Water quality measuring device

Abstract

The embodiment of the utility model provides a water quality measuring device which comprises a constant-temperature water supply module used for inputting to-be-measured liquid, controlling the to-be-measured liquid to be kept at a constant temperature and outputting the to-be-measured liquid; the first measuring assembly and the second measuring assembly are communicated with the constant-temperature water supply module; the first measuring assembly comprises an oxygen content measuring unit for measuring the oxygen content of the to-be-measured liquid output by the constant-temperature water supply module; and the second measuring assembly comprises a conductivity measuring unit for measuring the conductivity of the to-be-measured liquid output by the constant-temperature water supply module, and a temperature measuring unit for measuring the temperature of the to-be-measured liquid output by the constant-temperature water supply module. According to the water quality measuring device provided by the embodiment of the invention, multiple water quality indexes can be measured, temperature measuring probes can be prevented from being arranged on the oxygen content measuring unit and the conductivity measuring unit, the structure is simplified, and the measuring efficiency is improved.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor manufacturing, and more specifically to a water quality measuring device. Background Technology

[0002] In some rinsing stages of semiconductor manufacturing, highly purified ultrapure water is required to avoid the influence of impurity ions on semiconductor products. Therefore, it is necessary to measure the quality of this ultrapure water to prevent product defects caused by water quality issues. Against this backdrop, providing a measuring device for multiple water quality indicators and simplifying its structure has become a pressing technical problem for those skilled in the art. Utility Model Content

[0003] To address the aforementioned technical problems, this disclosure provides a water quality measuring device.

[0004] In a first aspect, embodiments of this disclosure provide a water quality measuring device, comprising:

[0005] The constant temperature water supply module is used to input the liquid to be measured, control the liquid to be measured to maintain a constant temperature, and output the liquid to be measured.

[0006] The first and second measuring components are connected to the constant temperature water supply module;

[0007] The first measuring component includes an oxygen content measuring unit that measures the oxygen content of the liquid to be measured output by the constant temperature water supply module; the second measuring component includes a conductivity measuring unit that measures the conductivity of the liquid to be measured output by the constant temperature water supply module, and a temperature measuring unit that measures the temperature of the liquid to be measured output by the constant temperature water supply module.

[0008] In a second aspect, embodiments of this disclosure provide a semiconductor manufacturing system, including the water quality measuring device as described in the first aspect.

[0009] This disclosure provides a water quality measuring device that controls the temperature of the liquid to be measured supplied to the device via a constant-temperature water supply module. The liquid is then transported to a first measuring component and a second measuring component connected to the constant-temperature water supply module. The oxygen content of the liquid is measured by the oxygen content measuring unit of the first measuring component, and the conductivity and temperature of the liquid are measured by the conductivity measuring unit and temperature measuring unit of the second measuring component, respectively. Therefore, by providing a constant-temperature liquid to the first and second measuring components via the constant-temperature water supply module, multiple water quality indicators can be measured. Furthermore, there is no need to install temperature probes on the conductivity and oxygen content measuring probes, simplifying the structure of the water quality measuring device. Additionally, there is no need for the transmitter to use a temperature compensation algorithm for calculation, thus improving the measurement efficiency of the water quality measuring device. Attached Figure Description

[0010] To more clearly illustrate the technical solutions in the embodiments of this disclosure or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0011] Figure 1 This is a schematic diagram of a dissolved oxygen measuring device.

[0012] Figure 2 This is a schematic diagram of a conductivity measuring device.

[0013] Figure 3 It is a graph showing the relationship between dissolved oxygen test results and temperature.

[0014] Figure 4 It is a graph showing the relationship between conductivity test results and temperature.

[0015] Figure 5 This is a schematic diagram of a water quality measuring device provided in an embodiment of this disclosure.

[0016] Figure 6 This is a schematic diagram of a temperature measuring unit in a water quality measuring device provided in an embodiment of this disclosure.

