Cleaning system for polycrystalline silicon reduction furnace bell jar

Abstract

The utility model discloses a cleaning system for a bell jar of a polycrystalline silicon reduction furnace, relates to the technical field of bell jar cleaning, and mainly aims to provide the cleaning system for the bell jar of the polycrystalline silicon reduction furnace, which can improve the cleaning quality of the bell jar and prolong the cleaning period of the bell jar. According to the main technical scheme, the cleaning system for the bell jar of the polycrystalline silicon reduction furnace comprises a placing component, a cleaning component and a cleaning component, wherein the bell jar is placed on the placing component; the liquid supply component comprises a spray head, a liquid supply pipeline, a water supply tank and an alkali liquor tank, the spray head penetrates through and extends into the placing component, one end of the liquid supply pipeline is connected to the spray head, and the other end of the liquid supply pipeline is connected to the water supply tank and the alkali liquor tank; the hot air component comprises an air blower, a filter, a heater and an air outlet pipeline, one end of the air outlet pipeline penetrates through and extends into the placing component, and the other end of the air outlet pipeline is sequentially connected to the heater, the filter and the air blower. The bell jar cleaning device is mainly used for bell jar cleaning.

Description

Technical Field

[0001] This utility model relates to the field of bell cleaning technology, and in particular to a cleaning system for bells in polycrystalline silicon reduction furnaces. Background Technology

[0002] The reduction furnace bell jar is a core component in polysilicon production equipment. It is mainly used to form a closed reaction environment during chemical vapor deposition. As the core sealing structure of the reaction chamber, it ensures the stable reaction between the silicon core and gaseous raw materials under high temperature and high pressure. It is mainly used to improve the Siemens process for producing polysilicon, covering the demand for high-purity silicon from industrial to electronic grades. Because reaction byproducts are easy to adhere to the inner wall, a high-pressure water automatic cleaning system or a special cleaning agent is required for efficient cleaning to avoid contaminating the silicon core and affecting product quality.

[0003] Existing high-pressure water automatic cleaning systems mainly rely on multiple alternating rinses with water or weak alkaline solutions. This approach has the following problems:

[0004] Incomplete removal of silicon powder residue from the surface of the bell jar led to subsequent production contamination.

[0005] The alternating rinsing process results in a significant waste of water and alkali.

[0006] Alkaline cleaning solutions can remain on the surface of the bell jar, leading to equipment corrosion. Utility Model Content

[0007] In view of this, the present invention provides a cleaning system for a bell jar of a polycrystalline silicon reduction furnace, the main purpose of which is to provide a cleaning system for a bell jar of a polycrystalline silicon reduction furnace that can improve the cleaning quality and cleaning cycle of the bell jar.

[0008] To achieve the above objectives, this utility model mainly provides the following technical solutions:

[0009] This utility model embodiment provides a cleaning system for the bell jar of a polycrystalline silicon reduction furnace, the system comprising:

[0010] A placement component, on which a bell jar is placed;

[0011] The liquid supply component includes a nozzle, a liquid supply pipe, a water supply tank, and an alkali tank. The nozzle passes through and extends into the placement component. One end of the liquid supply pipe is connected to the nozzle, and the other end is connected to the water supply tank and the alkali tank.

[0012] A hot air component, comprising a blower, a filter, a heater, and an air outlet duct, wherein one end of the air outlet duct passes through and extends into the placement component, and the other end is sequentially connected to the heater, the filter, and the blower.

[0013] Furthermore, the recycling component includes a discharge pipe, a waste liquid tank, a water treatment component, and a silicon powder recycling pool. One end of the discharge pipe is connected to the placement component, and the other end is connected to the waste liquid tank. One end of the water treatment component is connected to the waste liquid tank, and the other end is connected to the silicon powder recycling pool.

[0014] Furthermore, the recycling component also includes a clarification tank, a waste liquid pipeline, and a waste liquid pump. The discharge pipeline is connected to the clarification tank, one end of the waste liquid pipeline is connected to the clarification tank, and the other end is connected to the water treatment component. The waste liquid pump is installed on the waste liquid pipeline.

