Multifunctional coating mechanism

Abstract

The utility model belongs to the field of vacuum coating, and particularly relates to a multifunctional coating mechanism which comprises a fixing body, a coating target frame, a coating target assembly, a displacement driving assembly used for driving the coating target frame to move, a rotation driving assembly used for driving coating targets to rotate and a cooling assembly used for inputting and outputting cooling liquid. In the application, the coating target is driven to rotate in real time while the coating target is driven to move, so that the coating uniformity, efficiency, quality and process flexibility can be effectively improved; and the stability of coating process parameters can be kept while the coating duration of the coating mechanism is prolonged.

Description

Technical Field

[0001] This application belongs to the field of vacuum coating, and specifically relates to a multifunctional coating mechanism. Background Technology

[0002] Vacuum coating technology, as an important surface treatment process, is widely used in many fields, such as electronics, optics, decoration, and machinery. In the vacuum coating process, the coating target is a key component, and its performance and structure have a crucial impact on the quality and efficiency of the coating. Traditional coating target structures are relatively simple in structure and have limited functions. However, with the continuous development of technology and the increasing demands for product surface quality from various industries, existing coating target structures are no longer sufficient to meet the market's needs for high-quality, high-efficiency coating processes. Utility Model Content

[0003] To address the aforementioned problems, the present invention aims to provide a multifunctional coating mechanism that can drive the coating target to move and rotate in real time, thereby effectively improving coating uniformity, efficiency, quality, and process flexibility.

[0004] Another objective of this invention is to provide a multifunctional coating mechanism that can increase the coating time while maintaining stable coating process parameters.

[0005] To achieve the above objectives, the technical solution of this application is as follows.

[0006] A multifunctional coating mechanism, comprising:

[0007] Fixed main body;

[0008] A coating target frame is movably mounted on one side of a fixed body. A first disassembly and assembly component and a second disassembly and assembly component are respectively vertically arranged at both ends of the coating target frame, and a disassembly and assembly position is formed between the first disassembly and assembly component and the second disassembly and assembly component.

[0009] A coating target assembly includes a coating target, a first target head, and a second target head. The two ends of the coating target are rotatably connected to the first target head and the second target head, respectively. The first target head and the second target head are detachably mounted on a first mounting / dismounting component and a second mounting / dismounting component, respectively, so that the coating target can be detachably installed in the mounting / dismounting position.

[0010] A displacement driving assembly for driving the coating target holder to move, the displacement driving assembly is fixedly disposed on the other side of the fixed body, and the displacement driving assembly passes through the fixed body to be drivenly connected to the coating target holder;

[0011] A rotary drive assembly for driving the coating target to rotate, the rotary drive assembly being movably disposed on the other side of the fixed body, the rotary drive assembly being movably passed through the fixed body to connect with the coating target holder, and being driven to connect with the coating target at the disassembly / removal position;

[0012] A cooling assembly for inputting and outputting coolant, the cooling assembly having an inlet channel and an outlet channel, the cooling assembly being movably disposed on the other side of the fixed body, the cooling assembly passing through the fixed body to connect with the coating target holder, and the outlet channel and the inlet channel being connected to the coating target at the disassembly / removal position.

[0013] In this application, based on the setting of the displacement driving component, the coating target holder can be controlled to move the coating target, and at the same time, the rotation driving component can continuously drive the coating target to rotate. This structural design has the following advantages:

[0014] 1. In terms of coating uniformity: It expands the coating range, allowing the coating material to cover a larger area, avoiding local uncoated areas or excessively thin coatings, and improving overall uniformity; for complex workpieces, it ensures that all parts, including protrusions and depressions, are coated with the coating material, guaranteeing the integrity and uniformity of the overall coating of complex workpieces; the movement can also break the simple radial distribution pattern of the coating material, avoid atomic agglomeration, and improve the uniformity of the microstructure.

[0015] 2. Coating efficiency: More coating tasks can be completed per unit time, greatly improving production efficiency; the coating target can be quickly moved to the key coating area, ensuring the coating quality of key parts while reducing unnecessary long-term coating operations, improving coating targeting and efficiency.

[0016] 3. Regarding coating quality: It can compensate for the uneven coating thickness caused by differences in linear velocity, ensuring that each area is in the appropriate position, forming a coating layer with a more uniform thickness; it avoids local over-deposition, reduces the probability of defect formation, and improves the overall quality of the coating layer.