[0017] Figure 7 This is another schematic diagram of a water quality measuring device provided in an embodiment of this disclosure.

[0018] Figure 8 This is another schematic diagram of a water quality measuring device provided in the embodiments of this disclosure. Detailed Implementation

[0019] As the background technology indicates, in some cleaning steps of the semiconductor manufacturing process, highly purified ultrapure water is required for rinsing to avoid the influence of impurity ions on semiconductor products. Among these, the temperature, conductivity, dissolved oxygen (DO), silicon (SI), particulate matter, and total organic matter (TOC) of ultrapure water are important water quality indicators and significant factors affecting product yield.

[0020] To ensure that the ultrapure water meets the cleanliness requirements of the semiconductor manufacturing process, high-accuracy instruments are needed for monitoring to guarantee the stability of the ultrapure water quality in the semiconductor manufacturing system.

[0021] The measurement of dissolved oxygen in the liquid to be tested can be based on the principle of a galvanic cell. Figure 1 This is a schematic diagram of a dissolved oxygen measuring device. (Reference) Figure 1Dissolved oxygen in the test liquid 110 enters the electrolyte 103 through the breathable membrane 102. By applying a polarization voltage to the measuring cathode 100 and measuring anode 101, the current signal generated by the redox reaction process is acquired by the current sensor A and transmitted to the transmitter. Since the current signal is proportional to the oxygen partial pressure p(O2) in the electrolyte 103, the test result of dissolved oxygen in the test liquid 110 can be calculated based on the value of the current signal.

[0022] The conductivity of the liquid to be tested can be measured based on the principle of an electrolytic cell. Figure 2 A schematic diagram of a conductivity measuring device, for reference. Figure 2 By applying an alternating current AC between two test electrodes 111 in the liquid to be tested 110, the current sensor measures the electrical signal formed by the ions after electrolysis in the liquid to be tested 110 and transmits it to the transmitter, so that the conductivity of the liquid to be tested 110 can be calculated based on the value of the current signal.

[0023] However, the measurements of dissolved oxygen and conductivity in liquids are both affected by temperature.

[0024] Figure 3 This is a graph showing the relationship between dissolved oxygen test results and temperature. (Reference) Figure 3 , Figure 3 The horizontal axis represents the temperature of the liquid being tested, and the vertical axis represents the dissolved oxygen content within the liquid, expressed in mg / L. This unit represents the mass of dissolved oxygen (in mg) per liter of the liquid. For the same liquid, the dissolved oxygen concentration decreases as the temperature increases. Therefore, temperature compensation calculations are required based on the measured temperature to obtain an accurate dissolved oxygen value.

[0025] Figure 4 This is a graph showing the relationship between conductivity test results and temperature. (Reference) Figure 4 , Figure 3 The horizontal axis represents the temperature of the liquid being tested, and the vertical axis represents its conductivity, expressed in μs / cm (micro-Siemens per centimeter). It is evident that for the same liquid, the conductivity increases with increasing temperature. Furthermore, the water used in semiconductor manufacturing processes has a low ion concentration. For example, the conductivity of a 100 μg / L NaCl solution increases with temperature in a similar manner to that of pure water. This demonstrates that temperature significantly affects the conductivity of the liquid being tested; therefore, temperature compensation calculations are necessary to obtain accurate conductivity values.

[0026] It is evident that existing dissolved oxygen and conductivity measuring instruments are affected by temperature, requiring the integration of temperature probes into their respective measuring probes for temperature compensation calculations to obtain accurate DO and conductivity values. This increases the production costs of probes and sensors, as well as the computational complexity of the transmitters. Furthermore, DO instruments require manual replacement of the electrolyte and diaphragm, and demand a relatively long polarization time. This process necessitates professional instrument maintenance, incurring labor, material, and other maintenance costs.

