Conductivity detection device for metal film of film capacitor after chemical plating

Abstract

The utility model relates to the technical field of film capacitor detection, in particular to a device for detecting the conductivity of a metal film of a film capacitor after chemical plating, which comprises a supporting seat, an upper bracket and a lower bracket, the conductivity detection device further comprises a plurality of upper shells arranged on the upper support side by side and upper probes penetrating through the bottoms of the upper shells, and elastic suspension pieces are arranged between the top ends of the upper probes and the tops in the upper shells. According to the utility model, through mutual cooperation of the upper probe and the lower probe which are vertically and oppositely arranged, and the elastic suspension member, the guide rod and the pressure spring which are corresponding to the upper probe and the lower probe, when all the upper shells are located at the same height and all the lower shells are located at the same height, enough displacement space is reserved for the upper probe and the lower probe during detection; therefore, the stability of the conductive detection is improved, and the problem that the detection precision is affected by poor contact can be avoided.

Description

Technical Field

[0001] This utility model relates to the field of thin film capacitor testing technology, and in particular to a device for testing the conductivity of the metal thin film of a chemically plated thin film capacitor. Background Technology

[0002] The metal film of a film capacitor is made by chemically depositing a metal layer onto the surface of an insulating film. To detect the uniformity of the metal coating on the metal film, after chemical plating, a resistance probe is used to detect the conductivity of the metal coating on the surface of the metal film, and the resistance change is recorded in real time. The conductivity decay trend is dynamically analyzed by a corrosion imaging detector, thereby detecting the smoothness and roughness of the metal coating on the surface of the metal film.

[0003] Existing patent application number 202420133882.8 discloses a sheet resistance detection device for conductive metal thin films. This device controls a driving element to move the sheet resistance detector closer to or further away from the traction roller, causing the probe to contact the conductive metal thin film and read the sheet resistance data. It can also detect the sheet resistance of the top and bottom surfaces of the conductive metal thin film, improving detection efficiency. In the above-mentioned prior art, due to the difference in flatness at different points on the surface of the metal thin film, when multiple driving elements drive the corresponding probes to contact the metal thin film, the problem of poor contact of one probe may easily occur, affecting the detection accuracy. Utility Model Content

[0004] In view of this, the purpose of this utility model is to propose a device for detecting the conductivity of a thin-film metal capacitor after chemical plating, so as to solve the problem that when multiple driving elements drive the corresponding probes to contact the metal film, a certain probe may have poor contact, which affects the detection accuracy.

[0005] To achieve the above objectives, this utility model provides a device for detecting the conductivity of a thin-film metal capacitor after electroless plating, comprising a support base and an upper bracket and a lower bracket vertically hinged to each other within the support base. The conductivity detection device further includes:

[0006] Several upper outer shells are arranged side by side on the upper support, and an upper probe is inserted through the bottom of the upper outer shell. An elastic suspension member is provided between the top of the upper probe and the top of the interior of the upper outer shell.

[0007] Several lower housings are arranged side by side on the lower support, and a lower probe is inserted through the top of the lower housing. An elastic support is provided between the bottom of the lower probe and the bottom of the interior of the lower housing. When the metal film passes horizontally between the upper probe and the lower probe, the two are stably pushed against the metal film by the elastic force of the elastic suspension and the elastic support, respectively.

[0008] A drive unit used to drive the upper and lower supports to deflect in opposite directions.

[0009] Preferably, the elastic suspension component includes a vertical rod fixed to the top of the upper probe and a sleeve rod slidably sleeved on the top of the outer end of the vertical rod. The top end of the sleeve rod is fixed to the top of the inner part of the upper housing. A tension spring is provided inside the sleeve rod, and the two ends of the tension spring are respectively fixed to the top of the vertical rod and the top of the inner part of the sleeve rod.

[0010] Preferably, the elastic support includes a guide rod fixed to the bottom of the lower probe and a sleeve slidably sleeved on the bottom of the guide rod. The bottom of the sleeve is fixed inside the bottom of the lower housing. A compression spring is sleeved on the outside of the guide rod, and the two ends of the compression spring abut against the top of the sleeve and the bottom of the lower probe, respectively.

[0011] Preferably, the bottom end of the upper probe and the top end of the lower probe are both pointed tips, and the pointed tips of the upper probe correspond to the pointed tips of the lower probe.

