Purification device for preparing high-purity germanium evaporation material

Abstract

The utility model provides a purification device for preparing a high-purity germanium evaporation material, and relates to the technical field of purification of the high-purity germanium evaporation material, the purification device comprises a purification tank, a coaxially distributed heating box is arranged in the purification tank, the center of the bottom of the heating box is rotatably connected with a rotary drum which is coaxially arranged with the purification tank, the outer wall of the rotary drum is provided with a plurality of stirring blades, and the stirring blades are arranged on the outer wall of the rotary drum. The heating box is used for containing hydrochloric acid, vertical shaking of liquid is achieved through reciprocating lifting of the heating box, meanwhile, stirring is conducted in combination with the rotating stirring blades, a rubber cushion is not arranged any more, and the risk that the rubber cushion is corroded by hydrochloric acid and aged at high temperature is directly eliminated; the stirring function is achieved, and the stirring rod and the inner wall of the purification tank do not need to be protected by a rubber cushion.

Description

Technical Field

[0001] This utility model relates to the field of high-purity germanium evaporation material purification technology, and in particular to a purification device for preparing high-purity germanium evaporation material. Background Technology

[0002] High-purity germanium evaporation materials are mainly used in high-tech fields such as semiconductors, solar cells, and fiber optic communications. For example, in semiconductor manufacturing, germanium is an important semiconductor material, and its purity directly affects the performance of devices.

[0003] Therefore, a high-efficiency germanium tetrachloride extraction and purification device, with publication number CN215538601U, is used. In operation, germanium tetrachloride and hydrochloric acid are poured into an extraction and purification tank. Heating strips are installed on the inner wall of the tank; multiple heating strips allow for faster heating, accelerating the evaporation of internal moisture and improving purification efficiency. During purification, a stirring rod agitates the material to ensure uniform heating. A rubber pad is installed at one end of the stirring rod to prevent scratching the inner wall of the extraction and purification tank during agitation. Furthermore, a PJ-205 timer module is installed on the outer surface of the extraction and purification tank, allowing the setting of the required purification time. Heating automatically stops when the time is up. After purification, the discharge valve is opened, allowing the material to fall from the discharge port.

[0004] However, hydrochloric acid is a strong acid with high corrosiveness. Under heating conditions, the volatility of hydrochloric acid increases, and its vapor may come into contact with the rubber pad, causing chemical corrosion of the rubber pad. Moreover, the heating process will increase the temperature inside the extraction and purification tank, and the rubber pad will age faster in a high-temperature environment. Utility Model Content

[0005] The purpose of this invention is to solve the problems existing in the prior art by proposing a purification device for preparing high-purity germanium evaporation material.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a purification device for preparing high-purity germanium evaporation material, comprising a purification tank, wherein a heating box is coaxially distributed inside the purification tank, a rotating cylinder coaxially arranged with the center of the bottom of the heating box is rotatably connected, the outer wall of the rotating cylinder is provided with several stirring blades, the opening of the rotating cylinder faces upward and is rotatably connected through the top of the heating box, a horizontally arranged connecting rod is fixedly installed on the top of the purification tank, a central rod extending into the rotating cylinder is fixedly installed at the middle position of the surface of the connecting rod, a horizontally arranged protruding post is fixedly installed at the bottom end of the central rod, a spiral groove is opened on the inner wall of the rotating cylinder and slidably connected with the end of the protruding post, and at least two electric push rods for driving the heating box to rise and fall are fixedly installed on the bottom edge of the connecting rod.

[0007] Preferably, a plurality of the electric push rods are arranged in a circular array about the central rod, with the telescopic ends of the electric push rods facing downwards and detachably connected to the top of the outer casing of the heating box by bolts.

[0008] Preferably, two flow valves are fixedly installed through the outer wall of the purification tank near the top edge. One end of each flow valve is connected to an L-shaped pipe on the inner wall of the purification tank. The outlet of the L-shaped pipe faces vertically downward and is fitted with a connecting pipe that is fixedly connected through the top of the heating box.

[0009] Preferably, the two flow valves are used for injecting germanium tetrachloride and hydrochloric acid, respectively.

[0010] Preferably, a switch valve is fixedly installed through the bottom edge of the heating box, and a drain pipe is fixedly installed through the bottom of the purification tank directly below the switch valve.

[0011] Preferably, the upper port of the drain pipe extends upward and is used to fit with the lower valve port of the switch valve.

[0012] Preferably, the outer side of the heating box is fitted with the inner wall of the purification tank with a clearance.

