Grinding and finishing device and chemical mechanical polishing equipment

Abstract

The utility model discloses a grinding and finishing device and chemical mechanical polishing equipment. According to the grinding and finishing device, the cover plate is made of a transparent material, so that an operator directly observes the internal condition of the finishing arm body and finds out the abrasion condition of internal components such as a sealing ring of the finishing arm body, and therefore the problem of liquid seepage caused by damage of the sealing ring is avoided; the liquid leakage detection device arranged in the trimming arm body is connected with the control unit, and when seepage occurs in the trimming arm body, the liquid leakage detection device detects the seepage and transmits the seepage to the control unit through a signal to trigger an alarm mechanism, so that an operator takes measures before core components such as a motor are damaged by the liquid, and the operation is convenient. And the equipment maintenance requirement and the downtime caused by part damage are reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, specifically to a grinding and finishing apparatus and a chemical mechanical polishing device. Background Technology

[0002] In the semiconductor manufacturing field, chemical mechanical polishing (CMP) is a critical step in chip production. In related technologies, the polishing and dressing device of a CMP polishing machine (i.e., the polishing and dressing arm 10, such as...) Figure 1 (As shown) This includes a dressing arm body 12 and a cover plate 11 located above it. When the water curtain device 13 of the CMP grinding machine washes the grinding dressing arm 10, water accumulates on the cover plate 11. This water can easily splash onto the grinding pad during the grinding process, affecting the stability of the grinding rate. At the same time, because of the water accumulation on the cover plate 11, the water can easily seep into the interior of the dressing arm body 12, which may damage the motor of the grinding dressing arm 10 and increase equipment maintenance needs and downtime.

[0003] Therefore, solutions need to be proposed for the problems in the relevant technologies. Utility Model Content

[0004] The purpose of this application is to provide a grinding and finishing apparatus and a chemical mechanical polishing device to solve the problems in the related technologies.

[0005] To address the aforementioned problems, according to a first aspect of this application, an embodiment of this application provides a grinding and dressing device, comprising: a base; a dressing arm body, one end of which is fixedly disposed above the base; a cover plate disposed on the top of the dressing arm body and forming a sealed connection with the dressing arm body; the cover plate being made of a transparent material; a leakage detection device disposed inside the dressing arm body and connected to a control unit; and a dressing execution unit disposed below the other end of the dressing arm body.

[0006] In some possible implementations, the cover plate is a sloping top cover plate, the top of which slopes downward from the center to the periphery.

[0007] In some possible implementations, the angle of inclination of the surface of the sloping top cover is between 45 and 70 degrees.

[0008] In some possible implementations, the cover plate is a flat cover plate.

[0009] In some possible implementations, the cover plate is connected to the dressing arm body by a plurality of screws; the grinding and dressing device includes a plurality of screw caps disposed above the screws, covering and sealing the screw holes.

[0010] In some possible implementations, a sealing ring is provided between the cover plate and the trimming arm body.

[0011] In some possible implementations, the leakage detection device includes: a leakage detection strip disposed on at least one of the inner wall and bottom of the trimming arm body; and a signal transmission line connected to the leakage detection strip and connected to the control unit.

[0012] In some possible implementations, the control unit includes: a user input / output interface connected to the signal transmission line; a signal processing unit disposed within the control unit, the input terminal of the signal processing unit being connected to the user input / output interface; and an alarm indicator connected to the output terminal of the signal processing unit, the alarm indicator being disposed on the control unit, the alarm indicator including a visual indicator light and a sound generator.

[0013] In some possible implementations, a motor is installed within the base; the dressing arm body includes: a rotating shaft rotatably disposed within the dressing arm body for driving the grinding and dressing head to rotate, the grinding and dressing head being located at the end of the dressing execution unit facing away from the dressing arm body; a belt connecting the motor within the base to the rotating shaft within the dressing arm body for transmitting power from the motor to the rotating shaft; an air pipe disposed within the dressing arm body, one end of the air pipe being connected to an air source, and the other end being connected to a lifting mechanism in the dressing execution unit, the lifting mechanism being used to control the lifting and lowering action of the grinding and dressing head; and a speed sensor adjacent to the rotating shaft, the speed sensor being connected to the control unit.

