Coating device for electronic vacuum device production

Abstract

The utility model discloses a coating device for electronic vacuum device production, which comprises a magnetron sputtering coating machine body, a coating bin and a hanging rack, the hanging rack is composed of a vertical rod and a plurality of hanging rod discs movably connected outside the vertical rod, the hanging rod discs are distributed along the axial direction of the vertical rod in an adjusting manner, a mounting disc is arranged at the bottom in the coating bin, and the mounting disc is connected with the vertical rod. A movable ring is rotationally installed in the annular groove in the installation disc, the bottom end of the vertical rod is rotationally connected with the movable ring, a driven gear is fixed to the end, penetrating into the movable ring, of the vertical rod, and a first gear ring meshed with the driven gear is fixed to the inner ring of the annular groove of the installation disc. After a workpiece is hung on the hanging frame, the workpiece can be driven by the movable ring to rotate around the large circle in the coating bin in the circumferential direction, and can also be driven by the driven gear and the first gear ring to rotate, so that the workpiece hung in the coating process can move, the shielding of the hanging frame on the surface of the workpiece is reduced, and the uniformity of a coating layer is improved.

Description

Technical Field

[0001] This utility model relates to the field of coating processing technology, and in particular to a coating device for the production of electronic vacuum devices. Background Technology

[0002] The core structure of an electron vacuum device includes a vacuum-sealed housing and internal electrodes. To improve the emission efficiency of the internal electrodes and the stability of the device, a coating process is required on the electrode surface during manufacturing, which is where magnetron sputtering coating machines are used.

[0003] Currently, when performing magnetron sputtering coating, the workpiece is first suspended on a rack inside the coating chamber of the machine. However, traditional racks are fixed, placing the workpiece in a fixed position without rotation or movement, which can easily cause differences in film thickness, making it difficult to ensure the uniformity of the coating and affecting the quality of film formation.

[0004] To address these issues, we propose a coating apparatus for the production of electronic vacuum devices. Utility Model Content

[0005] The purpose of this invention is to provide a coating apparatus for the production of electronic vacuum devices, so as to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A coating apparatus for producing electronic vacuum devices includes a magnetron sputtering coating machine body, a coating chamber, and a hanger. The hanger consists of a vertical rod and several hanging rod discs movably connected to the outside of the vertical rod, and the hanging rod discs are arbitrarily distributed along the axial direction of the vertical rod. A mounting plate is provided at the bottom of the coating chamber, and a movable ring is rotatably mounted in the annular groove of the mounting plate. The bottom end of the vertical rod is rotatably connected to the movable ring. A driven gear is fixed at one end of the vertical rod that passes through the movable ring, and a toothed ring that meshes with the driven gear is fixed in the inner ring of the annular groove of the mounting plate. When the movable ring rotates, it drives the hanger to rotate on its own axis and revolve around the axis of the movable ring.

[0008] In a further embodiment, the hanging rod plate includes a sleeve and a plurality of hanging rods distributed around the sleeve, and the sleeve and the vertical rods are connected by threads.

[0009] In a further embodiment, the sleeve is threaded with a threaded sleeve, and a rotating ring is rotatably sleeved around the threaded sleeve. Several support rods corresponding one-to-one with the hanging rods are hinged to the outside of the rotating ring. The end of the support rod away from the rotating ring is hinged to the middle section of the hanging rod, and the top end of the hanging rod is hinged to the sleeve.

[0010] In a further embodiment, a locking rod is radially threaded onto the outer wall of the sleeve, and a locking block is rotatably connected to one end of the locking rod that is screwed into the inner threaded hole of the sleeve.

[0011] In a further embodiment, the hanger is uniformly scattering along the circumference of the movable ring.

[0012] In a further embodiment, a second toothed ring is fixed on the outer ring of the movable ring, and a drive gear is meshed with the outer periphery of the second toothed ring. The drive gear is rotatably mounted in the mounting plate, and a motor is connected to the drive gear below.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] After the workpiece is hung on the hanger, it can not only rotate around a large circle inside the coating chamber under the drive of the movable ring, but also rotate on its own under the drive of the driven gear and the gear ring. This allows the suspended workpiece to move during the coating process, reducing the obstruction of the workpiece surface by the hanger and thus improving the uniformity of the film layer. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of this utility model;

[0016] Figure 2 This is a schematic diagram of the mounting structure of the hanger and movable ring of this utility model;

[0017] Figure 3 This is a schematic diagram of the installation structure of the hanging rod plate and the vertical rod of this utility model;

[0018] Figure 4 This is a partial cross-sectional structural diagram of the vertical rod, hanging rod plate, and movable ring of this utility model.

[0019] In the diagram: 1. Magnetron sputtering coating machine body; 2. Coating chamber; 3. Hanger; 4. Vertical rod; 5. Hanging rod plate; 51. Hanging rod; 52. Sleeve; 53. Screw sleeve; 54. Rotary ring; 55. Support rod; 56. Locking rod; 57. Locking block; 6. Moving ring; 7. Mounting plate; 8. Driven gear; 9. Motor; 10. Drive gear; 11. Gear ring one; 12. Gear ring two. Detailed Implementation