[0017] Furthermore, the integration of cooling components further enhances the coating effect of this coating mechanism, building upon the aforementioned improvements.

[0018] 1. Temperature control: It can more precisely control the temperature of the coating target; during the coating process, the coating target may suffer from uneven heating, which may lead to a decrease in coating quality; the cooling component can cool the target according to the temperature changes at different locations; for example, when the temperature at the edge of the coating target rises rapidly, the cooling intensity of that part is increased to keep the temperature of the entire coating target uniform, reduce problems such as uneven coating thickness and uneven stress caused by temperature differences, and ensure stable coating quality;

[0019] 2. Improved coating efficiency: It helps to shorten the coating cycle; when the cooling components are working effectively, the coating target can reach the appropriate coating temperature more quickly and remain stable; for example, in magnetron sputtering coating, rapid heat dissipation allows the coating target to work continuously at higher power, reducing the situation of power reduction or coating pause due to overheating, thereby increasing the amount of coating per unit time and improving the overall coating efficiency.

[0020] 3. Performance optimization of coating materials: Improving the microstructure of coating materials; suitable temperature conditions have an important impact on the crystallization, orientation and other microstructures of coating materials; precise temperature control through cooling components can enable coating materials to form a more ideal microstructure; for example, after high-temperature coating, controlling the cooling rate through cooling components can enable coating materials to form a dense and uniform crystal structure, improving the hardness, wear resistance and other properties of the coating layer.

[0021] 4. Enhanced stability of the mechanism: Prevents damage to the mechanism due to overheating; some key components in the coating mechanism, such as the power supply and control system, may malfunction in high-temperature environments; the cooling components effectively dissipate heat from the coating target and the surrounding environment, reducing the overall temperature of the mechanism, reducing the risk of damage due to overheating, extending the service life of the mechanism, reducing maintenance costs and downtime, and improving the stability and reliability of the mechanism. Attached Figure Description

[0022] Figure 1 This is a structural schematic diagram of an embodiment of this application.

[0023] Figure 2 This is a cross-sectional view of an embodiment of this application.

[0024] Figure 3 It is a cross-sectional view of the cooling assembly, the coating target holder, and the coating target assembly.

[0025] Figure 4 This is a cross-sectional view of the displacement drive component.

[0026] Figure 5 This is a cross-sectional view of the rotary drive component.

[0027] Icon labels:

[0028] 1. Fix the main body;

[0029] 2. Coating target holder; 21. First disassembly / assembly component; 211. Insertion hole; 212. Insertion port; 22. Second disassembly / assembly component; 221. First connecting channel; 222. Second connecting channel; 223. Positioning groove; 224. Disassembly / assembly part; 225. Limiting plate; 226. Limiting groove; 23. Disassembly / assembly position; 24. Limiting component;

[0030] 3. Coating target assembly; 31. Coating target; 311. Upper end cap; 312. Lower end cap; 313. Water guide rod; 314. Yoke; 315. Target body; 316. Magnet; 317. Inner water channel; 318. Outer water channel; 319. Second gear; 32. First target head; 321. Insertion part; 322. Fixing part; 33. Second target head; 331. Discharge inlet; 332. Discharge outlet; 333. Positioning convex ring;

[0031] 4. Displacement drive assembly; 41. Displacement drive component; 42. Displacement mounting base; 43. Push-pull rod; 44. First insulating sleeve; 45. First guide sleeve; 46. First oil seal;

[0032] 5. Rotary drive assembly; 51. Rotary drive component; 511. Motor; 512. Fourth gear; 52. Rotary mounting base; 53. First gear; 54. Rotary telescopic rod assembly; 541. Rotary rod; 542. Telescopic rod; 543. Telescopic cavity; 544. Third gear; 55. Second insulating sleeve; 56. Second guide sleeve; 57. Second oil seal; 58. Guide post; 581. Bearing; 582. Third oil seal;

[0033] 6. Cooling components; 61. Liquid inlet channel; 62. Liquid outlet channel;

[0034] 7. Baffle assembly; 71. Movable baffle; 72. Rotating retaining ring; 73. Limiting block; 74. Fixed baffle;

