Rotating device for infrared detection of vacuum coating substrate

Abstract

The utility model provides a rotating device for infrared detection of a vacuum coating substrate, which comprises a workbench, a rotating mechanism is arranged on the workbench, the rotating mechanism comprises two groups of worms rotatably mounted on the workbench, worm gears are mounted on the outer walls of the opposite sides of the two groups of worms in a meshed manner, and the two groups of worm gears are arranged up and down and are concentric and not coaxial. A first rotating shaft and a second rotating shaft are installed at the top ends of the two worm wheels correspondingly, a rotating base is installed at the top end of the first rotating shaft, and the top end of the second rotating shaft penetrates through the second rotating shaft and is fixedly sleeved with a first bevel gear. The rotating mechanism is arranged, the upper worm gear and the lower worm gear are driven by the two sets of worms respectively, multi-shaft linkage rotation is achieved in combination with the bevel gear set, traditional operation of manually adjusting the angle of the base plate step by step is replaced, and all-directional automatic rotating scanning of the base plate and high stability and precise angle control of a worm gear and worm transmission structure are achieved. Complete coverage of infrared detection on the uniformity of the film is ensured, and a detection blind area is eliminated.

Description

Technical Field

[0001] This utility model belongs to the field of substrate inspection technology, and more specifically, it relates to a rotating device for infrared inspection of vacuum coated substrates. Background Technology

[0002] Vacuum coating technology, a key process in modern precision manufacturing, is widely used in the preparation of optical devices, semiconductor components, solar cells, and functional coatings. During the coating process, the uniformity, thickness, and microstructure of the thin film on the substrate surface directly affect the product's optical performance, conductivity, and durability. To ensure coating quality, infrared detection technology, with its non-contact, high-sensitivity, and real-time analysis capabilities, has become an important means of monitoring thin film characteristics (such as composition distribution, thickness uniformity, and defect identification). However, the accuracy and efficiency of infrared detection are highly dependent on the motion control of the substrate during the detection process, especially the performance of the rotating device, which directly affects the scanning coverage of the infrared beam on the substrate surface and the completeness of data acquisition.

[0003] In the infrared detection stage of vacuum-coated substrates, some existing equipment still relies on manual operation to control the rotation of the fixture and substrate. Operators need to manually adjust the angle of the rotary table or use simple mechanical devices (such as handwheels or knobs) to adjust the substrate position step by step to achieve infrared beam scanning of different areas of the substrate. Although this manual control mode is low-cost and easy to implement, in practical applications, the manual control of fixture rotation is no longer sufficient to meet the high-precision, high-efficiency, and intelligent infrared detection requirements of modern vacuum coating processes.

[0004] Therefore, in view of this, we have studied and improved the existing structure and its shortcomings, and provided a rotating device for infrared detection of vacuum coated substrates, in order to achieve a more practical purpose. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides a rotating device for infrared detection of vacuum coated substrates, which is achieved by the following specific technical means:

[0006] A rotating device for infrared detection of vacuum-coated substrates includes a worktable with a rotating mechanism. The rotating mechanism includes two sets of worm gears rotatably mounted on the worktable. Worm wheels are meshed on the outer walls of opposite sides of the two sets of worm gears. The two sets of worm wheels are arranged vertically and are concentric but not on the same axis. A first rotating shaft and a second rotating shaft are respectively mounted on the top of the two sets of worm wheels. A rotating seat is mounted on the top of the first rotating shaft. A first bevel gear is fixedly fitted through the top of the second rotating shaft. A second bevel gear is meshed on one side of the first bevel gear. A rotating shaft is mounted in the middle of the second bevel gear. A mounting seat is mounted on the outer wall of the rotating shaft, and the mounting seat is equipped with a clamping mechanism.

[0007] Preferably, it also includes an infrared detection body, which consists of an infrared instrument and a convex frame. The infrared instrument is installed on the bottom side of one end of the convex frame, and a base plate is provided at the bottom of the infrared instrument. The other end of the convex frame is installed on the side wall of the workbench.

[0008] Preferably, the clamping mechanism includes a support plate for placing the substrate. Two sets of extension rods are installed on both side walls of the support plate. The top of each of the four sets of extension rods is provided with a sliding groove, and a clamping plate is slidably installed through the sliding groove. A screw is rotatably installed on the top side of one end of each of the four sets of clamping plates, and an upper clamping plate and a lower clamping plate are screwed on through the screw. A pull rod is installed on the other side wall of each of the four sets of clamping plates. A spring is fitted on the outer wall of the pull rod, and the other end of the pull rod is installed through the outer wall of the sliding groove.

[0009] Preferably, each of the two sets of worm gears has a mounting block rotatably fitted on one end of its outer wall, the bottom of each of the two mounting blocks is fixedly connected to the top side of the worktable, and a motor is installed on the side wall of each of the two mounting blocks. The two motors are respectively connected to one end of the corresponding worm gear for transmission.

[0010] Preferably, connecting rods are installed at the four corners of the bottom of the bearing plate, and the bottom ends of the four sets of connecting rods are all installed on the mounting base.