[0027] To address the aforementioned issues, this disclosure provides a water quality measuring device. A constant-temperature water supply module controls the temperature of the liquid to be measured supplied to the device and delivers the liquid to a first measuring component and a second measuring component connected to the constant-temperature water supply module. The oxygen content of the liquid is measured by the oxygen content measuring unit of the first measuring component, and the conductivity and temperature of the liquid are measured by the conductivity and temperature measuring units of the second measuring component, respectively. Therefore, by providing a constant-temperature liquid to the first and second measuring components through the constant-temperature water supply module, multiple water quality indicators can be measured. Furthermore, there is no need to install temperature probes on the conductivity and oxygen content measuring probes, simplifying the structure of the water quality measuring device. Additionally, there is no need for the transmitter to use a temperature compensation algorithm for calculation, thus improving the measurement efficiency of the water quality measuring device.

[0028] To make the above-mentioned objects, features and advantages of this disclosure more apparent and understandable, specific embodiments of this disclosure will be described in detail below with reference to the accompanying drawings.

[0029] Figure 5 This is a schematic diagram of a water quality measuring device provided in an embodiment of this disclosure. (Reference) Figure 5 The water quality measuring device provided in this embodiment includes:

[0030] Thermostatic water supply module 2 is used to input the liquid to be measured, control the liquid to be measured to maintain a constant temperature, and output the liquid to be measured.

[0031] The first measuring component 3 and the second measuring component 4 are connected to the constant temperature water supply module 2;

[0032] The first measuring component 3 includes an oxygen content measuring unit 34 that measures the oxygen content of the liquid to be measured output by the constant temperature water supply module 2; the second measuring component 4 includes a conductivity measuring unit 41 that measures the conductivity of the liquid to be measured output by the constant temperature water supply module 2, and a temperature measuring unit 42 that measures the temperature of the liquid to be measured output by the constant temperature water supply module.

[0033] The liquid to be measured can be ultrapure water required in semiconductor manufacturing processes, or other liquids whose water quality needs to be monitored, such as deionized water required in semiconductor manufacturing processes.

[0034] Since the constant temperature water supply module 2 controls the liquid to be measured to remain at a constant temperature, there is no need to install temperature probes on the oxygen content measurement unit 34 and the conductivity measurement unit 41, which simplifies the structure of the water quality measurement device. In addition, there is no need for the transmitter to use a temperature compensation algorithm for calculation, thereby improving the measurement efficiency of the water quality measurement device.

[0035] To ensure that the pressure of the liquid to be measured in the first measuring component 3 and the second measuring component 4 is the same, thereby improving the measurement accuracy of the water quality measuring device, continue to refer to... Figure 5 In some embodiments, the first measuring component 3 and the second measuring component 4 are disposed on the top of the constant temperature water supply module 2 and connected to different communication ports on the top of the constant temperature water supply module 2.

[0036] It is understood that the connection method and positional relationship between the first measuring component 3 and the second measuring component 4 and the constant temperature water supply module 2 can be changed according to the size requirements of the instrument. For example, the first measuring component 3 and the second measuring component 4 can be horizontally connected to the constant temperature water supply module 2.

[0037] In some specific embodiments, the top of the constant temperature water supply module 2 is provided with a first connecting port 23 and a second connecting port 24; the first measuring component 3 is connected to the constant temperature water supply module 2 through the first connecting port 23; wherein, the first connecting port 23 protrudes from the top of the constant temperature water supply module 2 and is inserted into the first measuring component 3 to provide the liquid to be measured to the first measuring component 3; the second measuring component 4 is connected to the constant temperature water supply module 2 through the second connecting port 24; wherein, the second connecting port 24 protrudes from the top of the constant temperature water supply module 2 and is inserted into the second measuring component 4 to provide the liquid to be measured to the second measuring component 4.