[0035] 8. Vacuum chamber. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0037] See Figure 1-5 In this embodiment, a multifunctional coating mechanism is provided, which includes:

[0038] Fixing body 1, specifically a part of the outer shell of the coating equipment;

[0039] The coating target holder 2 is movably disposed on one side of the fixed body 1, that is, the side of the fixed body 1 facing the vacuum cavity 8 applied to the coating, and the other side is the side facing the outside. The coating target holder 2 has a first disassembly and assembly component 21 and a second disassembly and assembly component 22 respectively vertically disposed at both ends, and a disassembly and assembly position 23 is formed between the first disassembly and assembly component 21 and the second disassembly and assembly component 22.

[0040] The coating target assembly 3 includes a coating target 31, a first target head 32, and a second target head 33. The two ends of the coating target 31 are rotatably connected to the first target head 32 and the second target head 33, respectively. The first target head 32 and the second target head 33 are detachably mounted on the first mounting / dismounting component 21 and the second mounting / dismounting component 22, respectively, so that the coating target 31 can be detachably installed in the mounting / dismounting position 23.

[0041] The displacement drive assembly 4 is used to drive the coating target 2 to move closer to or away from the fixed body 1. The displacement drive assembly 4 is fixedly disposed on the other side of the fixed body 1 and moves through the fixed body 1 to drive the coating target 2. By driving the coating target 2 closer to or away from the fixed body 1, the position of the coating target assembly 3 can be controlled.

[0042] The rotary drive assembly 5 is used to drive the coating target 31 to rotate. The rotary drive assembly 5 is located on the other side of the fixed body 1. The rotary drive assembly 5 moves through the fixed body 1 to connect with the coating target frame 2 and is driven to connect with the coating target 31 on the disassembly position 23. The rotary drive assembly 5 can drive the coating target 31 to rotate in real time. When the displacement drive assembly 4 drives the coating target frame 2 to move, the rotary drive assembly 5 can still drive the coating target 31 to rotate while moving synchronously.

[0043] Cooling component 6 is used for inputting and outputting coolant. Cooling component 6 is provided with inlet channel 61 and outlet channel 62. Cooling component 6 is located on the other side of fixed body 1 and moves through fixed body 1 to connect with coating target frame 2. The outlet channel 62 and inlet channel 61 are connected to coating target 31 on disassembly position 23 so that coolant is discharged into coating target 31 through inlet channel 61 and discharged from coating target 31 through outlet channel 62 so as to adjust the temperature of coating target 31 in real time.

[0044] The baffle assembly 7 automatically opens during the coating process on the coating target. The two ends of the baffle assembly 7 are respectively movably mounted on the first target head 32 and the second target head 33.

[0045] It is worth noting that when the displacement drive assembly 4 drives the coating target 2 to move closer to or away from the fixed body 1, the rotation drive assembly 5 and the cooling assembly 6 follow the coating target 2 to perform corresponding activities at the fixed body 1, so as to ensure that the cooling function, rotation function and displacement function of the coating target 31 can be realized simultaneously.

[0046] In this embodiment, a circulating cooling channel is provided inside the coating target 31, and the second target head 33 is also provided with an inlet 331 and an outlet 332 that are connected to the circulating cooling channel. The liquid inlet channel 61 and the liquid outlet channel 62 are connected to the inlet 331 and the outlet 332, respectively.

[0047] In this embodiment, the second disassembly component 22 is provided with a first connecting channel 221 and a second connecting channel 222. The liquid inlet channel 61 is connected to the outlet 331 through the first connecting channel 221, and the liquid outlet channel 62 is connected to the outlet 332 through the second connecting channel 222. That is to say, the liquid inlet channel 61 and the liquid outlet channel 62 are indirectly connected to the circulating cooling channel through the first connecting channel 221 and the second connecting channel 222 of the second disassembly component 22. When the coating target assembly 3 is installed, it is only necessary to install it on the coating target frame 2 to realize the connection between the liquid inlet channel 61, the liquid outlet channel 62 and the circulating cooling channel.