[0014] According to a second aspect of this application, embodiments of this application provide a chemical mechanical polishing apparatus, which includes the grinding and dressing device described in any of the preceding claims.

[0015] The grinding and dressing device provided in this application uses a transparent cover plate, allowing operators to directly observe the internal condition of the dressing arm body and promptly detect the condition of internal components, such as the wear of the sealing rings, thereby avoiding leakage problems caused by damaged sealing rings. Simultaneously, a leakage detection device located inside the dressing arm body is connected to the control unit. When leakage occurs inside the dressing arm body, the leakage detection device detects it and transmits a signal to the control unit to trigger an alarm mechanism, allowing operators to take countermeasures before liquid damages core components such as the motor, reducing equipment maintenance needs and downtime due to component damage. Furthermore, the sloping top cover plate design allows cleaning water to flow away from the cover plate surface, preventing surface water accumulation and avoiding the risk of water splashing onto the grinding pad during grinding, thus affecting the stability of the grinding rate and improving the precision and consistency of the chemical mechanical polishing process. The chemical mechanical polishing equipment in this application embodiment also has the above-mentioned effects. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the grinding and dressing device in related technologies.

[0018] Figure 2 This is a schematic diagram of the grinding and dressing apparatus according to an embodiment of this application.

[0019] Figure 3 This is a schematic diagram of the internal structure of the grinding and dressing device.

[0020] Figure 4 This is a schematic diagram of the architecture of a chemical mechanical polishing apparatus according to an embodiment of this application. Detailed Implementation

[0021] The embodiments of this application will be further described in detail below with reference to the accompanying drawings and examples. It should be particularly noted that the following embodiments are only used to illustrate the embodiments of this application and do not limit the scope of the embodiments of this application. Similarly, the following embodiments are only some embodiments of the embodiments of this application, and not all embodiments. All other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the embodiments of this application.

[0022] It should be understood that in the description of this application, terms such as "first" and "second" are used only to distinguish similar objects and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated.

[0023] Furthermore, the directional terms mentioned in the embodiments of this application, such as [up], [down], [front], [back], [left], [right], [inner], [outer], [side], etc., are only for reference to the accompanying drawings. Therefore, the directional terms used are for illustrating and understanding the embodiments of this application, and not for limiting the embodiments of this application. In the various drawings, structurally similar units are represented by the same reference numerals. For clarity, the various parts in the drawings are not drawn to scale. In addition, some related parts may not be shown in the drawings.

[0024] In related technologies, the grinding dressing device of a CMP grinding machine includes a dressing arm body and a cover plate located above it. The researchers of this application found that when the water curtain device washes the grinding dressing arm, existing designs have technical problems related to water splashing and equipment maintenance. Specifically, water accumulates on the surface of the cover plate, which can easily splash onto the grinding pad during grinding, affecting the stability of the grinding rate and process consistency. Simultaneously, the water accumulation on the cover plate increases the risk of leakage into the dressing arm body. The researchers of this application further found that existing cover plates are usually made of non-transparent materials, and the dressing arm body typically lacks a leak detection device. The non-transparent nature of the cover plate prevents operators from visually inspecting the internal components of the dressing arm body, such as the wear of the sealing rings. Furthermore, when leakage occurs inside the dressing arm body, the lack of a leak detection device prevents timely detection, potentially damaging core components such as the motor and increasing equipment maintenance needs and downtime. Therefore, existing designs lack both water management and drainage mechanisms and monitoring and early warning functions for potential leakage risks, leading to the aforementioned problems with process stability and equipment reliability.