[0020] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0021] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1-4 A coating apparatus for producing electronic vacuum devices includes a magnetron sputtering coating machine body 1, a coating chamber 2, and a hanger 3. The coating chamber 2 is mounted on the magnetron sputtering coating machine body 1. The hanger 3 is installed inside the coating chamber 2 for suspending workpieces. The hanger 3 consists of a vertical rod 4 and several hanging rod discs 5 movably connected to the outside of the vertical rod 4. The hanging rod discs 5 are axially adjustable along the vertical rod 4. A mounting plate 7 is provided at the bottom of the coating chamber 2. A movable ring 6 is rotatably mounted in the annular groove on the mounting plate 7, and the bottom end of the vertical rod 4 is rotatably connected to the movable ring 6. Specifically, the hanger 3 is evenly distributed around the movable ring 6, so that multiple vertical rods 4 are mounted around the movable ring 6. One end of each vertical rod 4 that penetrates into the movable ring 6 is fixed with a driven gear 8. A gear ring 11 that meshes with the driven gear 8 is fixed in the inner ring groove of the disk 7. When the movable ring 6 rotates, it drives the hanger 3 to revolve around the axis of the movable ring 6. During the revolution, the vertical rod 4 rotates because the driven gear 8 meshes with the gear ring 11. The suspended workpiece can move and adjust its position during the coating process, which helps to improve the uniformity of the film. Specifically, a gear ring 12 is fixed on the outer ring of the movable ring 6, and a drive gear 10 is meshed with the outer periphery of the gear ring 12. The drive gear 10 is rotatably installed in the mounting disk 7, and a motor 9 is connected to the drive gear 10. The motor 9 drives the drive gear 10 to rotate, and the drive gear 10 meshes with the gear ring 12, which drives the movable ring 6 to rotate.

[0024] Considering that the electrode plates used in different sizes of electronic vacuum tubes have different dimensions, the space occupied after suspension also varies. Therefore, the hanging rod plate 5 includes a sleeve 52 and several hanging rods 51 distributed around the sleeve 52. The hanging rods 51 are L-shaped rods, with their straight sections connected to the sleeve 52 and their curved sections facing outwards, which facilitates the suspension of the electrode plates. Since the sleeve 52 and the vertical rod 4 are connected by threads, the height distance between the hanging rod plate 5 and the vertical rod 4 can be adjusted. By increasing or decreasing the number of hanging rod plates 5, more electrode plates can be coated at once, improving processing efficiency.

[0025] Furthermore, in order to ensure the stability of the hanging rod plate 5 after the position is adjusted, a locking rod 56 is screwed radially onto the outer wall of the sleeve 52, and a locking block 57 is rotatably connected to one end of the locking rod 56 that is screwed into the inner thread hole of the sleeve 52. The locking block 57 can be inserted into the thread gap to lock the sleeve 52 and prevent it from rotating arbitrarily.

[0026] To further improve the flexibility of use, a sleeve 52 is screwed with a threaded sleeve 53, and a rotating ring 54 is rotatably sleeved on the outside of the threaded sleeve 53. Several support rods 55 corresponding to the hanging rods 51 are hinged to the outside of the rotating ring 54. The end of the support rod 55 away from the rotating ring 54 is hinged to the middle section of the hanging rod 51, and the top of the hanging rod 51 is hinged to the sleeve 52. This allows the rotating ring 54 to rise and fall when the threaded sleeve 53 is rotated, and then the hanging rod 51 is pulled to retract or expand through the support rods 55, so as to adjust the suspension angle of the hanging rod 51.

[0027] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0028] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A coating apparatus for producing electronic vacuum devices, comprising a magnetron sputtering coating machine body (1), a coating chamber (2), and a hanger (3), characterized in that: The hanging frame (3) consists of a vertical rod (4) and several hanging rod discs (5) movably connected to the outside of the vertical rod (4). The hanging rod discs (5) are axially distributed along the vertical rod (4). The bottom of the coating chamber (2) is provided with an installation disc (7). A movable ring (6) is rotatably installed in the annular groove of the installation disc (7). The bottom end of the vertical rod (4) is rotatably connected to the movable ring (6). A driven gear (8) is fixed at one end of the vertical rod (4) that passes through the movable ring (6). A toothed ring (11) that meshes with the driven gear (8) is fixed in the annular groove of the installation disc (7). When the movable ring (6) rotates, it drives the hanging frame (3) to rotate on its own axis and revolve around the axis of the movable ring (6).

2. The coating apparatus for producing electronic vacuum devices according to claim 1, characterized in that: The hanging rod plate (5) includes a sleeve (52) and several hanging rods (51) distributed around the sleeve (52), and the sleeve (52) and the vertical rod (4) are connected by threads.

3. The coating apparatus for producing electronic vacuum devices according to claim 2, characterized in that: The sleeve (52) is threaded with a threaded sleeve (53), and a rotating ring (54) is rotatably sleeved on the outside of the threaded sleeve (53). Several support rods (55) corresponding one-to-one with the hanging rod (51) are hinged to the outside of the rotating ring (54). The end of the support rod (55) away from the rotating ring (54) is hinged to the middle section of the hanging rod (51), and the top end of the hanging rod (51) is hinged to the sleeve (52).

4. The coating apparatus for producing electronic vacuum devices according to claim 2, characterized in that: A locking rod (56) is screwed radially onto the outer wall of the sleeve (52), and a locking block (57) is rotatably connected to one end of the locking rod (56) that is screwed into the inner threaded hole of the sleeve (52).

5. The coating apparatus for producing electronic vacuum devices according to claim 1, characterized in that: The hanger (3) is uniformly distributed around the circumference of the movable ring (6).

6. The coating apparatus for producing electronic vacuum devices according to claim 1, characterized in that: A toothed ring (12) is fixed on the outer ring of the movable ring (6), and a drive gear (10) is meshed with the outer periphery of the toothed ring (12). The drive gear (10) is rotatably installed in the mounting plate (7), and a motor (9) is connected to the drive gear (10).

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