[0048] In this embodiment, the second disassembly component 22 is also provided with multiple positioning grooves 223 to connect with the first connecting channel 221 and the second connecting channel 222 respectively. The second target head 33 is also fixed with multiple positioning protrusions 333, which are respectively arranged around the outside of the outlet 332 and the inlet 331. When the coating target assembly 3 is installed on the coating target frame 2, the multiple positioning protrusions 333 are inserted into the multiple positioning grooves 223 respectively, so that the first connecting channel 221 and the second connecting channel 222 are connected with the liquid inlet channel 61 and the liquid outlet channel 62 respectively. It can be understood that when the coating target assembly 3 is installed, the multiple positioning protrusions 333 can be aligned with the positioning grooves 223 and inserted into them, thus completing the alignment and installation between the first connecting channel 221, the second connecting channel 222 and the liquid inlet channel 61 and the liquid outlet channel 62, and ensuring the accurate and stable installation position of the coating target assembly 3.

[0049] In this embodiment, the coating target 31 includes an upper end cover 311, a lower end cover 312, a water guide rod 313, a yoke 314, a target body 315, and a magnet 316. The upper end cover 311 is rotatably mounted on the second target head 33, and the lower end cover 312 is rotatably mounted on the first target head 32. The target body 315 is sleeved on the yoke 314, and both ends of the target body 315 are fixed to the upper end cover 311 and the lower end cover 312, respectively. The magnet 316 is fixedly mounted on the yoke 314. One end of the water guide rod 313 passes through the upper end cover 311 and is connected to the yoke 314, and the other end of the water guide rod 313 extends into the second target head 33.

[0050] The circulating cooling channel includes an inner water channel 317 and an outer water channel 318. The outlet 331 is connected to one end of the inner water channel 317, and the other end of the inner water channel 317 passes through the water guide rod 313 and the yoke 314 in sequence. One end of the outer water channel 318 is connected to the outlet 332, and the other end of the outer water channel 318 passes through the space between the upper end cover 311 and the water guide rod 313, and between the yoke 314 and the target body 315 in sequence. The other end of the outer water channel 318 and the other end of the inner water channel 317 are connected at or near the lower end cover 312. After entering through the inlet channel 61, the external coolant passes through the first connecting channel 221 to the outlet 331, enters the inner water channel 317 of the guide rod 313, and then enters the inner water channel 317 of the yoke 314 from the inner water channel 317 of the guide rod 313, then enters the outer water channel 318 between the yoke 314 and the target 315, and finally enters the outer water channel 318 between the yoke 314 and the target 315. Finally, it passes through the outlet 332 and the second connecting channel 222 in sequence and is discharged from the outlet channel 62.

[0051] In this embodiment, the first disassembly component 21 is located below the second disassembly component 22; the first disassembly component 21 is provided with an insertion hole 211, and the first target head 32 includes an insertion part 321 and a fixing part 322. The insertion part 321 is fixedly disposed on the lower side of the fixing part 322, the insertion part 321 extends into the insertion hole 211, and the fixing part 322 abuts against the first disassembly component 21 so that the first disassembly component 21 first bears the weight of the coating target 31, and a first locking member for locking the two is provided between the fixing part 322 and the first disassembly component 21. The first locking member can preferably be a screw.

[0052] In this embodiment, the side of the insertion hole 211 extends through the end of the first disassembly and assembly component 21 away from the coating target holder 2 to form an insertion port 212. The insertion port 212 is adapted to the insertion part 321. When the first target head 32 is installed on the first disassembly and assembly component 21, its insertion part 321 is pushed into the insertion hole 211 through the insertion port 212 to reduce the installation difficulty of the coating target 31.

[0053] In this embodiment, the insertion hole 211, the insertion part 321, and the fixing part 322 are all circular, and the diameter of the insertion part 321 is smaller than the diameter of the fixing part 322.

[0054] In this embodiment, the second disassembly / assembly component 22 includes a disassembly / assembly section 224 and two limiting plates 225. The two limiting plates 225 are fixedly disposed on the left and right sides of the disassembly / assembly section 224, and a limiting groove 226 is formed between the second disassembly / assembly component 222 and the two limiting plates 225. The second target head 33 is disposed in the limiting groove 226, and the left and right sides of the second target head 33 are respectively attached to the two limiting plates 225. The second target head 33 is detachably connected to the disassembly / assembly section 224. This detachable connection can be achieved by using screws.

[0055] Specifically, the positioning groove 223 is located on one side of the disassembly and assembly part 224 within the limiting groove 226.