[0013] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0014] 1. In this utility model, a heating box is used to hold hydrochloric acid, and the liquid is shaken up and down by the reciprocating lifting of the heating box. At the same time, a rotating stirring blade is used for stirring. The rubber pad is no longer needed, which directly eliminates the risk of the rubber pad being corroded by hydrochloric acid and aged by high temperature. The stirring function is realized through the structural design of the reciprocating lifting of the heating box and the rotating stirring blade, without relying on the rubber pad to protect the stirring rod and the inner wall of the purification tank.

[0015] 2. In actual operation, germanium tetrachloride and hydrochloric acid enter and exit the L-shaped pipe through two flow valves, and then enter the heating box through the corresponding connecting pipe. After the two solutions in the heating box have reacted, the heating box is lowered to the bottom of the box. The switch valve is inserted into the upper opening of the drain pipe. The solution that has reacted is discharged and collected through the drain pipe by opening the switch valve, which can realize automated processing. Attached Figure Description

[0016] Figure 1 This utility model provides a three-dimensional structural schematic diagram of a purification device for preparing high-purity germanium evaporation material;

[0017] Figure 2 This invention provides a purification device for preparing high-purity germanium evaporation material. Figure 1 A schematic diagram of the rear view structure;

[0018] Figure 3 This invention provides a purification device for preparing high-purity germanium evaporation material. Figure 1 A schematic diagram of the cross-sectional structure;

[0019] Figure 4 This invention provides a purification device for preparing high-purity germanium evaporation material. Figure 3 A cross-sectional structural diagram.

[0020] Legend: 1. Purification tank; 2. Flow valve; 3. Drain pipe; 4. Heating box; 5. Electric push rod; 6. Center rod; 7. Rotary drum; 8. Stirring blade; 9. Connecting pipe; 10. Spiral groove; 11. Protruding column; 12. Switch valve; 13. Connecting rod; 14. L-shaped pipe. Detailed Implementation

[0021] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0022] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0023] like Figures 1-4As shown, a purification device for preparing high-purity germanium evaporation material includes a purification tank 1, with a heating box 4 coaxially distributed inside the purification tank 1. The inner wall of the purification tank 1 and the outer wall of the heating box 4 can be insulated by covering with insulation cotton or using other heat insulation methods. In this solution, the inner wall of the heating box 4 can be heated by a built-in spiral electric heating wire. A rotating cylinder 7 coaxially arranged with the purification tank 1 is rotatably connected to the center of the bottom of the heating box 4. Several stirring blades 8 are provided on the outer wall of the rotating cylinder 7. The opening of the rotating cylinder 7 faces upward and is rotatably connected to the top of the heating box 4. A horizontally arranged connecting rod 13 is fixedly installed on the top of the purification tank 1. A central rod 6 extending into the rotating cylinder 7 is fixedly installed at the middle of the surface of the connecting rod 13. A horizontally arranged protruding post 11 is fixedly installed at the bottom end of the central rod 6. A spiral groove 10 is opened on the inner wall of the rotating cylinder 7 and slidably connected to the end of the protruding post 11. At least two driving rods are fixedly installed on the bottom edge of the connecting rod 13. The heating chamber 4 is raised and lowered by electric push rods 5. Several electric push rods 5 are arranged in a circular array about the central rod 6, with the telescopic ends of the electric push rods 5 facing downwards and detachably connected to the top of the outer casing of the heating chamber 4 by bolts. In actual use, the heating chamber 4 is raised and lowered by the contraction and extension of the electric push rods 5, thereby causing the liquid inside the heating chamber 4 to slosh up and down. In addition, when the liquid sloshes up and down, it is mixed by several passively rotating stirring blades 8. In order to make the rotating drum 7 drive the stirring blades 8 to rotate with the raising and lowering of the heating chamber 4, this scheme is provided with a central rod 6, a protruding post 11 and a spiral groove 10. When the heating chamber 4 drives the rotating drum 7 to rise and fall synchronously, the rotating drum 7 will rotate synchronously due to the connection between the spiral groove 10 and the protruding post 11, while the protruding post 11 will not rotate due to the fixed installation of the central rod 6. Therefore, when the rotating drum 7 reciprocates, it will rotate synchronously due to the connection between the spiral groove 10 and the protruding post 11, thereby making the stirring blades 8 on its surface rotate.