[0025] To address the aforementioned problems, this application proposes a grinding and trimming apparatus that integrates a transparent cover plate, a leakage detection device, and an improved structural design. The transparent cover plate enables visual monitoring of the internal components of the trimming arm; the leakage detection device, through components such as a leakage detection strip and a signal processing unit, can promptly detect leaks within the trimming arm and trigger an alarm. The grinding and trimming apparatus of this application solves the aforementioned technical problems in related technologies, improves equipment operational reliability and process stability, and provides technical support for the precision and efficiency of CMP processes in semiconductor manufacturing.

[0026] The grinding and dressing apparatus and the chemical mechanical polishing equipment will be described in detail below with reference to the accompanying drawings.

[0027] Reference Figures 2 to 3 As shown, this application provides a grinding and dressing device, including a base 70, a dressing arm body 20, a cover plate 30, a leakage detection device 40, and a dressing execution unit 66.

[0028] One end of the trimming arm body 20 is fixedly mounted above the base 70, and the trimming execution unit 66 is disposed below the other end. The trimming arm body 20 forms a hollow structure to accommodate internal components. A cover plate 30 is disposed on the top of the trimming arm body 20. Specifically, the upper part of the trimming arm body 20 has an opening 21, through which the cover plate 30 forms a sealed connection with the trimming arm body 20. The cover plate 30 is made of a transparent material, allowing the operator to directly observe the internal condition of the trimming arm body 20 and monitor the operation of internal components and the wear condition of the sealing ring (not shown in the figure) in real time. The transparent material can be made of wear-resistant and corrosion-resistant materials such as reinforced engineering plastics or tempered glass.

[0029] A leak detection device 40 is installed inside the trimming arm body 20 and connected to the control unit 50. When leakage occurs inside the trimming arm body 20, the leak detection device 40 can detect the presence of liquid and transmit the signal to the control unit 50 through the signal transmission line 42, thereby issuing an alarm in time to prevent leakage from damaging the internal components of the trimming arm body 20.

[0030] In some embodiments, the cover plate 30 can be a sloping top cover plate 31, the cross-sectional shape of which is an isosceles triangle, with its top sloping downwards from the center to the periphery. This allows the cleaning water on the surface of the cover plate 30 to flow to the periphery, preventing water accumulation on the surface of the cover plate 30 and thus preventing water from splashing from the surface of the cover plate 30 onto the grinding pad (not shown in the figure), improving the stability of the grinding interface conditions. It should be noted that, as Figure 1 As shown, in related technologies, when the water curtain device 13 provides a cleaning water flow to the grinding and dressing arm 10, if the surface of the cover plate 11 is flat, water may accumulate on the cover plate 11. This accumulated water can easily splash onto the grinding pad during the grinding process, affecting the stability of the grinding rate. Therefore, the cover plate 30 is designed as a sloping top cover plate 31, which can prevent water from forming on the surface of the cover plate 30, thereby improving the stability of the grinding interface conditions.

[0031] The surface tilt angle of the sloping top cover 31 can be from 45 degrees to 70 degrees. Experiments have shown that when the tilt angle is less than 45 degrees, the water flow is insufficient; when the tilt angle is greater than 70 degrees, it affects the operator's observation of the interior. Therefore, setting the tilt angle to 45 to 70 degrees provides both effective water flow and a good viewing angle.

[0032] In some embodiments, the cover plate 30 may also be designed as a flat cover plate (see reference). Figure 1(The cover plate shown in reference numeral 11). Flat cover plates are suitable for certain specific working environments, such as in situations where cleaning frequency is low, or where there are special requirements for the viewing angle.

[0033] In some embodiments, the cover plate 30 is connected to the trimming arm body 20 by a plurality of screws 23 to achieve a secure connection. To prevent water from seeping in through the screw holes, the grinding and trimming device of this application includes a plurality of screw caps 24, which are disposed above the screws 23, covering and sealing the screw holes 22, thereby avoiding the risk of water seeping into the interior of the trimming arm body 20 from the screw holes 22.

