Testing machine and isolated power supply system thereof

Abstract

The utility model relates to a test machine and an isolation power supply system thereof, the test machine comprises a plug-in frame power supply arranged in an electrical cabinet and a slot position power supply board arranged in a test head, the plug-in frame power supply is connected with the slot position power supply board through a cable, and the slot position power supply board is connected with a service board card in the test head; the plug-in frame power supply outputs direct-current voltage to the slot power supply board, the slot power supply board converts the received direct-current voltage, generates power supply voltage with corresponding amplitude and transmits the power supply voltage to the service board card for power supply, the types, the number and the wire diameter of cables between the electrical cabinet and the test head are reduced, equipment installation and maintenance are facilitated, and use convenience is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, and in particular to a testing machine and its isolated power supply system. Background Technology

[0002] The power system of a semiconductor tester needs to provide various high-power, low-voltage DC voltage sources to the service boards. Testers typically use commercially available, mature AC-DC (alternating current to DC) modules as voltage sources, outputting voltages of different amplitudes to meet the diverse power supply requirements of the service boards. However, these AC-DC power supply modules are relatively large and cannot be installed within the limited space of the test head. Therefore, traditional testers often install the AC-DC modules in an electrical cabinet and then connect them in parallel to multiple service boards inside the test head via various cables. This introduces many large-diameter cables, causing significant inconvenience for installation and maintenance, and resulting in low ease of use. Utility Model Content

[0003] Therefore, it is necessary to provide a test machine and its isolated power supply system that can improve ease of use to address the above problems.

[0004] The first aspect of this application provides an isolated power supply system for a test machine, including a frame power supply disposed in an electrical cabinet and a slot power board (SPB) disposed in a test head. The frame power supply is connected to the slot power board via a cable, and the slot power board is connected to a service board in the test head. The frame power supply outputs a DC voltage to the slot power board, and the slot power board converts the received DC voltage to generate a power supply voltage of corresponding amplitude and supplies it to the service board for power supply.

[0005] In one embodiment, the slot power supply includes several rectifier modules. The rectifier modules are connected to the slot power board via cables to rectify the received three-phase AC power and output DC voltage to the slot power board.

[0006] In one embodiment, the slot power board includes multiple power bricks connected to the service board. The power bricks convert the received DC voltage individually and in series to generate a power supply voltage of corresponding amplitude and deliver it to the service board; or, the slot power board directly transmits the received DC voltage to the service board.

[0007] In one embodiment, the slot power board further includes a power input module, a controller, a DC-DC conversion module, a voltage regulator, and an isolation chip. The power input module is connected to the power brick and the DC-DC conversion module. The controller is connected to the DC-DC conversion module and the isolation chip. The isolation chip is connected to the power brick and the DC-DC conversion module. The voltage regulator is connected to the power brick and the isolation chip. The power input module delivers the input DC voltage to the power brick and the DC-DC conversion module. The controller obtains and stores the alarm information of each power brick through the isolation chip.

[0008] In one embodiment, the isolated power system further includes a filter disposed on the test head, the filter being connected to the slot power board and connected to the socket power supply via a cable.

[0009] In one embodiment, the isolated power supply system further includes a test-head power temperature monitor (TPTM) disposed on the test head and an electrical-cabinet power temperature monitor (EPTM) disposed on the electrical cabinet. The electrical-cabinet power temperature monitor is connected to the socket power supply and the test-head power temperature monitor, and the test-head power temperature monitor is connected to the management module in the slot power board and the service board.

[0010] After the test head power temperature monitoring module powers on the management module in the service board, the electrical cabinet power temperature monitoring module enables the socket power supply to output DC voltage; and / or

[0011] After the power supply temperature monitoring module of the test head powers down the management module in the service board, the power supply temperature monitoring module of the electrical cabinet enables the power supply of the plug frame to stop outputting DC voltage.

[0012] In one embodiment, the isolated power supply system further includes a power conversion module disposed in the electrical cabinet, the power conversion module being connected to the power temperature monitoring module of the electrical cabinet and the power temperature monitoring module of the test head;

[0013] The power conversion module converts the incoming single-phase AC power into DC power and then supplies power to the electrical cabinet power temperature monitoring module and the test head power temperature monitoring module.