[0012] Preferably, the bottom end of the upper probe and the top end of the lower probe abut against the top and bottom of the metal film respectively and are perpendicular to the surface of the metal film during detection.

[0013] Preferably, the driving unit includes two vertical grooves disposed on one of the vertical surfaces of the support base and a slider slidably disposed inside the vertical grooves. A horizontal support arm is fixedly provided on the upper and lower supports near the end of the slider. One end of the slider is slidably connected to a horizontal groove disposed on one of the vertical surfaces of the horizontal support arm. The remaining end of the slider is hinged to a diagonal brace. A connecting block is hinged between the free ends of the two diagonal braces. A telescopic cylinder for laterally pushing the connecting block to move is fixedly provided on one of the vertical surfaces of the support base.

[0014] Preferably, the telescopic cylinder is located between two vertical grooves, and the axis of the telescopic cylinder is perpendicular to the vertical grooves.

[0015] Preferably, the conductivity detection device further includes four conveying rollers disposed in the support base. The four conveying rollers are distributed in two layers, one above the other. The metal film runs vertically from bottom to top around the outside of two adjacent conveying rollers, then horizontally passes between the upper and lower probes and around the outside of one of the remaining conveying rollers, and finally runs downward around the outside of the last conveying roller.

[0016] The beneficial effects of this utility model are:

[0017] This invention utilizes vertically oriented upper and lower probes, along with corresponding elastic suspension components, guide rods, and compression springs, to achieve a balance where, when all upper and lower shells are at the same height, the distance between the tips of the upper and lower probes is half the thickness of the metal film. This ensures sufficient displacement space for the upper and lower probes during detection, maintaining stable contact with the metal film and improving the stability of conductivity detection. It also avoids issues caused by poor contact affecting detection accuracy and allows for simultaneous detection of the same point at the top and bottom of the metal film, further enhancing detection precision. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a three-dimensional illustration of the present invention. Figure 1 ;

[0020] Figure 2 This is a three-dimensional illustration of the present invention. Figure 2 ;

[0021] Figure 3 This is a three-dimensional illustration of the present invention. Figure 3 ;

[0022] Figure 4 for Figure 3 An enlarged schematic diagram of part A in the middle;

[0023] Figure 5 for Figure 3 Enlarged schematic diagram of part B in the middle;

[0024] Figure 6 This is a three-dimensional illustration of the present invention. Figure 4 .

[0025] The diagram is marked as follows:

[0026] 1. Support base; 2. Conveyor roller; 3. Upper bracket; 4. Upper outer shell; 5. Drive unit; 51. Vertical groove; 52. Slider; 53. Diagonal brace; 54. Connecting block; 55. Telescopic cylinder; 56. Horizontal slide groove; 57. Horizontal support arm; 6. Lower bracket; 7. Lower outer shell; 8. Upper probe; 9. Elastic suspension component; 91. Vertical rod; 92. Sleeve rod; 93. Tension spring; 10. Lower probe; 11. Elastic support component; 111. Guide rod; 112. Sleeve; 113. Compression spring. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments.

[0028] It should be noted that, unless otherwise defined, the technical or scientific terms used in this utility model should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar terms used in this utility model do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0029] like Figures 1 to 6 As shown, a conductivity testing device for a chemically plated thin-film capacitor includes a support base 1 and an upper bracket 3 and a lower bracket 6 vertically hinged to each other within the support base 1. The conductivity testing device further includes:

[0030] Several upper outer shells 4 are arranged side by side on the upper support 3, and an upper probe 8 is inserted through the bottom of the upper outer shell 4. An elastic suspension member 9 is provided between the top of the upper probe 8 and the top of the interior of the upper outer shell 4.

[0031] Several lower housings 7 are arranged side by side on the lower support 6, and a lower probe 10 is inserted through the top of the lower housing 7. An elastic support 11 is provided between the bottom of the lower probe 10 and the bottom of the interior of the lower housing 7. The upper probe 8 is electrically connected to the corrosion imaging detector through wires, and the lower probe 10 is also electrically connected to the corrosion imaging detector through wires. When the metal film passes horizontally between the upper probe 8 and the lower probe 10, the two are stably pushed against the metal film by the elastic force of the elastic suspension 9 and the elastic support 11, respectively. The detected surface unevenness data of the metal film is stably transmitted to the corrosion imaging detector in real time, which improves the stability and accuracy of the detection data, avoids poor contact that affects the accuracy of the detection data, and can also automatically adapt to the undulations of the metal film surface, improving the continuity of detection.

