Storage box and annealing device

Abstract

The utility model discloses a storage box and an annealing device, and belongs to the field of superconducting quantum chip manufacturing. The storage box comprises a body, a first channel and a second channel, wherein the first channel and the second channel are arranged on the body. Wherein the first channel extends inwards from the main surface of the body and is provided with an expansion part and a contraction part; a second channel in communication with the first channel extends from a partial inner wall of the first channel. The storage box can be used for storing the probe used when the Josephson junction resistor is measured, so that the probe is allowed to be replaced more flexibly and conveniently in measurement equipment, the tedious operation of measuring the Josephson junction resistor is reduced, and the measurement precision is improved.

Description

Technical Field

[0001] This application belongs to the field of quantum information, especially the field of superconducting quantum chip manufacturing. In particular, this application relates to a storage box and an annealing device. Background Technology

[0002] In the fabrication of superconducting quantum chips, a crucial process is the fabrication of superconducting qubits. A key step in this process is ensuring that the resistance of the fabricated Josephson junction meets design requirements. Therefore, there is a need to measure the Josephson junction resistance, and when the measured resistance does not meet design expectations, annealing in a vacuum is required. Correspondingly, the resistance value needs to be measured again after annealing to verify the post-annealing value. This involves frequent operations, increasing the operational complexity and potentially affecting the accuracy of measurements due to the frequent removal and placement of the Josephson junction. Utility Model Content

[0003] This application provides an example of a storage box and an annealing apparatus. This solution can be used to conveniently anneal Josephson junctions, and by providing feedback and verification of the annealing process and parameters through measurement results, it simplifies the resistance correction operation of the Josephson junction and reduces operational difficulty.

[0004] The solution presented in this application example is implemented through the following steps.

[0005] In the first aspect, an example of this application discloses a storage box.

[0006] It includes:

[0007] A body having a main surface is defined with a first direction and a second direction that are perpendicular to each other and constrain the main surface, and a third direction that is perpendicular to the main surface;

[0008] A first channel extending inward from the main surface along a third direction has an expansion portion and a contraction portion distributed in the first direction; and

[0009] The second channel, which is connected to the first channel, is recessed from the inner wall of the extension along the second direction.

[0010] According to some examples of this application, the contraction portion is an elongated strip structure; and / or, the inner wall of the extension portion is arc-shaped; and / or, along a third direction, the inner wall of the extension portion away from the main surface protrudes and is provided with a limiting wall.

[0011] According to some examples of this application, the width of the extension measured along the second direction is greater than the width of the contraction measured along the second direction; and / or, the height of the extension measured along the first direction is less than the height of the contraction measured along the first direction.

[0012] According to some examples in this application, along a third direction, the depth of the second channel is less than the depth of the first channel.

[0013] According to some examples of this application, along a third direction, the depth of the extension is equal to the depth of the contraction.

[0014] According to some examples of this application, the second channels are configured in pairs and are recessed from opposite inner walls of the extensions along a second direction.

[0015] According to some examples in this application, two pairs of second channels are set up in a mirror-symmetric configuration.

[0016] According to some examples of this application, the first channel and the second channel are configured in pairs to form a channel group, and the body is provided with multiple pairs of channel groups.

[0017] According to some examples of this application, multiple pairs of channel groups are configured in a multi-row, multi-column array; and channel groups in the same column but not in the same row are staggered.

[0018] In a second aspect, examples of this application disclose an annealing apparatus. The annealing apparatus includes: a laser annealing apparatus for annealing Josephson junctions; and a storage box as described above, wherein the storage box is disposed within the laser annealing apparatus.

[0019] Beneficial effects:

[0020] The storage box in this application example can be fixed or installed in an annealing apparatus (e.g., a laser annealer, which may have a device for measuring the resistance of the Josephson junction via probes) for annealing Josephson junctions, allowing for probe replacement when needed. Thus, after the Josephson junction has undergone annealing, it is not necessary to remove it; instead, the resistance of the Josephson junction can continue to be measured within the laser annealing equipment. The obtained measurement value can then be used to determine whether annealing was performed correctly, or whether the desired annealing effect was achieved. In particular, if the measurement result does not achieve the desired annealing effect, a second annealing can be conveniently and immediately performed. This method allows for the evaluation and optimization of the annealing process and parameters, thereby positively impacting chip design and shortening the chip manufacturing development cycle. Attached Figure Description

[0021] To illustrate this more clearly, the accompanying drawings used in the description will be briefly introduced below.