[0056] In this embodiment, the displacement driving assembly 4 includes a displacement driving component 41, a displacement mounting base 42, and a push-pull rod 43. The displacement driving component 41 is fixedly mounted on the displacement mounting base 42. One end of the push-pull rod 43 movably passes through the displacement mounting base 42 and the fixing body 1 to be fixed to the coating target frame 2, and the other end of the push-pull rod 43 is drivenly connected to the displacement driving component 41. The displacement driving component 41 pushes and pulls the push-pull rod 43 to push and pull the coating target frame 2 away from the fixing body 1 and closer to the workpiece to be coated in the vacuum chamber 8, or to bring it closer to the fixing body 2 and away from the workpiece to be coated in the vacuum chamber 8.

[0057] In this embodiment, the displacement drive 41 includes an adjustable stroke cylinder, whose stroke can be adjusted as needed; it is worth noting that the displacement drive 41 can also be replaced by other drive structures that can drive the push-pull rod 43.

[0058] In this embodiment, one side of the displacement mounting base 42 is embedded in the fixing body 1, and a first insulating sleeve 44 is provided between the displacement mounting base 42 and the fixing body 1.

[0059] In this embodiment, a first guide sleeve 45 is provided between the push-pull rod 43 and the displacement mounting seat 42.

[0060] In this embodiment, a first oil seal 46 is provided between the push-pull rod 43 and the displacement mounting seat 42.

[0061] In this embodiment, the rotary drive assembly 5 includes a rotary drive component 51, a rotary mounting base 52, a first gear 53, and a rotary telescopic rod assembly 54 that can extend and retract while being driven to rotate by the rotary drive component 51. A second gear 319 is provided on the coating target 31. The rotary mounting base 52 is fixedly mounted on the fixed body 1, and the rotary drive component 51 is fixedly mounted on the rotary mounting base 52. One end of the rotary telescopic rod assembly 54 is driven to connect with the rotary drive component 51 so that the rotary drive component 51 drives the telescopic rod assembly to rotate. The other end of the rotary telescopic rod assembly 54 passes through the rotary mounting base 52 and the fixed body 1 to extend into the disassembly / assembly position 23 of the coating target frame 2. The first gear 53 is sleeved on the other end of the rotary telescopic rod assembly 54, and the first gear 53 meshes with the second gear 319. When the coating target frame 2 moves, the rotary telescopic rod assembly 54 moves synchronously with it. At this time, the relative position of the first gear 53 on the disassembly / assembly position 23 remains unchanged, and it can work continuously.

[0062] In this embodiment, both the first gear 53 and the second gear 319 are bevel gears.

[0063] It is worth noting that when the coating target 31 is installed, the first target head 32 at its lower end is placed on the first disassembly and assembly part 21 and supported by the first disassembly and assembly part 21. At this time, the second gear 319 on the coating target 31 can mesh with the first gear 53. The second target head 33 at its upper end is placed in the limiting groove 226 of the second disassembly and assembly part 22. Finally, the first target head 32 and the second target head 33 are locked onto the first disassembly and assembly part 21 and the second disassembly and assembly part 22 respectively with screws to complete the installation process.

[0064] In this embodiment, the rotating telescopic rod assembly 54 includes a rotating rod 541 and a telescopic rod 542. A rotating drive member 51 is driven to rotate the rotating rod 541. The rotating rod 541 has a telescopic cavity 543 that restricts the telescopic rod 542 from rotating relative to it. One end of the telescopic rod 542 is telescopically disposed in the telescopic cavity 543, and the other end of the telescopic rod 542 passes through the rotating mounting base 52 and the fixing body 1 to extend into the disassembly / assembly position 23 of the coating target frame 2. The first gear 53 is sleeved on the other end of the telescopic rod 542. It can be seen that when the rotating drive member 51 drives the rotating rod 541 to rotate, the rotating rod 541 will synchronously drive the telescopic rod 542 to rotate, so as to drive the first gear 53 to rotate through the telescopic rod 542; at the same time, the telescopic rod 542 can also move under the drive of the coating target frame 2 to extend and retract relative to the rotating rod 541. Specifically, the telescopic cavity 543 and the telescopic rod 542 can be designed as flat or as non-cylindrical cylindrical structures to achieve the function that the telescopic rod 542 can extend and retract within the telescopic cavity 543 but cannot rotate.