[0032] Drive unit 5 for driving the upper bracket 3 and lower bracket 6 to deflect in the opposite direction.

[0033] like Figure 2 , Figure 3 and Figure 4 As shown, the elastic suspension component 9 includes a vertical rod 91 fixed to the top of the upper probe 8 and a sleeve 92 slidably sleeved on the top of the outer side of the vertical rod 91. The top of the sleeve 92 is fixed inside the top of the upper outer shell 4. A tension spring 93 is provided inside the sleeve 92. The two ends of the tension spring 93 are respectively fixed to the top of the vertical rod 91 and the top of the inside of the sleeve 92. This design allows the vertical rod 91 and the sleeve 92 to match, and in conjunction with the insertion connection between the upper probe 8 and the bottom of the upper outer shell 4, to constrain the degree of freedom of the upper probe 8, allowing it to move linearly only in its axial direction. The 93 method allows the upper probe 8 to be elastically suspended at a certain height when it is in a natural vertical state. This ensures that the bottom of the upper probe 8 is slightly lower than the top of the metal film, thus allowing the bottom of the upper probe 8 to always stably contact the top of the metal film. During the transport of the metal film, this reduces the stress between the bottom of the upper probe 8 and the metal film, enabling it to move stably up and down with the surface unevenness of the metal film and maintain good contact with it at all times. This improves the accuracy of continuous detection and avoids problems with poor contact.

[0034] like Figure 2 , Figure 3 and Figure 5 As shown, the elastic support 11 includes a guide rod 111 fixed to the bottom of the lower probe 10 and a sleeve 112 slidably sleeved on the bottom of the guide rod 111. The bottom of the sleeve 112 is fixed inside the bottom of the lower housing 7. A compression spring 113 is sleeved on the outside of the guide rod 111. The two ends of the compression spring 113 abut against the top of the sleeve 112 and the bottom of the lower probe 10, respectively. With this design, the guide rod 111, the sleeve 112, and the compression spring 113 are matched and, together with the interlocking connection between the lower probe 10 and the top of the lower housing 7, the lower probe 10 is elastically supported. When perpendicular to the horizontal plane, the top of the lower probe 10 is slightly higher than the bottom of the metal film, so that the top of the lower probe 10 can stably adhere to the bottom of the metal film during detection, improving detection stability. During the transport of the metal film, it can reduce the stress between the bottom of the lower probe 10 and the metal film, allowing it to move stably up and down with the surface unevenness of the metal film and always maintain good contact with the metal film, improving the accuracy of continuous detection and avoiding the problem of poor contact. In this way, with the cooperation of the upper probe 8 and the lower probe 10, the metal film can be detected stably and efficiently.

[0035] like Figure 1 , Figure 2 , Figure 3 and Figure 6As shown, the bottom end of the upper probe 8 and the top end of the lower probe 10 are both sharp points, and the sharp point of the upper probe 8 corresponds to the sharp point of the lower probe 10. In this way, the same point on the top and bottom of the metal film can be detected at the same time, thus improving the detection accuracy.

[0036] During detection, the bottom end of the upper probe 8 and the top end of the lower probe 10 abut against the top and bottom of the metal film respectively and are perpendicular to the surface of the metal film, thus enabling efficient and stable detection of the metal film.

[0037] like Figure 2 , Figure 3 and Figure 6 As shown, the drive unit 5 includes two vertical grooves 51 arranged vertically on one of the vertical surfaces of the support base 1, and a slider 52 slidably disposed inside the vertical grooves 51. A horizontal support arm 57 is fixedly provided on the upper bracket 3 and the lower bracket 6 near one end of the slider 52. One end of the slider 52 is slidably connected to a horizontal sliding groove 56 provided on one of the vertical surfaces of the horizontal support arm 57. The remaining end of the slider 52 is hinged to a diagonal brace 53. A connecting block 54 is hinged between the free ends of the two diagonal braces 53. A telescopic cylinder 55 for laterally pushing the connecting block 54 to move between them is fixedly provided on one of the vertical surfaces of the support base 1.

