Precise etching machine for glass-based chip

Abstract

The utility model discloses a precise etching machine for a glass-based chip, and relates to the technical field of etching machines. The device comprises a box body, an annular frame, a partition plate and an ejector, the partition plate is arranged in the box body, the annular frame is arranged in the box body, a gear ring is arranged on the inner wall of the annular frame, a motor is arranged on the inner wall of the lower end of the box body, a gear is arranged at the output end of the motor, and a material groove is formed in the upper end of the annular frame. A guide rail is arranged on the inner wall of the lower end of the box body, balls are rotationally installed at the lower end of the annular frame, a liquid box is arranged at the upper end of the box body, an ejector is arranged on the inner wall of the upper end of the box body, a conveying pipe is arranged at the lower end of the ejector, and an ejector head is arranged at the lower end of the conveying pipe. According to the utility model, the independent and relatively sealed chamber is arranged to carry out stable etching processing on the glass-based chip, so that the problems that the stable etching processing of the chip is influenced and the processing cost is increased due to the loss of a large amount of protective gas when equipment is frequently opened and closed to access the chip are solved.

Description

Technical Field

[0001] This utility model relates to the field of etching machine technology, and in particular to a precision etching machine for glass-based chips. Background Technology

[0002] Glass-based chips are integrated circuits or microelectronic devices manufactured using ultra-thin glass with a thickness of 50-200μm as the substrate material. The chip etching process requires highly specific physical and chemical conditions.

[0003] Chinese patent discloses a chip etching machine (authorization announcement number CN221149945U). This patent technology includes a housing and a liquid storage tank. The bottom of the inner cavity of the housing is provided with a placement frame, and the top of the placement frame is provided with several chip slots. The liquid storage tank is located on the top of the housing, and the side wall of the liquid storage tank is provided with a liquid guide pipe. One end of the liquid guide pipe is connected to a sprayer. In this application, during the process of etching and removing burrs from chips, it is convenient to spray the etching liquid in a classified manner on multiple chips, resulting in uniform spraying and better removal of chip burrs. At the same time, it can reduce the splashing of etching liquid on the inner wall during spraying, thereby improving the protection of the device.

[0004] This patented technology has the advantage of preventing etching solution splashing during use, but it still has shortcomings. During chip access, the external environment directly affects the interior of the etching environment. Various protective gases need to be added to the etching environment during the etching process to ensure stable chip processing. Frequent opening and closing of the equipment to access the chip will cause a large amount of protective gas to be lost, affecting the stable etching process of the chip and increasing the processing cost. Therefore, those skilled in the art have provided a glass-based chip precision etching machine to solve the problems mentioned in the background art. Utility Model Content

[0005] 1. Technical Solution

[0006] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0007] This utility model relates to a precision etching machine for glass-based chips, comprising a housing, a ring frame, a partition, and an ejector. The housing contains a partition and a ring frame with a gear ring on its inner wall. A motor is mounted on the lower inner wall of the housing, and a gear meshing with the gear ring is mounted on the motor's output end. The ring frame is hollow, and a material trough arranged in a circular array is located on the upper inner wall. Guide rails are located on both sides of the partition on the lower inner wall of the housing. Ball bearings arranged in a circular array and rolling within the guide rails are rotatably mounted on the lower end of the ring frame. A liquid tank is located at the upper end of the housing, and an ejector is mounted on the upper inner wall of the housing. A conveying pipe is located at the lower end of the ejector, and an ejection head is located at the lower end of the conveying pipe.

[0008] Furthermore, a sleeve is fitted around the outside of the conveying pipe, and a shield is provided at the lower end of the sleeve. A hydraulic rod with a telescopic end connected to the conveying pipe via a connecting block is provided on the inner wall of the upper end of the box.

[0009] Specifically, the sleeve moves longitudinally on the outer wall of the delivery pipe by the drive of the hydraulic rod 2, causing the lower end of the shield to fit against the upper end of the ring frame, thus shielding the material trough below the spray head, so that the glass-based chip inside the material trough is sprayed and etched in a sealed manner, avoiding liquid splashing.