[0065] In this embodiment, the rotary drive component 51 includes a motor 511, which is fixedly mounted on the rotary mounting base 52. A third gear 544 is fixed to the outside of the rotating rod 541, and a fourth gear 512 is fixed to the output shaft of the motor 511. The fourth gear 512 meshes with the third gear 544.

[0066] In this embodiment, one side of the rotating mounting base 52 is embedded in the fixed body 1, and a second insulating sleeve 55 is provided between the rotating mounting base 52 and the fixed body 1.

[0067] In this embodiment, a second guide sleeve 56 is provided between the telescopic rod 542 and the rotating mounting base 52.

[0068] In this embodiment, a second oil seal 57 is provided between the telescopic rod 542 and the rotating mounting base 52.

[0069] In this embodiment, the rotating telescopic rod assembly 54 further includes a guide post 58, which telescopically passes through the rotating mounting base 52 and the fixed body 1, and is rotatably sleeved on the outside of the telescopic rod 542. Specifically, the second guide sleeve 56 and the second oil seal 57 are located between the guide post 58 and the rotating mounting base 52.

[0070] In this embodiment, a bearing 581 is provided between the telescopic rod 542 and the guide post 58.

[0071] In this embodiment, a third oil seal 582 is provided between the telescopic rod 542 and the guide post 58.

[0072] In this embodiment, the baffle assembly 7 includes a movable baffle 71 and two rotating retaining rings 72. The two ends of the movable baffle 71 are respectively fixed to the two rotating retaining rings 72, and the rotating retaining rings 72 are respectively connected to the coating target 31 in a damped rotational manner.

[0073] The rotation process of the rotating baffle 72 includes a first position for blocking the coating target 31 and a second position for exposing the coating target 31; when the rotating baffle 72 rotates to the first position, it will synchronously drive the movable baffle 71 to rotate to block the coating target 31; when the rotating baffle 72 rotates to the second position, it will synchronously drive the movable baffle 71 to rotate to expose the coating target 31.

[0074] The first assembly / disassembly component 21 and / or the second assembly / disassembly component 22 are provided with a limiting component 24 that restricts the rotation of the movable baffle 71 when it rotates to the first position in the first direction and to the second position in the second direction. When the coating target 31 rotates, based on the certain damping between the coating target 31 and the rotating retaining ring 72, the rotating retaining ring 72 and the movable baffle 71 are rotated synchronously. When it rotates to the first position in the first direction and to the second position in the second direction, the limiting component 24 limits the baffle assembly 7 to stop its rotation; specifically, " / " means "or", and the first direction and the second direction are opposite directions.

[0075] In this embodiment, a limiting block 73 is provided on the rotating retaining ring 72, and the limiting member 24 corresponds to the limiting block 73.

[0076] In this embodiment, there are two limiting blocks 73, and the two limiting blocks 73 are fixed on the two limiting plates 225 respectively, so as to correspond to the two limiting blocks 73 respectively.

[0077] In this embodiment, at least one limiting plate 225 is detachably provided with a fixing baffle 74 on the side away from the limiting groove 226.

[0078] In this embodiment, a fixed baffle 74 is detachably provided on the side of each of the two limiting plates 225 away from the limiting groove 226, and the coating target 31 is located between the two fixed baffles 74.

[0079] It should be emphasized that in this application, the displacement drive assembly 4, the rotation drive assembly 5, and the baffle assembly 7 can also work in coordination:

[0080] Before starting work, the coating target 2 is placed close to the fixed body 1 to keep away from the coating workpiece inside the vacuum chamber 8.

[0081] During operation, the displacement drive assembly 4 drives the coating target holder 2, which in turn moves the coating target assembly 3 closer to the workpiece to be coated inside the vacuum chamber 8. Simultaneously, the rotation drive assembly 5 operates to drive the coating target 31 to rotate. When the coating target 31 rotates, it will synchronously drive the rotating retaining ring 72 to rotate under the action of damping. The rotating retaining ring 72 will drive the movable baffle 71 to rotate in the first direction to the first position, so that the coating target 31 is exposed. At this time, the coating target 31 can be coated. It should be noted that when the coating target 31 is rotating for coating, the displacement drive assembly 4 can stop to keep it in a fixed position, or it can continue to work and change its position in real time.