[0038] The telescopic cylinder 55 is located between the two vertical grooves 51, and the axis of the telescopic cylinder 55 is perpendicular to the vertical grooves 51.

[0039] This design, by controlling the telescopic movement of the telescopic cylinder 55, pushes the connecting block 54 to move synchronously, thereby synchronously pushing the opposite ends of the two diagonal braces 53 laterally away from or towards the vertical groove 51. This causes the end of the diagonal brace 53 away from the telescopic cylinder 55 to move vertically towards or away from the telescopic cylinder 55, thereby driving the two sliders 52 to move towards or away from the telescopic cylinder 55 synchronously. This allows for a lateral relative displacement between the sliders 52 and the horizontal support arm 57, causing the upper bracket 3 and the lower bracket 6 to deflect relative to each other. This, in turn, drives the upper probe 8 and the lower probe 10 to move closer to or away from each other, so that they contact or move away from the metal film, thus controlling the start and stop of the detection.

[0040] like Figure 1 and Figure 2 As shown, the conductivity detection device also includes four conveying rollers 2 disposed in the support base 1. The four conveying rollers 2 are distributed in two layers, one above the other. The metal film runs vertically from bottom to top, passing over the outside of two adjacent conveying rollers 2, then horizontally passing between the upper probe 8 and the lower probe 10 and around the outside of one of the remaining conveying rollers 2, and finally downwards, passing over the outside of the last conveying roller 2. This design allows the metal film to be horizontally taut as it passes between the upper probe 8 and the lower probe 10, so that the upper probe 8 and the lower probe 10 can be vertically perpendicular to the surface of the metal film during detection, thus improving the accuracy of conductivity detection.

[0041] Working principle: The telescopic cylinder 55 is initially in the retracted state. At this time, the two sliders 52 are located at opposite ends of the two vertical grooves 51. Simultaneously, the upper support 3 and lower support 6 form a horizontal V-shaped opening, and the upper probe 8 and lower probe 10 are far apart. When testing is required, the telescopic cylinder 55 is extended and the connecting block 54 is pushed laterally away from the vertical groove 51. This simultaneously pulls the opposite ends of the two diagonal braces 53 closer together, causing the other ends of the two diagonal braces 53 to simultaneously approach the telescopic cylinder 55, and thus bringing the sliders 52 closer to the telescopic cylinder 55. This causes the other end of slider 52 to move relative to the horizontal support arm 57 in the lateral direction, thereby pulling the upper bracket 3 to deflect the upper probe 8 downward and pulling the lower bracket 6 to deflect the lower probe 10 upward until the upper probe 8 is in a natural vertical state and the lower probe 10 is naturally perpendicular to the horizontal direction. At this time, under the action of the elastic tension of the elastic suspension 9 and the elastic support of the elastic support 11, the tips of the upper probe 8 and the lower probe 10 elastically abut against the top and bottom of the metal film, respectively. Since the tip of the upper probe 8 is lower than the metal film... The upper probe 8 and lower probe 10 are positioned at the top of the horizontal section, with the tip of the lower probe 10 higher than the bottom of the horizontal section of the metal film. This allows the upper probe 8 and lower probe 10 to automatically move up and down as the flatness of the top and bottom of the metal film changes during metal film transport, maintaining good contact with the metal film at all times. This prevents poor contact caused by changes in the flatness of the metal film surface, improving the stability of conductivity detection. This allows for stable detection of resistance changes at various points on the metal film, and then the conductivity attenuation trend can be dynamically analyzed using a corrosion imaging detector to detect the flatness and roughness of the metal coating on the metal film surface. It can also simultaneously detect the flatness and roughness of the metal coating at the same position on the top and bottom of the metal film, improving detection efficiency and accuracy. After detection, the telescopic cylinder 55 is retracted and reset, and the two diagonal support rods 53 and two sliders 52 push the upper support 3 and lower support 6 upward and downward respectively, causing the upper probe 8 and lower probe 10 to move away from the metal film, thus stopping the detection of the metal film.

[0042] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples; within the framework of the present invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in the details for the sake of brevity.