[0034] To achieve a sealing effect, a sealing ring (not shown in the figure) is provided between the cover plate 30 and the trimming arm body 20. The sealing ring can be made of corrosion-resistant and wear-resistant rubber material to prevent water from seeping into the trimming arm body 20 from the gap between the cover plate 30 and the trimming arm body 20.

[0035] In this embodiment, the grinding and dressing device includes a dressing arm body 20, a base 70 located below one end of the dressing arm body 20, and a dressing execution unit 66 disposed at the other end of the dressing arm body 20. The dressing execution unit 66 includes a lifting mechanism (not shown in the figure) and a grinding and dressing head, which is located at the end of the dressing execution unit 66 away from the dressing arm body 20. The rotating shaft 62, air pipe 64, and speed sensor 65 are disposed inside the dressing arm body 20, while the motor 61 is installed inside the base 70.

[0036] The motor 61 provides power to the grinding and dressing device. Furthermore, the motor 61 can be located at the bottom of the base 70 to lower the overall center of gravity and improve device stability. A rotating shaft 62 is rotatably mounted within the dressing arm body 20 and connected to the motor 61 within the base 70 via a belt 63, which transmits power from the motor 61 to the rotating shaft 62. Specifically, a portion of the belt 63 can extend from inside the base 70 into the dressing arm body 20 for proper guidance and arrangement. The rotating shaft 62 connects to and drives the grinding and dressing head in the dressing execution unit 66, causing it to rotate and dress the surface of the grinding pad. One end of the air pipe 64 is connected to an air source (not shown) to provide compressed gas, and the other end is connected to a lifting mechanism in the dressing execution unit 66. This lifting mechanism generates a telescopic movement through air pressure changes, directly controlling the lifting and lowering action of the grinding and dressing head to achieve contact and separation between the grinding and dressing head and the surface of the grinding pad. Specifically, when the grinding head needs to descend and contact the grinding pad, the air source provides air pressure to the lifting mechanism through the air pipe 64, causing the grinding head to descend to the working position; when the grinding head needs to rise and detach from the grinding pad, the air source changes the air pressure in the lifting mechanism through the air pipe 64, causing the grinding head to rise to the non-working position. A speed sensor 65 is adjacent to the rotating shaft 62 and connected to the control unit 50, monitoring the rotational speed of the rotating shaft 62 in real time to control the rotational speed of the grinding head, thereby improving grinding quality. Thus, the movement of the grinding head is controlled collaboratively by two independent mechanisms: the rotational movement is driven by the motor 61 within the base 70 via the belt 63 and the rotating shaft 62, while the lifting movement is achieved by the air pipe 64 through the lifting mechanism. These two mechanisms work together to ensure the grinding head contacts the grinding pad surface at the appropriate position for the finishing operation.

[0037] In this embodiment, the leakage detection device 40 is used to promptly detect water seepage inside the dressing arm body 20. Once water seeps into the dressing arm body 20, it may damage core components such as the rotating shaft 62 and the speed sensor 65, potentially causing partial malfunctions or a complete system shutdown of the chemical mechanical polishing equipment. The transparent cover 30 allows operators to directly observe the internal components of the dressing arm body 20 and promptly detect any abnormalities, while the leakage detection device 40 monitors for leaks. Together, these two components improve the operational reliability of the grinding and dressing device.

[0038] In one embodiment, the leakage detection device 40 includes a leakage detection strip 41 and a signal transmission line 42. The leakage detection strip 41 is disposed on at least one of the inner wall and bottom of the trimming arm body 20. In this embodiment, the leakage detection strip 41 is disposed around the inner wall and bottom of the trimming arm body 20, forming an all-around leakage detection network. In other embodiments, the leakage detection strip 41 may be disposed only on the inner wall of the trimming arm body 20 or only on the bottom to meet different detection requirements.