[0011] Preferably, the inner surfaces of both the upper and lower clamping plates are provided with a silicone anti-slip layer, and the surfaces are evenly distributed with hemispherical protrusions. A torque adjustment handle is coaxially installed at the top of the screw.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] 1. This utility model is equipped with a rotating mechanism, which uses two sets of worm gears to drive the upper and lower worm wheels respectively, and combines them with a bevel gear set to achieve multi-axis linkage rotation, replacing the traditional manual step-by-step adjustment of the substrate angle, realizing automatic rotation scanning of the substrate in all directions. The high stability and precise angle control of the worm gear transmission structure ensure that the infrared detection completely covers the uniformity of the film and eliminates the detection blind zone.

[0014] 2. This utility model adopts a sliding groove and pull rod sliding cooperation structure, combined with spring elastic reset and screw adjustment clamping plate pressure, which can be used to clamp substrates of different sizes and thicknesses. The silicone anti-slip layer on the inner side of the upper and lower clamping plates can avoid surface scratches or overpressure damage, while reducing manual repeated clamping and improving detection efficiency. The infrared detection body is fixed above the rotation path by the C-shaped frame, and the automated rotation scanning covers the entire surface of the substrate, ensuring the continuity and consistency of thin film characteristic data acquisition. Attached Figure Description

[0015] Figure 1 This is a three-dimensional schematic diagram of the utility model. Figure 1 .

[0016] Figure 2 This is a three-dimensional schematic diagram of the utility model. Figure 2 .

[0017] Figure 3 This is an enlarged schematic diagram of the clamping mechanism of this utility model.

[0018] Figure 4 This is a top view of the present invention.

[0019] In the diagram, the correspondence between component names and drawing numbers is as follows:

[0020] 1. Workbench; 2. Infrared detection body; 3. Rotation mechanism; 4. Base plate; 5. Clamping mechanism; 301. Worm gear; 302. Worm wheel; 303. Mounting block; 304. First rotating shaft; 305. Second rotating shaft; 306. Rotary seat; 307. First bevel gear; 308. Second bevel gear; 309. Mounting seat; 310. Rotating shaft; 501. Bearing plate; 502. Slide groove; 503. Clamping plate; 504. Upper clamping plate; 505. Lower clamping plate; 506. Screw; 507. Spring; 508. Pull rod. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] Example:

[0023] As attached Figure 1 To be continued Figure 4 As shown:

[0024] This utility model provides a rotating device for infrared detection of vacuum coated substrates, including a worktable 1. A rotating mechanism 3 is provided on the worktable 1. The rotating mechanism 3 includes two sets of worm gears 301 rotatably mounted on the worktable 1. Worm wheels 302 are meshed on the outer walls of opposite sides of the two sets of worm gears 301. The two sets of worm wheels 302 are arranged vertically and are concentric but not on the same axis. A first rotating shaft 304 and a second rotating shaft 305 are respectively installed at the top of the two sets of worm wheels 302. A rotating seat 306 is installed at the top of the first rotating shaft 304. A first bevel gear 307 is fixedly fitted through the top of the second rotating shaft 305. A second bevel gear 308 is meshed on one side of the first bevel gear 307. A rotating shaft 310 is installed in the middle of the second bevel gear 308. A mounting seat 309 is installed on the outer wall of the rotating shaft 310. The mounting seat 309 is provided with a clamping mechanism 5.

[0025] It also includes an infrared detection body 2, which consists of an infrared instrument and a shaped frame. The infrared instrument is installed on the bottom side of one end of the shaped frame, and a base plate 4 is provided at the bottom of the infrared instrument. The other end of the shaped frame is installed on the side wall of the workbench 1.

[0026] The clamping mechanism 5 includes a support plate 501 for placing the substrate 4. Two sets of extension rods are installed on both side walls of the support plate 501. The top of each of the four sets of extension rods is provided with a sliding groove 502, and a clamping plate 503 is slidably installed through the sliding groove 502. A screw 506 is rotatably installed on the top side of one end of each of the four sets of clamping plates 503, and an upper clamping piece 504 and a lower clamping piece 505 are screwed on through the screw 506. A pull rod 508 is installed on the other side wall of each of the four sets of clamping plates 503. A spring 507 is fitted on the outer wall of the pull rod 508. The other end of the pull rod 508 is installed through the outer wall of the sliding groove 502. The clamping plate 503 is adjusted by the sliding groove 502 and the screw 506 to accommodate substrates 4 of different sizes. The upper / lower clamping pieces 504 and 505 are made of silicone anti-slip layer + hemispherical protrusion to avoid scratching the substrate 4 and enhance friction.

[0027] Among them, an installation block 303 is rotatably mounted on the outer wall of one end of each of the two sets of worm gears 301. The bottom ends of the two sets of installation blocks 303 are fixedly connected to the top side of the workbench 1. A motor is installed on the side wall of each of the two sets of installation blocks 303. The two motors are respectively connected to one end of the corresponding worm gear 301 for transmission.