[0014] The test head power temperature monitoring module sends the alarm information output by the slot power board to the electrical cabinet power temperature monitoring module for buffering, so that the host computer can detect whether there is an alarm.

[0015] A second aspect of this application provides a testing machine, including an electrical cabinet, a test head, and the aforementioned isolated power supply system.

[0016] In one embodiment, the test machine further includes a filtering module disposed in the electrical cabinet. The filtering module is connected to the socket power supply and the power conversion module in the isolated power supply system, and filters the external AC power before supplying it to the socket power supply and the power conversion module.

[0017] In one embodiment, the filtering module includes a harmonic filter, a three-phase AC EMI filter, and a single-phase AC EMI filter. The harmonic filter is connected to an AC power cable, the three-phase AC EMI filter is connected to the harmonic filter and the plug-in power supply, and the single-phase AC EMI filter is connected to the AC power cable and the power conversion module.

[0018] The aforementioned tester and its isolated power supply system have a plug-in power supply in the electrical cabinet. The DC voltage is output through cables to the slot power board located on the test head. The slot power board converts the received DC voltage and generates a power supply voltage of the corresponding amplitude to supply power to the service board. This reduces the types, quantity, and diameter of cables between the electrical cabinet and the test head, making equipment installation and maintenance easier and improving usability. Attached Figure Description

[0019] Figure 1 This is a block diagram of an isolated power supply system in one embodiment;

[0020] Figure 2 This is a schematic diagram of the structure of an isolated power supply system in one embodiment;

[0021] Figure 3 This is a schematic diagram of the slot power board in one embodiment;

[0022] Figure 4 This is a schematic diagram of the structure of the slot power board in one embodiment;

[0023] Figure 5 This is a schematic diagram of the power-on process of the test head in one embodiment;

[0024] Figure 6 This is a schematic diagram of the power-down process of the test head in one embodiment;

[0025] Figure 7 This is a schematic diagram of the alarm collection and processing flow of the slot power board in one embodiment;

[0026] Figure 8 This is a schematic diagram of the alarm output process of the slot power board in one embodiment;

[0027] Figure 9This is a schematic diagram of the power-on process of the 12V and 24V power supply of the slot power board in one embodiment.

[0028] Figure 10 This is a schematic diagram of the alarm polling process of the power brick inside the slot power board in one embodiment;

[0029] Figure 11 This is a schematic diagram of the power system isolation design of the test machine in one embodiment. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0032] It is understood that the term "connection" in the following embodiments should be understood as "electrical connection," "communication connection," etc., if the connected circuits, modules, units, etc., have electrical signal or data transmission with each other.

[0033] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising,” “including,” or “having,” etc., specify the presence of the stated feature, whole, operation, component, part, or combination thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, operations, components, parts, or combinations thereof.

[0034] In one embodiment, such as Figure 1 As shown, an isolated power supply system for a test machine is provided, including a frame power supply 110 installed in an electrical cabinet and a slot power supply board 120 installed in a test head. The frame power supply 110 is connected to the slot power supply board 120 via a cable, and the slot power supply board 120 is connected to the service board in the test head. The frame power supply 110 outputs DC voltage to the slot power supply board 120, and the slot power supply board 120 converts the received DC voltage to generate a power supply voltage of corresponding amplitude and sends it to the service board for power supply.

[0035] The slot power supply 110 can process the received DC or AC power, output DC voltage, and transmit it to the slot power board 120 via cables. For example... Figure 2As shown in this embodiment, the slot power supply 110 may specifically include several rectifier modules. These rectifier modules are connected to the slot power board 120 via cables to rectify the received three-phase AC power and output DC voltage to the slot power board 120. The specific number of rectifier modules is not unique and can be set according to actual needs. For example, the slot power supply 110 can support nine rectifier modules to convert 380Vav AC power to 48Vdc power, with a power output of 35kW. After converting the 380Vav AC power to 48Vdc power, the slot power supply 110 outputs a 48V DC voltage to the slot power board 120 via cables.