[0039] During installation, the leak detection strip 41 is attached to the inner wall and / or bottom surface of the trimming arm body 20 by adhesive bonding or mechanical fixing. The specific installation position can be determined according to the actual situation. To avoid interference with moving parts such as the rotating shaft 62 and the air pipe 64, the leak detection strip 41 maintains a certain safe distance around these parts and is laid out along the non-moving area.

[0040] The leakage detection strip 41 can be made of a conductive material and is connected to the control unit 50 via the signal transmission line 42. Under normal operating conditions, the leakage detection strip 41 maintains a certain resistance value. When liquid seeps into the strip, it alters its resistance characteristics, causing a change in resistance value. When the change in resistance reaches a preset threshold, a leakage detection signal is generated. This signal is transmitted to the control unit 50 via the signal transmission line 42, and the control unit 50 generates an alert upon receiving the signal. It should be noted that the preset threshold can be set by those skilled in the art based on the actual environment and conditions of the grinding and dressing device, and is not limited here.

[0041] In other embodiments, the leakage detection device 40 can also be implemented using different types of sensors instead of the leakage detection band 41. Specifically, a capacitive level sensor can be used, which is installed by threaded fastening, that is, the sensor body is fixed to the mounting hole on the inner wall of the trimming arm body 20 through a threaded connector, so that the sensing surface of the sensor is basically flush with the inner wall surface. It is installed in a non-moving area near moving parts such as the rotating shaft 62 and the air pipe 64 to avoid mechanical interference. Its working principle is that when the seeping liquid contacts the sensor surface, the capacitance value changes, thereby detecting the leakage; or, a conductivity sensor can be used, which is embedded in the sensor probe. The sensor connection line is led out through a customized cable channel and connected to the signal transmission line 42 on the inner wall or bottom surface of the trimming arm body 20. Its working principle utilizes the conductivity of liquids; when the sensor comes into contact with the seeping liquid, it detects a change in conductivity. Alternatively, a humidity sensor can be used. This sensor is wall-mounted, meaning it is fixed to an empty area inside the trimming arm body 20 by a bracket, away from moving parts such as the rotating shaft 62. The sensor housing is designed with ventilation holes. Its working principle is to indirectly detect seepage by monitoring changes in humidity inside the trimming arm body 20. These sensor types can be selected according to the actual application environment to improve detection performance. Regardless of the sensor type used, all sensors are connected to the signal transmission line 42 through a corresponding signal line (not shown in the figure) to transmit the detection signal to the control unit 50 for processing.

[0042] The signal transmission line 42 is connected to the leakage detection strip 41 and is used to transmit the signal detected by the leakage detection strip 41. Inside the trimming arm body 20, the signal transmission line 42 avoids moving parts such as the rotating shaft 62, air pipe 64, and lifting mechanism, and is routed along the non-moving area and fixed with a cable fixing groove. The signal transmission line 42 is led out from the sealed outlet at the bottom of the trimming arm body 20, continues to be routed inside the base 70, and extends to the outside from the outlet of the base 70. The outlet of the trimming arm body 20 adopts an O-ring sealing structure to maintain the sealing performance of the trimming arm body 20. To enhance the reliability of the cable, the signal transmission line 42 is covered with a flexible sheath to improve its bending resistance and abrasion resistance.

[0043] In some embodiments, the control unit 50 includes a user input / output interface 52, a signal processing unit (not shown), and an alarm indicator 51. A signal transmission line 42 is connected to the control unit 50 via the user input / output interface 52, transmitting detected signals to the control unit 50 for processing. The signal processing unit is located within the control unit 50, with its input terminal connected to the user input / output interface 52, receiving signals from the leakage detection device 40 and performing corresponding data processing.