[0038] By positioning the first measuring component 3 and the second measuring component 4 at the top of the constant temperature water supply module 2, the flow direction of the liquid to be measured in the water quality measuring device can be better controlled based on the pressure of the externally input liquid, ensuring the normal operation of the water quality measuring device. In some specific embodiments, the first connecting port 23 and the second connecting port 24 are symmetrically arranged at the top of the constant temperature water supply module 2, thereby ensuring that the pressure of the liquid to be measured in the first connecting port 23 and the second connecting port 24 is the same, facilitating the control of the flow direction of the liquid to be measured in the water quality measuring device.

[0039] In some embodiments, the first measuring component 3 further includes: a measuring water tank 31 communicating with the first communication port 23 and a measuring electrolyte tank 32 located above the measuring water tank 31; a first partition 33 is provided between the measuring water tank 31 and the measuring electrolyte tank 32, and a measuring film 341 of the oxygen content measuring unit 34 is disposed in the first partition 33, wherein the gas in the liquid to be measured located in the measuring water tank 31 passes through the measuring film 341 and enters the measuring electrolyte tank 32.

[0040] In some embodiments, the measurement of dissolved oxygen in the liquid to be measured can be based on the principle of a galvanic cell. Oxygen molecules are introduced into the measuring electrolyte pool 32 containing the electrolyte through the measuring membrane 341, where a reduction reaction occurs in the oxygen content measuring unit, generating an electric current. The concentration of dissolved oxygen in the liquid to be measured is then calculated by measuring the magnitude of this current. Therefore, the first partition 33, which contains the measuring membrane 341, is required to isolate the measuring reservoir 31 from the measuring electrolyte pool 32, ensuring that the electrolyte in the measuring electrolyte pool 32 does not contaminate the liquid to be measured.

[0041] In some specific embodiments, the electrolyte is one of potassium chloride solution, sodium chloride solution or sodium sulfate solution.

[0042] In some embodiments, an exhaust unit 35 is provided inside the measuring electrolyte pool 32, the exhaust unit 35 being used to expel air bubbles from the electrolyte in the measuring electrolyte pool 32.

[0043] The exhaust unit 35 allows the gas in the electrolyte to be discharged through negative pressure or other means after the oxygen content measurement process is completed, thus avoiding affecting subsequent measurements and improving the accuracy of oxygen content measurement.

[0044] In some embodiments, the electrolyte tank 32 is further provided with an oxygen content measuring probe 343 of the oxygen content measuring unit 34 and an oxygen content measuring sensor 342 of the oxygen content measuring unit 34; the oxygen content measuring sensor 342 is connected to the oxygen content measuring probe 343; wherein, the oxygen content measuring probe 343 and the oxygen content measuring sensor 342 are used to measure the oxygen content of the liquid to be measured.

[0045] The oxygen content measuring probe 343 is used to measure the current generated by the reduction reaction in the oxygen content measuring unit. The current measured by the oxygen content measuring probe 343 is transmitted to the oxygen content measuring sensor 342. The oxygen content measuring sensor 342 converts the current into a current value that can be processed later. Thus, the water treatment device can calculate the concentration of dissolved oxygen in the liquid to be measured based on the current value.

[0046] In some specific embodiments, a second partition 36 is also provided in the measuring electrolyte pool 32, the exhaust unit 35 passes through the second partition 36, and the oxygen content measuring probe 343 is isolated from the oxygen content measuring sensor 342 through the second partition 36.

[0047] The second partition 36 can isolate the oxygen content measuring probe 343 from the oxygen content measuring sensor 342, while improving the airtightness of the measuring electrolyte pool 32 and preventing impurities from entering the measuring electrolyte pool 32, thereby improving the accuracy of water quality measurement.

[0048] Please continue to refer to this. Figure 5 The second measuring component 4 includes a conductivity measuring unit 41 for measuring the conductivity of the liquid to be measured output by the constant temperature water supply module 2.

[0049] The conductivity of the liquid to be measured can be measured based on the principle of an electrolytic cell, using the conductivity measuring unit 41.