[0043] This utility model is intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A device for detecting the conductivity of a thin-film metal capacitor after chemical plating, comprising a support base (1) and an upper bracket (3) and a lower bracket (6) vertically hinged to each other within the support base (1), characterized in that, The conductivity detection device further includes: A plurality of upper outer shells (4) are arranged side by side on the upper support (3) and an upper probe (8) is inserted through the bottom of the upper outer shell (4). An elastic suspension member (9) is provided between the top of the upper probe (8) and the top of the interior of the upper outer shell (4). A plurality of lower housings (7) are arranged side by side on the lower support (6) and a lower probe (10) is inserted through the top of the lower housing (7). An elastic support (11) is provided between the bottom of the lower probe (10) and the bottom inside the lower housing (7). When the metal film passes horizontally between the upper probe (8) and the lower probe (10), the two are stably pressed against the metal film under the elastic force of the elastic suspension (9) and the elastic support (11), respectively. A drive unit (5) for driving the upper bracket (3) and the lower bracket (6) to deflect in opposite directions.

2. The device for detecting the conductivity of the metal thin film of a chemically plated thin-film capacitor according to claim 1, characterized in that, The elastic suspension component (9) includes a vertical rod (91) fixed to the top of the upper probe (8) and a sleeve rod (92) slidably sleeved on the top of the outside of the vertical rod (91). The top of the sleeve rod (92) is fixed inside the top of the upper outer shell (4). A tension spring (93) is provided inside the sleeve rod (92). The two ends of the tension spring (93) are respectively fixed to the top of the vertical rod (91) and the top of the inside of the sleeve rod (92).

3. The device for detecting the conductivity of the metal thin film of a chemically plated thin-film capacitor according to claim 1, characterized in that, The elastic support (11) includes a guide rod (111) fixed to the bottom of the lower probe (10) and a sleeve (112) slidably sleeved on the bottom of the guide rod (111). The bottom of the sleeve (112) is fixed inside the bottom of the lower outer shell (7). A compression spring (113) is sleeved on the outside of the guide rod (111). The two ends of the compression spring (113) abut against the top of the sleeve (112) and the bottom of the lower probe (10), respectively.

4. The device for detecting the conductivity of the metal thin film of a chemically plated thin-film capacitor according to claim 1, characterized in that, The bottom end of the upper probe (8) and the top end of the lower probe (10) are both sharp points, and the sharp point of the upper probe (8) corresponds to the sharp point of the lower probe (10).

5. The device for detecting the conductivity of the metal thin film of a chemically plated thin-film capacitor according to claim 4, characterized in that, The bottom end of the upper probe (8) and the top end of the lower probe (10) abut against the top and bottom of the metal film respectively and are perpendicular to the surface of the metal film during detection.

6. The device for detecting the conductivity of a thin-film metal capacitor after chemical plating according to claim 1, characterized in that, The drive unit (5) includes two vertical grooves (51) arranged vertically on one of the vertical surfaces of the support base (1) and a slider (52) slidably disposed inside the vertical grooves (51). A horizontal support arm (57) is fixedly provided on one end of the upper support (3) and the lower support (6) near the slider (52). One end of the slider (52) is slidably connected to a horizontal sliding groove (56) on one of the vertical surfaces of the horizontal support arm (57). The remaining end of the slider (52) is hinged to a diagonal brace (53). A connecting block (54) is hinged between the free ends of the two diagonal braces (53). A telescopic cylinder (55) for laterally pushing the connecting block (54) to move between them is fixedly provided on one of the vertical surfaces of the support base (1).

7. The device for detecting the conductivity of the metal thin film of a chemically plated thin-film capacitor according to claim 6, characterized in that, The telescopic cylinder (55) is located between two vertical grooves (51), and the axis of the telescopic cylinder (55) is perpendicular to the vertical grooves (51).

8. The device for detecting the conductivity of a thin-film metal capacitor after chemical plating according to claim 1, characterized in that, The conductivity detection device also includes four conveying rollers (2) located in the support base (1). The four conveying rollers (2) are distributed in two layers, one above the other. The metal film passes vertically from bottom to top around the outside of two adjacent conveying rollers (2), then passes horizontally between the upper probe (8) and the lower probe (10) and around the outside of one of the remaining conveying rollers (2), and finally passes downward around the outside of the last conveying roller (2).

Images