[0015] Furthermore, the recovery component also includes a nitrogen pipeline and a venting pipeline, the nitrogen pipeline being connected to the alkali tank and the waste liquid tank, and the venting pipeline being connected to the alkali tank, the waste liquid tank, and the discharge pipeline.

[0016] Furthermore, the waste liquid pipeline is connected to the bottom of the waste liquid tank and the alkali tank, respectively.

[0017] Furthermore, the bottom of the clarification tank is connected to the silicon powder recovery tank.

[0018] Furthermore, the liquid supply component also includes a booster pump and a plunger pump, which are mounted on the liquid supply pipeline.

[0019] Compared with the prior art, the present invention has the following technical effects:

[0020] In the technical solution provided by this utility model embodiment, the function of the placement component is to fix the bell jar, and the bell jar is placed on the placement component. The function of the liquid supply component is to supply demineralized water and NaOH solution into the bell jar. The liquid supply component includes a nozzle, a liquid supply pipe, a water supply tank, and an alkali tank. The nozzle passes through and extends into the placement component. One end of the liquid supply pipe is connected to the nozzle, and the other end is connected to the water supply tank and the alkali tank. The function of the hot air component is to dry the inside of the bell jar. The hot air component includes a blower, a filter, a heater, and an air outlet pipe. One end of the air outlet pipe passes through and extends into the placement component, and the other end is sequentially connected to the heater, the filter, and the blower. Existing high-pressure water automatic cleaning systems mainly rely on repeated alternating rinsing with water or weak alkaline solutions. This method has the following problems: incomplete removal of silica powder residue on the bell jar surface, leading to subsequent production contamination; significant waste of water and alkaline solutions during alternating rinsing; and alkaline cleaning solution residue on the bell jar surface, causing equipment corrosion. In this technical solution, demineralized water and NaOH solution are supplied to the nozzles through a liquid supply pipeline. The nozzles spray the solution onto the inner wall of the bell jar, rinsing it and achieving rapid cleaning. Then, hot air is supplied into the bell jar by a blower, achieving rapid drying of the inner wall. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of a cleaning device for a bell jar of a polycrystalline silicon reduction furnace, provided as an embodiment of the present invention. Detailed Implementation

[0022] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0023] like Figure 1 As shown in the figure, this utility model embodiment also provides a cleaning device for the bell jar of a polycrystalline silicon reduction furnace, the device comprising:

[0024] Placement component 1, on which a bell jar 9 is placed;

[0025] The liquid supply component includes a nozzle 21, a liquid supply pipe 22, a water supply tank 23, and an alkali tank 24. The nozzle 21 passes through and extends into the placement component 1. One end of the liquid supply pipe 22 is connected to the nozzle 21, and the other end is connected to the water supply tank 23 and the alkali tank 24.

[0026] The hot air component includes a blower 31, a filter 32, a heater 33, and an air outlet duct 34. One end of the air outlet duct 34 passes through and extends into the placement component 1, and the other end is connected in sequence to the heater 33, the filter 32, and the blower 31.

[0027] In the technical solution provided by this utility model embodiment, the function of the placement component 1 is to fix the bell jar 9, and the bell jar 9 is placed on the placement component 1. The function of the liquid supply component is to supply demineralized water and NaOH solution into the bell jar 9. The liquid supply component includes a nozzle 21, a liquid supply pipe 22, a water supply tank 23, and an alkali solution tank 24. The nozzle 21 passes through and extends into the placement component 1. One end of the liquid supply pipe 22 is connected to the nozzle 21, and the other end is connected to the water supply tank 23 and the alkali solution tank 24. The function of the hot air component is to dry the inside of the bell jar 9. The hot air component includes a blower 31, a filter 32, a heater 33, and an air outlet pipe 34. One end of the air outlet pipe 34 passes through and extends into the placement component 1, and the other end is sequentially connected to the heater 33 and the filter. Compared to existing technologies, conventional high-pressure water automatic cleaning systems mainly rely on alternating rinsing with water or weak alkaline solutions. This approach has several drawbacks: incomplete removal of silica powder residue on the surface of the bell jar 9 leads to subsequent production contamination; the alternating rinsing process wastes a significant amount of water and alkaline solution; and alkaline cleaning solutions remain on the surface of the bell jar 9, causing equipment corrosion. In this technical solution, demineralized water and NaOH solution are supplied to the nozzle 21 via the liquid supply pipe 22. The nozzle 21 sprays the solution onto the inner wall of the bell jar 9, rinsing it and achieving rapid cleaning. Then, hot air is supplied to the bell jar 9 via the blower 31, achieving rapid drying of the inner wall of the bell jar 9.

