression rod is inserted through the end of the compression chamber, and the compression motor is disposed outside the compression chamber and is drivenly connected to the compression rod.

4. The hexachlorosilane pretreatment apparatus according to claim 1, characterized in that, The pushing mechanism includes a pushing motor and a pushing plate. The pushing motor is located outside the receiving box, and the pushing plate is located inside the receiving box. The pushing plate is drivenly connected to the pushing motor.

5. The hexachlorosilane pretreatment apparatus according to claim 1, characterized in that, The electric sealing door includes a door panel and a push motor. The push motor is driven and connected to the door panel. The door panel is located at the bottom of the receiving box. The receiving box and the compression box have a height difference. The door panel can move to the opening of the compression box under the push of the push motor.

6. The hexachlorosilane pretreatment apparatus according to claim 5, characterized in that, The electric sealing door also includes a slide rail, which is connected to the bottom of the receiving box and is slidably connected to the door panel.

7. The hexachlorosilane pretreatment apparatus according to claim 1, characterized in that, A material storage bin is also installed below the electric gate to receive compressed materials.

8. The hexachlorosilane pretreatment apparatus according to claim 7, characterized in that, The stacking bins are transported by railcars.

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