[0050] In some implementations, reference Figure 5 and Figure 7 The conductivity measurement unit 41 includes a conductivity measurement probe 412 extending into the constant temperature water supply module 2 and a conductivity sensor 411 connected to the conductivity measurement probe 412.

[0051] By applying alternating current between two test electrodes on the conductivity measuring probe 412 in the liquid to be measured, the conductivity sensor 411 measures the electrical signal formed by ions after electrolysis in the liquid to be measured, and the conductivity of the liquid to be measured can be calculated based on the value of the electrical signal.

[0052] It is understood that the purpose of the conductivity measuring probe 412 extending into the constant temperature water supply module 2 is to reduce the height of the water quality testing device and make the structure of the water quality testing device more compact. In some other embodiments, the conductivity measuring probe 412 can also be placed inside the second measuring component 4.

[0053] Continue to refer to Figure 5 The second measuring component 4 also includes a temperature measuring unit 42 for measuring the temperature of the liquid to be measured output by the constant temperature water supply module.

[0054] The temperature measuring unit 42 is used to measure the temperature of the liquid to be measured output by the constant temperature water supply module 2. The constant temperature water supply module 2 can control the temperature of the liquid to be measured output by the constant temperature water supply module 2 through closed-loop control (e.g., PID control algorithm) based on the temperature of the liquid to be measured obtained by the temperature measuring unit 42, thereby ensuring the measurement accuracy of the water quality measuring device.

[0055] In some implementations, reference Figure 5 , Figure 6 and Figure 7 The temperature measuring unit 42 includes a temperature measuring probe 422 extending into the constant temperature water supply module 2 and a temperature sensor 421 connected to the temperature measuring probe 422. Extending the temperature measuring probe 422 into the constant temperature water supply module 2 improves the control accuracy of the temperature of the liquid being measured output by the constant temperature water supply module 2, thereby further improving the measurement accuracy of the water quality measuring device. It is understood that in some other embodiments, the temperature measuring probe 422 may also be disposed within the second measuring component 4.

[0056] Continue to refer to Figure 5 In some embodiments, the second measuring component 4 further includes a third partition 44, which is used to carry the electrolyte delivery unit 43, the conductivity measuring unit 41, and the temperature measuring unit 42; wherein the electrolyte delivery unit 43 is used to deliver and recover electrolyte to the first measuring component 3; the conductivity sensor 411 and the temperature sensor 421 are disposed on the top of the third partition 44; and the conductivity measuring probe 412 and the temperature measuring probe 422 are disposed on the bottom of the third partition 44.

[0057] It is understood that the third partition 44 isolates the conductivity sensor 411 and the conductivity measuring probe 412, as well as the temperature sensor 421 and the temperature measuring probe 422, which can further improve the conductivity measurement accuracy and the temperature measurement accuracy.

[0058] The electrolyte delivery unit 43 is used to deliver and recycle electrolyte to the first measuring component 3, so that when the measurement is completed or the instrument needs to be maintained, there is no need to manually discharge the electrolyte, avoiding unexpected instrument failures caused by manual operation, and ensuring the recycling and reuse of electrolyte, improving the utilization rate of electrolyte, and thus reducing costs.

[0059] It is understandable that, since the electrolyte tank 32 in the first measuring component 3 requires a certain space to accommodate the electrolyte, placing the electrolyte delivery unit 43 outside the first measuring component 3, such as on the third partition 44 of the second measuring component 4 in the aforementioned embodiment, can improve the space utilization of the water quality measuring device. In some other embodiments, the electrolyte delivery unit 43 can also be placed outside the second measuring component 4, as long as it can realize the function of delivering and recovering electrolyte to the first measuring component 3.

[0060] In some specific embodiments, the electrolyte delivery unit 43 includes: an electrolyte bottle 431 fixedly connected to the third partition 44, a peristaltic pump 432 communicating with the electrolyte bottle 431, and a valve 433 communicating with the peristaltic pump 432; wherein, when the peristaltic pump 432 is running in the forward direction, it delivers electrolyte to the measuring electrolyte pool 32, and when running in the reverse direction, it recovers electrolyte from the measuring electrolyte pool 32; the valve 433 is used to control the flow rate of the electrolyte.

