Process cavity structure

Abstract

The utility model provides a process cavity structure, and relates to the technical field of semiconductor equipment. Comprising an outer cavity, a cavity sleeve and a heater, the cavity sleeve is embedded in the outer cavity, the heater is annularly arranged on the outer side of the outer cavity, and heat is transmitted into the cavity sleeve through the outer cavity in a heat radiation and heat conduction mode. According to the scheme, the space required to be reserved by the cavity is reduced, so that the size of equipment is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and more specifically, to a process cavity structure. Background Technology

[0002] In existing thermal ALD processes, a structure typically uses an outer cavity and an inner cavity. A heat source is arranged around the inner cavity within the outer cavity, and the heat source heats the inner cavity through thermal radiation. However, in existing structures, the heating method for the inner cavity is thermal radiation, which requires a high-power heat source and results in slow temperature rise. A large gap needs to be maintained between the inner cavity and the heat source to allow for easy replacement and maintenance of the inner cavity. Therefore, for the same production capacity, the equipment requires a large cavity space. Utility Model Content

[0003] This utility model discloses a process cavity structure, which aims to solve the problems mentioned above.

[0004] The present invention adopts the following solution:

[0005] A process cavity structure includes an outer cavity, a cavity sleeve, and a heater. The cavity sleeve is embedded in the outer cavity, and the heater is arranged around the outside of the outer cavity to transfer heat through the outer cavity to the cavity sleeve by means of thermal radiation and thermal conduction.

[0006] Furthermore, a gap is formed between the outer cavity and the sleeve, and the gap is filled with gas to accelerate the heat conduction between the sleeve and the outer cavity.

[0007] Furthermore, the gap is less than 1 mm.

[0008] Furthermore, the heater is attached tightly to the outside of the outer cavity.

[0009] Furthermore, the cavity sleeve is provided with a cavity sleeve door, and the outer cavity is provided with an outer cavity door, and the cavity sleeve door and the outer cavity door are positioned by a guide shaft.

[0010] Furthermore, the guide shaft is adapted to slide between the cavity door and the outer cavity door, and a spring member sleeved on the guide shaft is provided between the cavity door and the outer cavity door so that when the outer cavity door is closed, the deformation of the spring member will press the cavity door tightly against the cavity.

[0011] Furthermore, several guide shafts are provided.

[0012] Beneficial effects:

[0013] By placing the heater outside the outer cavity, compared to the traditional structure where it is placed between the outer and inner cavities, the maintenance space between the cavity sleeve and the heater can be greatly saved, resulting in a more compact overall device with higher heating efficiency. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of a process cavity structure according to an embodiment of the present invention;

[0015] Figure 2 yes Figure 1 A partially enlarged structural diagram;

[0016] Reference numerals: 1. Heater, 2. Outer cavity, 3. Cavity sleeve, 4. Cavity sleeve door, 5. Outer cavity door, 6. Guide shaft, 7. Spring. Detailed Implementation

[0017] Combination Figure 1 This embodiment provides a process cavity structure, including an outer cavity 2, a cavity sleeve 3, and a heater 1. The cavity sleeve 3 is embedded inside the outer cavity 2, and the heater 1 is arranged around the outside of the outer cavity 2 to transfer heat through the outer cavity 2 to the cavity sleeve 3 via thermal radiation and thermal conduction. In this embodiment, the heater 1 adopts an existing heating structure, closely attached to the outside of the outer cavity 2, and conducts heat to the cavity sleeve 3 through thermal conduction and thermal radiation from the outer cavity 2. This structural design reduces the space required inside the outer cavity 2, facilitating equipment maintenance and saving the required volume space of the cavity, while the heat transfer effect is essentially unaffected.

[0018] In one embodiment, a gap is formed between the outer cavity 2 and the cavity sleeve 3, and the gap is filled with gas to accelerate heat conduction between the cavity sleeve 3 and the outer cavity 2. Here, the gap is less than 1 mm, and the gas can be an inert gas or other gas that facilitates heat conduction. This arrangement accelerates heat conduction between the cavity sleeve 3 and the outer cavity 2, improving the heat transfer effect.

[0019] Combination Figure 1 and Figure 2As shown, in this embodiment, the cavity sleeve 3 is provided with a cavity door 4, and the outer cavity 2 is provided with an outer cavity door 5. The cavity door 4 and the outer cavity door 5 are positioned by a guide shaft 6. Several guide shafts 6 can be arranged on the cavity door 4, and the guide shaft 6 is adapted to slide between the cavity door 4 and the outer cavity door 5. The guide shaft 6 helps maintain the relative positions of the outer cavity door 5 and the cavity door 4. In a preferred embodiment, a spring 7 is provided between the cavity door 4 and the outer cavity door 5, sleeved on the guide shaft 6, so that when the outer cavity door 5 is closed, the deformation of the spring 7 will press the cavity door 4 tightly against the cavity sleeve 3. The elastic force provided by spring 7 positions the cavity door 4 within the cavity 3 along the guide shaft 6. Specifically, when the outer cavity door 5 is closed, the cavity door 4 contacts the cavity 3 and compresses the spring 7. The spring 7 deforms to press the cavity door 4 tightly against the cavity 3. The thrust can be changed by adjusting the elastic force and deformation of the spring 7.

[0020] In this embodiment, by placing the heater 1 outside the outer cavity 2, compared to the traditional structure where it is placed between the outer cavity 2 and the inner cavity, the maintenance space directly between the cavity sleeve 3 and the heater 1 can be greatly saved, resulting in a more compact overall device size and higher heating efficiency. The guide shaft 6 and spring 7 are used to link the outer cavity door 5 and the cavity sleeve door 4, improving the closing effect of the cavity sleeve door 4.

[0021] It should be understood that the above are only preferred embodiments of the present utility model, and the protection scope of the present utility model is not limited to the above embodiments. All technical solutions that fall within the scope of the present utility model are protected by the present utility model.

[0022] The accompanying drawings used in the above description of the embodiments only show some embodiments of the present invention and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

Claims

1. A process cavity structure, comprising an outer cavity, a cavity sleeve, and a heater, characterized in that, The sleeve is embedded in the outer cavity, and the heater is arranged around the outside of the outer cavity to transfer heat through the outer cavity to the sleeve via thermal radiation and thermal conduction.

2. The process cavity structure according to claim 1, characterized in that, A gap is formed between the outer cavity and the sleeve, and the gap is filled with gas to accelerate heat conduction between the sleeve and the outer cavity.

3. The process cavity structure according to claim 2, characterized in that, The gap is less than 1 mm.

4. The process cavity structure according to claim 1, characterized in that, The heater is attached to the outside of the outer cavity.

5. The process cavity structure according to claim 1, characterized in that, The cavity sleeve is provided with a cavity sleeve door, and the outer cavity is provided with an outer cavity door. The cavity sleeve door and the outer cavity door are positioned by a guide shaft.

6. The process cavity structure according to claim 5, characterized in that, The guide shaft is adapted to slide between the cavity door and the outer cavity door, and a spring member sleeved on the guide shaft is provided between the cavity door and the outer cavity door so that when the outer cavity door is closed, the cavity door is pressed tightly against the cavity by the deformation of the spring member.

7. The process cavity structure according to claim 6, characterized in that, Several guide shafts are provided.

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