[0024] Two flow valves 2 are fixedly installed through the outer wall of the purification tank 1 near the top edge. One end of each flow valve 2 located on the inner wall of the purification tank 1 is connected to an L-shaped pipe 14. The outlet of the L-shaped pipe 14 faces vertically downwards and is fitted with a connecting pipe 9 that is fixedly connected through the top of the heating chamber 4. The two flow valves 2 are used for injecting germanium tetrachloride and hydrochloric acid, respectively. A switch valve 12 is fixedly installed through the bottom edge of the heating chamber 4. A drain pipe 3 is fixedly installed through the bottom of the purification tank 1, directly below the switch valve 12. The upper end of the drain pipe 3 extends upwards and is fitted with the lower valve port of the switch valve 12. The outer side of the heating box 4 is fitted with the inner wall of the purification tank 1 with a clearance. When the heating box 4 moves up and down, it will drive the connecting pipe 9 installed on its surface to slide up and down on the surface of the L-shaped pipe 14. In actual operation, germanium tetrachloride and hydrochloric acid enter and exit the L-shaped pipe 14 through two flow valves 2, and then enter the heating box 4 along the corresponding connecting pipe 9. After the two solutions in the heating box 4 have completed the reaction, the heating box 4 descends to the bottom of the box. The switch valve 12 is inserted into the upper opening of the drain pipe 3. The solution that has completed the reaction can be discharged and collected through the drain pipe 3 by opening the switch valve 12.

[0025] Usage: Germanium tetrachloride and hydrochloric acid enter and exit through two flow valves 2 into L-shaped pipes 14, and then quantitatively enter the heating chamber 4 along the corresponding connecting pipes 9. Then, the flow valves 2 are closed, and the heating chamber 4 is raised and lowered by the contraction and extension of the electric push rod 5, thereby causing the liquid in the heating chamber 4 to sway and agitate. In addition, when the liquid sways up and down, it is mixed by several passively rotating stirring blades 8. After the two solutions in the heating chamber 4 have reacted completely, the heating chamber 4 is lowered to the bottom of the chamber. The switch valve 12 is inserted into the upper opening of the drain pipe 3, and the solution that has reacted is discharged and collected through the drain pipe 3 by opening the switch valve 12.

[0026] The wiring diagrams for the flow valve 2, electric push rod 5, switching valve 12, and electric heating wire in this utility model are common knowledge in the field. Their working principles are known technologies. The appropriate model is selected according to actual use. Therefore, the control method and wiring layout of the flow valve 2, electric push rod 5, switching valve 12, and electric heating wire will not be explained in detail.

[0027] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A purification apparatus for preparing high-purity germanium evaporation material, comprising a purification tank (1), characterized in that: The purification tank (1) is provided with a heating box (4) arranged coaxially. A rotating cylinder (7) coaxially arranged with the purification tank (1) is rotatably connected at the center of the bottom of the heating box (4). Several stirring blades (8) are provided on the outer wall of the rotating cylinder (7). The opening of the rotating cylinder (7) faces upward and is rotatably connected through the top of the heating box (4). A horizontally arranged connecting rod (13) is fixedly installed on the top of the purification tank (1). A central rod (6) extending into the rotating cylinder (7) is fixedly installed at the middle position of the surface of the connecting rod (13). A horizontally arranged protruding column (11) is fixedly installed at the bottom end of the central rod (6). A spiral groove (10) slidably connected to the end of the protruding column (11) is opened on the inner wall of the rotating cylinder (7). At least two electric push rods (5) for driving the heating box (4) to rise and fall are fixedly installed on the bottom edge of the connecting rod (13).

2. The purification apparatus for preparing high-purity germanium evaporation material according to claim 1, characterized in that: Several of the electric push rods (5) are arranged in a ring array about the central rod (6), with the telescopic ends of the electric push rods (5) facing downwards and detachably connected to the top of the outer casing of the heating box (4) by bolts.

3. The purification apparatus for preparing high-purity germanium evaporation material according to claim 1, characterized in that: Two flow valves (2) are fixedly installed through the outer wall of the purification tank (1) near the top edge. One end of the flow valve (2) located on the inner wall of the purification tank (1) is connected to an L-shaped pipe (14). The outlet of the L-shaped pipe (14) is vertically downward and fitted with a connecting pipe (9) that is fixedly connected through the top of the heating box (4).

4. The purification apparatus for preparing high-purity germanium evaporation material according to claim 3, characterized in that: The two flow valves (2) are used for injecting germanium tetrachloride and hydrochloric acid, respectively.

5. The purification apparatus for preparing high-purity germanium evaporation material according to claim 1, characterized in that: A switch valve (12) is fixedly installed through the bottom edge of the heating box (4), and a drain pipe (3) is fixedly installed through the bottom of the purification tank (1) directly below the switch valve (12).

6. The purification apparatus for preparing high-purity germanium evaporation material according to claim 5, characterized in that: The upper port of the drain pipe (3) extends upward and is used to fit with the lower valve port of the switch valve (12).

7. The purification apparatus for preparing high-purity germanium evaporation material according to claim 1, characterized in that: The outer side of the heating box (4) is fitted with the inner wall of the purification tank (1) with a clearance.

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