[0010] Furthermore, a viewing panel is provided at the front end of the box, an opening and closing cover is rotatably installed at the rear end of the box, a hydraulic rod is provided at one end of the box, and a clamping plate with a conical inner wall is provided at the output end of the hydraulic rod.

[0011] Specifically, the rotation of the ring frame and the delivery of the glass-based chips can be observed through the visual panel. The opening and closing cover is pressed and held by the hydraulic rod driving the clamping plate. The closing cover at the rear end of the rotating and closing box is pressed and secured.

[0012] Furthermore, a first sealing sleeve and a second sealing sleeve are embedded inside the partition, and the ring frame is rotatably installed inside the first sealing sleeve and the second sealing sleeve;

[0013] Specifically, when the ring frame rotates, the sealing sleeves 1 and 2 rotate inside the partition. During rotation, the outer wall of the ring frame and the rack and balls of the gear ring apply pressure to the sealing sleeves. The sealing sleeves 1 and 2 contract inward through their own material to ensure the sealing of the ring frame during rotation.

[0014] Furthermore, the inner wall of the ring frame is provided with an annular groove, the gear ring is located on the inner wall of the annular groove, and a negative pressure pump communicating with the inside of the box is provided at the upper end of the box.

[0015] Specifically, the annular groove accommodates the gear ring, reducing the squeezing force between the rack and sealing ring one and sealing ring two, and preventing the gear ring and rack from excessively squeezing the inner walls of sealing ring one and sealing ring two. The negative pressure pump draws air from the feeding area on one side of the partition, reducing the amount of outside air entering the box after the cover is opened and closed and remaining inside the box.

[0016] Furthermore, a support ring is provided inside the ring frame, and a through hole is provided inside the support ring. A second set of through holes distributed in a ring array is provided inside the lower end of the ring frame.

[0017] Specifically, the support ring provides bottom support for the glass substrate chip placed inside the material tank. The sprayed etching solution flows downward through through hole one and flows out of the ring frame through through hole two into the liquid tank.

[0018] Furthermore, the lower inner wall of the box is provided with a ring-shaped liquid tank located below the ring frame, and the lower inner wall of the box is provided with a suction pump with its suction end located inside the liquid tank;

[0019] Specifically, the liquid accumulated inside the tank is sucked out by a suction pump and discharged to the outside.

[0020] 2. Beneficial effects

[0021] Compared with existing technologies, the advantages of this utility model are:

[0022] This invention presents a glass-based chip etching chamber consisting of two separate chambers, one for etching and the other for storing and retrieving the glass-based chips. These chambers operate independently during chip storage and etching, connected by a rotating ring frame. The ring frame contains a ring-shaped array of material trays for placing the glass-based chips. Etching is performed by spraying a corrosive liquid, reducing the loss of protective gas and the impact of the external environment on the etching chambers, thereby lowering production costs and ensuring stable etching.

[0023] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a front-view three-dimensional structural diagram of the present invention;

[0026] Figure 2 This is a rear-view three-dimensional structural diagram of the present invention;

[0027] Figure 3 This is a top view of the three-dimensional structure of the partition of this utility model;

[0028] Figure 4 This is a side sectional three-dimensional structural diagram of the shield of this utility model;

[0029] Figure 5 This is a top-view three-dimensional structural diagram of the motor of this utility model;

[0030] Figure 6 This is a three-dimensional structural diagram of the motor of this utility model viewed from below.

[0031] The attached diagram lists the components represented by each number as follows:

[0032] 1. Housing; 2. Visible panel; 3. Liquid tank; 4. Negative pressure pump; 5. Opening / closing cover; 6. Clamping plate; 7. Hydraulic rod one; 8. Ring frame; 9. Sealing sleeve one; 10. Sealing sleeve two; 11. Partition plate; 12. Injector; 13. Material trough; 14. Liquid tank; 15. Sleeve; 16. Injector head; 17. Shielding cover; 18. Motor; 19. Gear; 20. Ring groove; 21. Gear ring; 22. Suction pump; 23. Guide rail; 24. Ball bearing; 25. Through hole one; 26. Through hole two; 27. Support ring; 28. Hydraulic rod two; 29. ​​Conveying pipe. Detailed Implementation

[0033] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0034] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0035] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not adhering to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0036] To make the objectives, technical solutions, and advantages of this utility model clearer, the embodiments of this utility model will be described in further detail below with reference to the accompanying drawings.