[0061] A peristaltic pump is a pump that uses the contraction and expansion of an elastic tube to propel liquid flow. Its characteristic is that the liquid never comes into direct contact with the pump's mechanical parts during the flow process. Therefore, the peristaltic pump 432 can deliver and recover electrolyte to the first measuring component 3, thus avoiding electrolyte contamination and ensuring the normal operation of the water quality measuring device.

[0062] Continue to refer to Figure 5 In some embodiments, the second measuring component 4 further includes a drainage unit for discharging the liquid to be measured from the water quality measuring device. The drainage unit includes a connecting pipe connecting the measuring water tank 31 and the second measuring component 4, and a drainage pipe 452 passing through the third partition 44 and connecting the second measuring component 4 and the outside of the water quality measuring device.

[0063] After the liquid to be measured has passed through the water quality measurement device, it needs to be discharged to ensure the normal operation of subsequent measurements. Therefore, the drainage unit can ensure that the liquid to be measured is discharged normally from the water quality measurement device.

[0064] The connecting pipe connects the first measuring component 3 and the second measuring component 4. Specifically, the connecting pipe connects the measuring water storage tank 31 and the space below the third partition 44 in the second measuring component 4. The drain pipe 452 passes through the third partition 44 and connects the space below the third partition 44 in the second measuring component 4 to the outside of the water quality measuring device, so that the liquid to be tested in the first measuring component 3 and the second measuring component 4 can be discharged from the water quality measuring device.

[0065] It is understood that the drainage unit only needs to perform the function of draining the liquid to be tested from the water quality measuring device. For example, the first measuring component 3 and the second measuring component 4 can each have their own drainage pipes to drain the liquid to be tested from the water quality measuring device.

[0066] In some implementations, reference continues. Figure 5 The top of the third partition 44 is also provided with a control unit 46 for controlling the water quality measuring device. The control unit 46 is electrically connected to at least the temperature sensor 421, the conductivity sensor 411, the oxygen content measuring sensor 342 and the peristaltic pump 432.

[0067] The water quality measuring device can be operated normally by the control unit 46 located on top of the third partition 44. It is understood that the control unit 46 needs to be connected to the temperature sensor 421, the conductivity sensor 411, and the oxygen content measuring sensor 342 to collect data, and also needs to be electrically connected to the peristaltic pump 432 to realize the function of delivering and recovering electrolyte to the first measuring component 3.

[0068] In some implementations, reference continues. Figure 5 The constant temperature water supply module 2 has an inlet 21 on one side that connects to the outside of the water quality measuring device and is used to input the liquid to be tested into the constant temperature water supply module 2; and the constant temperature water supply module 2 also has an air inlet 22 on the side where the inlet 21 is located, which connects to the outside of the water quality measuring device and is used to provide clean gas to the water quality measuring device.

[0069] The water inlet 21 is used to input the liquid to be tested into the constant temperature water supply module 2. For example, the liquid to be tested can be input into the constant temperature water supply module 2 through an external water source. The air inlet 22 is used to provide cleaning gas to the water quality measuring device. When maintenance of the water quality measuring device is required, the cleaning gas is used to clean the constant temperature water supply module 2, the first measuring component 3, and the second measuring component 4.

[0070] In some specific embodiments, the cleaning gas is one of nitrogen, helium, argon, or clean dry air (CDA).

[0071] Figure 8 This is yet another schematic diagram of a water quality measuring device provided in an embodiment of this disclosure. (See reference) Figure 8In some embodiments, the water quality measuring device further includes a housing 5 that houses the constant temperature water supply module, the first measuring component, and the second measuring component. The housing 5 has a housing water inlet corresponding to the water inlet, a housing air inlet corresponding to the air inlet, and a housing drain outlet corresponding to the drain pipe.