[0022] Figure 1 A structural schematic diagram of a storage box from one perspective is disclosed in this application example;

[0023] Figure 2 It was made public. Figure 1 A structural diagram of the storage box from another perspective;

[0024] Figure 3 It was made public. Figure 2 The diagram shows a cross-sectional view of the storage box on side AA.

[0025] Figure 4 It was made public. Figure 2 The diagram shows a cross-sectional view of the storage box on the BB side.

[0026] Figure 5 It was made public. Figure 1 The diagram shows the internal structure of the first channel of the storage box after a portion has been removed along the first direction.

[0027] Figure 6 A schematic diagram of the structure of one type of tooling in the example is disclosed;

[0028] Figure 7 A structural schematic diagram of another storage box in this application example is disclosed from one perspective.

[0029] Figure 8 The example disclosed in this application Figure 7 A structural diagram of the storage box from another perspective.

[0030] Explanation of reference numerals in the attached figures:

[0031] 100 - Storage box; 101 - Main body; 102 - First channel; 103 - Second channel;

[0032] 104 - Main surface; 105 - Limiting wall;

[0033] 1021 - Expanding section; 1022 - Contracting section;

[0034] 500 - Tooling; 501 - Protruding edge;

[0035] 200 - Storage box; 201 - Wrapping structure; 202 - Fixing block; 203 - Quick release structure; 204 - Mounting hole; 205 - Through hole. Detailed Implementation

[0036] As is known, probes are a common, even indispensable, testing tool in semiconductor chip manufacturing processes. In industries such as integrated circuits, discrete devices, optoelectronic devices, and sensors, probes can be used for precision electrical measurements and fault analysis to control product quality and reliability, and can also reduce R&D time and manufacturing costs.

[0037] In superconducting quantum chips, probes are commonly used to measure the resistance (typically room temperature / room temperature resistance) of Josephson junctions. In practice, the probe is inserted into the Josephson junction to form a direct contact for resistance measurement. Currently, the physical realization of Josephson junctions is primarily based on materials such as aluminum, which is highly susceptible to oxidation. Given the physical size of Josephson junctions, oxidation is even more likely to occur, and it can significantly affect the measured resistance.

[0038] Because the oxide layer formed on the electrode surface of the Josephson junction is difficult to remove, a probe needs to penetrate the oxide layer to obtain the resistance more accurately; otherwise, the presence of the oxide layer will interfere with the measurement results.

[0039] Meanwhile, the Josephson junction has a relatively small physical size, making it relatively fragile. The action of a probe penetrating the electrodes of the Josephson junction may cause performance loss or failure of the superconducting qubit. Therefore, the probe structure is also relatively small, which means that the probe may be damaged after frequent or repeated use, thus requiring timely replacement.

[0040] Furthermore, during the manufacturing process, factors such as process technology, structural design, and materials may cause the resistance of the Josephson junction to deviate from the design expectations, necessitating resistance adjustment rather than discarding it directly. This resistance adjustment can be achieved through methods such as annealing.

[0041] In light of the above, the resistance of the Josephson junction after annealing also needs to be measured. Currently, the annealing equipment and the resistance measurement equipment are separate structures. Therefore, after annealing, the Josephson junction needs to be removed, reassembled, and then the resistance measured. This operation is quite cumbersome. Therefore, if the resistance could be measured within the annealing equipment, the operation would be simplified. However, changing the probes within the annealing equipment is a problem that urgently needs to be solved.

[0042] In view of this, an example of this application discloses a storage box. It can be used in the aforementioned annealing apparatus to allow for the retrieval and replacement of probes for resistance measurement of the Josephson junction without removing the junction from the annealing apparatus, thereby significantly reducing the difficulty of measuring resistance.

[0043] The following section will provide a detailed description of the example scheme of this application; please refer to it accordingly. Figures 1 to 8 .

[0044] As described, the storage box 100 can be used to store the probe fixture 500 for measuring the Josephson junction resistance (the probe is fixed in the fixture 500—mentioned later and illustrated) so that the probe can be replaced as needed by changing the probe fixture 500.