[0036] The number of slot power boards 120 can be one or more, such as Figure 2 As shown, the slot power supply board 120 may include slot power supply boards SPB0, SPB1, ..., SPBn, etc., each slot power supply board is connected to a corresponding service board via a backplane CBP. The slot power supply board 120 can either step down the received DC voltage to generate voltages of different amplitudes to power the service boards, or directly transmit the DC voltage to the service boards. The electrical cabinet only needs to provide one power supply for the test head; the remaining power supplies are converted by the slot power supply board 120 into the voltages required by each service board channel. This reduces the number and diameter of cables, making test head movement and maintenance more convenient.

[0037] In one embodiment, the slot power board 120 includes multiple power bricks connected to service boards. These power bricks, arranged individually and in series, convert the received DC voltage to generate a supply voltage of corresponding amplitude and deliver it to the service boards. Specifically, as shown... Figure 3 As shown, the power supply brick can be a 1 / 4 standard isolated power supply brick (540W) converting 48Vdc to 12Vdc. It can convert the input 48V DC voltage to 12V individually, or convert the input 48V DC voltage to 24V (1080W) by connecting two identical power supply bricks in series. This solves the problem of the current market lacking 1 / 4 isolated power supply bricks with a capacity of 1000W or higher for 48V to 24V conversion. Furthermore, the slot power board 120 can directly transmit the received DC voltage to the service board, thus simultaneously handling the 48V power conversion function, allowing the service board to use all three power supplies at the same time. By setting three power supply bricks in each slot power board 120 of the test head, the corresponding power supply requirements of the service board are met.

[0038] Furthermore, such as Figure 4As shown, the slot power board 120 also includes a power input module 122, a controller 123, a DC-DC conversion module 124, a voltage regulator 125, and an isolation chip 126. Each power supply brick serves as a 48-12V isolation module 121. The power input module 122 connects the power supply brick and the DC-DC conversion module 124; the controller 123 connects the DC-DC conversion module 124 and the isolation chip 126; the isolation chip 126 connects the power supply brick and the DC-DC conversion module 124; and the voltage regulator 125 connects the power supply brick and the isolation chip. The power input module 122 delivers the input DC voltage to the power supply brick and the DC-DC conversion module 124. The controller 123 obtains and stores the alarm information from each power supply brick through the isolation chip 126.

[0039] The number of isolation chips 126 and voltage regulators 125 corresponds to the number of power bricks. The controller 123 can use processing units such as MCUs and FPGAs, the voltage regulator 125 can be a 12V-3.3V LDO voltage regulator, and the isolation chip 126 can be an I2C isolation chip. The power input module 122 sends the input 48V DC voltage to the power bricks and the DC-DC conversion module 124. The DC-DC conversion module 124 uses a 48V-3.3V DC-DC module to convert the received 48V DC voltage into a 3.3V voltage and supply it to the controller 123 and the isolation chip 126 for power supply. The isolation chip 126 is also connected to the corresponding power brick through the voltage regulator 125. The voltage regulator 125 converts the 12V voltage output from the power brick into a 3.3V voltage and supplies it to the isolation chip 126 for power supply. That is, the DC-DC conversion module 124 and the voltage regulator 125 respectively supply power to the isolated sides of the isolation chip 126. The controller 123 is connected to each isolation chip 126 via a communication line, and the isolation chip 126 is connected to its corresponding power supply brick via a communication line. The power supply brick uses its built-in PMBUS communication to transmit alarm information to the controller 123 via the isolation chip 126. The controller 123 collects the alarm information from each power supply brick and stores it in its local memory. In addition, the slot power board 120 may also include a communication chip, which may be an RS485 chip or other chips. The controller 123 is connected to the communication chip via a communication line, and the controller 123 can also forward the collected alarm information through the communication chip.