[0028] The aforementioned placement component 1 serves to fix the bell jar 9. The bell jar 9 is placed on the placement component 1, and the upper part of the placement component 1 is used to install the bell jar 9. A nozzle 21 and an air outlet duct 34 are installed on the base plate of the placement component 1. The function of the liquid supply component is to supply demineralized water and NaOH solution into the bell jar 9. The liquid supply component includes a nozzle 21, a liquid supply pipe 22, a water supply tank 23, and an alkali solution tank 24. The nozzle 21 passes through and extends into the placement component 1. One end of the liquid supply pipe 22 is connected to the nozzle 21, and the other end is connected to the water supply tank 23 and the alkali solution tank 24. The water supply tank 23 and the alkali solution tank 24 are simultaneously connected to the liquid supply pipe 22. Optionally, the liquid supply component also includes a booster pump 5 and a plunger pump 6. The booster pump 5 and the plunger pump 6 are installed on the liquid supply pipe for supplying demineralized water and NaOH solution. The nozzle 21 is installed on one side of the liquid supply pipe 22. The device sprays deionized water or NaOH solution onto the inner wall of the bell jar 9. The hot air component dries the inside of the bell jar 9. The hot air component includes a blower 31, a filter 32, a heater 33, and an air outlet duct 34. One end of the air outlet duct 34 passes through and extends into the placement component 1, and the other end is connected in sequence to the heater 33, the filter 32, and the blower 31. The blower 31 delivers air through the duct to the air outlet duct 34. The filter 32 and the heater 33 are installed in sequence between the blower 31 and the air outlet duct 34. After being filtered by the filter 32, the air enters the heater 33 for heating to form hot air. The hot air is discharged through the air outlet duct 34 to dry the inner wall of the bell jar 9. This not only effectively cleans the inner wall of the bell jar 9, improving the cleaning cycle and equipment utilization, but also enhances the product quality of polysilicon.

[0029] Furthermore, a recycling component is included, comprising a discharge pipe 41, a waste liquid tank 42, a water treatment component 43, and a silicon powder recycling pool 44. One end of the discharge pipe 41 is connected to the placement component 1, and the other end is connected to the waste liquid tank 42. One end of the water treatment component 43 is connected to the waste liquid tank 42, and the other end is connected to the silicon powder recycling pool 44. In this embodiment, a recycling component is added to recycle the waste liquid after cleaning. One end of the discharge pipe 41 is installed at the bottom of the placement component 1 to discharge the waste liquid after cleaning. The waste liquid tank 42 is connected to the discharge pipe 41 to collect the waste liquid and perform separation treatment. The separated wastewater enters the water treatment component 43 for treatment, the separated alkaline solution returns to the alkaline solution tank for continued use, and the silicon powder separated by the water treatment component 43 returns to the silicon powder recycling pool 44, thereby achieving the technical effect of waste reuse.

[0030] Furthermore, the recycling component also includes a clarification tank 45, a waste liquid pipeline 46, and a waste liquid pump 47. The discharge pipeline 41 is connected to the clarification tank 45. One end of the waste liquid pipeline 46 is connected to the clarification tank 45, and the other end is connected to the water treatment component 43. The waste liquid pump 47 is installed on the waste liquid pipeline 46. In this embodiment, the recycling component is further defined. The function of the clarification tank 45 is to coagulate the water and remove suspended solids and colloids. One end of the waste liquid pipeline 46 is connected to the clarification tank 45, and the other end is connected to the water treatment component 43. The water discharged from the clarification tank 45 enters the water treatment component 43 for treatment, and the precipitated silicon powder enters the silicon powder recycling tank 44. Optionally, the bottom of the clarification tank is connected to the silicon powder recycling tank, and the solid matter at the bottom of the clarification tank enters the silicon powder recycling tank for recycling, thereby achieving the technical effect of improving the utilization rate of silicon powder.