[0028] Among them, the bottom four corners of the bearing plate 501 are all equipped with connecting rods, and the bottom ends of the four sets of connecting rods are all installed on the mounting base 309.

[0029] The inner surfaces of the upper clamping plate 504 and the lower clamping plate 505 are provided with a silicone anti-slip layer, and the surfaces are uniformly distributed with hemispherical protrusions. The top of the screw 506 is coaxially mounted with a torque adjustment handle. The silicone layer and the hemispherical protrusions provide double anti-slip protection to prevent displacement of the substrate 4 or damage to its surface.

[0030] The working principle of this embodiment:

[0031] Rotating mechanism 3: Two sets of worm gears 301 are driven by a motor and mesh with the upper and lower worm wheels 302. They drive the rotating seat 306 to rotate horizontally through the first rotating shaft 304. At the same time, the second rotating shaft 305 drives the rotating shaft 310 and the mounting seat 309 to rotate through the vertical meshing of the first bevel gear 307 and the second bevel gear 308.

[0032] Clamping mechanism 5: The substrate 4 is placed on the support plate 501. The clamping plate 503 slides close to the edge of the substrate 4 through the slide groove 502. The spring 507 provides elastic restoring force through the pull rod 508. The clamping pressure of the upper clamping plate 504 and the lower clamping plate 505 is adjusted in conjunction with the screw 506. The silicone anti-slip layer and the surface protrusion structure enhance the friction.

[0033] Infrared detection body 2: The infrared instrument is fixed on the frame. When the substrate 4 moves with the rotating mechanism 3, the infrared instrument continuously scans the surface of the rotating substrate 4. The precision transmission of the worm gear 302 and the worm 301 ensures that the rotation speed matches the infrared detection frequency.

[0034] The embodiments of this utility model are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the utility model to the forms disclosed. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described in order to better illustrate the principles and practical applications of this utility model, and to enable those skilled in the art to understand this utility model and design various embodiments with various modifications suitable for a particular purpose.

Claims

1. A rotating device for infrared detection of vacuum-coated substrates, comprising a worktable (1), characterized in that: A rotating mechanism (3) is provided on the workbench (1). The rotating mechanism (3) includes two sets of worm gears (301) rotatably mounted on the workbench (1). Worm wheels (302) are meshed on opposite outer walls of the two sets of worm gears (301). The two sets of worm wheels (302) are arranged vertically and are concentric but not on the same axis. A first rotating shaft (304) and a second rotating shaft (305) are respectively mounted on the top ends of the two sets of worm wheels (302). The first rotating shaft (304)... A rotating seat (306) is installed at the top. The top of the second rotating shaft (305) passes through the second rotating shaft (305) and is fixedly fitted with a first bevel gear (307). A second bevel gear (308) is meshed on one side of the first bevel gear (307). A rotating shaft (310) is installed in the middle of the second bevel gear (308). A mounting seat (309) is installed on the outer wall of the rotating shaft (310). The mounting seat (309) is provided with a clamping mechanism (5).

2. The rotating device for infrared detection of vacuum-coated substrates according to claim 1, characterized in that: It also includes an infrared detection body (2), which consists of an infrared instrument and a frame. The infrared instrument is installed on the bottom side of one end of the frame, and a base plate (4) is provided at the bottom of the infrared instrument. The other end of the frame is installed on the side wall of the workbench (1).

3. The rotating device for infrared detection of vacuum-coated substrates according to claim 2, characterized in that: The clamping mechanism (5) includes a support plate (501) for placing the substrate (4). Two sets of extension rods are installed on both sides of the support plate (501). The top of each of the four sets of extension rods is provided with a sliding groove (502), and a clamping plate (503) is slidably installed through the sliding groove (502). A screw (506) is rotatably installed on the top side of one end of each of the four sets of clamping plates (503), and an upper clamping plate (504) and a lower clamping plate (505) are screwed on through the screw (506). A pull rod (508) is installed on the other side wall of each of the four sets of clamping plates (503). A spring (507) is fitted on the outer wall of the pull rod (508), and the other end of the pull rod (508) is installed through the outer wall of the sliding groove (502).

4. The rotating device for infrared detection of vacuum-coated substrates according to claim 1, characterized in that: Each of the two sets of worm gears (301) has a mounting block (303) rotatably fitted on one end of its outer wall. The bottom of each of the two sets of mounting blocks (303) is fixedly connected to the top side of the workbench (1). Each of the two sets of mounting blocks (303) has a motor installed on its side wall. Each of the two sets of motors is connected to one end of the corresponding worm gear (301) for transmission.

5. The rotating device for infrared detection of vacuum-coated substrates according to claim 3, characterized in that: Connecting rods are installed at the four corners of the bottom of the bearing plate (501), and the bottom ends of the four sets of connecting rods are installed on the mounting base (309).

6. The rotating device for infrared detection of vacuum-coated substrates according to claim 5, characterized in that: The inner surfaces of the upper clamping plate (504) and the lower clamping plate (505) are provided with a silicone anti-slip layer, and the surfaces are uniformly distributed with hemispherical protrusions. The top of the screw (506) is coaxially mounted with a torque adjustment handle.

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