[0072] To improve the airtightness of the water quality measuring device and ensure the accuracy of water quality measurements, the constant temperature water supply module, the first measuring component, and the second measuring component are housed within the outer casing 5. In some specific embodiments, the outer casing 5 has an openable first door 54 and a second door 55 on its side. The second door 55 is equipped with a display screen 57 for displaying water quality measurement parameters and buttons 56 for controlling the water quality measuring device, thereby enabling convenient operation of the water quality measuring device and intuitive acquisition of the water quality measurement results of the liquid to be measured.

[0073] As can be seen, the water quality measuring device provided in this embodiment controls the temperature of the liquid to be measured supplied to the water quality measuring device through a constant temperature water supply module, and delivers the liquid to be measured to a first measuring component and a second measuring component connected to the constant temperature water supply module. The oxygen content of the liquid to be measured is measured by the oxygen content measuring unit of the first measuring component, and the conductivity and temperature of the liquid to be measured are measured by the conductivity measuring unit and the temperature measuring unit of the second measuring component, respectively. It can be seen that by providing the first measuring component and the second measuring component with a constant temperature liquid to be measured through the constant temperature water supply module, multiple water quality indicators can be measured. Moreover, there is no need to set a temperature probe on the conductivity and oxygen content measuring probes, which simplifies the structure of the water quality measuring device. Furthermore, there is no need for the transmitter to use a temperature compensation algorithm for calculation, which improves the measurement efficiency of the water quality measuring device.

[0074] This disclosure also provides a semiconductor manufacturing system, including the water quality measuring device described in the foregoing embodiments. By monitoring the ultrapure water quality in the semiconductor manufacturing system using the water quality measuring device described in the foregoing embodiments, the measurement accuracy and efficiency of the water quality measuring device can be improved, ensuring the normal operation of the semiconductor manufacturing process.

[0075] While the above disclosure is provided, it is not limited thereto. Any person skilled in the art may make various alterations and modifications without departing from the spirit and scope of this disclosure; therefore, the scope of protection of this disclosure shall be determined by the scope defined in the claims.

Claims

1. A water quality measuring device, characterized in that, include: The constant temperature water supply module is used to input the liquid to be measured, control the liquid to be measured to maintain a constant temperature, and output the liquid to be measured. A first measuring component and a second measuring component connected to the constant temperature water supply module; The first measuring component includes an oxygen content measuring unit that measures the oxygen content of the liquid to be measured output by the constant temperature water supply module; the second measuring component includes a conductivity measuring unit that measures the conductivity of the liquid to be measured output by the constant temperature water supply module, and a temperature measuring unit that measures the temperature of the liquid to be measured output by the constant temperature water supply module.

2. The water quality measuring device as described in claim 1, characterized in that, The first measuring component and the second measuring component are disposed on the top of the constant temperature water supply module and connected to different communication ports on the top of the constant temperature water supply module.

3. The water quality measuring device as described in claim 2, characterized in that, The top of the constant temperature water supply module is provided with a first connection port and a second connection port. The first measuring component is connected to the constant temperature water supply module through the first connecting port; wherein, the first connecting port protrudes from the top of the constant temperature water supply module and is inserted into the first measuring component to provide the liquid to be measured to the first measuring component; The second measuring component is connected to the constant temperature water supply module through the second connecting port; wherein the second connecting port protrudes from the top of the constant temperature water supply module and is inserted into the second measuring component to provide the liquid to be measured to the second measuring component.

4. The water quality measuring device as described in claim 3, characterized in that, The first measuring component further includes: a measuring water tank connected to the first communication port and a measuring electrolyte tank located above the measuring water tank; a first partition is provided between the measuring water tank and the measuring electrolyte tank, and a measuring membrane of the oxygen content measuring unit is disposed in the first partition, wherein the gas in the liquid to be measured located in the measuring water tank passes through the measuring membrane and enters the measuring electrolyte tank.