[0040] In one embodiment, continue to refer to Figure 2The isolated power supply system also includes a test head power temperature monitoring module TPTM located on the test head, and an electrical cabinet power temperature monitoring module EPTM located in the electrical cabinet. The electrical cabinet power temperature monitoring module EPTM is connected to the socket power supply 110 and the test head power temperature monitoring module TPTM. The test head power temperature monitoring module TPTM is connected to the slot power board 120 and the management module in the service board. Furthermore, the isolated power supply system also includes a power conversion module 130 located in the electrical cabinet. The power conversion module 130 is connected to the electrical cabinet power temperature monitoring module EPTM and the test head power temperature monitoring module TPTM. The power conversion module 130 converts the incoming single-phase AC power into DC power and supplies power to the electrical cabinet power temperature monitoring module EPTM and the test head power temperature monitoring module TPTM.

[0041] The power conversion module 130 converts the incoming 220V single-phase AC power to output 24V DC power to supply the electrical cabinet power temperature monitoring module EPTM and the test head power temperature monitoring module TPTM. The EPTM and TPTM communicate via an RS485 bus. The TPTM is specifically connected to the communication chip in the slot power board 120, receiving alarm information collected by the controller 123. In the slot power board 120, the DC conversion module 124 starts before the power supply brick, and then the controller 123 begins operation. The controller 123 will only enable the power supply brick to supply power after checking that its operating status is normal; otherwise, it will disable the power supply brick and report alarm information to the TPTM.

[0042] In one embodiment, after the test head power temperature monitoring module TPTM powers on the management module in the service board, the electrical cabinet power temperature monitoring module EPTM enables the slot power supply 110 to output DC voltage. Specifically, the test head power temperature monitoring module TPTM converts the 24V DC output from the power conversion module 130 to output 5V DC, which is then supplied to the management module of the service board via the backplane CBP. The management module of the service board powers on before the slot power board 120. The test head power temperature monitoring module TPTM can obtain the monitoring information of the management module of each service board before the slot power board 120 powers on. Only when no serious fault is detected in the management module of each service board will the electrical cabinet power temperature monitoring module EPTM enable the slot power board 120 to power on the service board. This allows the health information of the service board to be obtained before the main power supply is powered on, avoiding serious faults that could damage the board and system after power-on.

[0043] In one embodiment, such as Figure 2As shown, the isolated power supply system also includes a filter 140 disposed on the test head. The filter 140 is connected to the slot power board 120 and to the socket power supply 110 via a cable. Specifically, the filter 140 can be a DC EMI filter. The filter 140 is connected to the power input module 122 in the slot power board 120 to filter the received DC voltage before sending it to the slot power board 120.

[0044] The slot power board 120 generates a high-frequency common-mode current (frequency range 30MHz-250MHz) at the 48V power input terminal and radiates the 48V cable into space as an antenna. Mounting a filter 140 on the 48V cable suppresses the common-mode current in the loop, reducing the radiated interference generated by the slot power board 120 and preventing interference to other devices through electromagnetic radiation. Simultaneously, the filter 140 also attenuates high-frequency noise coupled from the 48V cable, improving the power system's immunity.

[0045] For ease of description, the electrical cabinet power supply temperature monitoring module EPTM will be referred to as electrical cabinet PTM, and the test head power supply temperature monitoring module TPTM will be referred to as test head PTM. The power-on process of the test head is as follows: Figure 5 As shown, after the electrical cabinet PTM and the test head PTM are powered on with 24V, when the electrical cabinet PTM recognizes the action of the external switch, it sends a power-on message to the test head PTM via the RS485 bus. After receiving the power-on message, the test head PTM connects the 5V management power circuit to output to the backplane and replies to the electrical cabinet PTM with a confirmation message of successful power-on. After receiving the confirmation message from the test head PTM, the electrical cabinet PTM connects the 48V DC power supply to power the 16 slot power boards 120 of the test head.

[0046] In one embodiment, after the test head power temperature monitoring module TPTM powers down the management module in the service board, the electrical cabinet power temperature monitoring module EPTM enables the slot power supply 110 to stop outputting DC voltage. Furthermore, the test head power temperature monitoring module TPTM also sends alarm information output by the slot power supply board 120 to the electrical cabinet power temperature monitoring module EPTM cache for the host computer to detect whether an alarm exists.