[0031] Furthermore, the recovery component also includes a nitrogen pipeline 48 and a venting pipeline 49. The nitrogen pipeline 48 is connected to the alkali tank and the waste liquid tank 42, and the venting pipeline 49 is connected to the alkali tank, the waste liquid tank 42, and the discharge pipeline 41. In this embodiment, the recovery component is further defined: one end of the nitrogen pipeline 48 is connected to the alkali tank and the waste liquid tank 42, and the other end is connected to a nitrogen supply device. The nitrogen supply device supplies nitrogen to the alkali tank and the waste liquid tank 42 to displace the gas inside the alkali tank and the waste liquid tank 42. The venting pipeline 49 is connected to the alkali tank, the waste liquid tank 42, and the discharge pipeline 41 to discharge hydrogen or other harmless gases from the alkali tank, the waste liquid tank 42, and the discharge pipeline 41.

[0032] Furthermore, the waste liquid pipeline is connected to the bottom of both the waste liquid tank and the alkali tank. In this embodiment, the waste liquid pipeline is further defined, with a first branch pipeline and a second branch pipeline provided on it. One end of the first branch pipeline is connected to the waste liquid pipeline, and the other end is connected to the waste liquid tank for discharging the waste liquid in the waste liquid tank. One end of the second branch pipeline is connected to the waste liquid pipeline, and the other end is connected to the alkali tank for discharging the alkali solution at the bottom of the alkali tank, thereby achieving the technical effect of recycling the waste liquid and alkali solution.

[0033] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A cleaning system for the bell jar of a polycrystalline silicon reduction furnace, characterized in that, include: A placement component, on which a bell jar is placed; The liquid supply component includes a nozzle, a liquid supply pipe, a water supply tank, and an alkali tank. The nozzle passes through and extends into the placement component. One end of the liquid supply pipe is connected to the nozzle, and the other end is connected to the water supply tank and the alkali tank. A hot air component, comprising a blower, a filter, a heater, and an air outlet duct, wherein one end of the air outlet duct passes through and extends into the placement component, and the other end is sequentially connected to the heater, the filter, and the blower.

2. The cleaning system for the bell jar of a polycrystalline silicon reduction furnace according to claim 1, characterized in that, Also includes: The recycling component includes a discharge pipe, a waste liquid tank, a water treatment component, and a silicon powder recycling pool. One end of the discharge pipe is connected to the placement component, and the other end is connected to the waste liquid tank. One end of the water treatment component is connected to the waste liquid tank, and the other end is connected to the silicon powder recycling pool.

3. A cleaning system for a bell jar of a polycrystalline silicon reduction furnace according to claim 2, characterized in that, The recycling component also includes a clarification tank, a waste liquid pipeline, and a waste liquid pump. The discharge pipeline is connected to the clarification tank, one end of the waste liquid pipeline is connected to the clarification tank, and the other end is connected to the water treatment component. The waste liquid pump is installed on the waste liquid pipeline.

4. A cleaning system for a bell jar of a polycrystalline silicon reduction furnace according to claim 3, characterized in that, The recovery component also includes a nitrogen pipeline and a venting pipeline. The nitrogen pipeline is connected to the alkali tank and the waste liquid tank, and the venting pipeline is connected to the alkali tank, the waste liquid tank, and the discharge pipeline.

5. A cleaning system for a bell jar of a polycrystalline silicon reduction furnace according to claim 3, characterized in that, The waste liquid pipeline is connected to the bottom of the waste liquid tank and the alkali tank, respectively.

6. A cleaning system for a bell jar of a polycrystalline silicon reduction furnace according to claim 3, characterized in that, The bottom of the clarification tank is connected to the silicon powder recovery tank.

7. A cleaning system for a bell jar of a polycrystalline silicon reduction furnace according to any one of claims 1 to 6, characterized in that, The liquid supply component also includes a booster pump and a plunger pump, which are installed on the liquid supply pipeline.

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