[0044] In some embodiments, the control unit 50 can be integrated into the control terminal (not shown) of the CMP equipment. This control terminal can be located in the operation panel area of ​​the CMP equipment. A user input / output interface 52 and an alarm indicator 51 are mounted on the control terminal housing. The user input / output interface 52 is used for signal transmission line connection, and the alarm indicator 51 is used by the operator to observe the alarm status. In other embodiments, the control unit 50 can also be used as a standalone control device, located at an appropriate position within the CMP equipment rack, and connected to the grinding and finishing device via a signal transmission line 42. In this case, the control unit 50 is located in a maintainable area that does not affect the normal operation of the equipment. Correspondingly, the user input / output interface 52 and the alarm indicator 51 are both mounted on the control device housing, used for signal transmission line 42 connection and operator observation of the alarm status, respectively. The specific installation location of the control unit 50 can be determined according to the overall design and operational requirements of the CMP equipment, and those skilled in the art can set it according to the actual application.

[0045] Regardless of which configuration the control unit 50 adopts, the alarm indicator 51 is connected to the output of the signal processing unit. The alarm indicator 51 includes a visual indicator 511 and a sound generator 512. When the signal processing unit detects a leakage signal, the alarm indicator 51 simultaneously issues a visual and audible alarm to alert the operator and allow them to take necessary maintenance measures.

[0046] The working principle of the grinding and dressing apparatus of this application will be further described below.

[0047] First, the grinding and dressing device is installed in the grinding unit area of ​​the CMP equipment. The dressing arm body 20 and the base 70 are matched and fixed to the grinding area of ​​the CMP equipment through a bottom connecting structure (not shown in the figure). After installation, the internal condition of the dressing arm body 20 can be directly observed through the transparent cover plate 30 to confirm that the internal components of the grinding and dressing device are installed in the correct positions and that the sealing rings are intact and without wear.

[0048] During the operation of the CMP equipment, the grinding and dressing device can perform the following functions: grinding pad dressing and grinding fluid distribution. When the grinding pad dressing function is executed, the motor 61 in the base 70 starts, driving the rotating shaft 62 to rotate via the belt 63. The rotating shaft 62 then drives the grinding and dressing head in the dressing execution unit 66 to rotate, so that the grinding and dressing head dresses the surface of the grinding pad, maintaining the uniformity of the grinding pad surface and meeting the surface characteristics required by the process. At the same time, the speed sensor 65 monitors the speed of the rotating shaft 62 in real time and transmits the speed information to the control unit 50. The control unit 50 adjusts the output power of the motor 61 according to the received speed information to control the dressing process.

[0049] When the grinding head needs to contact the grinding pad surface, the air source provides air pressure to the lifting mechanism of the dressing execution unit 66 through the air pipe 64, causing the grinding head to descend to the working position. When the grinding head needs to rise and detach from the grinding pad, the air source changes the air pressure in the lifting mechanism through the air pipe 64, causing the grinding head to rise to the non-working position. In this way, the rotational movement of the grinding head is driven by the motor 61 in the base 70 through the belt 63 and the rotating shaft 62, while the lifting movement is achieved by the air pipe 64 through the lifting mechanism. The two mechanisms work together to control the grinding process.

[0050] The design of the sloping top cover plate 31 allows cleaning water to flow away from the surface of the cover plate, preventing water accumulation on the surface of the cover plate and thus preventing water from splashing onto the grinding pad, thereby improving the stability of the grinding interface conditions.

[0051] When liquid seepage occurs inside the trimmer arm body 20, the leak detection device 40 detects the presence of seepage liquid, causing a change in detection parameters. This change is transmitted via signal transmission line 42 to the user input / output interface 52, and then to the signal processing unit of the control unit 50. After processing the received signal, the signal processing unit triggers the alarm indicator 51 to issue a visual and audible alarm when the detection signal reaches a preset condition, alerting the operator to address the leak. Based on the alarm prompts, the operator observes the location and extent of the internal leak through the transparent cover 30 and takes appropriate measures to prevent the seepage liquid from damaging internal components.