[0047] The power-down procedure for the test head is as follows: Figure 6 As shown, the power-down process of the test head is basically the same as the power-on process. The electrical cabinet PTM notifies the test head PTM to turn off the 5V management power supply through 485 communication and replies to the electrical cabinet PTM with a confirmation message that the power-down was successful. After receiving the confirmation message from the test head PTM, the electrical cabinet PTM turns off the 48V DC power supply through the control circuit and stops supplying power to the slot power board 120 of the test head.

[0048] The alarm collection and processing flow of slot power board 120 is as follows: Figure 7 As shown, the power supply boards 120 in each slot of the test head are identical hardware. They act as slaves on the 485 bus, identifying their communication addresses via their own DIP switches. These communication addresses, after conversion, also represent the slot number of the power supply board 120. After the slot power supply board 120 is connected to 48V DC power, the test head PTM actively polls all slot power supply boards 120 one by one via the 485 bus for alarms such as temperature, current, and voltage. When the test head PTM detects an alarm, it reports it to the electrical cabinet PTM. The electrical cabinet PTM receives the alarm information from the slot power supply boards 120 and caches it in its internal RAM. The host computer actively polls the alarm information in the electrical cabinet PTM's RAM and displays it through the SEH interface. For severe temperature alarms, an alarm-based power-down process is initiated. After the slot power supply board 120 is powered off from 48V DC, the test head PTM no longer polls the SPB for alarm content. The specific alarm items for SPB are: input voltage 48V overvoltage / undervoltage alarm, output voltage 12V and 24V overvoltage / undervoltage alarm, output current overcurrent alarm, power supply brick temperature overheating alarm, and board temperature overheating alarm.

[0049] The alarm output process of slot power board 120 is as follows: Figure 8 As shown, the slot power board 120 achieves 12V output through power bricks, and 24V output through two power bricks connected in series. The power bricks use their built-in PMBUS communication, and transmit power brick alarm information to the memory of the controller 123 via an I2C isolation chip. The controller 123 reports the alarm information when the test head PTM polls for it. The power-on process for the 12V and 24V power supplies of the slot power board 120 is as follows: Figure 9 As shown, the service board is first powered on with 12V, then powered on with 24V after a set delay (e.g., 1 second). The alarm polling process for the three power bricks inside slot power board 120 is as follows: Figure 10 As shown, the voltage, current, and temperature of different power supply bricks are sequentially polled with delayed alarms.

[0050] In one embodiment, a testing machine is also provided, including an electrical cabinet, a test head, and the aforementioned isolated power supply system. Wherein, as... Figure 2 As shown, the test machine also includes a filter module 200 installed in the electrical cabinet. The filter module 200 is connected to the socket power supply 110 and the power conversion module 130 in the isolated power supply system. After filtering the external AC power, it is delivered to the socket power supply 110 and the power conversion module 130. Through the filtering by the filter module 200, interference is filtered out for the entire power supply system, so that the EMI index of the system meets the national standard limit, and at the same time, the anti-interference capability of the system is improved.

[0051] Specifically, the filtering module 200 may include a harmonic filter 210, a three-phase AC EMI filter 220, and a single-phase AC EMI filter 230. The harmonic filter 210 is connected to the AC power cable; the three-phase AC EMI filter 220 is connected to the harmonic filter 210 and the plug-in power supply 110; and the single-phase AC EMI filter 230 is connected to the AC power cable and the power conversion module 130. The harmonic filter 210, mounted on the system's AC power cable, contains a resonant circuit of a delta capacitor and a reactor. Its main function is to compensate for harmonic currents generated by the nonlinear load of the switching power supply, ensuring that the 3rd to 40th harmonic currents of the power system meet national standards and reducing damage to the power grid. The three-phase AC EMI filter 220 and the single-phase AC EMI filter 230 are also mounted on the AC power cable, providing a certain degree of attenuation for common-mode and differential-mode noise in the 150kHz-30MHz range, thereby reducing interference noise from the equipment to the power grid at this frequency, as well as noise from the power grid itself, thus improving the overall system reliability.