[0082] After the work is completed, the displacement drive assembly 4 drives the coating target holder 2 to move the coating target assembly 3 away from the coating workpiece in the vacuum chamber 8. At the same time, the rotation drive assembly 5 drives the coating target 31 to rotate in the opposite direction. When the coating target 31 rotates in the opposite direction, it will drive the rotating retaining ring 72 to rotate synchronously under the action of damping. The rotating retaining ring 72 drives the movable baffle 71 to rotate in the second direction to the second position to block the coating target. At this time, the coating target 31 can avoid contamination.

[0083] The above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A multifunctional coating mechanism, characterized in that, The coating mechanism includes: Fixed main body; A coating target frame is movably mounted on one side of a fixed body. A first disassembly component and a second disassembly component are respectively provided at both ends of the coating target frame, and a disassembly / assembly position is formed between the first disassembly component and the second disassembly component. A coating target assembly includes a coating target, a first target head, and a second target head. The two ends of the coating target are rotatably connected to the first target head and the second target head, respectively. The first target head and the second target head are detachably mounted on a first mounting / dismounting component and a second mounting / dismounting component, respectively, so that the coating target can be detachably installed in the mounting / dismounting position. A displacement driving assembly for driving the coating target holder to move, the displacement driving assembly is disposed on the other side of the fixed body, and the displacement driving assembly moves through the fixed body to be driven to connect with the coating target holder. A rotary drive assembly for driving the coating target to rotate is disposed on the other side of the fixed body. The rotary drive assembly moves through the fixed body to connect with the coating target holder and is driven to the coating target at the mounting / removing position. A cooling assembly for inputting and outputting coolant, the cooling assembly having an inlet channel and an outlet channel, the cooling assembly being located on the other side of the fixed body, the cooling assembly being movable through the fixed body to connect with the coating target holder, and the outlet channel and the inlet channel being connected to the coating target at the disassembly / removal position.

2. The multifunctional coating mechanism according to claim 1, characterized in that, The coating target is provided with a circulating cooling channel, and the second target head is also provided with an inlet and an outlet connected to the circulating cooling channel. The liquid inlet channel and the liquid outlet channel are respectively connected to the inlet and the outlet.

3. The multifunctional coating mechanism according to claim 2, characterized in that, The second disassembly component is provided with a first connecting channel and a second connecting channel. The liquid inlet channel is connected to the discharge inlet through the first connecting channel, and the liquid outlet channel is connected to the discharge outlet through the second connecting channel. The second assembly is also provided with multiple positioning grooves to connect with the first connecting channel and the second connecting channel respectively. The second target head is also fixed with multiple positioning protrusions to surround the outside of the outlet and the outside of the inlet respectively. The multiple positioning protrusions are inserted into the multiple positioning grooves so that the first connecting channel and the second connecting channel are connected with the liquid inlet channel and the liquid outlet channel respectively.

4. The multifunctional coating mechanism according to claim 3, characterized in that, The coating target includes an upper end cover, a lower end cover, a water guide rod, a yoke, a target body, and a magnet. The upper end cover is rotatably mounted on a second target head, and the lower end cover is rotatably mounted on a first target head. The target body is sleeved on the yoke, and both ends of the target body are fixed to the upper end cover and the lower end cover, respectively. The magnet is fixedly mounted on the yoke. One end of the water guide rod passes through the upper end cover and is connected to the yoke, and the other end of the water guide rod extends into the second target head. The circulating cooling channel includes an inner water channel and an outer water channel. The outlet is connected to one end of the inner water channel, and the other end of the inner water channel passes through the water guide rod and the yoke in sequence. One end of the outer water channel is connected to the outlet, and the other end of the outer water channel passes through the space between the upper end cover and the water guide rod, and between the yoke and the target body in sequence. The other end of the outer water channel is connected to the other end of the inner water channel.