[0045] The fixture 500 is used to assist in the replacement of the probe. The fixture 500 can fix the probe in place. Furthermore, the probe can be removed for replacement when needed. Briefly and schematically, in one example, the structure of the fixture 500 can be seen in the attached drawing.

[0046] In the example, the storage box 100 has a body 101 and a first channel 102 and a second channel 103 disposed on the body 101. The first channel 102 and the second channel 103 are connected to each other to accommodate the tooling 500 and the probe assembled by the tooling 500.

[0047] The first channel 102 and the second channel 103 can be realized by known machining methods. In some examples, a block-shaped structure is chosen, which can then be obtained by subtractive manufacturing—e.g., cutting. The block material includes, for example, metallic materials or non-metallic materials (such as resin).

[0048] More specifically, holes and grooves can be manufactured in the block material by means of drilling, punching, laser drilling, or wire cutting. Advantageously, the inner walls of the first channel 102 and the second channel 103 are ground and various edges are rounded, thereby improving the smoothness of the installation and disassembly of the tooling 500, and also avoiding mechanical damage to the "fragile" probe, such as scratches, abrasions, and scuffs.

[0049] Considering the various structures that may protrude from the inner wall of the channel, some examples may also attempt to manufacture them using additive manufacturing methods. Additive manufacturing, for example, includes 3D printing. Depending on the material of the storage box 100, different methods can be used to manufacture it. For example, in other examples, it can also be manufactured using injection molding, casting, etc., which will not be detailed in this application.

[0050] As a positioning reference, the main body 101 in the storage box has a main surface 104. This main surface 104 can be any surface of the main body 101, provided that the surface provides sufficient space to form various structures. For example, in some examples, the main surface 104 has a larger surface area compared to other surfaces; that is, the main surface 104 has the largest surface area among all surfaces of the main body 101 (but this is not a limiting requirement). Taking a roughly cuboid-shaped main body 101 as an example, the main surface 104 can be one of the surfaces defined by the length and width of the cuboid.

[0051] Figure 1 A structural schematic diagram of a storage box 100 from one perspective is disclosed in this application example. Figure 2 It was made public. Figure 1 A structural diagram of the storage box 100 from another perspective. Please refer to... Figure 1 and Figure 2 The main body 101 of the storage box 100 is roughly rectangular in shape.

[0052] Depending on the application scenario, the body 101 can be designed in different shapes. For example, in some examples, the body 101 can be blocky—roughly cubic in shape. In other examples, the body 101 can also have shapes such as cuboids or irregular structures (such as frustums). The structure of the body 101 is preferably adapted to the installation space where the storage box 100 is used (such as the vacuum chamber of an annealing device).

[0053] Based on the main surface 104 of the body 101, the body 101 also defines a first direction (I) and a second direction (II) that define the main surface 104 and are perpendicular to each other, as well as a third direction (III) that is perpendicular to the main surface 104.

[0054] Basically, in some examples, the directions can be defined by length, width, and height. In the illustrated structure of this application, the first direction can be considered as the length direction, the second direction can be considered as the height direction, and the third direction can be considered as the width direction (or described as the thickness direction).

[0055] Based on the clearly defined directions described above, the passageway provided on the body can be described more clearly. The first channel 102 and the second channel 103 can have various optional shapes in the projection or cross-section parallel to the main surface 104 of the body 101. This application's example does not impose any particular limitation on this, but is limited to a structure capable of accommodating the actual tooling 500 and the corresponding probe. For example, the cross-sectional shape of the channel can be rectangular, square, trapezoidal, or convex. Furthermore, in other examples, the channel can also have different cross-sectional shapes at different locations in its depth direction.

[0056] In one beneficial improvement, the extension 1021 of the first channel 102 has an arcuate surface along a cross-sectional shape parallel to the main surface 104. Specifically, the opposing faces of the extension 1021 (e.g., in the horizontal direction) are close to each other, defining an annular region. This annular region is sufficient for the tool 500 to pass through the storage box 100 and allows the tool 500 to enter and exit the channel with a more stable posture. Because in some examples the tool 500 may have an arcuate surface shape, the arcuate surface of the first channel can better conform to the tool 500.

[0057] In the body 101, a first channel 102 extends from the main surface 104 into the interior of the body 101 along a third direction, and the first channel 102 has an extension portion 1021 and a contraction portion 1022 distributed in a first direction.