[0037] Example 1

[0038] Please see Figures 1-6As shown, this embodiment is a glass-based chip precision etching machine, including a housing 1, a ring frame 8, a partition 11, and an ejector 12. The housing 1 is provided with a partition 11 and a ring frame 8. A gear ring 21 is provided on the inner wall of the ring frame 8. A motor 18 is provided on the lower inner wall of the housing 1. A gear 19 that meshes with the gear ring 21 is provided at the output end of the motor 18. The ring frame 8 is hollow inside. A material trough 13 distributed in a ring array is opened in the upper inner wall of the ring frame 8. A guide rail 23 located on both sides of the partition 11 is provided on the lower inner wall of the housing 1. Ball bearings 24 distributed in a ring array and rolled inside the guide rail 23 are rotatably installed in the lower end of the ring frame 8. A liquid tank 3 is provided in the upper end of the housing 1. An ejector 12 is provided in the upper inner wall of the housing 1. A conveying pipe 29 is provided in the lower end of the ejector 12. An ejector head 16 is provided in the lower end of the conveying pipe 29.

[0039] A sleeve 15 is fitted to the outside of the conveying pipe 29. A shield 17 is provided at the lower end of the sleeve 15. A hydraulic rod 28 with a telescopic end connected to the conveying pipe 29 via a connecting block is provided on the inner wall of the upper end of the box 1.

[0040] The front end of the box 1 is provided with a viewing panel 2, the rear end of the box 1 is rotatably installed with an opening and closing cover 5, one end of the box 1 is provided with a hydraulic rod 7, and the output end of the hydraulic rod 7 is provided with a clamping plate 6 with a conical inner wall.

[0041] The partition 11 is internally fitted with sealing sleeve 9 and sealing sleeve 10, and the ring frame 8 is rotatably installed inside the sealing sleeve 9 and sealing sleeve 10.

[0042] The inner wall of the ring frame 8 is provided with an annular groove 20, the gear ring 21 is located on the inner wall of the annular groove 20, and a negative pressure pump 4 connected to the inside of the box 1 is provided at the upper end of the box 1.

[0043] The ring frame 8 has a support ring 27 inside, and the support ring 27 has a through hole 25 inside. The lower end of the ring frame 8 has a through hole 26 arranged in a ring array.

[0044] The lower inner wall of the housing 1 is provided with a ring-shaped liquid tank 14 located below the ring frame 8, and the lower inner wall of the housing 1 is provided with a suction pump 22 with the suction end located inside the liquid tank 14.

[0045] Through a dual-chamber isolation design and an automated transfer and conveying system, a fully enclosed operation for chip storage and etching is achieved. First, the glass-based chips to be processed are systematically placed into the material slots 13 arranged in a ring array at the upper end of the ring frame 8. Each material slot 13 forms a liquid flow channel through a through-hole 25 on the support ring 27 and a through-hole 26 below. After the equipment is started, the hydraulic rod 7 drives the clamping plate 6 to press and seal the opening and closing cover 5. The motor 18, through the meshing of the gear 19 and gear ring 21, drives the ring frame 8 to rotate along the guide rail 23, thus separating the loading area from the etching area. 11 is dynamically sealed by the first sealing sleeve 9 and the second sealing sleeve 10 of the ring frame 8. When the ring frame 8 drives the glass substrate chip inside the hopper to rotate above the etching area, the liquid in the liquid tank 3 supplies liquid to the injector 12. The etching liquid is transported to the spray head 16 through the delivery pipe 29. At this time, the hydraulic rod 28 drives the sleeve 15 to move the shield 17 down, forming a closed spraying space with the upper end of the ring frame 8. The etching liquid permeates evenly to the chip surface through the first through hole 25. The waste liquid after the reaction flows into the annular liquid tank 14 through the second through hole 26 and is finally discharged by the suction pump 22.