5. A multifunctional coating mechanism according to claim 1, characterized in that, The first disassembly component is located below the second disassembly component; the first disassembly component is provided with an insertion hole, the first target head includes an insertion part and a fixing part, the insertion part is fixedly disposed on the lower side of the fixing part, the insertion part extends into the insertion hole, and the fixing part abuts against the first disassembly component, and a first locking member for locking the two is provided between the fixing part and the first disassembly component; The side of the insertion hole extends through the end of the first disassembly component away from the coating target frame to form an insertion port, and the insertion port is adapted to the insertion part; The second assembly / disassembly component includes an assembly / disassembly section and two limiting plates. The two limiting plates are fixedly disposed on the left and right sides of the assembly / disassembly section, respectively. A limiting groove is formed between the second assembly / disassembly component and the two limiting plates. The second target head is disposed in the limiting groove. The left and right sides of the second target head are respectively attached to the two limiting plates, and the second target head is detachably connected to the assembly / disassembly section.

6. The multifunctional coating mechanism according to claim 1, characterized in that, The displacement driving assembly includes a displacement driving component, a displacement mounting base, and a push-pull rod. The displacement driving component is fixedly mounted on the displacement mounting base. One end of the push-pull rod movably passes through the displacement mounting base and the fixed body to be fixed to the coating target frame. The other end of the push-pull rod is drivenly connected to the displacement driving component. One side of the displacement mounting base is embedded in the fixing body, and a first insulating sleeve is provided between the displacement mounting base and the fixing body; A first guide sleeve is provided between the push-pull rod and the displacement mounting seat; A first oil seal is provided between the push-pull rod and the displacement mounting seat.

7. A multifunctional coating mechanism according to claim 1, characterized in that, The rotary drive assembly includes a rotary drive component, a rotary mounting base, a first gear, and a rotary telescopic rod assembly that can extend and retract while being driven to rotate by the rotary drive component. A second gear is provided on the coating target. The rotary mounting base is fixedly mounted on the fixed body, and the rotary drive component is fixedly mounted on the rotary mounting base. One end of the rotary telescopic rod assembly is drivenly connected to the rotary drive component, and the other end of the rotary telescopic rod assembly passes through the rotary mounting base and the fixed body to extend into the disassembly / assembly position of the coating target frame. The first gear is sleeved on the other end of the rotary telescopic rod assembly, and the first gear meshes with the second gear.

8. A multifunctional coating mechanism according to claim 7, characterized in that, The rotating telescopic rod assembly includes a rotating rod and a telescopic rod. The rotating drive component is driven to connect with the rotating rod. The rotating rod has a telescopic cavity that restricts the telescopic rod from rotating relative to it. One end of the telescopic rod is telescopically disposed in the telescopic cavity, and the other end of the telescopic rod passes through the rotating mounting base and the fixing body to extend into the disassembly / assembly position of the coating target frame. The first gear is sleeved on the other end of the telescopic rod.

9. A multifunctional coating mechanism according to claim 8, characterized in that, The rotary drive component includes a motor, which is fixedly mounted on a rotary mounting base. A third gear is fixed to the outside of the rotating rod, and a fourth gear is fixed to the output shaft of the motor. The fourth gear meshes with the third gear. One side of the rotating mounting base is embedded in the fixed body, and a second insulating sleeve is provided between the rotating mounting base and the fixed body; A second guide sleeve is provided between the telescopic rod and the rotary mounting base; A second oil seal is provided between the telescopic rod and the rotary mounting base; The rotating telescopic rod assembly also includes a guide post, which can extend and move through the rotating mounting base and the fixed body, and the guide post is rotatably sleeved on the outside of the telescopic rod; A bearing is provided between the telescopic rod and the guide post; A third oil seal is provided between the telescopic rod and the guide post.

10. A multifunctional coating mechanism according to claim 1, characterized in that, The coating mechanism also includes a baffle assembly that automatically opens during coating of the coating target, with the two ends of the baffle assembly being movably disposed on the first target head and the second target head, respectively; The baffle assembly includes a movable baffle and two rotating retaining rings. The two ends of the movable baffle are respectively fixed to the two rotating retaining rings, and the rotating retaining rings are respectively connected to the damping of the coating target. The rotation process of the rotating retaining ring includes a first position for blocking the coating target and a second position for exposing the coating target; The first and / or second disassembly components are provided with limiting components that restrict the rotation of the movable baffle when it rotates to the first position in the first direction and to the second position in the second direction; The rotating retaining ring is provided with a limiting block, and the limiting member corresponds to the limiting block; Both limiting plates have a detachable fixed baffle on the side away from the limiting groove, and the coating target is located between the two fixed baffles.

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