[0058] As described, the size of the extension 1021 is larger than the size of the contraction 1022, so that the tooling 500 can be accommodated through the extension 1021 and the probe can be accommodated through the contraction 1022. Therefore, in some examples, the extension and contraction of the first channel are implemented in such a way that the width of the extension 1021, measured along the second direction, is greater than the width of the contraction 1022, measured along the second direction.

[0059] Furthermore, considering the relatively long probe, in some examples, the height of the extension 1021 measured along the first direction is less than the height of the contraction 1022.

[0060] The structure of the first channel has been discussed above. The structure of the second channel will be described in detail below.

[0061] The second channel 103 communicates with the first channel 102, and the second channel 103 is recessed from the inner wall of the extension 1021 along a second direction. In some examples, it can be described as the contraction of the first channel extending vertically, while the second channel extends horizontally.

[0062] The second channel 103 serves as a guide rail for limiting the trajectory of the tooling 500 entering and exiting the first channel 102. That is, the second channel 103 can serve as a channel "track" for the aforementioned tooling 500 to enter the body 101, so as to regulate and restrict the posture of the tooling 500 entering the channel and moving forward and backward within the channel, thereby improving the smoothness and stability of the tooling 500's loading and unloading.

[0063] Understandable, as Figure 1 and Figure 2 Taking the orientation shown as an example, as mentioned above, the second channel 103 is set in a basically horizontal direction, while the first channel 102 is set in a basically vertical direction.

[0064] As shown in the figure, the constriction portion 1022 of the first channel 102 is an elongated strip structure; the expansion portion 1021 of the first channel 102 is a block structure. Based on this structure, the tooling 500 with the probe assembled thereon can be embedded into the first channel 102 from the main surface 104 of the body 101. That is, the tooling enters the expansion portion, while the probe assembled on the tooling enters the constriction portion.

[0065] Figure 6 A structural schematic diagram of one example tooling 500 is provided. Please refer to [link / reference]. Figure 6 The tooling 500 has a cylindrical structure and two protruding ridges 501. The protruding ridges 501 can restrict the circumferential rotation of the tooling 500 within the first channel 102. Therefore, when the tooling 500 is installed into the storage box 100, the protruding ridges 501 rest against the second channel 103 of the body 101.

[0066] As tooling 500 continues to advance, protruding ridge 501 travels along the second channel 103 and can be stopped at the location of limiting wall 105, as mentioned later—that is, the tooling is installed in place. At the same time, due to the presence of protruding ridge 501, tooling 500 is prevented from rotating by the second channel, thereby allowing tooling to be removed by threaded connection with other components.

[0067] That is, the probe is fixed on the fixture 500, thus forming a roughly T-shaped structure. Therefore, the two protruding edges 501 of the fixture 500 can be inserted into the second channel 103 of the storage box 100, and the second channel 103 defines its posture. Furthermore, the second channel 103 can also restrict the rotational movement of the fixture 500 along its own axis, thereby facilitating the use of the fixture 500.

[0068] It is worth pointing out that, Figures 1 to 5 In the illustration, two second channels 103 are shown as examples. Therefore, in the example, the second channels 103 are arranged in pairs and are recessed in the second direction from opposite inner walls of the extension 1021 along the horizontal direction.

[0069] The two paired second channels 103 are arranged opposite each other, and in some examples they may even be mirror or symmetrically configured. The plane of symmetry is the plane of symmetry of the contraction portion 1022 of the first channel 102 in a first direction. This plane of symmetry is perpendicular to the main surface 104 of the body 101, and the vertical projection shape of the contraction portion 1022 on the main surface 104 is about the vertical projection shape of this plane of symmetry on the main surface 104 as the axis of symmetry.

[0070] However, this is not limiting; in other examples, the number of second channels 103 can be less (e.g., one) or more, such as three, four, five, etc. As a beneficial alternative, the number of second channels 103 can be an odd number greater than two.

[0071] Taking a pair of second channels 103 as an example, they can be distributed on the same plane, such as a horizontal plane. Two second channels 103 can improve the stability of the tooling 500 during assembly into the storage box 100. The two second channels 103 can have the same structure and dimensions, and there are no particular limitations on this in the application. In such an example, as... Figure 5 The protruding edge 501 of the fixture 500 shown can be constrained by the two second channels 103 so that the fixture 500 can travel along a suitable trajectory. However, there may be a fixture orientation that could potentially damage the probe during installation.

