Novel graphite boat

Abstract

A novel graphite boat comprises a graphite block and a plurality of boat pieces arranged in parallel, the graphite block and the boat pieces form an included angle of 90 degrees, the graphite block is connected with the boat pieces through graphite screws, and the novel graphite boat is characterized in that a fixed interval is arranged between every two adjacent boat pieces, and the width of the fixed interval is gradually increased from the center to the two sides. According to the utility model, through the non-equal-interval design, the intervals of the outer-layer boat pieces of the graphite boat are increased, and the potential difference of the adjacent outer-layer boat pieces during discharging is reduced in the process, so that the film forming color difference caused by temperature difference is optimized, and the effect that the appearance color of the formed film is consistent is achieved; rework and damage can be effectively reduced, the one-time yield is improved, the cost is further reduced, and the production efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of solar cell manufacturing, specifically to a novel graphite boat. Background Technology

[0002] In current solar cell production, surface coating is a critical process. After the initial silicon wafer processing, a silicon nitride film needs to be deposited in this step to achieve anti-reflection and passivation. Silicon nitride film deposition requires specific conditions including vacuum, high temperature, discharge, and plasma special gas. Variations in these conditions can lead to significant differences in the appearance and performance of the silicon nitride film, failing to meet customer requirements and resulting in rework. In the current industry context of cost reduction, efficiency improvement, and the development of large-size solar cells, the increasing diameter of furnace tubes in equipment has led to corresponding increases in the width and height of the graphite boats used as wafer carriers. This results in the graphite wafers near the furnace tube heating up rapidly to the process temperature, while the middle of the boat requires heat transfer, causing a delay in heating. This leads to inconsistent temperatures inside and outside the boat at the end of the heating process. When introducing special gas, the inconsistent temperatures prevent sufficient ionization of the gas molecules, resulting in different silicon nitride film deposition rates during the discharge process, causing uneven film thickness and significant differences in color and appearance. Summary of the Invention

[0003] The purpose of this invention is to overcome the defects and shortcomings of the existing technology and provide a new type of graphite boat with simple structure, low rework and breakage rate, and effective improvement of production efficiency.

[0004] To achieve the above objectives, the technical solution of this utility model is: a novel graphite boat, comprising a graphite block and several parallel boat sheets, wherein the graphite block and the boat sheets form a 90° angle, and the graphite block is connected to the boat sheets by graphite screws, characterized in that: a fixed interval is provided between adjacent boat sheets, and the width of the fixed interval gradually increases from the center to both sides.

[0005] The increase in the fixed interval width is 0.2 mm.

[0006] The number of boat pieces is 27.

[0007] This invention utilizes a non-equidistant spacing design to increase the spacing between the outer layers of the graphite boat. During the process, it reduces the potential difference when adjacent outer layers are discharged, thereby optimizing the color difference in film formation caused by temperature differences and achieving a consistent film appearance. This effectively reduces rework and breakage, increases the first-pass yield, and thus reduces costs and improves production efficiency. Attached Figure Description

[0008] Figure 1 This is a schematic diagram of the structure of this utility model.

[0009] In the diagram: 1. Graphite block; 2. Boat; 3. Graphite screw; 4. Fixed interval; 5. Edge fixed interval; 6. Secondary edge fixed interval; 7. Center fixed interval. Detailed Implementation

[0010] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0011] See Figure 1 See Figure 1 A novel graphite boat is described, comprising a cuboid 1603 mm long, 375 mm wide, and 223 mm high, consisting of graphite blocks 1 and 27 parallel boat sheets 2. The graphite blocks 1 and boat sheets 2 form a 90° angle. The graphite blocks 1 are connected to the boat sheets 2 by graphite screws 3. Fixed intervals 4 are provided between adjacent boat sheets 2. The width of the fixed intervals 4 is basically the same at the center, and the width of the fixed intervals 4 gradually increases from the center to both sides. The increase in the width of the fixed intervals 4 is 0.2 mm. For example, the width of the edge fixed interval 5 is 0.4 mm larger than that of the secondary edge fixed interval 6, and the width of the secondary edge fixed interval 6 is 0.2 mm larger than that of the center fixed interval 7.

[0012] This utility model device uses a non-equidistant spacing design to increase the spacing between the outer layers of the graphite boat. During the process, it reduces the potential difference when adjacent outer layers are discharged, thereby optimizing the film color difference caused by temperature differences and achieving a consistent film appearance color.

Claims

1. A novel graphite boat, comprising a graphite block (1) and a plurality of parallel boat sheets (2), wherein the graphite block (1) and the boat sheets (2) form a 90° angle, and the graphite block (1) is connected to the boat sheets (2) by graphite screws (3), characterized in that: A fixed interval (4) is provided between adjacent boat pieces (2), and the width of the fixed interval (4) gradually increases from the center to both sides.

2. The novel graphite boat according to claim 1, characterized in that: The width of the fixed interval (4) increases by 0.2 mm.

3. The novel graphite boat according to claim 1, characterized in that: The number of the boat pieces (2) is 27.

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