Heater taking and placing device for producing single crystal by Czochralski method

Abstract

The utility model relates to the technical field of heater pick-and-place devices, in particular to a heater pick-and-place device for producing single crystals by a czochralski method, which comprises a supporting rod, a plurality of connecting plates are arranged on the outer side wall of the supporting rod through connecting structures, and the other ends of the connecting plates are connected with a heater body. The connecting structure is a connecting groove formed in the supporting rod, so that the heater can be taken and placed more conveniently and quickly, unmanned operation can be achieved, manual intervention is reduced, and the yield in the production process is increased.

Description

Technical Field

[0001] This utility model relates to the technical field of heater loading and unloading devices, specifically to a heater loading and unloading device for Czochralski method for producing single crystals. Background Technology

[0002] The heater handling device for Czochralski single crystal production is an auxiliary device used in single crystal growth equipment. Its main function is to remove or place the single crystal ingot into the molten pool at various growth stages. During the Czochralski single crystal production process, the single crystal ingot needs to be pulled out of the molten pool and kept at a constant temperature within a certain range. To achieve this, a heater is needed to heat and hold the single crystal ingot at that temperature. Simultaneously, in certain situations, the single crystal ingot needs to be removed or placed back into the molten pool to achieve different growth conditions. However, during manual removal, the heater may deform and break due to uneven stress on the main heater, resulting in a short heater lifespan. Using a disassembly cart to remove the main heater lacks tooling, preventing unmanned operation and leading to defects in the production process, thus reducing the yield rate. Utility Model Content

[0003] The purpose of this invention is to overcome the shortcomings of the prior art where uneven force on the heater during production reduces the production quality, and to provide a heater handling device for Czochralski method for producing single crystals.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: a heater loading and unloading device for single crystal production using the Czochralski method, comprising a support rod, wherein multiple connecting plates are provided on the outer side wall of the support rod via a connecting structure, and the other end of the connecting plate is connected to the heater body, wherein the connecting structure is a connecting groove provided on the support rod.

[0005] Furthermore, a connection hole is provided on the upper part of the support rod.

[0006] Furthermore, the connecting groove includes an upper mounting groove, a snap-fit ​​plate is provided at the lower part of the mounting groove, and an opening groove for accommodating the connecting plate is provided at the middle position of the snap-fit ​​plate.

[0007] Furthermore, the tail of the connecting plate is provided with a connector that engages with the connecting groove, and the bottom of the connector is provided with a snap-fit ​​plate that engages with the opening groove.

[0008] Furthermore, a clamping ring for limiting the position is provided on the outer side of the support rod.

[0009] Furthermore, the outer wall of the support rod is provided with threads, and the clamping ring is screwed to the support rod.

[0010] Furthermore, a connecting seam is provided at the bottom of the heater body, the opening of the connecting seam faces downward, the connecting plates are equidistantly distributed along the circumference of the support rod, and the connecting plates are engaged with the connecting clips.

[0011] The beneficial effects of this utility model embodiment are as follows: Multiple connecting plates are provided on the outer wall of the support rod through a specific connecting structure. The connecting structure consists of connecting grooves on the support rod, with multiple connecting grooves arranged along the circumference of the support rod. This allows the connecting plates to be securely connected to the support rod, and different connecting plates can be replaced according to the specifications of the heating element body. The upper part of the connecting groove is configured as an installation groove, and the lower part of the installation groove is configured with a snap-fit ​​plate. The middle position of the snap-fit ​​plate is configured with an opening groove for accommodating the connecting plate. The tail of the connecting plate is configured with a connector that snaps into the connecting groove, and the bottom of the connector is configured with a snap-fit ​​plate that snaps into the opening groove. During operation, this effectively avoids problems such as heater deformation and breakage, making the heater removal and placement operations more convenient and quick. This helps to achieve unmanned operation, reduce manual intervention, and thus improve the yield rate in the production process. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0013] Figure 2 This is a front view structural diagram of the support rod of this utility model;

[0014] Figure 3 This is a front view structural diagram of the connecting plate of this utility model;

[0015] Figure 4 This is a schematic diagram of the structure of the present invention in use.

[0016] In the diagram: 1. Support rod; 101. Mounting groove; 102. Opening groove; 2. Connecting plate; 201. Snap-fit ​​plate; 3. Pressure ring; 4. Heater body. Detailed Implementation

[0017] The preferred embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely for explaining the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0018] See Figures 1 to 4This utility model discloses a heater loading and unloading device for Czochralski method single crystal production, which mainly includes a support rod 1, a connecting plate 2 and a heater body 4. Multiple connecting plates 2 are provided on the outer wall of the support rod 1 through a specific connection structure. The connection structure is a connecting groove provided on the support rod 1. Multiple connecting grooves are provided along the circumference of the support rod 1, so that the connecting plates 2 can be stably connected to the support rod 1. Furthermore, different connecting plates 2 can be replaced according to the specifications of the heater body to achieve different usage effects.