[0072] Therefore, in other examples, there are three second channels 103, and by selecting the positions of the three second channels 103 within the first channel 102, the orientation of the tooling 500 during installation is avoided. For example... Figure 6 The main body of the fixture 500 shown is a cylindrical structure, and the probe assembled on the fixture 500 is directional. Therefore, if installed in reverse, the probe may be damaged. In an example with, for example, three second channels 103, two of them can be arranged horizontally opposite each other, while the third second channel is arranged in a direction opposite to the contraction 1022 of the first channel 102—correspondingly, the fixture 500 can be configured with three protruding ridges 501. In this way, when the fixture 500 is reversed, it cannot be installed into the extension 1021, thereby avoiding damage to the probe.

[0073] exist Figure 6 In this example, the tooling 500 has a cylindrical main structure. Therefore, in order to improve the flexibility of installing the tooling 500 and improve the posture correction effect of the tooling 500, in some examples, the inner wall of the extension 1021 of the first channel 102 is arc-shaped (i.e. the aforementioned arc surface) so as to fit more closely with the cylindrical surface of the tooling 500, thereby reducing the space for the tooling 500 to shake or tilt.

[0074] In some other examples, in order to accurately control the installation depth of the tooling 500 in the third direction of the storage box 100, a limiting structure can be set in the extension 1021 of the first channel 102. Figure 3 It was made public. Figure 1 The diagram shows a cross-sectional view of the storage box 100 on surface AA. Figure 4 It was made public. Figure 1 The diagram shows a cross-sectional view of the storage box 100 on the BB side. Figure 5 It was made public. Figure 1 The diagram shows the internal structure of the first channel 102 of the storage box 100 after a portion has been removed along the first direction.

[0075] Therefore, refer to Figure 3 , Figure 4 and Figure 5 As an alternative implementation, along a third direction, a limiting wall 105 is provided protruding from the inner wall of the extension 1021 away from the main surface 104—in conjunction with Figure 1 , Figure 2 , Figure 3 and Figure 5 It can be seen that; in Figure 1 and Figure 2 In the middle, the front / main surface 104 of the body 101 has a second channel 103, while Figure 3 The back of the main body 101 does not have a second channel 103.

[0076] The limiting wall 105 may be formed by the portion of the body 101 that is not penetrated by the second channel 103. The limiting wall 105 protrudes from the inner wall surface of the first channel. Therefore, the length of the limiting wall 105 (the distance of extension along the trajectory direction of the second channel 103) may be equal to the difference between the thickness of the body 101 and the depth of the second channel 103.

[0077] Furthermore, for examples with a limiting wall 105, the protrusion height of the limiting wall 105 and the recess depth of the second channel 103 can be set independently—measured from a direction perpendicular to the inner wall of the first channel 102 (which could be a side wall depending on the placement orientation of the storage box 100). In some examples, the protrusion height of the limiting wall 105 and the recess depth of the second channel 103 are different.

[0078] In some examples, the protrusion height of the limiting wall 105 is greater than the recess depth of the second channel 103; the protrusion height of the limiting wall 105 is less than the recess depth of the second channel 103. Furthermore, in the illustrated structure of this application, the protrusion height of the limiting wall 105 is equal to the protrusion height of the protruding ridge of the tooling.

[0079] In the example with limiting wall 105, it can be understood that, along a third direction, the depth of the second channel 103 is less than the depth of the first channel 102. For example, along the thickness direction of the body 101, the first channel 102 penetrates the body 101, while the second channel 103 does not penetrate the body 101—that is, the extension distance of the second body 101 is less than the thickness of the body 101. At the same time, along a third direction, the depth of the extension portion 1021 in the first channel 102 is equal to the depth of the contraction portion 1022.

[0080] Through the cooperation of the main body 101, the limiting wall 105, the first channel 102, and the second channel 103, the storage box 100 can provide space for storing the probe and the tooling 500, and also allows the probe tooling 500 to be removed when needed to replace the probe.