[0046] The dual-chamber physical isolation structure, combined with the dynamic sealing system of the ring frame 8, isolates the chip access process from the etching environment, improves the protective gas retention rate, and effectively solves the problem of loss of protective gases such as nitrogen caused by frequent opening and closing. The combination of the annular array material tank 13 and the shield 17 forms a closed spraying area, which not only ensures the uniformity of etching, but also prevents liquid splashing through the hydraulically driven shield 17. Compared with the traditional open spray, it reduces splash pollution. The visual board 2 and the automated transfer and conveying system realize the visual monitoring of the processing process. Combined with the self-locking closing mechanism of the hydraulic rod 7, the equipment operation time is shortened and the production efficiency is significantly improved.

[0047] The sealing sleeve is made of self-shrinking elastic material. When the ring frame 8 rotates, it achieves dynamic sealing through the radial pressure of the toothed ring 21 and the ball 24, ensuring the stability of the etching environment. The through-hole design of the support ring 27 balances the liquid distribution and discharge efficiency, and together with the suction pump 22, it forms a circulation filtration system. The hydraulically driven double rod system achieves precise motion control. The visual panel 2 is made of high-transparency explosion-proof glass, which meets the real-time monitoring requirements while ensuring operational safety, and solves the problems of gas loss, liquid contamination and low operation efficiency of traditional etching machines.

[0048] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0049] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A glass-based chip precision etching machine, comprising a housing (1), a ring frame (8), a partition (11), and an ejector (12), characterized in that: The box (1) is equipped with a partition (11) inside, and a ring frame (8) is provided inside the box (1). A gear ring (21) is provided on the inner wall of the ring frame (8). A motor (18) is provided on the lower inner wall of the box (1). A gear (19) that meshes with the gear ring (21) is provided at the output end of the motor (18). The ring frame (8) is hollow inside. A material trough (13) arranged in a ring array is opened inside the upper end of the ring frame (8). (1) The lower inner wall is provided with guide rails (23) located on both sides of the partition (11). The lower end of the ring frame (8) is rotatably installed with ball bearings (24) arranged in a ring array and rolled inside the guide rails (23). The upper end of the box (1) is provided with a liquid tank (3). The upper inner wall of the box (1) is provided with an injector (12). The lower end of the injector (12) is provided with a delivery pipe (29). The lower end of the delivery pipe (29) is provided with a spray head (16).

2. The glass-based chip precision etching machine according to claim 1, characterized in that: The outer side of the conveying pipe (29) is fitted with a sleeve (15), and a shield (17) is provided at the lower end of the sleeve (15). The upper inner wall of the box (1) is provided with a hydraulic rod (28) whose telescopic end is connected to the conveying pipe (29) through a connecting block.

3. The glass-based chip precision etching machine according to claim 1, characterized in that: The front end of the box (1) is provided with a viewing panel (2), the rear end of the box (1) is rotatably installed with an opening and closing cover (5), one end of the box (1) is provided with a hydraulic rod (7), and the output end of the hydraulic rod (7) is provided with a clamping plate (6) with a conical inner wall.

4. The glass-based chip precision etching machine according to claim 1, characterized in that: The partition (11) is internally fitted with a first sealing sleeve (9) and a second sealing sleeve (10), and the ring frame (8) is rotatably installed inside the first sealing sleeve (9) and the second sealing sleeve (10).

5. A glass-based chip precision etching machine according to claim 1, characterized in that: The inner wall of the ring frame (8) is provided with an annular groove (20), the gear ring (21) is located on the inner wall of the annular groove (20), and a negative pressure pump (4) connected to the inside of the box (1) is provided at the upper end of the box (1).

6. A glass-based chip precision etching machine according to claim 1, characterized in that: The ring frame (8) is provided with a support ring (27) inside, and a through hole (25) is provided inside the support ring (27). The lower end of the ring frame (8) is provided with a through hole (26) arranged in a ring array.

7. A glass-based chip precision etching machine according to claim 1, characterized in that: The lower inner wall of the box (1) is provided with a ring-shaped liquid tank (14) located below the ring frame (8), and the lower inner wall of the box (1) is provided with a suction pump (22) with the suction end located inside the liquid tank (14).

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