[0019] The upper part of the support rod 1 is provided with a connection hole, which can be used to connect with other equipment or operating mechanisms to facilitate the installation and operation of the entire pick-and-place device. For example, the pick-and-place device can be connected to equipment such as a robotic arm through the connection hole to realize automated operation. The upper part of the connection groove is provided as a mounting groove 101, and the lower part of the mounting groove 101 is provided with a snap-fit ​​plate 201. The middle position of the snap-fit ​​plate 201 is provided with an opening groove 102 for accommodating the connection plate 2. The tail of the connection plate 2 is provided with a connector that snaps into the connection groove, and the bottom of the connector is provided with a snap-fit ​​plate 201 that snaps into the opening groove 102. During installation, insert the connector of the connecting plate 2 into the mounting slot 101 and snap the snap plate 201 at the bottom of the connector into the opening slot 102. This way, the connecting plate 2 can be firmly fixed on the support rod 1 and the force is evenly distributed, avoiding the problem of heater deformation and breakage caused by uneven force when picking it up. When it is necessary to replace different connecting plates 2, simply remove the two and a half sections and replace them with connecting plates 2 with the same connector, so as to achieve adjustment for different usage states and ensure the use effect.

[0020] To further ensure the stability of the connection between the connecting plate 2 and the support rod 1, a clamping ring 3 for limiting the position is provided on the outer side of the support rod 1. The outer wall of the support rod 1 is threaded, and the clamping ring 3 is screwed onto the support rod 1. After the connecting plate 2 is installed, the clamping ring 3 is rotated to a suitable position to clamp the connecting plate 2, preventing it from loosening or shifting during use. The heater body 4 is connected to the support rod 1 through the connecting plate 2. The heater body 4 has an annular bottom with a connecting seam, the opening of which faces downwards. The connecting plates 2 are evenly distributed along the circumference of the support rod 1, and they engage with the connecting seam on the heater body 4. This evenly distributed design makes the heater body 4 more evenly stressed, further improving the heater's service life. Simultaneously, the evenly distributed connecting plates 2 also ensure the stability of the heater body 4 during handling, preventing shaking or tilting.

[0021] In practical use, when it is necessary to place the heater into or remove it from the molten pool, the entire placement and removal device can be operated by a robotic arm or other equipment connected to the upper connection hole of the support rod 1. Because the connection between the connecting plate 2, the support rod 1, and the heater body 4 is stable and the force is evenly distributed, problems such as heater deformation and breakage can be effectively avoided during operation. This makes the placement and removal of the heater more convenient and faster, helps to achieve unmanned operation, reduces manual intervention, and thus improves the yield rate in the production process.

[0022] It should be noted that in the description of this utility model, terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," which indicate direction or positional relationships, are based on the direction or positional relationships shown in the accompanying drawings. These are used merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0024] The term "comprising" or any other similar term is intended to cover non-exclusive inclusion, such that a process, article, or apparatus / device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to those processes, articles, or apparatus / devices.

[0025] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.

Claims

1. A heater handling device for Czochralski method single crystal production, characterized in that: It includes a support rod, on the outer side wall of which multiple connecting plates are provided by a connecting structure. The other end of the connecting plate is connected to the heater body. The connecting structure is a connecting groove provided on the support rod.

2. The heater handling device for Czochralski single crystal production according to claim 1, characterized in that: The upper part of the support rod is provided with a connection hole.

3. The heater handling device for Czochralski single crystal production according to claim 1, characterized in that: The connecting groove includes an upper mounting groove, a snap-fit ​​plate is provided at the lower part of the mounting groove, and an opening groove for accommodating the connecting plate is provided in the middle of the snap-fit ​​plate.

4. The heater loading and unloading device for Czochralski single crystal production according to claim 3, characterized in that: The tail of the connecting plate is provided with a connector that engages with the connecting groove, and the bottom of the connector is provided with a snap-fit ​​plate that engages with the opening groove.

5. The heater handling device for Czochralski single crystal production according to claim 1, characterized in that: The outer side of the support rod is provided with a clamping ring for limiting the position.

6. The heater handling device for Czochralski single crystal production according to claim 5, characterized in that: The outer wall of the support rod is threaded, and the clamping ring is screwed to the support rod.

7. The heater handling device for Czochralski single crystal production according to claim 1, characterized in that: The bottom of the heater body is provided with a connecting seam, the opening of the connecting seam faces downward, the connecting plates are equidistantly distributed along the circumference of the support rod, and the connecting plates are engaged with the connecting clips.

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