[0081] Furthermore, as mentioned above, it can be understood that the probe and tooling 500 can be pre-assembled and then installed and stored in the storage box 100; when the probe needs to be replaced, the tooling 500 is taken out for use; the removal and use of the tooling 500 can be achieved manually or automatically by a robotic arm in the annealing device mentioned later. That is, the replacement of the probe can be achieved by replacing the tooling 500.

[0082] Furthermore, based on the above solution, the retrieval, insertion, removal, and replacement of the tooling 500 (connected to the probes) can all be carried out through the storage box 100, and all can be performed in the annealing equipment using the storage box 100. That is, the storage box 100, the tooling 500 stored within it, and the probes assembled on the tooling 500 can be used and disposed of as a whole device or product. Of course, in other examples, the storage box 100 can also be disposed of as a product of the tooling 500, such as for sale.

[0083] Thus, for annealing equipment that anneales Josephson junctions in a vacuum, the storage box 100 can be used to replace probes "without breaking the vacuum," ensuring that the probes used in the measurement process are of qualified quality, undamaged, and free from severe wear. It also helps to improve the effectiveness and efficiency of adjusting the resistance of Josephson junctions through annealing.

[0084] To accommodate more probes and corresponding probe fixtures 500, more channels can be configured in some examples. For example, for ease of description, the first channel 102 and the second channel 103 are configured in pairs and can form and be named channel groups. Based on this, multiple pairs of channel groups can be provided in the main body 101 of the storage box. That is, the number of channel groups in the main body 101 can be one, two, three, or even more.

[0085] Furthermore, given that the internal space of the annealing equipment using the storage box 100 is limited, and sufficient space needs to be reserved for other equipment, the resulting multiple pairs of channel groups are configured in a multi-row, multi-column array; and channel groups in the same column but not in the same row are staggered. For example, with Figure 2 As shown, multiple channel groups with 6 rows and 8 columns per row are disclosed. It can be seen that channel groups in different rows but the same column are distributed in the first direction.

[0086] The above content mainly discusses the structure of the main body 101 and its first channel 102 and second channel 103.

[0087] In other examples, the structure of the storage box 100 can be configured as needed to optimize its functionality.

[0088] Figure 7 A structural schematic diagram of another storage box 100 in this application example is disclosed from one perspective. Figure 8 The example disclosed in this application Figure 7 A structural diagram of the storage box 100 from another perspective.

[0089] See Figure 7 and Figure 8As an example, considering that tooling 500 may have a large size—such as Figure 6 The tooling 500 shown can have a larger cylindrical height, allowing for greater depth in the first channel 102 and the second channel 103. Correspondingly, the body 101 of the storage box 100 has a greater thickness / width in a third direction. Therefore, as... Figure 7 As shown, the body 101 also has a back protrusion opposite to the main surface 104. In this way, the cylindrical tool can be fully inserted into the channel without protruding from the main surface of the body.

[0090] For example, in the case of other examples of the storage box 200, a wrapping structure 201 may be provided on the body 101 to allow the storage box 100 to be installed and secured in an annealing device, such as a shell structure.

[0091] Furthermore, in other examples, the body 101 may also be provided with a fixing structure. This fixing structure may be integrally formed with the body 101, or fixed by means such as welding, riveting, or bolting. Alternatively, this structure may be a fixing block 202 provided on the side surface of the body 101 near the main surface 104 (or it may be provided at other locations on the body 101 besides the aforementioned main surface 104).

[0092] The number of fixed blocks 202 can be one or two. Figure 7 ,and Figure 8 (In the example scheme, there are two and symmetrically distributed), or three, or more.

[0093] In some examples, the fixing block 202 is provided with mounting holes. Each fixing block 202 may have one or more mounting holes. These mounting holes may be plain holes (without internal threads) or threaded holes (with internal threads). Therefore, the storage device can be fixed to the device using it, such as the aforementioned laser annealing machine, by means of bolts or studs and nuts.

[0094] In other examples, the mounting block 202 can also be fitted with a quick-release structure 203. Thus, the mounting block, or further, the quick-release structure 203, makes it easier to secure the storage box 100 to other devices, such as laser annealing equipment.

[0095] Specifically, the packaging structure 201 and the quick-release structure 203 can be used in combination. For example, they can be named a fixing mechanism, and this fixing mechanism is fixed into the annealing equipment. The storage box 100 can be used as a replaceable / replaceable part.