[0052] The grinding and dressing device of this application embodiment integrates a transparent cover plate, a leakage detection system, and an improved structural design, realizing visualized monitoring, real-time leakage detection, and prevention of liquid accumulation during the grinding and dressing process. It solves the technical problems in related technologies, such as the difficulty in observing the internal components of the dressing arm body 20, the difficulty in detecting seepage, and the possibility that surface water may affect the grinding interface conditions, thereby improving the stability of the CMP process and the reliability of the equipment.

[0053] like Figure 4 As shown, this application also provides a chemical mechanical polishing (CMP) apparatus 100, including a grinding and dressing device 1. The specific structure of the grinding and dressing device 1 can be found in the description of the above embodiments, and will not be repeated here. By employing the grinding and dressing device 1 of the embodiments of this application, the CMP apparatus 100 helps to improve the operational reliability and process stability of the equipment, helps to reduce equipment failures and downtime caused by leakage, reduces maintenance costs, and improves production efficiency.

[0054] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The features, structures, or characteristics described above can be combined in any suitable manner in one or more embodiments.

[0055] It is understood that those skilled in the art, guided by the above embodiments, can combine various implementation methods in the above embodiments to obtain technical solutions with multiple implementation methods. The above descriptions are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A grinding and dressing device, characterized in that, include: Base; A trimming arm body, one end of which is fixedly mounted above the base; A cover plate is disposed on the top of the trimming arm body and forms a sealed connection with the trimming arm body; the cover plate is made of transparent material. A leakage detection device is installed inside the trimming arm body and is connected to the control unit; The trimming execution unit is located below the other end of the trimming arm body.

2. The grinding and dressing apparatus as described in claim 1, characterized in that, The cover plate is a sloping top cover plate, and the top of the sloping top cover plate slopes downward from the center to the periphery.

3. The grinding and dressing apparatus as described in claim 2, characterized in that, The inclined angle of the surface of the sloping top cover plate is 45 degrees to 70 degrees.

4. The grinding and dressing apparatus as described in claim 1, characterized in that, The cover plate is a flat cover plate.

5. The grinding and dressing apparatus as described in claim 1, characterized in that, The cover plate is connected to the dressing arm body by a plurality of screws; the grinding and dressing device includes: a plurality of screw caps, which are disposed above the screws and cover and seal the screw holes.

6. The grinding and dressing apparatus as described in claim 1, characterized in that, A sealing ring is provided between the cover plate and the trimming arm body.

7. The grinding and dressing apparatus as described in claim 1, characterized in that, The leakage detection device includes: A leakage detection strip is disposed on at least one of the inner wall and bottom of the trimming arm body; A signal transmission line is connected to the leakage detection strip, and the signal transmission line is connected to the control unit.

8. The grinding and dressing apparatus as described in claim 7, characterized in that, The control unit includes: User input / output interface, which is connected to the signal transmission line; A signal processing unit is disposed within the control unit, and the input terminal of the signal processing unit is connected to the user input / output interface; An alarm indicator is connected to the output of the signal processing unit and is mounted on the control unit. The alarm indicator includes a visual indicator light and a sound generator.

9. The grinding and dressing apparatus as described in claim 1, characterized in that, A motor is installed inside the base; the trimming arm body contains: A rotating shaft is rotatably disposed within the body of the dressing arm and is used to drive the grinding and dressing head to rotate. The grinding and dressing head is located at one end of the dressing execution unit opposite to the body of the dressing arm. A belt connects the motor inside the base to the rotating shaft inside the trimming arm body, and is used to transmit the power of the motor to the rotating shaft; An air tube is installed inside the trimming arm body. One end of the air tube is connected to an air source, and the other end is connected to a lifting mechanism in the trimming execution unit. The lifting mechanism is used to control the lifting and lowering movement of the grinding and trimming head. A speed sensor is located adjacent to the rotating shaft and is connected to the control unit.

10. A chemical mechanical polishing apparatus, characterized in that, Includes the grinding and dressing apparatus as described in any one of claims 1 to 9.

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