[0052] like Figure 11 As shown, the entire power system of the test machine uses isolated power supplies. Each slot has an independent slot power board 120 that supplies power to the service boards via a backplane CBP. The power traces of each slot power board 120 on the backplane are independent of each other, with no common return path. This ensures that the power return current of each service board is only in its own loop and does not affect others. In this way, when a service board experiences large dynamic load changes, the fluctuation of its own power circuit will not affect the power performance of other service boards. Moreover, if the output of a slot power board 120 in a certain slot is abnormal, the service board can be moved to another slot for continued use, avoiding the problem of a power failure in a single slot causing the entire device to crash, which is common in shared power supply designs.

[0053] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0054] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. An isolated power supply system for a testing machine, characterized in that, It includes a socket power supply installed in the electrical cabinet and a slot power supply board installed in the test head. The socket power supply is connected to the slot power supply board via a cable, and the slot power supply board is connected to the service board in the test head. The socket power supply outputs DC voltage to the slot power supply board, and the slot power supply board converts the received DC voltage to generate a power supply voltage of corresponding amplitude and sends it to the service board for power supply.

2. The isolated power supply system according to claim 1, characterized in that, The slot power supply includes several rectifier modules. The rectifier modules are connected to the slot power board via cables to rectify the received three-phase AC power and output DC voltage to the slot power board.

3. The isolated power supply system according to claim 1, characterized in that, The slot power board includes multiple power bricks connected to the service board. The power bricks convert the received DC voltage individually and in series to generate a power supply voltage of the corresponding amplitude and send it to the service board; or, the slot power board directly transmits the received DC voltage to the service board.

4. The isolated power supply system according to claim 3, characterized in that, The slot power board also includes a power input module, a controller, a DC-DC conversion module, a voltage regulator, and an isolation chip. The power input module is connected to the power brick and the DC-DC conversion module. The controller is connected to the DC-DC conversion module and the isolation chip. The isolation chip is connected to the power brick and the DC-DC conversion module. The voltage regulator is connected to the power brick and the isolation chip. The power input module delivers the input DC voltage to the power brick and the DC-DC conversion module. The controller obtains and stores the alarm information of each power brick through the isolation chip.

5. The isolated power supply system according to claim 1, characterized in that, It also includes a filter disposed on the test head, the filter being connected to the slot power board and connected to the socket power supply via a cable.

6. The isolated power supply system according to any one of claims 1-5, characterized in that, It also includes a test head power supply temperature monitoring module disposed on the test head, and an electrical cabinet power supply temperature monitoring module disposed on the electrical cabinet. The electrical cabinet power supply temperature monitoring module is connected to the socket power supply and the test head power supply temperature monitoring module, and the test head power supply temperature monitoring module is connected to the slot power supply board and the management module in the service board. After the test head power temperature monitoring module powers on the management module in the service board, the electrical cabinet power temperature monitoring module enables the socket power supply to output DC voltage; and / or After the power supply temperature monitoring module of the test head powers down the management module in the service board, the power supply temperature monitoring module of the electrical cabinet enables the power supply of the plug frame to stop outputting DC voltage.

7. The isolated power supply system according to claim 6, characterized in that, It also includes a power conversion module installed in the electrical cabinet, the power conversion module being connected to the power temperature monitoring module of the electrical cabinet and the power temperature monitoring module of the test head; The power conversion module converts the incoming single-phase AC power into DC power and then supplies power to the electrical cabinet power temperature monitoring module and the test head power temperature monitoring module. The test head power temperature monitoring module sends the alarm information output by the slot power board to the electrical cabinet power temperature monitoring module for buffering, so that the host computer can detect whether there is an alarm.

8. A testing machine, characterized in that, It includes an electrical cabinet, a test head, and an isolated power supply system as described in any one of claims 1-7.

9. The testing machine according to claim 8, characterized in that, It also includes a filtering module installed in the electrical cabinet. The filtering module is connected to the socket power supply and the power conversion module in the isolated power supply system. It filters the external AC power and then supplies it to the socket power supply and the power conversion module.

10. The testing machine according to claim 9, characterized in that, The filtering module includes a harmonic filter, a three-phase AC EMI filter, and a single-phase AC EMI filter. The harmonic filter is connected to the AC power cable, the three-phase AC EMI filter is connected to the harmonic filter and the plug-in power supply, and the single-phase AC EMI filter is connected to the AC power cable and the power conversion module.

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