[0096] Furthermore, to ensure operational effectiveness (such as proper installation of the storage box), the fixing block 202 may also be provided with mounting holes 204. Specifically, in some examples, the mounting holes 204 are provided in the aforementioned quick-release structure 203. Through this mounting hole 204 (which may be a threaded hole), a sensor can be installed to detect whether the probe box has been installed—whether the storage box mates with the wrapping structure 201, that is, whether the storage box is assembled inside the shell-like wrapping structure.

[0097] In some examples, the sensor can be a light sensor; correspondingly, the shell-like enclosure has a through-hole communicating with its internal space. The axis of this through-hole is collinear with the axis of the mounting hole 204. Thus, light from the light sensor can pass through this through-hole to detect whether the storage box is properly installed. Alternatively, the sensor can also be a proximity sensor or a magnetic sensor, etc.

[0098] In practice, a storage device with multiple probe assemblies can be formed by pre-inserting the tooling 500 assembled with probes into the first channel 102 and the second channel 103 of the storage box 100. Then, the storage device is fitted into the aforementioned wrapping structure 201, and the storage device is fixed by the quick-release structure 203 cooperating with the fixing block 202 provided on the side of the main body 101.

[0099] When all probes in the storage device need to be replaced during testing, the storage device can be disassembled and removed as a whole, and replaced with a new, pre-assembled storage device. The new storage device can be a new storage box 100 and newly assembled tooling 500 and probes; or the new storage device can also be a removed storage box 100 and newly assembled tooling 500 and probes.

[0100] Based on the storage box 100 described above, an annealing apparatus is also disclosed in this example. This annealing apparatus is used to anneal the Josephson junction and can also measure the resistance of the Josephson junction after annealing. Thus, by combining the functions of annealing and resistance measurement, the resistance of the Josephson junction can be measured directly after annealing without being removed from the annealing apparatus. This allows for faster verification and inspection of the annealing effect, enabling the acquisition of more accurate annealing parameters and process conditions.

[0101] In the example, the annealing apparatus includes a laser annealer and a storage box 100 as described above, disposed within the laser annealer.

[0102] The above description of the structure, features and effects of this application is based on the embodiments shown in the drawings. The above are only preferred embodiments of this application. However, this application does not limit the scope of implementation to what is shown in the drawings. Any changes made in accordance with the concept of this application, or modifications to equivalent embodiments, that do not exceed the spirit covered by the specification and drawings, should be within the protection scope of this application.

Claims

1. A storage box, characterized in that, include: A body having a main surface is defined with a first direction and a second direction that define the main surface and are perpendicular to each other, and a third direction that is perpendicular to the main surface; The first channel extending from the main surface inward along a third direction has an expansion portion and a contraction portion distributed in the first direction; as well as The second channel, which is connected to the first channel, is recessed from the inner wall of the extension along the second direction.

2. The storage box according to claim 1, characterized in that, The contraction section is a slender strip-shaped structure; And / or, the inner wall of the extension is arc-shaped; And / or, along a third direction, the extension portion is provided with a limiting wall protruding from the inner wall away from the main surface.

3. The storage box according to claim 1, characterized in that, The width of the extended portion, measured along the second direction, is greater than the width of the contracted portion, measured along the second direction. And / or, the height of the extension portion measured along the first direction is less than the height of the contraction portion measured along the first direction.

4. The storage box according to claim 1, characterized in that, Along the third direction, the depth of the second channel is less than the depth of the first channel.

5. The storage box according to claim 1 or 4, characterized in that, Along the third direction, the depth of the extended portion is equal to the depth of the contracted portion.

6. The storage box according to claim 1, characterized in that, The second channels are arranged in pairs and are recessed from the opposite inner walls of the extensions along a second direction.

7. The storage box according to claim 6, characterized in that, The two second channels are set up in a mirror-symmetric configuration.

8. The storage box according to claim 1, characterized in that, The first channel and the second channel are configured in pairs to form a channel group, and the main body is provided with multiple pairs of channel groups.

9. The storage box according to claim 8, characterized in that, The multiple pairs of channel groups are configured in a multi-row, multi-column array; and channel groups in the same column but not in the same row are staggered.

10. An annealing apparatus, characterized in that, include: Laser annealing apparatus for annealing Josephson junctions; And, the storage box as described in any one of claims 1 to 7 is disposed inside the laser annealing apparatus.

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