5. The water quality measuring device as described in claim 4, characterized in that, The electrolyte tank is equipped with an exhaust unit, an oxygen content measuring probe of the oxygen content measuring unit, and an oxygen content measuring sensor of the oxygen content measuring unit; the oxygen content measuring sensor is connected to the oxygen content measuring probe. The exhaust unit is used to expel air bubbles from the electrolyte in the measuring electrolyte pool, and the oxygen content measuring probe and the oxygen content measuring sensor are used to measure the oxygen content of the liquid to be measured.

6. The water quality measuring device as described in claim 5, characterized in that, The measuring electrolyte pool is also equipped with a second partition, the exhaust unit passes through the second partition, and the oxygen content measuring probe is isolated from the oxygen content measuring sensor through the second partition.

7. The water quality measuring device as described in claim 5, characterized in that, The conductivity measurement unit includes a conductivity measurement probe that extends into the constant temperature water supply module and a conductivity sensor connected to the conductivity measurement probe; The temperature measurement unit includes a temperature measurement probe that extends into the constant temperature water supply module and a temperature sensor connected to the temperature measurement probe.

8. The water quality measuring device as described in claim 7, characterized in that, The second measuring component also includes a third partition, which is used to support the electrolyte delivery unit, the conductivity measuring unit, and the temperature measuring unit; The electrolyte delivery unit is used to deliver and recover electrolyte to the first measuring component; the conductivity sensor and the temperature sensor are disposed on the top of the third partition; and the conductivity measuring probe and the temperature measuring probe are disposed on the bottom of the third partition.

9. The water quality measuring device as described in claim 8, characterized in that, The second measuring component further includes a drainage unit for discharging the liquid to be measured from the water quality measuring device. The drainage unit includes a connecting pipe connecting the measuring water tank and the second measuring component, and a drainage pipe passing through the third partition and connecting the second measuring component and the outside of the water quality measuring device.

10. The water quality measuring device as described in claim 9, characterized in that, The electrolyte delivery unit includes: an electrolyte storage bottle fixedly connected to the third partition, a peristaltic pump communicating with the electrolyte storage bottle, and a valve communicating with the peristaltic pump; The peristaltic pump delivers electrolyte to the measuring electrolyte pool when running in the forward direction and recovers electrolyte from the measuring electrolyte pool when running in the reverse direction; the valve is used to control the flow rate of the electrolyte.

11. The water quality measuring device as described in claim 10, characterized in that, The top of the third partition is also provided with a control circuit box for controlling the water quality measuring device. The control circuit box is electrically connected to at least the temperature sensor, the conductivity sensor, the oxygen content measuring sensor and the peristaltic pump.

12. The water quality measuring device as described in claim 11, characterized in that, One side of the constant temperature water supply module is provided with an inlet that connects to the outside of the water quality measuring device, which is used to input the liquid to be tested into the constant temperature water supply module. In addition, the constant temperature water supply module also has an air inlet on the side where the water inlet is located, which is connected to the outside of the water quality measuring device and is used to provide clean gas to the water quality measuring device.

13. The water quality measuring device as described in claim 12, characterized in that, The water quality measuring device further includes a housing that accommodates the constant temperature water supply module, the first measuring component, and the second measuring component. The housing has a housing water inlet corresponding to the water inlet, a housing air inlet corresponding to the air inlet, and a housing drain outlet corresponding to the drain pipe.

14. The water quality measuring device as described in claim 13, characterized in that, The outer casing has an openable first door and a second door on its side. The second door has a display screen for displaying water quality measurement parameters and buttons for controlling the water quality measurement device.

15. The water quality measuring device as described in claim 14, characterized in that, The electrolyte is one of potassium chloride solution, sodium chloride solution, or sodium sulfate solution; the cleaning gas is one of nitrogen, helium, argon, or dry air.

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